Seiko Instruments Heat Pump MT 17E 003 D User Guide

MT-17E-003-D

STP-H600/H1000 Series

Turbomolecular Pump

INSTRUCTION MANUAL

(Third Edition-d)

Read through the Safety Precautions of this Manual

carefully before using the STP pump.

Keep this Manual in a place where you can quickly access

it at any time.

Seiko Instruments Inc.

Dec. 2001

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STP-H600/H1000 Series Instruction Manual

WARNING

◇ Check the properties of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. Follow any and all safety precautions and/or

recommendations instructed by the gas supplier.

Take appropriate measures specified in the MSDS to prevent a problem if you use any

corrosive, reactive, flammable or other system gas. Dilute the pumped gas with a monitored

inert gas if necessary. Take appropriate measures so as not to cause a problem due to the

pumped gas

◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the

specified method. Failure to do so may lead to serious personal injury, product and/or

peripheral equipment damage if any abnormality/error occurs in the rotor.

◇ The STP pump operates at high temperatures while the baking heater is in operation.

NEVER touch the STP pump and its peripheral equipment while the baking heater is in

operation.

Operators can burn hands.

◇ Always exhaust residual gases thoroughly from the STP pump when removing the STP

pump from the vacuum equipment. Residual gases in the STP pump may cause an

accident which, for certain gases, may involve serious injury or death.

Confirm the characteristics of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. Wear personal protective equipment if

necessary.

◇ When covering the battery case, be sure not to catch the battery cable in the battery case.

Failure to do so may short-circuit the battery and result in a leakage, production of fire or

explosion.

◇ NEVER throw the battery into fire nor heat it.

Failure to do so may result in an explosion, production of fire and/or serious personal injury.

Observe the instructions given by the battery maker, the national and/or local government

when disposing of the battery.

◇ Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is

used for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial

waste in accordance with guidelines given by the national and/or local government.

Residual gas in the STP pump may cause an accident which, for certain gases, may involve

serious injury or death.

◇ Always remove the battery from the STP control unit when disposing of it. Failure to do so

may result in fire or other accident.

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STP-H600/H1000 Series Instruction Manual

CAUTION

◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas

may corrode the STP pump and damage it.

◇ A hazardous live voltage may exist at connector/terminal that marked

DO NOT touch the terminal. Doing so may result in electric shock.

When operating connection/disconnection to terminal, always power OFF the STP pump

(Switch the breaker “OFF”).

◇ Always check the STP pump has stopped, then turn OFF the primary power (switch the

breaker “OFF”) before proceeding to any of the following operations. Failure to do so may

cause the STP pump to rotate accidentally, which may injure operators seriously or result in

electric shock.

Sꢀ Connect or disconnect cables;

Sꢀ Connect an external battery;

Sꢀ Perform maintenance and inspections such as replacement of the internal battery

and/or fuses as well as inspections of deposit and/or the air cooling fan (when replacing

fuses, always disconnect the internal battery connector);

Sꢀ Perform investigations into probable causes and action/measures taken in the event of

occurrence of a problem; or

Sꢀ Open and close the STP control unit front panel (hereinafter referred to as the front

panel) in order to check or reset the "BATTERY NG" (hereinafter referred to as

"BATTERY NG") lamp.

◇ The STP pump and the STP control unit are heavy products. Always use a crane or the

like when lifting them. When lifting the STP pump by hands for unavoidable reasons, it

must always be lifted by two or more people. Failure to do so may damage their hipbone or

injure them due to occurrence of an accident such as fall.

◇ Install the STP control unit not only by fitting it with the front panel fitting screws but also by

supporting it from the bottom side. Fitting the STP control unit with the screws only cannot

sustain its weight, and therefore resulting in product damage.

◇ Always use the STP pump, STP control unit and STP connection cables of the same model

name, serial number and cable length, which are specified on their own name plate.

Failure to do so may result in product damage. If you use units with the same model name

but different serial number and cable length; they must be adjusted. If the model names

are different, they may not be used even when performing adjustment. In both cases,

contact Seiko Instruments.

◇ Use the STP connection cable and the motor connection cable that have a label affixed

STP-H600/H1000

Series

The use of different cables may result in product damage.

◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing

so may result in electric shock or product damage.

◇ Always use the power voltage specified on the name plate for the primary power voltage of

the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric

shock or product damage.

◇ NEVER remove the splinter shield from the STP pump. Doing so may result in product

damage.

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STP-H600/H1000 Series Instruction Manual

CAUTION

◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage.

◇ NEVER turn OFF the primary power (DO NOT switch the breaker “OFF”) while the STP

pump is rotating. Doing so may result in product damage.

◇ Perform investigations into probable causes and remove them before restarting the STP

pump in the event of occurrence of a problem. The use of the abnormal STP pump may

result in product damage.

◇ Always replace batteries once a year. Failure to do so, the battery backup operation may

not run at the power failure.

◇ DO NOT connect internal batteries and external batteries simultaneously. Failure to do so

may result in product damage.

◇ DO NOT move the STP pump and the STP control unit while the STP pump is in operation.

Doing so may result in product damage.

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STP-H600/H1000 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The

turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust

gases from it.

This manual covers all items necessary to ensure safe installation, operation and

maintenance of the following series of the STP-H600/H1000 turbomolecular pump:

Model Name

Specification

Sꢀ STP-H600

Sꢀ STP-H1000

Sꢀ STP-H600C

Sꢀ STP-H1000C

High-throughput type

High-throughput type, chemical specific ^*1

High-throughput type, chemical specific

For the specifications of other models of the STP-H600/H1000 pump series, contact Seiko

Instruments.

In this manual, the above STP pump series is collectively referred to as the “STP pump.”

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

◇ Applied Directives

Sꢀ EC Machinery Directive

Sꢀ EC Electromagnetic Compatibility Directive

Sꢀ EC Low Voltage Directive

◇ Applied Standards

Sꢀ EN292-1

Sꢀ EN292-2

Sꢀ EN60204-1

Sꢀ EN55011 (class A)

Sꢀ EN50082-2

◇ Applied Standards (Only a some model)^*2

Sꢀ UL3101-1,1993 (Electrical Equipment for Laboratory Use; Part 1 : General

Requirements)

^*1Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

^*2Contact Seiko Instruments about recognized model.

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STP-H600/H1000 Series Instruction Manual

PRECAUTIONS

1) No part of this manual may be reproduced in any form by any means

written permission from Seiko Instruments.

without prior

2) Seiko Instruments pursues a policy of continuing improvement in design and

performance of this product. The right is, therefore, reserved to vary specifications and

design without notice. Understand that the product you purchased and its contents

including specifications described in this manual may differ.

REQUEST

If you find inaccuracies or errors in this manual, advise your nearest sales representative

office of Seiko Instruments or the following sections of them:

Seiko Instruments Inc.

Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Sales Department

1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN

Telephone:

Domestic

043-211-1401

International

Domestic

+ 81-43-211-1401

043-211-8075

Facsimile:

International

+ 81-43-211-8075

Manufacturer, Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Division

4-3-1 Yashiki, Narashino-shi, Chiba 275-0004 JAPAN

Telephone:

Domestic

047-475-3123

International

Domestic

+81-47-475-3123

047-475-3111

International

Domestic

International

+81-47-475-3111

047-471-1544

+81-47-471-1544

Facsimile:

Vacuum Innovative Products Sales Department

1-8 Nakase, Mihama-ku, Chiba 261, Japan

Telephone:

Facsimile:

+ 81-43-211-1401(Direct)

+ 81-43-211-8075

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STP-H600/H1000 Series Instruction Manual

LIMITED WARRANTY

This WARRANTY applies to the customer to whom Seiko Instruments has delivered this

product.

1. WARRANTY PERIOD:

Seiko Instruments warrants this product against defects for a period of

two (2) years from the date of delivery or during the period specified in

the agreement made by and between the customer and Seiko

Instruments.

2. ITEM WARRANTED:

1) This warranty applies only to the product delivered from Seiko

Instruments to the customer.

2) If any defect is found during this period, Seiko Instruments will, at

its option, repair or recondition the product free of charge. The

costs for repair or replacement of the product after the warranty

period has passed will be at the customer's own charge.

3. DISCLAIMER:

Seiko Instruments makes no warranty with respect to any damage occurred

due to any of the following during the warranty period:

1) Handling, operation or maintenance other than that specified herein;

2) Failure to follow any of the warnings or cautions enumerated under

;

3) Installation, operation or maintenance using parts which are not

specified by Seiko Instruments;

4) Maintenance personnel other than those authorized by Seiko

Instruments or its specified plant have disassembled, reconditioned, or

tampered the product;

5) Defect resulting from the not-specified use of the product;

6) When the product is used under special conditions without obtaining

the written consent of Seiko Instruments (Particular gases, strong

magnetic field and the radiation are added to the product.);

7) Defect resulting from deposit;

8) Water cooling system defect resulting from water quality used;

9) Defect resulting from the installation of the product (Exclude the

installation by authorized personnel.);

10) Deterioration in the external because of use (Discoloration, scratches

and so forth);

11) Product damage occurred during transport or other factors not

attributable to Seiko Instruments;

12) Product breakage or damage due to natural disasters, fire or other

external factors;

13) Deterioration in the basic performance due to the use of the product

beyond limits of the use;

14) Any direct, incidental or consequential damage resulting from the use

of the product;

15) When continuously operated without overhaul after the WARNING

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STP-H600/H1000 Series Instruction Manual

indication (“WARNING” message) on the LCD display;

16) Overhaul and replacement of maintenance parts;

4. SPARE PARTS:

● Fuse and air cooling fan for control unit

● Touch down bearing

● Heater

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STP-H600/H1000 Series Instruction Manual

TABLE OF CONTENTS

SAFETY PRECAUTION

INTRODUCTION

LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump..................................... 1-1

1.1

1.2

1.3

1.4

Usable Gases............................................................................................................ 1-1

Maintenance Precautions.......................................................................................... 1-1

Inspection Precautions.............................................................................................. 1-2

Labels........................................................................................................................ 1-2

2 Unpacking.................................................................................................. 2-1

2.1

2.2

Unpacking the STP Pump......................................................................................... 2-1

Unpacking the STP Control Unit ............................................................................... 2-2

3 Installation of the STP pump...................................................................... 3-1

3.1

3.2

Name and Function of Each Part.............................................................................. 3-1

Precautions Before Installation ................................................................................. 3-3

3.2.1 Operating Environment ................................................................................ 3-3

3.2.2 Installation Area ........................................................................................... 3-4

3.2.3 Bench........................................................................................................... 3-4

How to Install the STP Pump .................................................................................... 3-5

3.3.1 Cleaning the Seal......................................................................................... 3-6

3.3.2 STP Pump Installation Positions.................................................................. 3-7

3.3.3 How to Secure the STP Pump ..................................................................... 3-8

3.3.4 Vacuum Piping........................................................................................... 3-12

3.3.5 Connecting the Emergency Vent. Valve .................................................... 3-14

3.3.6 Connecting the Purge Port......................................................................... 3-14

3.3.7 Connecting the Ground Cable.................................................................... 3-15

3.3

4 Installation of the STP Control Unit............................................................ 4-1

4.1

Name and Function of Each Part.............................................................................. 4-1

4.1.1 Front Panel................................................................................................... 4-1

4.1.2 Rear Panel ................................................................................................... 4-4

4.1.3 Inside of the STP Control Unit...................................................................... 4-6

Precautions Before Installation ................................................................................. 4-8

4.2.1 Operating Environment ................................................................................ 4-8

4.2.2 Installation Area ........................................................................................... 4-9

Attaching the STP Control Unit Front Panel to a Rack ........................................... 4-10

Cable Connection.................................................................................................... 4-11

4.4.1 Name and Dimensions of Each Cable....................................................... 4-11

4.4.2 How to Connect the Cables ....................................................................... 4-13

4.2

4.3

4.4

5 How to Start/Stop the STP Pump .............................................................. 5-1

5.1

5.2

5.3

5.4

5.5

Before Starting .......................................................................................................... 5-1

Starting/Stopping Time.............................................................................................. 5-1

Start Procedures ....................................................................................................... 5-2

Stop Procedures ....................................................................................................... 5-2

Manual Operation...................................................................................................... 5-3

5.5.1 Powering ON................................................................................................ 5-3

5.5.2 Starting the STP Pump ................................................................................ 5-3

5.5.3 Stopping the STP Pump............................................................................... 5-3

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STP-H600/H1000 Series Instruction Manual

5.5.4 Starting the STP Pump after Stopping......................................................... 5-3

5.5.5 Powering OFF.............................................................................................. 5-4

Remote Operation..................................................................................................... 5-5

5.6.1 Powering ON................................................................................................ 5-5

5.6.2 Starting/Stopping the STP Pump ................................................................. 5-5

5.6.3 Starting the STP Pump After Stopping......................................................... 5-5

5.6.4 Powering OFF.............................................................................................. 5-6

5.6

6 Safety Functions When an Abnormality/Error Occurs ............................... 6-1

6.1

Safety Functions........................................................................................................ 6-1

6.1.1 Power Failure............................................................................................... 6-1

6.1.2 Abnormal State of Magnetic Bearing ........................................................... 6-3

6.1.3 Excessive Vibration...................................................................................... 6-3

6.1.4 Inverter Overload ......................................................................................... 6-3

6.1.5 Overheating Inside the STP pump............................................................... 6-3

6.1.6 Overheating Inside the STP Control Unit..................................................... 6-3

6.1.7 Overspeed.................................................................................................... 6-3

6.1.8 Abnormal Battery Voltage ............................................................................ 6-4

6.1.9 Failure of Brake............................................................................................ 6-4

Restarting after Any Safety Function Operates......................................................... 6-5

Operation of the Emergency Vent. Valve.................................................................. 6-7

