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ULTRAMIC™ 600
ADVANCED CERAMIC HEATER
ULTRA-FAST RAMP RATES
HIGH WATT DENSITIES
NON-CONTAMINATING
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ULTRAMIC™ 600 Temperature Ramping Capabilities
ULTRAMIC 600
temperature ramp
rate as a function of
watt density. Test
completed using
Watlow’s SERIES F4
temperature controller.
Application Examples
Semiconductor Equipment
Analytical Instrumentation
Eutectic die bonding equipment is used in the
attachment of lead wires to the die before packaging
of the IC. Optimum bonding is achieved by ramping
the solder and lead temperature through the eutectic
state. Watlow’s ULTRAMIC 600 heater is ideal for this
application because a temperature ramp of up to
150°C/second can be achieved while also achieving a
fast cool down in preparation for processing the next
device.
Mass spectrometers are used to determine the
presence of trace chemicals in industrial,
environmental and clinical applications. With detection
capabilities into the part-per-trillion levels, cleanliness
is of paramount concern. For use with ion sources,
the chemical compatibility, low porosity and fine
surface finish make the ULTRAMIC 600 an excellent
choice where contamination of the sample is of
concern.
• Temperature ramp rate to 150°C (270°F)/sec
• Vacuum holes and grooves
• Process temperatures to 600°C (1112˚F)
• Chemical compatibility
• Surface flatness 0.05 mm (0.002 in.)
• Surface finish <0.8 µm (32 µ-in.)
• High dielectric strength
• Small size and light weight
Why ULTRAMIC 600?
• Ultra-fast temperature response
• Operating temperatures up to 600°C
• Thermal uniformity
• Excellent chemical compatibility
• Geometrically stable
• High dielectric strength
• Customized design
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Configurations and Dimensions
Maximum Dimensions 4032 mm2 (6.25 in2)
Length
Width
Thickness
Aspect Ratio
Min: 8 mm (0.314 in.)
Max: 63.5 mm (2.5 in.)
Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)
1
Flat Square
Rectangular
Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)
Max: 100 mm (3.94 in.)
Min: 8 mm (0.157 in.)
<10
Inside Diameter
(I.D.)
Outside Diameter
(O.D.)
Thickness
Ring Wall Thickness
Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)
Minimum wall thickness:
3 mm (0.118 in.)
Min: 3 mm (0.118 in.)
Max: O.D. 75 mm (2.95 in.)
Ring
Surface Finish
Surface Roughness
(Ra)
Straight Groove
Custom Feature
Hole Size
Round Diameter
Flatness
Parallelism
Min: 1 mm (0.039 in.)
Max: Outer edge 3 mm
(0.118 in.)
Depth: 0.20 - 0.5 mm (0.019 in.)
Width: 0.75 - 2 mm (0.078 in.)
<0.05 mm (0.002 in.)
<0.05 mm (0.002 in.)
<0.8 µm (32 µ-in.)
Electrical Properties
Voltage
Leakage Current
Dielectric Constant
Dielectric Strength
24 to 480V
<0.1mA
8.9
15KV/mm
Ramp Rate vs. Wattage
Power density
Maximum and minimum power densities can vary with voltage, surface area and application
parameters. The following graph is meant as a guideline. Contact factory to determine optimum voltage
and power for your application.
Watt densities to
1000W/in2
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Sintered Ceramic Heater Construction
ULTRAMIC™ 600 heaters are
manufactured using a proprietary sintering
process. Sintering is a method where
aluminum nitride (AlN) ceramic powder is
heated at a high temperature, which
allows contacting particles to diffuse
together. This process creates a
monolithic, geometrically stable structure
with very low porosity.
The AlN matrix is constructed of two parts. The
heating element is printed on one of the AlN
parts. Then, the parts are sintered together,
making them one homogeneous assembly.
°C
399.5
399.9
400.4
400.1
400.8
400.6 401.1
401.3
399.7
401.5
The high thermal conductivity of AlN
and an optimized circuit layout
combine to produce superb
temperature uniformity across the
heater surface.
Non-contaminating
AlN composition
Custom designs can be rapidly accommodated
including those with complex topographies such as
holes, notches and vacuum grooves. Using a Finite
Element Analysis (FEA) technique, the heater circuit is
optimized and the thermal performance simulated
prior to manufacture.
ULTRAMIC 600 Thermal and Physical Properties
AIN
Thermal Properties
Thermal Conductivity (W/mK)
Physical Properties
140
4.5
Density (g/cm3)
Hardness (Hv@500g)
3.26
1050
>250
CTE (ppm/˚C)
Surface Temperature
Terminal Temperature
600˚C (1112˚F) Flexural Strength (MPa)
400˚C (752˚F)
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Mounting Guidelines
How to Order
• Temperature <200°C (392°F): bond with high-temperature
epoxy adhesive
To order your standard ULTRAMIC 600 heater, please specify
Watlow code number.