6.2

6.3

7 Gas Suction, Cooling and Baking the STP Pump...................................... 7-1

7.1

Gas Suction............................................................................................................... 7-1

7.1.1 How to Introduce a Purge Gas..................................................................... 7-1

Cooling the STP Pump.............................................................................................. 7-2

7.2.1 Water Cooling Method ................................................................................. 7-2

7.2.2 Air Cooling Method....................................................................................... 7-3

Baking the STP Pump............................................................................................... 7-4

7.3.1 Attaching a Baking Heater ........................................................................... 7-4

7.3.2 Interlocking the STP Pump Operation with Baking.......................................... 7-6

7.2

7.3

8 Remote Input/Output Signal Terminal Blocks............................................ 8-1

8.1

8.2

8.3

8.4

I/O TB2 Terminal Block............................................................................................. 8-1

DC I/O TB3 Terminal Block....................................................................................... 8-6

START STOP TB5 Terminal Block........................................................................... 8-8

START/STOP TB6 Terminal Block........................................................................... 8-9

9 Internal Battery........................................................................................... 9-1

9.1

9.2

9.3

9.4

9.5

Life of the Internal Battery......................................................................................... 9-1

Allowable Shelf Life of the Internal Battery................................................................ 9-1

How to Charge the Internal Battery........................................................................... 9-2

BATTERY NG Lamp ................................................................................................. 9-3

How to Replace the Internal Battery.......................................................................... 9-4

9.5.1 How to Replace the Battery Case ................................................................ 9-4

9.5.2 How to Replace the Battery in the Battery Case.......................................... 9-6

How to Dispose of the Internal Battery...................................................................... 9-8

9.6

10 External Battery ....................................................................................... 10-1

10.1 Specifications for the External Battery .................................................................... 10-1

10.2 Installation of the External Battery........................................................................... 10-2

10.3 How to Charge the External Battery........................................................................ 10-3

10.4 How to Dispose of the External Battery................................................................... 10-3

11 Operation Principle of the STP Pump...................................................... 11-1

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STP-H600/H1000 Series Instruction Manual

12 Maintenance and Inspection.................................................................... 12-1

12.1 Replacing the Internal Battery................................................................................. 12-1

12.2 Inspecting the Air Cooling Fan................................................................................ 12-1

12.3 Replacing the Fuses ............................................................................................... 12-2

12.4 Inspecting for Deposit ............................................................................................. 12-3

12.5 Overhaul.................................................................................................................. 12-4

12.6 Transporting for Repair or Overhaul ....................................................................... 12-5

13 Storage .................................................................................................... 13-1

13.1 The STP Pump........................................................................................................ 13-1

13.2 The STP Control Unit.............................................................................................. 13-2

13.3 Restarting Precautions............................................................................................ 13-2

14 Disposal ................................................................................................... 14-1

14.1 The STP Pump........................................................................................................ 14-1

14.2 The STP Control Unit.............................................................................................. 14-1

14.3 The Battery.............................................................................................................. 14-2

15 Troubleshooting....................................................................................... 15-1

15.1 Troubleshooting Immediately After An Abnormality/Error Occurs .......................... 15-1

15.2 Abnormalities When Powering ON ......................................................................... 15-2

15.3 Abnormalities When Performing The STP Pump Start Operation.......................... 15-3

15.4 Abnormalities While the STP Pump is Rotating...................................................... 15-3

15.5 When Any Abnormality/Error Warning Lamp Lights ............................................... 15-5

16 Specifications and Accessories ............................................................... 16-1

16.1 Specifications for the STP Pump ............................................................................ 16-1

16.2 Specifications for the STP Control Unit................................................................... 16-2

16.3 Accessories............................................................................................................. 16-4

16.4 Recommended Spare Parts.................................................................................... 16-4

STP PUMP PROBLEM CHECK SHEET

UNIT CONVERSION TABLE

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STP-H600/H1000 Series Instruction Manual

TABLES

Table 3.1

Table 3.2

Tightening torque of bolt....................................................................................... 3-8

Maximum Torque predicted and

Recommended securing bolt for inlet port flange................................................. 3-9

Number of Claw Clamps by Size of Flange........................................................ 3-10

Connecting Primary Power Cable....................................................................... 4-15

Starting/Stopping the STP Pump During Remote Operation................................ 5-5

State of Lamps and REMOTE Output Signal at Power Failure ............................ 6-2

Operation of the STP Pump after Power Recovery.............................................. 6-2

Safety Functions ................................................................................................... 6-8

Attaching Positions of the Cooling Unit and Baking Heater.................................. 7-5

I/O TB2 Terminal Block ........................................................................................ 8-1

Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10................................. 8-4

Rated Contacts for Relays CR5 and 6.................................................................. 8-4

DC I/O TB3 Terminal Block .................................................................................. 8-6

START STOP TB5 Terminal Block....................................................................... 8-8

START/STOP TB6 Terminal Block....................................................................... 8-9

Table 3.3

Table 4.1

Table 5.1

Table 6.1

Table 6.2

Table 6.3

Table 7.1

Table 8.1

Table 8.2

Table 8.3

Table 8.4

Table 8.5

Table 8.6

Table 10.1 Specifications for the External Battery................................................................ 10-1

Table 15.1 Troubleshooting After Powering ON................................................................... 15-2

Table 15.2 Troubleshooting When Performing The STP Pump Start Operation.................. 15-3

Table 15.3 Troubleshooting While the STP Pump Is Rotating ............................................. 15-3

Table 15.4 Cross Reference of Items of Abnormality Warning Lamps ................................ 15-5

Table 15.5 Troubleshooting When Any of Abnormality/Error Warning

Lamp Lights ........................................................................................................ 15-6

Table 16.1 Specifications for the STP Pump........................................................................ 16-1

Table 16.2 Specifications for the STP Control Unit .............................................................. 16-2

Table 16.3 Accessories ........................................................................................................ 16-4

Table 16.4 Recommended Spare Parts ............................................................................... 16-4

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STP-H600/H1000 Series Instruction Manual

FIGURES

Figure 2.1

Figure 3.1

Figure 3.2

Figure 3.3

Figure 3.4

Figure 3.5

Figure 3.6

Example of Lifting the STP Pump......................................................................... 2-1

Configuration of the STP Pump............................................................................ 3-2

Installation of the STP Pump to the Vacuum Equipment...................................... 3-5

STP Pump Installation Positions........................................................................... 3-7

Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump .. 3-7

Example of securing the STP pump (When securing the inlet port with bolts)..... 3-9

Example of securing the STP pump

(When securing the inlet port flange with claw clamps)...................................... 3-10

Example of securing the STP pump

Figure 3.7

(When installing the damper in the inlet port flange) .......................................... 3-11

Connecting the Purge Port and Emergency Vent. Valve.................................... 3-15

STP Control Unit Front Panel ............................................................................... 4-3

STP Control Unit Rear Panel................................................................................ 4-5

Inside of the STP Control Unit .............................................................................. 4-7

Peripheral Space of the STP Control Unit ............................................................ 4-9

Example of Securing the STP Control Unit......................................................... 4-10

External Dimensions of Each Cable ................................................................... 4-11

External Dimensions of he Power Cable ............................................................ 4-12

How to Secure Primary Power Cable ................................................................. 4-16

I/O TB2 Remote Output Signal Terminal Block.................................................... 8-3

Example of Connecting I/O TB2 R. Pump Terminal............................................. 8-5

Example of Securing the Remote Cable............................................................... 8-5

DC I/O TB3 Remote Input Signal Terminal Block................................................. 8-7

START STOP TB5 Remote Input Signal Terminal Block..................................... 8-8

START/STOP TB6 Remote Input Signal Terminal Block..................................... 8-9

Life of the Internal Battery..................................................................................... 9-2

Allowable Shelf Life of the Internal Battery ........................................................... 9-2

How to Replace the Internal Battery ..................................................................... 9-7

Figure 3.8

Figure 4.1

Figure 4.2

Figure 4.3

Figure 4.4

Figure 4.5

Figure 4.6

Figure 4.7

Figure 4.8

Figure 8.1

Figure 8.2

Figure 8.3

Figure 8.4

Figure 8.5

Figure 8.6

Figure 9.1

Figure 9.2

Figure 9.1

Figure 11.1 Cross Sectional View of the STP Pump ............................................................. 11-2

Figure 16.1 External Appearance of the STP Pump

(Example: STP-H1000 Series) ........................................................................... 16-5

Figure 16.2 External Appearance of the STP Control Unit .................................................... 16-6

Figure 16.3 Label Affixing Positions for the STP Pump......................................................... 16-7

Figure 16.4 Label Affixing Positions for the STP Control Unit ............................................... 16-8

Figure 16.4 Label Affixing Positions for the Special Accessory............................................. 16-9

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STP-H600/H1000 Series Instruction Manual

1 Precautions for Safe Operation of the STP Pump

1.1 Usable Gases

Chlorine or fluorine system gases can be used in chemical specific pumps (STP-

H600C/H1000C or other models). When you use gases including alkaline metals, but

excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki.

WARNING

◇ Check the properties of the gas to be used, referring to the Material Safety Data

Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety

precautions and/or recommendations instructed by the gas supplier.

Take appropriate measures specified in the MSDS to prevent a problem if you

use any corrosive, reactive, flammable or other system gas. Dilute the pumped

gas with a monitored inert gas if necessary. Take appropriate measures so as

not to cause a problem due to the pumped gas

CAUTION

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-H600/STP-H1000 pump or other models without anti-corrosion treatment.

◇ Introduce a dry N₂gas (purge gas) to protect the inside of the STP pump when

using reactive or corrosive gases.

◇ Cool the STP pump to within the operating pressure range to prevent the STP

pump from overheating when sucking gases.

1.2 Maintenance Precautions

Perform any maintenance of the STP pump and the STP control unit (battery replacement,

fuse replacement), following Section 12, "Maintenance and Inspection".

CAUTION

◇ Always turn OFF the primary power (switch the breaker "OFF") before

performing any maintenance.

◇ Disconnect internal battery connector before performing maintenance of the STP

control unit.

◇ NEVER touch any portions other than those designated when performing

maintenance.

Careless touch may cause electric shock and/or a short-circuiting of the internal

circuit, resulting in product damage or a problem.

1-1

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STP-H600/H1000 Series Instruction Manual

1.3 Inspection Precautions

Perform inspections of the STP pump and the STP control unit (check of the air cooling fan

and reset of the "BATTERY NG" lamp), following Section 12, "Maintenance and Inspection"

When performing inspections (check of the air cooling fan and reset of the "BATTERY NG"

lamp), always turn OFF the primary power (switch the breaker "OFF") before opening the

front panel, then turn ON the primary power again (switch the breaker "ON").

CAUTION

◇ NEVER touch any portions other than those designated when performing

inspections.

Careless touch may cause electric shock and/or a short-circuiting of the internal

circuit, resulting in product damage or a problem.

1.4 Labels

The following labels are affixed to the STP pump and STP control unit.

Read the contents of the labels before operation. For the positions of the labels, see Figures

“Label Affixing Positions”.

(1) STP Pump Caution Label

This label describes precautions for operating the STP pump.

Follow these precautions.

(2) STP Control Unit Caution Label

This label describes precautions for operating the STP control unit.

Follow these precautions.

1-2

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STP-H600/H1000 Series Instruction Manual

(3) Heavy Product Caution Label

This label is affixed to the product with a mass of 20 kg or more.

Follow the precautions of Section 2, "Unpacking" so as not to cause any accident during

handling.

(4) STP Pump Installation Warning Label

This label describes installation of the STP pump.

Install the STP pump according to the precautions of Section 3, "Installation of the STP

Pump. "

(5) Emergency Vent. Valve Caution Label

This label describes the emergency vent. valve installation position.

Connect the emergency vent. valve before use.

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(6) Connector Caution Label

◇ This label describes lock of the connector.

◇ This label instructs operators to prevent the connectors from being disconnected while

the STP pump is in operation.

(7) STP Control Unit Safety Instruction Label

This label describes instructions before operating the STP control unit.

(8) High Voltage Device Caution Label

The STP control unit is equipped with a high voltage device. This label warns operators to

pay attention to the high voltage device.

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(9) Battery Instruction Label

This label instructs operators to replace batteries once a year.

The next replacement date of batteries is specified upon delivery of the STP pump.

Record the next replacement date (after one year) of batteries in the blank of the label when

replacing them.

This label describes precautions for use of external batteries.

(10) Rotational Direction Instruction Label

This label describes the rotational direction of the STP pump.

The STP pump rotates in this direction.

ROTATION

(11) Voltage Rating Label

This label describes the rated voltage of the STP control unit.

Use voltage specified in this label.

200 240V

～

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(12) Hot Surface Warning Label

This label instructs operators so as not to touch the hot surface of the STP pump.

The use of the baking heater (optional accessory) may lead to a considerable rise in

temperatures outside the STP pump.

This label warns operators so as not to burn hands.

(only when using the baking heater.)

(13) Tuning Caution Label

This label describes precautions for performing the tuning.

Tuning should be performed by Seiko Seiki trained or authorized personnel only.

! 注意

浮上調整を行う場合は弊社

のトレーニングまたは許可を

受けてください。

CAUTION

Tuning must be performed

by Seiko Instruments Inc. or

authorized personnel only.

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2 Unpacking

2.1 Unpacking the STP Pump

Check the following before unpacking the STP pump.

1) Check the package for bruises, breakage, wetness, etc.

If there is any abnormality/error or it is judged necessary to return the product, contact

Seiko Seiki.

2) Check the contents of the package.

See Section 16.3, "Accessories."

CAUTION

◇ The mass of the STP pump is approx. 30 kg. Use a crane or other appropriate

means to lift the STP pump.

Lift the STP pump with an eyebolt or a similar tool that uses the fitting hole

attached to the inlet port flange.

Lift it with the aid of a suspension tool under the base when installing the STP

pump without fitting hole.

◇ Observe national laws/regulations, safety standards and so on when lifting the

STP pump.

◇ Use a crane or other appropriate means sufficient enough to withstand the load

when lifting the STP pump.

◇ Always lift the STP pump in stable places free of excessive shock or vibration to

prevent it from shaking or dropping.

◇ Have at least two people lift the STP pump when doing so by hand.

NOTICE

◇ Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on the

surface.

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.

Figure 2.1 Example of Lifting the STP Pump

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2.2 Unpacking the STP Control Unit

Check the following before unpacking the STP control unit.

1) Check the package for bruises, breakage, wetness, etc.

If there is any abnormality/error or it is judged necessary to return the product, contact

Seiko Seiki.

2) Check the contents of the package.

See Section 16.3, "Accessories."

CAUTION

◇ The mass of the STP control unit is approx. 40 kg. Use a crane or appropriate

means to lift the STP control unit.

Lift the STP control unit using the two handles attached to the front panel.

◇ Observe national laws/regulations, safety standards and so on when lifting the

STP control unit.

◇ Use a crane or appropriate means sufficient enough to withstand the load when

lifting the STP control unit.

◇ Always lift the STP control unit in stable places free of excessive shock or

vibration to prevent it from shaking or dropping.

◇ Have at least two people lift the STP control unit when doing so by hand.

NOTICE

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.

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STP-H600/H1000 Series Instruction Manual

3 Installation of the STP pump

3.1 Name and Function of Each Part

(1) Inlet Port Flange (ICF^*1, VG^*2, ASA, ISO, etc.)

ꢀꢁ Connected to the vacuum equipment (at the high vacuum side).

CAUTION

◇ A splinter shield is attached to the inlet port flange to prevent foreign particles

from falling into the STP pump.

NEVER remove it.

(2) Outlet Port Flange (KF^*240)

ꢀꢁ Connected to the inlet port side of the auxiliary pump.

(3) STP Connector (41 pins)

ꢀꢁ Connected to the STP connection cable.

(4) Motor Connector (5 pins)

ꢀꢁ Connected to the motor connection cable.

(5) Purge Port (KF^*210)

ꢀꢁ Introduces a purge gas.

In order to protect the inside of the STP pump when sucking reactive or

corrosive gases.

The STP pump is delivered with a blank flange attached to this port.

(6) Cooling Water Port (PT^*2(R/C)1/4 Female Screw)

ꢀꢁ Connected to the STP pump cooling water pipe.

This port is used when water cooling the STP pump.

(7) Emergency Vent. Valve

ꢀꢁ Protects the STP pump.

It functions immediately after any abnormality/error occurs inside the STP

pump.

(8) Ground Terminal

ꢀꢁ

Used for grounding.

Connect the ground cable between this terminal and the ground terminal of the

STP control unit .

The ground terminal is marked with label

(9) Temperature Sensor Connector (optional accessory)

ꢀꢁ A temperature sensor is attached.

For use with the Temperature Management System (TMS) unit only.

JVIS

JIS

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( ) Inlet Port Flange

( ) Temperature Sensor

Connector

Optional Accessory

( ) Outlet Port Flange

( ) Cooling Water Port

( ) STP Connector

( ) Motor Connector

( ) Ground Terminal

( ) Emergency Vent Valve

( ) Purge Port

Figure 3.1 Configuration of the STP Pump

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3.2 Precautions Before Installation

3.2.1 Operating Environment

CAUTION

◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type

C). When you use gases including alkaline metals, but excluding Li, gases

including Ga, Hg, Sn, or HBr, contact Seiko Instruments.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-H600/STP-H1000 pump or other models without anti-corrosion treatment

(see Section 1.1, "Usable Gases").

Install the STP pump in a place meeting the following requirements:

Ambient Temperature

Ambient Relative Humidity

Environment

0 to 40 °C

30 to 95 % (no dew condensing)

ꢀꢁ A place free of externally-applied mechanical shock.

ꢀꢁ A place free of a heat source

(Keep clean of the heat source or attach a thermal

shield plate).

ꢀꢁ A place free of a strong magnetic field

(Range: up to 15mT (150G) in the axial direction,

and up to 3mT (30G) in the radial direction with

respect to the rotational axis of the STP pump).

ꢀꢁ A place free of a strong electric field.

ꢀꢁ A place free of exposure to radiation.

ꢀꢁ No discharge of high voltage (more than 500 V)

(If more than 500 V is discharged, contact Seiko

Instruments).

STP Pump Installation

Equipment Conditions

ꢀꢁ Install the STP pump securely so that foreign

particles will easily fall into the STP pump (Ex.: Si

wafers or samples are positioned above the STP

pump) (To prevent foreign particles from falling into

the STP pump, design a shield plate with large

conductance).

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3.2.2 Installation Area

Leave enough space for the following in addition to that for the STP pump:

Sꢀ Space for maintenance and inspection

Sꢀ Space for connecting cables

◇ The minimum bending radius of the STP connection cable is 150 mm (see

Figure 16.1, "External Appearance of the STP Pump" [bending dimensions of

the STP connection cable]).

DO NOT excessively bend the cables and beware of any obstacles when

installing the STP pump.

Also, leave enough space to install other cables without bending them

excessively.

3.2.3 Bench

A bench must be prepared by the customer to secure the STP pump. The shape

and size of the bench differ depending upon the type of STP pump. Follow the

precautions of the WARNING, CAUTION, or NOTICE (See Sec t ion 3.3.3, "How to

Secure the STP Pump").

◇ The STP pump is provided with a high-speed rotor. Any internal

abnormality/error may result in a jump in rotational torque leading to personal

injury or peripheral equipment damage.

Design and secure the bench for the STP pump so that it can withstand the

maximum torque generated due to the occurrence of an abnormality/error.

Refer to Section 3.3.3 “How to Secure the STP Pump” for abnormal torque.

◇ Secure the customer-prepared bench and the vacuum equipment on the floor or

peripheral equipment and other equipment in accordance with the customer

application. NEVER move them while the STP pump is in operation.

Use fitting bolts with a strength equal to or higher than SUS 304^*1. (Tensile

strength class^*1: 50 or more as a target)

◇ The screw hole for leg for securing the STP pump is M12^*1, and the depth is

24mm (8 positions).

For the external appearance of the STP pump, see Figure 16.1, "External

Appearance of the STP Pump."

^*1:JIS

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3.3 How to Install the STP Pump

Install the STP pump to the vacuum equipment as shown in Figure 3.2.

The STP pump can be

installed through the damper

(optional accessory).

Vacuum Equipment

Inlet Port

Inlet Port Flange

Vacuum Valve

Power Cable

Emergency

Vent.Valve

To Power Supply

STP Pump

Dry Pump,etc.

Auxiliary

Pump

Emergency

Vent. Valve Cable

STP

Control Unit

STP Connection Cable

Motor Connection Cable

Ground Cable

Outlet Port

Leg

Remote Cable

To Vacuum Equipment Control Circuit

Figure 3.2 Installation of the STP Pump to the Vacuum Equipment

CAUTION

◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type

C). When you use gases including alkaline metals, but excluding Li, gases

including Ga, Hg, In, or Sn, or HBr, contact Seiko Instruments.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-H600/H1000 pump or other models without anti-corrosion treatment (see

Section 1.1, "Usable Gases").

◇ When you use the STP pump in a place subjected to exposure to radiation,

contact Seiko Instruments.

◇ DO NOT open the STP pump through the flange to atmospheric air while the

STP pump is running.

If atmospheric air flows into the STP pump, it may not function normally.

◇ Depending upon the type of the auxiliary pump used, atmospheric air may

reverse flow into the STP pump when the auxiliary pump stops. Attach a

vacuum valve to the middle of the piping between the STP pump outlet port

flange and the auxiliary pump, and close the vacuum valve when the auxiliary

pump stops.

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NOTICE

◇ The STP pump cannot be used with the outlet port open to atmospheric air.

Always use the auxiliary pump (dry pump or similar one).

◇ Use an auxiliary pump with a pumping speed of 240 L/min or more.

◇ Depending upon the type of the auxiliary pump used, oil vapor may contaminate

the inside of the STP pump. Some oil viscosity could cause a malfunction

when there is a strong reverse flow of oil.

Take the following measures to ensure the correct flow of oil:

Sꢀ Attach a vacuum valve to the middle of the piping between the STP pump

outlet port flange and the auxiliary pump.

Sꢀ Attach an absorption trap adjacent to the vacuum valve.

3.3.1 Cleaning the Seal

Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing

the STP pump in the vacuum equipment.

Take the following measures for cleaning the seals:

Sꢀ Clean off with a pure gas.

Sꢀ Wipe with proper solvent (such as alcohol).

CAUTION

◇ A splinter shield is attached to the inlet port flange to prevent foreign particles

from falling into the STP pump.

Always leave the splinter shield attached during operation.

NOTICE

◇ The splinter shield cannot perfectly prevent foreign materials from falling into the

STP pump.

DO NOT install the STP pump in such a manner that foreign materials can

easily fall into it (for example, Si wafers or samples are positioned above the

STP pump). If installing the STP pump in such a manner, always attach a

shield plate with sufficient conductance above the STP pump to prevent foreign

materials from falling into it. Foreign materials falling into the STP pump

through the splinter shield may result in product damage.

◇ Be careful not to scratch the flange of the STP pump.

Check whether or not there are scratches on the surface, before installing the

STP pump.

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3.3.2 STP Pump Installation Positions

The STP pump can be installed vertically, horizontally, upside-down and slanted.

Upside-down

Horizontal

STP Pump

Slanted

Vertical

Figure 3.3 STP Pump Installation Positions

When installing the STP pump in a horizontal or slanted position, it is

recommended to install it so that the direction of the outlet port is on a vertical or

horizontal plane in the direction of the gravity.

This makes it possible to reduce the load on the magnetic bearing and the heat

generated by the STP pump.

Outlet Port

Direction of Gravity

Outlet Port

Figure 3.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump

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3.3.3 How to Secure the STP Pump

◇ The STP pump is provided with a high-speed rotor. The worst-case failure may

result in a jump in rotational torque leading to personal injury or peripheral

equipment damage.

The method of securing the STP pump will depend on the installation

requirements. Secure the STP pump to the vacuum equipment as follows:

◇ Design and secure the mounting for the STP pump so that it can withstand the

maximum rotational torque. Refer to Table 3.2 for torque in pump abnormality.

with bolts

Refer to “1) When securing the

inlet port with bolts”

Secure the inlet port

Refer to “2) When securing the

inlet port flange with claw

clamps”

Damper

with Claw Clamps

Refer to “3) When installing the

damper in the inlet port flange”

Yes

◇ In some cases, the damper and the claw clamper securing cannot be used

depend on the type of the STP pump.

◇ Refer to Table 3.1 for tightening torque of the bolt.

Table 3.1 Tightening torque of bolt

Size of bolt

Tightening torque of bolt (Nm)

12.0

24.1

42.1

M10

M12

◇ When making the leg to secure the base, make them shortened more than ones

attached to the STP pump.

Use a material that has a tensile strength of 600N/mm²or more.

◇ When securing the base, use stainless steel securing bolts with a tensile

strength class is 70 or more.

◇ When using any securing method other than that specified in this manual,

contact Seiko Instruments.

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STP-H600/H1000 Series Instruction Manual

1) When securing the inlet port with bolts

Refer to Table 3.2 for torque in pump abnormality and recommended securing bolts.

Secure the inlet port flange with all of the boltholes of the size specified in the Inlet

Port Flange Standard.

Secure the base with all 8 screw-holes for legs or all 8 attached legs.

Follow “CAUTION” on page 3-8 about legs and bolts for securing the base.

Make sure that the recommended securing bolt may be different depending on the

method of securing the base.

Table 3.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange

Model of TMP

Type of flange

STP-H600

ISO160F/ISO160

2.2×10⁴

VG150

2.2×10⁴

ICF203

2.2×10⁴

Torque in pump

abnormality [Nm]

Base(8 positions)securing

Yes

Type of bolt

Standard

Stainless steel

70 or more

Standard

Stainless steel

70 or more

Standard

Stainless steel

70 or more

Recommended

Carbon steel

Alloyed steel

Carbon steel

Alloyed steel

Carbon steel

Alloyed steel

Type of steel^*1

Strength^*1

securing bolt

for TMP Flange

12.9 or more

Model of TMP

STP-H1000

ISO200F/ISO250F/ISO200

Type of flange

VG200

1.9×10⁴

ICF253

2.2×10⁴

Torque in pump

abnormality [Nm]

1.9×10⁴

Base(8 positions)securing

Yes

Type of bolt

Standard

Recommended

securing bolt

Type of steel^*1

Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel

70 or more 70 or more 70 or more 70 or more 70 or more 70 or more

for TMP Flange

Strength^*1

Recommended fitting bolt for

flange

Secure the base

(a) When the base is not secured

(b) When the base is secured

Figure 3.5 Example of securing the STP pump

(When securing the inlet port with bolts)

*1 Refer to ISO898-1(JISB1051), ISO3506(JISB1054) and AMS6119(Aerospace Material Specification)

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STP-H600/H1000 Series Instruction Manual

2) When securing the inlet port flange with claw clamps

Refer to Table 3.2 for rotational torque.

When securing the inlet port flange with only the claw clamp, the vacuum

equipment cannot withstand the maximum rotational torque generated by the

worst-case failure. To make the vacuum equipment withstand abnormal torque,

secure the base with all 8 screw-holes for legs or all 8 attached legs.

Follow “CAUTION” on page 3-8 about legs and bolts for securing the base.