• Temperature >200°C (392°F): screw hole can be provided
(recommend insulation buffer such as mica spacer)
• Clamp using single or multiple-point fasteners
If our standard units do not meet your application needs,
Watlow can rapidly manufacture the ULTRAMIC 600 to your
special requirements. For made-to-order units, please consult
the factory.
Optional Thermocouple
• Bonded bare wire Type K thermocouple with ceramic
insulation for <400°C (752°F)
Availability
Standard heaters are available for shipment in seven business
days or less. While normally customized for the application,
these products enable a development engineer to quickly and
easily acquire a test sample to determine its suitability in the
application.
• Drilled hole can be provided for installing a sheathed
thermocouple for <600°C (1112°F)
Lead Wire and Terminations
• Power terminals exit locations - extended from side on
square and rectangular shapes and from the top on the
ring shapes
Custom configurations involving grooves, holes, product
size or surface finishes are routinely manufactured to meet
the exact requirements of the design engineer. Delivery is
dependent on complexity of order. Please consult factory.
• Flexible lead extension
• Teflon® insulated silver-plated copper lead extension
• Lead extension length - standard length 305 mm (12 in.)
Standard Product Ordering Information
Code
Voltage
VÅ(ac)
Number
Size
Watts
W/in2
(W/cm2)
Square ‚
CER-1-01-00002
CER-1-01-00006
CER-1-01-00093
CER-1-01-00097
25 mm x 25 mm x 2.5 mm
(0.98 in. x 0.98 in. x 0.1 in.)
50 mm x 50 mm x 2.5 mm
(1.97 in. x 1.97 in. x 0.1 in.)
25 mm x 25 mm x 2.5 mm
(0.98 in. x 0.98 in. x 0.1 in.)
19 mm x 19 mm x 2.5 mm
(0.75 in. x 0.75 in. x 0.1 in.)
967
1938
150
1000
500
150
357
(155.04)
(77.52)
(24)
240
240
120
120
200
(55.56)
Rectangular ‚
CER-1-01-00001
25 mm x 15 mm x 2.5 mm
(0.98 in. x 0.6 in. x 0.1 in.)
50 mm x 10 mm x 2.5 mm
(1.97 in. x 0.39 in. x 0.1 in.)
50 mm x 10 mm x 2.5 mm
(1.97 in. x 0.39 in. x 0.1 in.)
50 mm x 25 mm x 2.5 mm
(1.97 in. x 0.98 in. x 0.1 in.)
75 mm x 25 mm x 2.5 mm
(2.95 in. x 0.98 in. x 0.1 in.)
25 mm x 15 mm x 2.5 mm
(0.98 in. x 0.6 in. x 0.1 in.)
50 mm x 25 mm x 2.5 mm
(1.97 in. x 0.98 in. x 0.1 in.)
580
582
1000
750
1000
750
500
305
50
(155.04)
(116.28)
(155.04)
(116.28)
(77.52)
(48.0)
120
120
240
240
240
120
120
CER-1-01-00003
CER-1-01-00004
CER-1-01-00005
CER-1-01-00007
CER-1-01-00098
CER-1-01-00105
770
1453
1455
180
100
(8)
Ring ƒ
CER-1-02-00001
38 mm O.D./29 mm I.D.
(1.50 in. O.D./1.14 in. I.D.)
77.5 mm O.D./59 mm I.D.
(3.05 in. O.D./2.32 in. I.D.)
733
770
1000
250
(155.04)
(38.76)
120
240
CER-1-02-00002
‚ Leads exit short side
Standard configurations include:
ƒ Leads exit top
• Power lead wires with Teflon® insulation 305 mm (12 in.)
• Bonded Type K thermocouple with 305 mm (12 in.) Teflon® insulated lead extension
• Surface finish (Ra) <0.8 µm (32 µ-in.)
®
Teflon is a registered trademark of E.I. du Pont Nemours & Company.
FEN-ULT-1007
To be automatically connected to the nearest North American Technical and Sales Office call:
1-800-WATLOW2
International Technical and Sales Offices: Australia, +61-3-9335-6449 • China, +86-21-3950-9510 • France, +33 (0) 3073-2425 •
Germany, +49 (0) 7253-9400-0 • Italy, +39 (0) 2 458-8841 • Japan, +81-3-3518-6630 • Korea, +82-2-575-9804 • Malaysia, +60-3-7980-7741 •
Mexico, +52 (442) 217-6235 • Shanghai, +86-21-3950-9504 • Singapore, +65-6773-9469 • Spain, +34 91 675 1292 • Sweden, +46 35-27-11-66 •
Taiwan, +886-7-288-5168 • United Kingdom, +44 (0) 115-964-0777
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