For the claw clamp-type, use the required number of claw clamps as specified in

Table 3.3. Position the claw clamps evenly on the circumference.

Table 3.3 Number of Claw Clamps by Size of Flange

Size of Flange

ISO 160 or less

ISO 200 to 250

ISO 320 or more

Number of Claw Clamps

4 or more

6 or more

8 or more

Vacuum Equipment

Claw Clamps

Secure the base

Figure 3.6 Example of securing the STP pump

(When securing the inlet port flange with claw clamps)

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3) When installing the damper in the inlet port flange

Refer to Table 3.2 for rotational torque.

In case of using a damper, secure the base with all 8 screw-holes for legs or all 8

attached legs. Follow “CAUTION” on page 3-8 about legs and bolts for securing

the base.

When the base cannot be secured because of the equipment design, install the pump

with a torque restraint like the one shown in Figure 3.7 (b).

◇ Use a damper only at the vertically upright position.

◇ DO NOT remove the bolts and nuts attached to reinforce the damper.

Vacuum Equipment

Damper Clamps

Secure the base

Hole to prevent

from rotating

Leg

(a) When securing the base

(b) When installing not to rotate

Figure 3.7 Example of securing the STP pump

(When installing the damper in the inlet port flange)

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3.3.4 Vacuum Piping

◇ DO NOT open the STP pump through the flange to atmospheric air while the

STP pump is running.

If atmospheric air flows into the STP pump, it may not function normally.

◇ Depending upon the type of the auxiliary pump used, atmospheric air may

reverse flow into the STP pump when the auxiliary pump stops.

Attach a vacuum valve to the middle of the piping between the STP pump outlet

port flange and the auxiliary pump, and close the vacuum valve when the

auxiliary pump stops.

In order to let the STP pump bring its performance into full play, follow the

precautions below:

1) Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on

the surface.

2) Use steel or aluminum tubes with a low gas loss to connect the vacuum

equipment to the STP pump.

3) Take measures for minimizing leakage. It is also necessary to degrease the

tubes as regularly as possible to keep the gas loss as low as possible.

4) It is recommended to use an auxiliary pump of 240 L/min or more. However,

the pressure at the inlet and outlet ports varies with the flow rate of gas,

capacity of the vacuum equipment, length and material of the piping. Select

an auxiliary pump in accordance with the capacity and starting method

(simultaneous starting, starting after generating roughing vacuum) suitable for

the vacuum equipment you use.

5) Connect the STP pump and the auxiliary pump using stainless steel or

aluminum alloy tubing, flexible tubing, vacuum rubber or Teflon tubing, etc.

The following measures can be used to avoid the transmission of the vibration

of the auxiliary pump to the STP pump and the vacuum equipment.

Sꢀ DO NOT place the auxiliary pump on the same floor as the vacuum

equipment.

Sꢀ Locate the auxiliary pump on a vibration-proof table.

Sꢀ Attain 1/3 or less of the rotational speed of the auxiliary pump,

when

adjusting the inherent frequency of the auxiliary pump installed on a

vibration-proof table.

Sꢀ Attach a weight to the piping from the auxiliary pump, or secure the piping

to a rigid, heavy object free of vibration.

Sꢀ Use a tube of high flexibility.

6) Depending upon the type of the auxiliary pump used, oil vapor may

contaminate the inside of the STP pump. Some oil viscosity could cause a

malfunction when there is a strong reverse flow of oil.

Take the following measures to ensure the correct flow of oil:

Sꢀ Attach a vacuum valve to the middle of the piping between the STP pump

outlet port flange and the auxiliary pump.

Sꢀ Attach an absorption trap adjacent to the vacuum valve.

3-12

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(1) Piping at the Inlet Port Flange

Attach the inlet port to the high vacuum side.

Maximum working pressure (Pressure at the inlet port flange applicable

continuously)

ꢀꢁ 67 Pa [0.5 Torr] (for water cooled)

ꢀꢁ 5.3 Pa [4×10^-2Torr] (for air cooled)

ꢀꢁ 0.9 Pa [7×10^-3Torr] (for natural air cooled)

ꢀꢁ 13 Pa [0.1 Torr] (when TMS unit is used)

(2) Piping at the Outlet Port Flange

Attach the outlet port to the inlet port flange of the auxiliary pump (primary

side pump).

Allowable backing pressure (Pressure at the outlet port flange applicable

continuously)

ꢀꢁ 400 Pa [3 Torr] (for water cooled, when TMS unit is used)

ꢀꢁ 267 Pa [2 Torr](for air cooled, natural air cooled)

◇ To attain the ultimate pressure shown in Table 16.1, "Specifications for STP

Pump", set the pressure at the outlet port flange to 1.3 Pa (10^-2Torr) or less.

3-13

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3.3.5 Connecting the Emergency Vent. Valve

The emergency vent. valve stops the STP pump by introducing gases if any

abnormality/error occurs in the STP pump.

Connect the emergency vent. valve (contained in the attached accessories) to the

purge port as shown in Figure 3.7. Note that the side of the emergency vent. valve

without filter is connected to the purge port.

Connect the cable for the emergency vent. valve to the connector, LEAK VALVE

CON8A, of the STP control unit.

◇ Always attach the emergency vent. valve.

◇ DO NOT close the port of the emergency vent. valve (filter side) with a blank

flange or other type of device.

◇ The allowable gas pressure ranges from zero [atmospheric pressure] to

4.9x10⁴Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm²[gauge

pressure]).

◇ Use a dry N2 gas or other.

3.3.6 Connecting the Purge Port

When sucking reactive or corrosive gases, introduce a dry N₂gas or other gas into

the STP pump in order to protect the inside of the STP pump.

As shown in Figure 3.7, introduce a dry N₂gas through the electromagnetic vent.

valve, needle valve or similar valve (must be prepared by the customer) from the

purge port.

For instructions on how to introduce the purge gas, See Section 7.1, "Gas Suction."

◇ The proper amount of gas purge is approx. 3.4×10^-2Pa·m³/s (20 SCCM).

◇ The allowable gas pressure ranges from zero [atmospheric pressure] to

4.9x10⁴Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm²[gauge

pressure]).

◇ When not introducing the purge gas, close the purge port with the blank flange

(attached at delivery).

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Dry N₂Gas or Other

Filter Side

KF10

Emergency Vent. Valve

Dry N₂Gas or Other

Purge Port

Figure 3.8 Connecting the Purge Port and Emergency Vent. Valve

3.3.7 Connecting the Ground Cable

Connect the ground cable (yellow/green) between the ground terminal of the STP

pump and the ground terminal of the STP control unit.

When the resistance between the ground terminals is lower than 0.1 ꢁ, it is not

necessary to connect the ground cable after installing the STP pump and the STP

control unit.

◇ When the resistance between the ground terminals is over 0.1 ꢁ, always

connect the ground cable.

3-15

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STP-H600/H1000 Series Instruction Manual

4 Installation of the STP Control Unit

4.1 Name and Function of Each Part

4.1.1 Front Panel

(1) "POWER ON/OFF" Switch (illuminated alternate push button switch, green

LED)

ꢀꢁ Press this switch to power ON/OFF the STP pump (MANUAL operation

only).

ꢀꢁ The POWER ON/OFF built-in lamp lights when the power is ON.

(2) "MOTOR START" Switch (momentary push button switch, black)

ꢀꢁ Press this switch with power ON to rotate and accelerate the STP pump

(MANUAL operation only).

ꢀꢁ The "ACCELERATION" lamp lights simultaneously.

(3) "MOTOR STOP" Switch (momentary push button switch, red)

ꢀꢁ Press this switch to decelerate and stop the STP pump (MANUAL

operation only).

ꢀꢁ The "NORMAL OPERATION" lamp or the "ACCELERATION" lamp goes

out and the "BRAKE" lamp lights simultaneously.

When the rotational speed is less than approx. 2000 rpm while the STP

pump is accelerating, the "BRAKE" lamp does not light.

(4) "HEATING ON/OFF" Switch (illuminated alternate push button switch, green

LED)

ꢀꢁ Press this switch to control the power supplied to the baking (MANUAL

operation only).

ꢀꢁ While the power is being supplied to the baking heater, the "HEATING

ON/OFF" switch built-in lamp lights.

ꢀꢁ Functions only under the NORMAL OPERATION state (for details, see

Section 8, "Remote Input/Output Signal Terminal Blocks").

(5) "NORMAL OPERATION" Lamp (green LED)

ꢀꢁ Lights during rated operation (NORMAL OPERATION state).

(6) "ACCELERATION" Lamp (green LED)

ꢀꢁ Lights during acceleration (ACCELERATION state).

(7) "BRAKE" Lamp (yellow LED)

ꢀꢁ Lights during braking (BRAKE state).

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(8) "OVER TEMPERATURE" Lamp (red LED)

ꢀꢁ Lights when any of the following abnormalities occurs:

a) When the motor or electromagnet overheats (110 ℃ or higher).

b) When the STP connection cable is not connected.

(9) "BATTERY OPERATION" Lamp (red LED)

ꢀꢁ Lights while the power is being supplied from the battery to the STP pump

during a power failure.

(10) "FAILURE" Lamp (red LED)

ꢀꢁ Lights when any of the following abnormalities occurs:

a) When the inside of the STP control unit overheats (90 ℃ or more

inside the heat sink).

b) When the motor or electromagnet overheats (110 ℃ or more).

c) When an abnormality occurs inside the inverter (overload, overspeed).

d) When the battery is thoroughly worn out and cannot be charged.

e) When the STP connection cable is not connected.

(11) "EMERGENCY OPERATION" Lamp (red LED)

ꢀꢁ Lights when any of the following abnormalities occurs:

a) When a power failure occurs.

b) When continuous vibration impact is applied to the rotor causing it to

come into contact with the touch down bearing.

c) When the STP connection cable is not connected.

For details concerning lamps (8) to (11) and abnormalities, see Section 6, "Safety

Functions When an Abnormality/Error Occurs" and Section 15, "Troubleshooting."

(12) ROTATION Meter (tachometer)

ꢀꢁ Indicates the rotational speed (rpm).

ꢀꢁ The needle moves to the black with an increase in rpm.

ꢀꢁ The needle moves to the red with a decrease in rpm.

ꢀꢁ The needle is located in the black during the rated operation.

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(5)

(6)

(12)

(7)

(8)

(9)

(10)

(11)

(4)

(3)

(1)

(2)

Figure 4.1 STP Control Unit Front Panel

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4.1.2 Rear Panel

CAUTION

◇ A hazardous live voltage may exist at connector/terminal that marked

DO NOT touch the terminal. Doing so may result in electric shock.

When operating connection/disconnection to terminal, always power OFF the

STP pump (Switch the breaker "OFF").

(13) AC POWER Terminal Block (TB1)

A maximum voltage : Equal to the input voltage of this terminal block. (MAX

240VAC)

ꢀꢁ For primary power input.

(14) MAIN POWER Breaker

ꢀꢁ Switches ON/OFF the primary power.

ꢀꢁ A metal fitting is attached to secure the breaker at the OFF position.

(15) P. CONNECTOR (CON5A)

A maximum voltage : 60VDC

ꢀꢁ For connection of the STP connection cable.

(16) INVERTER OUTPUT Connector (CON2)

A maximum voltage : 55VDC

ꢀꢁ For connection of the motor connection cable.

(17) LEAK VALVE Connector (CON8A)

A maximum voltage : 60VDC

ꢀꢁ For connection of the emergency vent. valve cable.

(18) Ground Terminal

ꢀꢁ For connection of the ground cable between the STP pump and the STP

control unit.

(19) I/O TB2 Terminal Block

A maximum voltage : Equal to the input voltage of this terminal block. (MAX

250VAC)

ꢀꢁ For remote control.

(20) DC I/O TB3 Terminal Block

A maximum voltage : 12VDC

ꢀꢁ For remote control.

(21) START STOP TB5 Terminal Block

A maximum voltage : 12VDC

ꢀꢁ For remote control.

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(22) START/STOP TB6 Terminal Block

A maximum voltage : Equal to the input voltage of this terminal block. (MAX

250VAC)

ꢀꢁ For remote control.

For details concerning remote control terminal blocks (19) to (22), see Section 8,

"Remote Input/Output Signal Terminal Blocks."

(23) "MANUAL/REMOTE" Changeover Switch

ꢀꢁ When setting to MANUAL, only start, stop or other operations can be

performed with the switches on the STP control front panel.

ꢀꢁ When setting to REMOTE, only start, stop or other operations can be

performed by inputting the remote signal.

(24) EXT. BATTERY (CON9) Connector

A maximum voltage : 55VDC

ꢀꢁ For connection of an external battery.

CAUTION

◇ When using EXT. BATTERY (CON9) connector, always disconnect the internal

battery connector (see Section 10, "External Battery" for details).

(21)

(23)

(22)

(24)

(14)

(18)

(16)

(13) (15)

(17) (20) (19)

Figure 4.2 STP Control Unit Rear Panel

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4.1.3 Inside of the STP Control Unit

(25) Inverter

ꢀꢁ This is a three-phase transistor-inverter which starts/stops the STP pump.

(26) Fuses 3 to 9, 11, and 12

ꢀꢁ These fuses protect as follows:

F3 and 4: 250 V, 5 A (for control power protection)

F5 to 7 : 250 V, 10 A, arc-extinguishing fuses

(for I/O TB2 terminal block power optional drive protection)

F8 and 9: 250 V, 10 A, arc-extinguishing fuses

(for internal and external batteries protection)

F11 and 12: 250 V, 0.1 A (for START/STOP TB6 terminal block protection)

(27) Control Circuit Boards

ꢀꢁ For control of the magnetic bearing, motor, safety functions, etc.

(28) Internal Battery

ꢀꢁ For backup during a power failure.

(29) Internal Battery Connector

ꢀꢁ For connection of internal battery (when using an internal battery, connect

it to this connector).

ꢀꢁ The internal battery has been installed upon shipment of the STP control

unit so that the customer can use it (the internal battery connector is

connected to the internal battery).

CAUTION

◇ When using an external battery, disconnect internal battery connector, then

connect external battery connector (see Section 10, "External Battery" for

details).

(30) Air Cooling Fan

ꢀꢁ For cooling the inside of the STP control unit.

(31) "BATTERY NG" Lamp

ꢀꢁ Lights when the battery capacity reduces to the minimum level (see

Section 9.4, "BATTERY NG Lamp”).

(32) "Reset" Switch

ꢀꢁ Resets the state of inability to start the STP control unit due to a decrease

in the battery capacity (see Section 9.4, "BATTERY NG Lamp”).

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(25)

(30) (26) (27) (28) (29)

(30)

(32) (31)

Figure 4.3 Inside of the STP Control Unit

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4.2 Precautions Before Installation

4.2.1 Operating Environment

Install the STP control unit in a place meeting the following requirements:

Ambient Temperature

0 ℃ to 40 ℃

Ambient Relative

Humidity

30 to 95% (no dew condensing)

Environment

ꢀꢁ A place free of exposure to direct sunlight.

ꢀꢁ A place free of high humidity.

ꢀꢁ A place free of dust.

ꢀꢁ A place free of salty air.

ꢀꢁ A place free of dripping water.

ꢀꢁ A place free of explosive or inflammable gas.

ꢀꢁ A place free of corrosive gas.

ꢀꢁ A place free of radiation.

ꢀꢁ A place free of strong magnetic and electric fields.

ꢀꢁ A place free of excessive vibration.

ꢀꢁ A place free of a source of electric noise.

ꢀꢁ Install the STP control unit horizontally (within

M10L).

Installation Condition

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4.2.2 Installation Area

Leave enough space for the following in addition to that for the STP control unit.

Sꢀ Space for maintenance and inspection

Sꢀ Space for inlet and outlet of air for cooling

ꢀ

- Top and side:

- Bottom:

5 cm or more

2.4 cm or more (height of the rubber foot)

Sꢀ Space for connecting the cables

- Rear: 15 cm or more

ꢀ

CAUTION

◇ The minimum bending radius of the STP connection cable is150 mm (see

Figure 16.2, "External Appearance of the STP Control Unit" [Cable Space]).

DO NOT excessively bend the cables and beware of any obstacles when

installing the STP pump.

Also, leave enough space to install other cables without bending them

excessively.

Rack Wall Side

Ventilation Port

5 cm or more 5 cm or more

5 cm or more 15 cm or more

Figure 4.4 Peripheral Space of the STP Control Unit

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4.3 Attaching the STP Control Unit Front Panel to a Rack

The dimensions of the STP control unit front panel conform to J IS. Therefore, this panel

can be attached to any type of commercially-available racks.

Attach the front panel unit to the rack according to the following steps:

1) When attaching the front panel to a rack:

ꢀꢁ Attach the front panel to a rack using the screw holes for the front panel.

ꢀꢁ Also support the STP control unit from the bottom using a support angle or a similar

tool.

2) When attaching the front panel to a movable rack:

ꢀꢁ Attach the front panel to a movable rack using the screw holes for the front panel.

ꢀꢁ To protect the STP control unit during transport, remove the rubber foot from the

bottom and attach the STP control unit to the rack using the screw holes for the

rubber foot.

CAUTION

◇ The STP control unit cannot be supported with only the screws on the front

panel (the STP control unit is a heavy product).

Always support it from the bottom. DO NOT block the ventilation port.

◇ For the peripheral space of the STP control unit, see Figure 4.4, "Peripheral

Space of the STP Control Unit."

NOTICE

◇ For the dimensions of the front panel and positions of screw holes for the rubber

foot, see Figure 16.2, "External Appearance of the STP Control Unit."

part: Secure with screw

Support Angle

Figure 4.5 Example of Securing the STP Control Unit

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4.4 Cable Connection

4.4.1 Name and Dimensions of Each Cable

STP Control Unit Side

STP Pump Side

Ground Terminal (

)

Ground Terminal (

Crimp-Type Terminal Lug (M4^*1)

)

Crimp-Type Terminal Lug (M4^*1)

Yellow / Green Wire

L 20m : 4mm

4.3(L 20m)

≦

6.5(L 20m)

≦

L 20m : 10mm

＞

Unit: mm

24.5

45 Pin (pin)

41 Pin (socket)

5 Pin (pin)

5 Pin (socket)

8 Pin (pin)

Emergency Vent. valve

Figure 4.6 External Dimensions of Each Cable

JIS

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Power Side

STP Control Unit Side

Crimp-Type Terminal Lug (M4 )

2.5mm 3core (brown, blue, yellow/green)

(a) without the Power Plug

Power Side

STP Control Unit Side

Plug type

Crimp-Type Terminal Lug (M4 )

NEMA L6-30

3pin (pin)

72.3

Y(N[L2])

blue

X(L[L1])

brown

2.5mm 3core

G(GND[ ])

yellow/green

(brown, blue, yellow/green)

(b) with the Power Plug^*2

Figure 4.7 External Dimensions of he Power Cable

^*1: JIS

^*2: Recognized model to UL3101-1 standard has power cable with the plug.

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4.4.2 How to Connect the Cables

CAUTION

◇ When connecting/disconnecting cables, always power OFF the STP pump

(switch the breaker "OFF").

Failure to do so may result in electric shock or product damage.

◇ With each connector, align the position of the guide key and insert the pin

vertically so as not to bend it.

If the pin is bent, not only may the connector not function normally, but may the

pin make contact, resulting in a malfunction.

◇ Lock and securely tighten each connector and screw.

◇ DO NOT apply voltage to each pin and DO NOT cause any short-circuiting

between pins.

◇ Connect each cable securely. DO NOT place heavy objects on the cables nor

bend them excessively.

Support each cable so as not to apply direct force to the connectors or terminals.

If any problem occurs in cables, connectors or terminals, the STP pump may not

function normally.

1) Connecting Ground Cable

Connect the ground cable (yellow/green) between the ground terminal of the

STP pump and the ground terminal of the STP control unit.

When the resistance between the ground terminals is lower than 0.1 ꢀ, it is not

necessary to connect the ground cable after installing the STP pump and the

STP control unit.

CAUTION

◇ First, connect the ground cable. Next, connect other cables.

◇ When the resistance between the ground terminals is over 0.1 ꢀ, always

connect the ground cable. Failure to do so may result in electric shock.

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2) Connecting the STP Connection Cable

Connect the socket side of the STP connection cable to the STP connector of the

STP pump and connect the pin side to "P.CONNECTOR CON5A" of the STP

control unit.

CAUTION

◇ Always use the STP pump, STP control unit and the STP connection cables of

the same model name, serial number and cable length. Failure to do so may

result in product damage.

Contact your nearest Seiko Seiki representative if you plan to use units with the

same model name but different serial numbers and cable length; They must

be adjusted. In some cases, the configuration may need more adjustment.

STP-H600/H1000

Use the STP connection cable that has a label affixed

◇

Series

The use of different cables may result in product damage.

3) Connecting the Motor Connection Cable

Connect the socket side of the motor connection cable to the motor connector of

the STP pump and connect the pin side to "INVERTER OUTPUT CON2" of the

STP control unit.

CAUTION

STP-H600/H1000

Use the motor connection cable that has a label affixed

◇

Series

The use of different cables may result in product damage.

4) Connecting the Emergency Vent. Valve Cable

Connect the emergency vent. valve to the purge port of the STP pump and the

connector to "LEAK VALVE CON8A" of the STP control unit (see Section 3.3.5,

"Connecting the Emergency Vent. Valve").

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5) Connecting Primary Power (Primary Side) Cable

Connect power cable to the "AC POWER TB1" on the STP control unit rear

panel as shown in Table 4.1.

Table 4.1 Connecting Primary Power Cable

TB1 Pin No.

1 [L(L1)]

Cable Color

Brown

Remarks

Single phase 200 to 240 V AC M10%

13A (maximum)

2 [N(L2)]

Blue

Both 50/60 Hz

Ground

3 [PE(

)]

Yellow/Green

Secure primary power cable to the STP control unit rear panel using the cable

fitting tool (see Figure 4.7).

CAUTION

◇ Connect the primary power cable securely to prevent incorrect wiring.

◇ DO NOT apply surge voltage exceeding 1 kV to the input power line.

◇ Always ground primary power cable to prevent electric shock.

◇ DO NOT remove the ground cable attached to the terminal block cover.

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Magnified

TB1

TB1 Cover

Ground Cable for Cover

Cable Fitting Tool

Primary Power Cable

part: Secure using attached screws

Figure 4.8 How to Secure Primary Power Cable

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5 How to Start/Stop the STP Pump

CAUTION

◇ NEVER connect or disconnect any cables while the power is ON.

◇ NEVER turn the primary power OFF (switch the breaker "OFF") while the STP

pump is in rotation.

◇ DO NOT release the inlet port flange or outlet port flange into the atmosphere

while the STP pump is in rotation.

5.1 Before Starting

After completing installation, piping, leakage test of the STP pump and installation of the

STP control unit, the STP pump is ready for start.

Check the following items before starting:

1) Are the STP pump and the STP control unit secured according to the appropriate

method?

2) Is the primary power cable connected correctly to the power supply?

3) Is the power voltage selected properly?

4) Do the manufacturing No. and the cable length of the STP pump, the STP control unit

and the STP connection cable match?

5) Are the labels affixed correctly to the STP connection cable and the motor connection

cable?

STP-H600/H1000

Series

6) Are the ground cable, the STP connection cable, the motor connection cable, and the

emergency vent. valve cable securely connected?

Is the connection cable securely connected?

Are each terminal and each connector securely locked?

5.2 Starting/Stopping Time

Starting time:

Approx. 6 minutes after start operation.

Stopping time: Approx. 6 minutes after stop operation.

If the rotational speed does not attain the rated speed within about 15 minutes, the

"FAILURE" lamp lights. Before restarting the STP pump, always check whether or not

there is leakage from the piping or the vacuum equipment and also confirm the capacity and

the START state of the auxiliary pump.

NOTICE

◇ When start/stop operations are frequently performed, the STP pump may

overheat. Avoid doing so.

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5.3 Start Procedures

Start the auxiliary pump before or simultaneously with start of the STP pump.

Open the vacuum valve located at the outlet port flange side after starting the auxiliary

pump.

NOTICE

◇ DO NOT open the vacuum valve without operating the auxiliary pump.

Doing so may cause a reverse flow of oil, which could contaminate the inside of

the STP pump.

5.4 Stop Procedures

Close the vacuum valve located at the outlet port flange side just before or after stopping the

STP pump.

After closing the valve, stop the auxiliary pump.

CAUTION

◇ DO NOT stop the auxiliary pump without closing the vacuum valve. Depending

upon the type of the auxiliary pump, doing so could cause a reverse flow of

atmospheric air into the STP pump, which may result in a malfunction.

NOTICE

◇ DO NOT stop the auxiliary pump without closing the valve.

Doing so may cause a reverse flow of oil, which could contaminate the inside of

the STP pump.

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There are two methods of operating the STP pump: MANUAL and

REMOTE.

Select one which fits your vacuum equipment.

5.5 Manual Operation

Slide the "MANUAL/REMOTE" changeover switch on the rear panel to "MANUAL."

5.5.1 Powering ON

1) Switch ON the breaker on the rear panel (to prevent incorrect operation, a

metal fitting is attached to the breaker. Loosen the screw, lift the metal

fitting and secure it).

2) Press the "POWER ON/OFF" switch (the switch is thoroughly locked down).

The magnetic bearing functions and the rotor levitates (POWER ON state).

The "POWER ON/OFF" switch built-in lamp lights.

5.5.2 Starting the STP Pump

1) Press the "MOTOR START" switch on the front panel after powering ON to

start and accelerate the STP pump.

The "ACCELERATION" lamp lights (ACCELERATION state).

2) When the STP pump attains the rated speed of rotations, the

"ACCELERATION" lamp goes out, and the "NORMAL OPERATION" lamp

lights (NORMAL OPERATION state).

5.5.3 Stopping the STP Pump

1) Press the "MOTOR STOP" switch on the front panel to stop the STP pump.

The STP pump starts to decelerate and stop.

The "NORMAL OPERATION" lamp or the "ACCELERATION" lamp goes out,

and the "BRAKE" lamp lights (BRAKE state)

(when the rotational speed is less than approx. 2000 rpm while the STP pump

is accelerating, the "BRAKE" lamp does not light).

2) The "BRAKE" lamp goes out when the rotational speed slows down to approx.

1000 rpm.

5.5.4 Starting the STP Pump after Stopping

Press the "MOTOR START" switch on the front panel to reaccelerate the STP

pump.

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5.5.5 Powering OFF

1) When all of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE"

lamps are off:

Press the "POWER ON/OFF" switch. The switch pops up into the unlocked

position, the magnetic bearing stops, and the rotor lands (POWER OFF state).

The "POWER ON/OFF" switch built-in lamp goes out.

2) When one of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE"

lamps is lit:

i. Even when the "POWER ON/OFF" switch is OFF, the rotor will not land.

Also, operation of the STP pump remains unchanged.

The "POWER ON/OFF" switch built-in lamp remains lit.

ii. When the STP pump stops under the above state, the magnetic bearing

stops, and the rotor automatically lands at the time the "BRAKE" lamp

goes out.

NOTICE

◇ The brake of the STP pump disengages at approx. 1000 rpm and the "BRAKE"

lamp goes out. The STP pump rotates by inertia even after the "BRAKE" lamp

has gone out.

Powering OFF immediately after the "BRAKE" lamp goes out or while any lamp

of the “ACCELERATION," "NORMAL OPERATION," or "BRAKE" lamp is being

lit causes the touch down bearing to touch the rotor resulting in a noise.

Frequent POWER OFF operations will expedite the wear of the touch down

bearing. It is recommended to power OFF the STP pump after it stops

thoroughly.

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5.6 Remote Operation

Slide the "MANUAL/REMOTE" changeover switch on the STP control unit rear panel to

"REMOTE."

5.6.1 Powering ON

Switch ON the breaker on the STP control unit rear panel,

(to prevent incorrect operation, a metal fitting is attached to the breaker. Loosen

the screw, lift the metal fitting and secure it ).

The magnetic bearing functions and the rotor levitates (POWER ON state).

The "POWER ON/OFF" switch built-in lamp lights.

5.6.2 Starting/Stopping the STP Pump

There are three methods of starting/stopping the STP pump. Use one of them.

Table 5.1 Starting/Stopping the STP Pump During Remote Operation

Terminal

Method

Starting the Pump

Stopping the Pump

Block

TB5

1) Short the circuit between (3) - Open the circuit

(2) (STOP IN).

between (3) - (2) (STOP

2) Short the circuit between (2) - IN).

(1) (START IN) for 0.3 seconds

or more.

However, when inputting the

signal simultaneously with

switching ON the breaker on

the rear panel, continue to

short the circuit for 5 seconds

or more.

TB5

TB6

Short the circuit between (1) - (3)

(START/STOP IN).

Open the circuit

between (3) - (1)

(START/STOP IN).

Input 25 to 250 V AC or 24 to 48 V Open the circuit

DC between (2) - (1) (START/STOP between (2) - (1)

IN).

(START/STOP IN).

With DC, the (+) side can be

connected to either (2) or (1).

5.6.3 Starting the STP Pump After Stopping

Perform the rotation procedures to reaccelerate the STP pump. See Section 5.6.2,

"Starting/Stopping the STP Pump."

The STP pump can be reaccelerated even while the STP pump is stopping.

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5.6.4 Powering OFF

When all three ("ACCELERATION", "NORMAL OPERATION" and "BRAKE")

lamps are off, switch the breaker OFF on the rear panel.

The magnetic bearing stops, and the rotor lands.

The POWER ON/OFF switch built-in lamp goes out.

CAUTION

◇ NEVER switch OFF the breaker on the rear panel while any of the

"ACCELERATION," "NORMAL OPERATION" and "BRAKE" lamps is being lit.

If doing so under the above condition, the STP pump may react as if there was a

power failure.

NOTICE

◇ The brake of the STP pump disengages at approx. 1000 rpm and the "BRAKE"

lamp goes out. The STP pump rotates by inertia even after the "BRAKE" lamp

has gone out.

Powering OFF immediately after the "BRAKE" lamp goes out causes the touch

down bearing to touch the rotor resulting in a noise.

Frequent POWER OFF operations may expedite the wear of the touch down

bearing. It is recommended to power OFF the STP pump after it stops

thoroughly.

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6 Safety Functions When an Abnormality/Error Occurs

The STP pump is provided with safety functions for various abnormalities/errors (See Tables

6.3 and 6.4, "Safety Functions").

For troubleshooting, see Section 6.2, "Restarting After Any Safely Function Operates" and

Section 15, "Troubleshooting."

6.1 Safety Functions

6.1.1 Power Failure

When power voltage drops below 170 V due to a power failure, internal battery of

the STP control unit automatically activate to supply power to the STP pump in

order to maintain normal function of the magnetic bearing (backup operation

during a power failure).

1) The STP control unit detects any power failure of 2 seconds or more and

automatically switches to the BATTERY OPERATION mode and the STP

pump decelerates. Gases are introduced from the emergency vent. valve at

approx. 7000 rpm and the rotor lands on the touch down bearing and stops at

approx. 2000 rpm.

In the BATTERY OPERATION mode, the "BATTERY OPERATION" lamp and

the "EMERGENCY OPERATION" lamp light, and an alarm signal is output

–

from I/O TB2 ALARM OUT terminals (10) (9), (10) (11) regardless of

MANUAL or REMOTE OPERATION mode.

When the rotor lands on the touch down bearing, the "BATTERY

OPERATION" lamp and the "EMERGENCY OPERATION" lamp go out, and

the alarm output is reset.

2) In case of a power failure of less than 2 seconds, the STP control unit does not

detect it and the STP pump continues rotating.

6-1

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STP-H600/H1000 Series Instruction Manual

1) MANUAL Operation

The STP pump continues decelerating even after a power recovery.

Press the "START" switch to reaccelerate the STP pump.

2) REMOTE Operation

Sꢀ When the START signal is input to the REMOTE input terminal at a

power recovery to reaccelerate the STP pump.

Sꢀ When the START signal is not input to the REMOTE input terminal after

the power recovery, the STP pump continues the BRAKE operation.

NOTICE

◇ Establish a sequence so that power can be supplied to the STP control unit

immediately after a power recovery.

Table 6.1 shows the states of lamps and the REMOTE output signal at a power

failure.

Also, Table 6.2 shows operations of the STP pump after a power recovery.

Table 6.1 State of Lamps and REMOTE Output Signal at Power Failure

REMOTE output

LED lamps

signal (I/O TB2)

Rotational speed

Power failure time

“BATTERY OPERATION”

“EMERGENCY

OPERATION”

Lights

(rpm)

Power ON ALARM

signal

Less than 2000

2000 or less

Approx. 2 sec. or more

Less than approx. 2 sec.

Goes out

OFF

Does not detect power failure.

Table 6.2 Operation of the STP Pump after Power Recovery

MANUAL operation

REMOTE operation

STP pump operation “START” REMOTE

after power recovery signal input after

power recovery

STP pump operation

after power recovery

Power failure time

Yes

Reacceleration

Deceleration/Stop

Approx. 2 sec. or more Deceleration/Stop

Less than approx. 2 sec.

Continues as before.

6-2

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STP-H600/H1000 Series Instruction Manual

6.1.2 Abnormal State of Magnetic Bearing

When the magnetic bearing does not function normally due to a breakage of the

STP connection cable, disconnection of connectors or any abnormality/error of the

STP control circuit, the rotor falls on the touch down bearing.

Simultaneously, the emergency vent. valve is opened to introduce gases and the

STP pump stops, and the "EMERGENCY OPERATION" lamp lights.

CAUTION

◇ When an abnormality/error occurs in the magnetic bearing, check the STP

pump as well as the STP control unit, and contact Seiko Seiki.

6.1.3 Excessive Vibration

When serious vibration or mechanical shock causes the rotor to touch the touch

down bearing (due to external vibration/impact, intrusion of atmosphere or foreign

materials into the STP pump or rotor imbalance), the emergency vent. valve is

opened to introduce gases, the STP pump stops, and the "EMERGENCY

OPERATION" lamp lights.

6.1.4 Inverter Overload

When the STP pump does not attain the rated speed within about 15 minutes after

starting or when the ACCELERATION state remains unchanged during operation

for about 15 minutes, the inverter stops and the STP pump continues rotating by

inertia.

The "FAILURE" lamp lights.

6.1.5 Overheating Inside the STP pump

When the temperature of the motor inside the STP pump exceeds 110 ℃ due to an

abnormal baking temperature or overload operation, the STP pump enters the

STOP operation.

The "OVER TEMPERATURE" lamp and the "FAILURE" lamp light.

6.1.6 Overheating Inside the STP Control Unit

When the temperature inside the STP control unit (at the heat sink) exceeds 90 ℃

due to a failure in the air cooling fan, external heat source, etc., the STP pump

enters the STOP operation.

The "FAILURE" lamp lights.

6.1.7 Overspeed

When the rotational speed of the STP pump exceeds 37,500 rpm due to a failure in

the inverter, the STP pump enters the STOP operation.

The "FAILURE" lamp lights.

6-3

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6.1.8 Abnormal Battery Voltage

When battery capacity became less than operating limit value or there was

connection mistake, there may be the thing that battery abnormality is detected.

When battery abnormality was detected, the STP pump does not operate even if the

STP pump START operation is performed.

The "FAILURE" lamp lights

(Both the "EMERGENCY OPERATION" lamp and the "BATTERY NG" lamp inside

the STP control unit front panel may light).

When battery voltage became less than DC21V, battery abnormal detection

operates.

However, when capacity of battery is less than operating limit value largely, there

may be the thing that battery abnormal detection does not operate.

CAUTION

◇ NEVER disconnect the internal or external battery connection cable while the

STP pump is under POWER ON state.

NOTICE

◇ When the "BATTERY NG" lamp inside the STP pump front panel comes on,

"FAILURE" and "EMERGENCY OPERATION" lamps also come on.

When the power is turned on again, the "FAILURE" lamp goes out, while the

"BATTERY NG" and “EMERGENCY OPERATION" lamps still remain lit.

6.1.9 Failure of Brake

If the brake is broken, the emergency vent. valve is opened to force the STP pump to

stop.

6-4

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STP-H600/H1000 Series Instruction Manual

6.2 Restarting after Any Safety Function Operates

1) In case of a power failure:

Establish a sequence so that power can be supplied to the STP control unit immediately

after a power recovery.

2) In case the "FAILURE" lamp lights due to an overload of the inverter

(the STP pump continues rotating by inertia: [FREE RUN state]):

(1) Press the "MOTOR STOP" switch. The "FAILURE" lamp goes out and the FREE RUN

state is reset.

(2) Press the "MOTOR START" switch and press the "MOTOR STOP" switch again. The

brake functions and the STP pump decelerates.

(3) After the STP pump stops thoroughly (the "BRAKE" lamp goes out: the needle of the

tachometer is in the red), turn "OFF" the "POWER ON/OFF" switch, switch the breaker

"OFF," and remove probable causes of the abnormality/error.

(4) Restart the STP pump and check if it operates correctly.

(1) Slide the "MANUAL/REMOTE" changeover switch on the rear panel to “MANUAL.”

(2) Press the "MOTOR STOP" switch. The "FAILURE" lamp goes out and the FREE RUN

state is reset.

(3) Press the "MOTOR START" switch and press the "MOTOR STOP" switch again. The

brake functions and the STP pump decelerates.

(4) After the STP pump stops thoroughly (the "BRAKE" lamp goes out: the needle of the

tachometer is in the red) , switch the breaker "OFF," and remove probable causes of the

abnormality/error.

(5) Restart the STP pump and check if it operates correctly.

(1) Check the tachometer on the front panel.

(2) If the needle is in the red, it means the STP pump has stopped.

Power OFF and switch the breaker "OFF."

(3) If the needle is in the black, the STP pump is rotating.

Wait for it to enter the red. Then, power OFF and switch the breaker "OFF."

(4) Restart the STP pump and check if operates correctly.

CAUTION

◇ DO NOT power OFF and switch the breaker OFF until the needle is in the red.

NOTICE

◇ If the FREE RUN state cannot be reset, it takes about 8 to 10 hours to stop the

STP pump (the needle is in the red) because it rotates by inertia.

To stop the STP pump quickly, close the vacuum valve at the outlet port flange

and introduce gas from the purge port into the STP pump.

6-5

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3) Other Cases

After the STP pump stops thoroughly, power OFF, switch the breaker "OFF" and

remove the cause of the abnormality/error. Then, restart the STP pump and check if it

operates correctly.

NOTICE

◇ For probable causes and troubleshooting, See Section 15, "Troubleshooting."

6-6

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STP-H600/H1000 Series Instruction Manual

6.3 Operation of the Emergency Vent. Valve

The emergency vent. valve is opened immediately after an abnormality/error in the

magnetic bearing, excessive vibration or any other abnormality/error is found. Gases (dry

N₂gases or other) are introduced through the emergency vent. valve into the STP pump.

Attach the emergency vent. valve taking care of the following NOTICE:

NOTICE

◇ It is recommended to introduce dry N₂gases to prevent the STP pump and

vacuum equipment from getting contaminated.

◇ The allowable gas pressure ranges from zero [atmospheric pressure] to

4.9x10⁴Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm²[gauge

pressure]).

◇ The rotor comes into contact with the touch down bearing, with the emergency

vent. valve opened. This may damage the rotor or the touch down bearing.

To stop the STP pump in a very short time, design an appropriate vacuum

exhaust system that closes the vacuum valve at the outlet port flange when the

emergency vent. valve is opened.

This prevents the rotor and the touch down bearing from being damaged.

◇ The state of the emergency vent. valve can be checked using "DC I/O TB3 L.

VALVE N. O. OUT Terminal (9)-(10)."

6-7

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STP-H600/H1000 Series Instruction Manual

Table 6.3 Safety Functions

[E.V. used herein is the abbreviation for Emergency Vent.]

Abnormality

/Error

Operation state of safety

functions

REMOTE

output signal

Probable causes of an

abnormality/error

Lamp indication

State of the STP pump

Power failure Failure time: 2 seconds or

more (for details, refer to

Section 6.1.1, "Power

"BATTERY

"ALARM"

"E.V. valve The STP pump stops.

OPEN

signal"

Levitation continues by battery.

Power failure.

Power cable breakage.

Power cable disconnection

OPERATION"

"EMERGENCY

OPERATION"

The E.V. valve functions at

approx. 7000 rpm.

Failure").

The rotor lands on the touch down

bearing at approx. 2000 rpm.

Abnormal

magnetic

bearing

Rotor descends onto the

touch down bearing.

"EMERGENCY

OPERATION"

"ALARM"

"E.V. valve The STP pump stops.

OPEN

The E.V. valve is opened.

STP connection cable breakage.

STP connection cable

disconnection.

signal"

Abnormal control circuit.

Excessive

vibration

Rotor vibration:

"EMERGENCY

OPERATION"

"ALARM"

"E.V. valve The STP pump stops.

OPEN

The E.V. valve is opened.

External vibration, and impact.

Intrusion of atmospheric air.

Intrusion of foreign materials.

100 m p-p or more.

signal"

Overload of

inverter

Current of more than 40A

flows into the inverter

momentarily or current of

more than 11.5A flows into

the inverter continuously

for 15 minutes.

"FAILURE"

"ALARM"

The inverter stops.

The STP pump continues to rotate equipment or piping.

by inertia.

Leakage from the vacuum

Insufficient pressure at inlet

and outlet port sides.

Failure of starting of the

auxiliary pump.

6-8

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Abnormality

/Error

Operation state of safety

functions

REMOTE

output signal

Probable causes of an

abnormality/error

Lamp indication

State of the STP pump

The STP pump stops.

Overheating Temperature of the STP

inside the

STP pump

"OVER

TEMPERATURE"

"FAILURE"

"ALARM"

Abnormal baking temperature.

Insufficient cooling.

Leakage of vacuum equipment

or piping.

pump motor: 110 ℃ or

Continuous repetition of

startup/shutdown.

Extraordinarily-high

temperature.

Overheating

inside the

STP control

unit

"FAILURE"

"ALARM" The STP pump stops.

Failure in the cooling fan.

Shielding of cooling air inlet

and ventilation port.

Extraordinarily-high

temperature

90℃ or more in the STP

control unit and heat sink.

Rotational speed of the STP

pump:37,500 rpm or more.

Overspeed

"ALARM" The STP pump stops.

Failure in the inverter.

Abnormal

battery

terminal

voltage

Battery terminal voltage:

42 V or lower^*1

"FAILURE" ^*2

"ALARM" The STP pump does not start.

Incorrect connection of the

battery.

Battery capacity became less

than operating limit value.

("EMERGENCY

OPERATION" or

"BATTERY NG"

lamp may light)

^*1: When capacity of battery is less than operating limit value largely, there may be the thing that battery abnormal detection does not operate.

^*2: When the power is turned on again, this lamp goes out.

6-9

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STP-H600/H1000 Series Instruction Manual

7 Gas Suction, Cooling and Baking the STP Pump

7.1 Gas Suction

WARNING

◇ When sucking gases, they may remain in the STP pump. Introduce a purge

gas and then exhaust all gasses.

Residual gases in the STP pump may cause an accident when the STP pump is

removed.

Confirm the characteristics of gases to be used, referring to the Material Safety

Data Sheet (MSDS) you obtain from the gas supplier.

CAUTION

◇ Chlorine or fluorine system gases can be used in the chemical specific STP-

H600C/H1000C (type C). When you use gases including alkaline metals, but

excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-H600/STP-H1000 pump or other models without anti-corrosion treatment.

◇ Cool the STP pump to within the operating pressure range to prevent the STP

pump from overheating when sucking gases.

7.1.1 How to Introduce a Purge Gas

When sucking reactive or corrosive gases, introduce a purge gas to protect the

inside of the STP pump.

1) Connect a needle valve or a similar part to the purge port and introduce a dry

N₂gas or other gas to perform a gas purge (See Section 3.3.6, "Connecting the

Purge Port").

2) The proper amount of the gas purge is approx. 3.4×10 ^-2Pa·m³/s (20SCCM).

The allowable gas pressure ranges from zero [atmospheric pressure] to

4.9x10⁴Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm²[gauge

pressure]).

NOTICE

◇ When not using the purge port, always mount the blank flange (attached at

delivery).

◇ High-pressure at the inlet port may result in a noise. This is no

abnormality/error.

7-1

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STP-H600/H1000 Series Instruction Manual

7.2 Cooling the STP Pump

There are two methods for cooling: Water cooling and Air cooling.

When sucking gases, cool the STP pump in accordance with the operating pressure range.

Also, when performing baking, always cool the STP pump.

Select the best one which fits your vacuum equipment.

7.2.1 Water Cooling Method

1) Connect the cooling water pipe to the cooling water port in accordance with

Figure 7.1.

2) The female screw PT^*1(RC)1/4 is used in the cooling water port (see Figure 16.1,

"External Appearance of the STP Pump").

3) Use connection hose of ID (internal diameter) 8 mm, and secure it to prevent

water leakage.

4) Use cooling water under the following conditions:

Amount of water: 2 L/min

Temperature:

Water pressure:

5 to 25 ℃

2.9×10⁵Pa (3kgf/cm²) or lower

NOTICE

◇ Use clean water as much as possible.

Cooling water containing foreign materials may corrode or clog the cooling water

pipe.

When the cooling system is clogged with foreign materials, clogs may possibly

be removed by feeding cooling water reversely.

◇ When the STP pump is overheated due to shortage or suspension of water, the

protective function detects the overheated condition in the STP pump and stops

the STP pump.

As a further safety procedure, attach a flow switch to the cooling water exit so

that the STP pump stops if abnormal cooling water flow occurs (a flow switch is

available on the market).

◇ When the STP pump is not to be used for a long period of time or it is to be

moved after use, introduce compressed air from one side of the inlet/outlet port

so that no water will remain inside.

◇ The joint for water cooling unit is made of brass. To prevent corrosion, connect

the brass joint.

*¹: JIS

7-2

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7.2.2 Air Cooling Method

When water cooling is not available, an air cooling unit (optional accessory) can be

used. Follow the steps below:

1) Remove the water cooling unit (it is attached with the four M8^*1screws).

2) Attach the air cooling unit using screw holes for the water cooling unit.

CAUTION

◇ Check the rated voltage of the air cooling unit before use.

◇ Purchase a breaker or fuses for the air cooling unit (remote terminal block TB2

incorporates fuses).

◇ When connecting the power for the air cooling unit (over 25 V AC) to the

remote terminal block, secure the cable using the attached cable fitting tool.

DO NOT apply excessive force to the cable for the air cooling unit.

Follow the steps below to run the STP pump associated with the air cooling unit

(read through Section 8, "Remote Input/Output Signal Terminal Blocks," then

operate them).

1) Connect the power cable of the air cooling unit between “I/O TB2 FAN OUT

Terminal (5) - (6)."

2) Input the power supply of the air cooling unit between “I/O TB2 AC. POWER

IN Terminal (19) - (20)."

3) The air cooling unit functions under the "ACCELERATION" or "NORMAL

OPERATION" state.

4) The air cooling unit also stops when the STP pump stops.

JIS

7-3

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7.3 Baking the STP Pump

To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum

equipment and STP pump.

WARNING

◇ The surfaces of the STP pump and its peripheral equipment will become

extremely hot when performing baking. NEVER touch them with bare hands.

CAUTION

◇ When baking the STP pump, always cool it to prevent overheating (for the

cooling method, see Section 7.2, "Cooling the STP Pump").

◇ Start baking after cooling is started.

Set the temperature of the baking heater to 120 ℃ or lower (an optional baking

heater is set to 110 ℃ or lower).

◇ DO NOT suck gases during baking to prevent overheating.

NOTICE

◇ To exhaust the gas discharged from the vacuum equipment and the inner wall of

the STP pump, run the STP pump during baking.

7.3.1 Attaching a Baking Heater

1) Attach a baking heater (optional accessory) as near as possible to the inlet port

flange.

2) Affix the "Hot Surface Warning Label" to the surface of the STP pump so that

the operator can see it clearly at any time.

CAUTION

◇ Check the rated voltage of the baking heater before use.

◇ Wind the baking heater around the surface of the STP pump tightly.

If the baking heater is not wound tightly, the loose parts will overheat.

◇ Procure protective parts for the baking heater, such as a residual current

operated circuit breaker and fuses when using the baking heater (remote

terminal block TB2 incorporates fuses).

◇ DO NOT apply excessive force to the cable for the baking heater.

7-4

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・警告

WARNING

・

Hot surface

Can burn hands

Do not touch

高温部

やけどします。

触らないでく

ださい。

This label is attached

to the baking heater

Baking Heater

(Optional Accessory)

Cooling Water Port

Water Cooling Unit

(Standard Accessory):

Used when water cooled

Air Cooling Unit

(Optional Accessory):

Used when air cooled

Table 7.1 Attaching Positions of the Cooling Unit and Baking Heater

7-5

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7.3.2 Interlocking the STP Pump Operation with Baking

Follow the steps below to interlock the STP pump operation with baking (read

through Section 8, " Remote Input/Output Signal Terminal Blocks," then start

operation).

CAUTION

◇ Check the rated voltage of the baking heater before use.

◇ Always turn OFF the power to the remote terminal block from equipment, before

connecting/disconnecting the remote wire to the remote terminal block.

Failure to do so may result in electric shock.

◇ When connecting the power for the baking heater (over 25 V AC) to the remote

terminal block, secure the cable using the attached cable fitting tool.

DO NOT apply excessive force to the cable for the baking heater.

1) MANUAL OPERATION (See Section 8.1, "I/O TB2 Terminal Block.")

(1) Connect the power cable of the baking heater between "I/O TB2 HEATER

OUT Terminals (1) - (2)."

(2) Input the power supply of the baking heater between "I/O TB2 AC.

POWER IN Terminals (19) - (20)."

(3) Press the HEATING ON/OFF switch (an alternate type) under the

NORMAL OPERATION state (the HEATING ON/OFF switch built-in

green lamp lights. The heater is "ON" while the lamp is being lit).

(4) Press the HEATING ON/OFF switch under any state other than the

NORMAL OPERATION. The HEATING ON/OFF switch built-in green

lamp lights and the baking heater functions under the NORMAL

OPERATION state.

2) REMOTE OPERATION (See Sections 8.1 and 8.2, "I/O TB2 Terminal Block"

and "DC I/O TB3 Terminal Block.")

(1) Perform the same steps (i, ii) as for the MANUAL OPERATION.

(2) Short the circuit between "I/O TB3 HEATING Terminals (2) – (4)" (the

HEATING ON/OFF switch built-in green lamp lights. The heater is "ON"

while the lamp is being lit).

(3) Short the circuit between "I/O TB3 HEATING Terminals (2) – (4)" under

any state other than the NORMAL OPERATION state.

(4) The HEATING ON/OFF switch built-in green lamp lights and the baking

heater functions under the NORMAL OPERATION state.

NOTICE

◇ The baking heater functions only while the STP pump is under the NORMAL

OPERATION state.

7-6

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8 Remote Input/Output Signal Terminal Blocks

8.1 I/O TB2 Terminal Block

This is a terminal block for a remote output signal. Use it in accordance with Table 8.1 and

Figure 8.1. The terminal block functions in both the MANUAL and REMOTE operations.

The screw for the terminal is M3^*1

Five abbreviations are used in the following tables:

N.O :Normal Open N.C :Normal Close

COM :Common

:Input Terminal OUT : Output Terminal

:Hot N1: Neutral (or Grounded Supply)

CAUTION

◇ Always turn OFF the power to the remote terminal block from equipment, before

connecting/disconnecting the remote wire to the remote terminal block.

Failure to do so may result in electric shock.

◇ When connecting optional power (over 25 V AC or over 60 V DC) to terminals

(1) to (6), (19) and (20), secure the remote cable using the attached cable fitting

tool (see Figure 8.3).

DO NOT apply excessive force to the remote cable.

Table 8.1 I/O TB2 Terminal Block

Terminal

Description

Terminal for inputting power for driving the baking heater,

auxiliary pump and air cooling unit. The voltage input to

this terminal is output to the specified terminal block through

operation of the STP pump.

(20) AC.POWER (19)

Connect hot to terminal (19)[L1].

Connect neutral (or grounded supply) to terminal (20)[N2].

Terminal for connecting the baking heater.

In either case of the following two types of operation under

the NORMAL OPERATION state, voltage input to the AC

power terminal ((19)-(20)) is output to this terminal.

1) Turn ON the HEATING switch on the front panel

through MANUAL Operation.

(2)

HEATER

N.O OUT

(1)

2) Short the circuit between I/O TB3 HEATING terminal

(2)-(4) through REMOTE Operation (See Section 7.3.2,

"Interlocking the STP Pump Operation with Baking").

Terminal for starting the auxiliary pump.

The voltage input to the AC. POWER terminal ((19)-(20)) is

output to this terminal through the STP pump rotation. DO

NOT connect the auxiliary pump directly.

Use separate power and a relay.

Use another power and a relay. See Figure 8.2.

(4)

R.PUMP

N.O OUT

(3)

◇ If the I/O TB3 ((1)-(3)) is opened, it is

diagnosed as abnormal auxiliary

pump, the "FAILURE" lamp lights and

the power is cut OFF.

NOTICE

JIS

8-1

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Terminal

FAN

Description

Terminal for connecting the air cooling unit.

The voltage input to AC. POWER terminal ((19)-(20)) is

output to this terminal when the STP pump is in acceleration

or rated operation.

The voltage is cut OFF when the STP pump is under the

BRAKE state (See Section 7.2.2, “Air Cooling Method").

(6)

(8)

(5)

(7)

N.O OUT

Terminal for outputting the POWER ON state signal.

This terminal is closed when the magnetic bearing functions

and the rotor levitates.

POWER

N.O OUT

Terminal for outputting the ALARM signal.

When an abnormality/error is detected under the POWER ON

state, the terminal between (10)-(9) is closed, and the

terminal between (10)-(11) is opened.

(10) ALARM OUT (9)

COM

(12)

N.O

N.C

(11)

Terminal for outputting the BRAKE state signal.

This terminal is closed when the STP pump is in brake.

(14)

Terminal for outputting the NORMAL OPERATION state

signal.

When the STP pump is in rated operation, the terminal

between (16)-(13) is closed, and the terminal between (16)-

(15) is opened.

NORM OUT (13)

N.O

COM N.C

(15)

(16)

(18)

Terminal for outputting the ACCELERATION state signal.

This terminal is closed when the STP pump is in acceleration.

POWER

N.O OUT

(17)

8-2

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N.O

N.C

:Normal Open

:Normal Close

:Common

I/O TB2 :

Remote Output Signal Terminal Block

COM

AC POWER

Power input terminals for

baking heater, auxiliary pump

and air cooling unit

Fuse F5 250 V AC 10A

Fuse F7

250 V AC 10A

HEATER

Terminal for connecting the

baking heater

CR1

Fuse F6

250 V AC 10A

N O OUT

R PUMP

Terminal for the auxiliary pump

Terminal for the air cooling unit

CR2

CR3

CR4

N O OUT

FAN

N O OUT

POWER

POWER ON state

signal output terminal

N O OUT

NO OUT

CR5

ALARM state

signal output terminal

ALARM OUT COM

NC OUT

BRAKE

NO OUT

BRAKE state

signal output terminal

CR10

NO OUT

CR6

NORMAL OPERATION state

signal output terminal

NORM OUT COM

NC OUT

ACC

ACCELERATION state

signal output terminal

CR7

NO OUT

Figure 8.1 I/O TB2 Remote Output Signal Terminal Block

8-3

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Table 8.2 shows rated contacts for relays CR1 to 4, CR7, and CR10 (See Figure 8.1) and CR8

(See Figure 8.4).

Table 8.2 Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10

Induction Load

Resistance Load

(cos φ=0.4)

(cos φ=1)

(L/R=7 ms)

250 V AC 10 A

30 V DC 10 A

250 V AC 5A

30 V DC 5A

Rated Load

Rated Current

Maximum Contact Point

Voltage

10 A

380 V AC

125 V DC

Maximum Contact Point

Current

10 A

Maximum Open/Close

Capacity

AC: 2500 VA

DC: 300 W

AC: 1250 VA

DC: 220 W

Minimum

Applicable Load

5 V DC 10 mA

Table 8.3 shows rated contacts for relays CR5 and 6 (see Figure 8.1).

Table 8.3 Rated Contacts for Relays CR5 and 6

Induction Load

(cos φ=0.4)

(L/R=7 ms)

Resistance Load

(cos φ=1)

250 V AC 10 A

30 V DC 10 A

250 V AC 7.5 A

30 V DC 5A

Rated Load

Rated Current

Maximum Contact Point

Voltage

10 A

380 V AC

125 V DC

Maximum Contact Point

Current

10 A

Maximum Open/Close

Capacity

AC: 2500 VA

DC: 300 W

AC: 1875 VA

DC: 150 W

Minimum

Applicable Load

5 V DC 100 mA

8-4

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STP-H600/H1000 Series Instruction Manual

AC Power

Relay

R.PUMP

NO.OUT

R.P

R.P : Auxiliary Pump

Figure 8.2 Example of Connecting I/O TB2 R. Pump Terminal

CAUTION

◇ When connecting optional power (over 25 V AC or over 60 V DC) to terminals

(1) to (6), (19) and (20), secure the remote cable using the attached cable fitting

tool (see Figure 8.3).

DO NOT apply excessive force to the remote cable.

◇ DO NOT disconnect the ground cable for the metallic terminal block cover.

Cable Fitting Tool

Magnified

Metallic Terminal Block Cover

Ground Cable for Cover

Remote Cable

Figure 8.3 Example of Securing the Remote Cable

8-5

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8.2 DC I/O TB3 Terminal Block

This is a terminal block for a remote input/output signal. Use it in accordance with Table

8.4 and Figure 8.4. Terminals excluding the HEATING terminal function in either case of

the REMOTE/MANUAL operation.

The screw for the terminal is M3^*1.

Four abbreviations are used in the following tables:

N.O :Normal Open

N.C :Normal Close

:Input Terminal OUT :Output Terminal.

Table 8.4 DC I/O TB3 Terminal Block

Terminal

Description

Terminal for connecting the thermal switch to protect the

auxiliary pump.

When the normal close type thermal switch for protecting

the auxiliary pump is connected between this terminal,

short the circuit between I/O TB2 R.PUMP terminal (3)-(4)

and stop the auxiliary pump.

The "FAILURE" lamp lights.

When this function is not used, short the circuit between (3)-

(4) (shorted at delivery).

(1)

(3)

Terminal for baking heater remote control.

When the circuit between this terminal is shorted through

the "REMOTE" operation, the voltage for the baking heater

is output between I/O TB2 HEATER terminal (1)-(2) during

rated operation.

(2)

(4)

Terminal for inputting the rotation INHIBIT signal. When

the terminal is set to open, the STP pump does not rotate

despite the STP pump operation.

And only the auxiliary pump start voltage is output to I/O

TB2 R.PUMP terminal ((3)-(4)).

(5)

(7)

When this function is not used, short the circuit between (5)-

(7) (shorted at delivery).

Terminal for the emergency vent. valve operation signal.

This terminal is closed while the emergency vent. valve is

opened.

(10) L.VALVE

N.O OUT

(9)

Ground

(6)

(8)

Not-used

JIS

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N.O : Normal Open

N.C : Normal Close

IN : Input Terminal

OUT : Output Terminal

DC I/O TB3 :

Remote Input Signal Terminal Block

+12V

1 k

R.P.THER

N.C IN

Auxiliary pump

thermal switch

input terminal

INHIBIT

N.C IN

Rotation inhibit signal

input terminal

HEATING

N.O IN

Baking heater control

signal input terminal

L..VALVE

N.O OUT

Emergency vent. valve

open signal output terminal

ＣＲ８

Ground terminal

Unused terminal

NOTICE

◇ Short the circuit between (1)-(3), when the R.P.THER terminal is not used.

◇ Short the circuit between (5)-(7), when the INHIBIT terminal is not used.

◇ See Table 8.2 for the contact ratings of relay CR8.

Figure 8.4 DC I/O TB3 Remote Input Signal Terminal Block

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8.3 START STOP TB5 Terminal Block

This is a terminal block for a contact type remote input signal. Use it in accordance with

Table 8.5 and Figure 8.5 (See Section 5.6.2, "Starting/Stopping the STP Pump").

The terminal block operates only during the REMOTE operation.

The screw for the terminal is M4^*1

Three abbreviations are used in the following tables:

N.O :Normal Open N.C :Normal Close

IN :Input Terminal

Table 8.5 START STOP TB5 Terminal Block

Terminal

Description

Terminal for the START signal input terminal. The

following two methods are available:

1) Short the circuit between terminals ((2)-(3)) for 0.3

(1)

(2)

seconds or more. When this signal is input

simultaneously with switching ON the breaker on the

rear panel, short the circuit for 5 seconds or more.

2) Short the circuit between terminals ((1)-(3)).

In this case, terminal (2) is not used.

N.O

START IN

Terminal for the STOP signal input terminal.

The STOP signal has priority for the START signal.

During the START operation input from terminal

(2)

(3)

(1)-(2) of the START/STOP TB6 terminal block, the STP

pump does not stop.

N.C

In case of above 1):

Rotation will stop when the circuit between this

terminal is opened.

STOP IN

In case of above 2):

Rotation will stop when the circuit between terminal

(1)-(3) is opened.

START STOP TB5 Remote Input Signal Terminal Block

N.O :Normal Open

N.C :Normal Close

IN :Input Terminal

Contact Type START/STOP Input Terminal

+12V

CR9

In case of 2) in Table 8.5

In case of 1) in Table 8.5

START Signal

N.O START IN

Input Terminal

STOP Signal

Input Terminal

N.C STOP IN

Figure 8.5 START STOP TB5 Remote Input Signal Terminal Block

JIS

8-8

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8.4 START/STOP TB6 Terminal Block

This is a terminal block for a voltage type remote input signal.

Use it in accordance with Table 8.6 and Figure 8.6 (See Section 5.6.2, “Starting/Stopping the

STP Pump").

The terminal block operates only during REMOTE operation.

The screw for the terminal is M4^*1

CAUTION

◇ When connecting optional power (over 25 V AC) to terminals (1) or (2), secure

the remote cable using the attached cable fitting tool (See Figure 8.3).

DO NOT apply excessive force to the remote cable.

◇ DO NOT disconnect the ground cable for the terminal block cover.

Table 8.6 START/STOP TB6 Terminal Block

Terminal

Description

Terminal for the voltage type START/STOP signal terminal.

When the voltage of 25 to 250 V AC or 24 to 48 V DC is

applied between these terminals, the STP pump starts.

When the circuit between these terminal is opened, the STP

pump stops.

(1)

(2)

In case of DC input, the STP pump can start to rotate by

connecting the plus (+) side either to (1) or (2).

START/STOP IN

START/STOP TB6 Remote Input Signal Terminal Block

Voltage Type START/STOP Input Terminal

0.1

120

μＦ

Equivalent Resistance

40 k

Fuse

F11 250V AC 0.1A

START/STOP IN

START/STOP Signal 25 - 250 V AC

Input Terminal 24 - 48 V DC

F12 250V AC 0.1A

Figure 8.6 START/STOP TB6 Remote Input Signal Terminal Block

JIS

8-9

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STP-H600/H1000 Series Instruction Manual

9 Internal Battery

Four batteries (PORTALAC Series Small-Sized Sealed Lead-Acid Batteries, PE12V 2WS :

12V, 2Ah, manufactured by J apan Storage Battery Co., Ltd.) (hereinafter referred to as the

internal battery) are inserted into the STP pump for backup during a power failure. These

are rechargeable. During a power failure, power is supplied from the batteries, and

levitation by a magnetic bearing continues for 6 minutes while the pump is decelerating and

the rotor is landing.

Fully-charged batteries are capable of consecutively backing up the operation of the STP

pump twice.

CAUTION

◇ Do not use unspecified battery.

If you use unspecified battery, contact Seiko Seiki before use.

9.1 Life of the Internal Battery

The life of the internal battery is affected by ambient temperatures.

Pay attention to ambient temperatures (the operating ambient temperatures range from 0 to

40 LC).

Figure 9.1 shows the relationship between the ambient temperatures and the battery life.

CAUTION

◇ Replace the battery approx. once a year to make sure it is always ready to back

up the operation of the STP pump.

For instructions on how to replace the battery, see Section 9.5, "How to Replace

the Internal Battery."

9.2 Allowable Shelf Life of the Internal Battery

When the internal battery is left uncharged, its capacity will be reduced by self-discharge.

The allowable shell life of the internal battery is affected by ambient temperatures. Pay

attention to its storage temperatures (the storage temperatures range from - 20 to + 40 LC).

Figure 9.2 shows the relationship between storage temperatures and the allowable shelf life

of the internal battery.

CAUTION

◇ When the STP pump is left unused over the specified period, charge the internal

battery for 90 minutes or more, or replace it with a new one before starting the

STP pump. For instructions on how to recharge the internal battery, see

Section 9.3, "How to Charge the Internal Battery." For instructions on how to

replace the internal battery, See Section 9.5, "How to Replace the Internal

Battery."

9-1

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0.5

２

30 40

Ambient Temperatures(

)

℃

)

℃

Figure 9.1 Life of the Internal Battery

Figure 9.2 Allowable Shelf Life of the Internal

Battery

9.3 How to Charge the Internal Battery

The battery is charged while the power is "ON," regardless of the operation state of the STP

pump.

After a power failure, charge the battery for approx. 12 times the BATTERY BACKUP time.

For example, when the BATTERY BACKUP time is 6 minutes, it takes approx. 75 minutes

to charge the battery.

If a power failure occurs 2 times within 90 minutes, charge the battery for more than 90

minutes before starting to operate the STP pump.

9-2

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9.4 BATTERY NG Lamp

If battery capacity became less than operating limit value or there was connection mistake,

the "BATTERY NG" lamp on the rear side of the STP control unit front panel (See 9.3, "Life

of the Internal Battery)", the "FAILURE" lamp, and the "EMERGENCY OPERATION" lamp

on the STP control unit front panel light, and the STP pump does not start.

Replace the battery with a new one and reset the "Battery Capacity Low Warning"

(BATTERY NG) lamp.

However, when capacity of battery is less than operating limit value largely, there may be

the thing that battery abnormal detection does not operate.

For instructions on how to replace the battery and restart the STP pump, see 9.5 “How to

Replace the Internal Battery "

CAUTION

◇ When the " BATTERY NG" lamp lights, always replace the internal battery with

a new one.

◇ "BATTERY NG" lamp does not indicate the battery exchange time beforehand.

There is the case that battery deteriorates even if this lamp does not turn on.

According to 9.1 "Life of the internal Battery", change battery regularly.

NOTICE

◇ When the power is turned on again, the "FAILURE" lamp goes out.

9-3

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STP-H600/H1000 Series Instruction Manual

9.5 How to Replace the Internal Battery

WARNING

◇ When covering the battery case, be sure not to catch the battery cable in the

battery case. Failure to do so may shortcircuit the battery and result in a

leakage, production of fire or explosion.

CAUTION

◇ Turn OFF the primary power (Switch the breaker "OFF"), before replacing the

battery.

Failure to do so may result in product damage or a problem due to electric

shock or short-circuiting of the internal circuit.

◇ DO NOT touch any portions other than those designated.

Careless touch may cause electric shock and/or a short-circuiting of the internal

circuit, resulting in product damage or a problem.

◇ DO NOT use a new battery and a worn-out battery simultaneously.

◇ DO NOT use different types of batteries simultaneously.

NOTICE

◇ When replacing the battery, record the next replacement date of the battery on

the "Battery Instruction Label" (See Figure 9.3) on the front panel.

◇ The first replacement date of the battery has been specified on the "Battery

Instruction Label" (See Figure 9.3) on the front panel at delivery.

9.5.1 How to Replace the Battery Case

1) Stop the STP pump, and turn OFF the primary power (switch the breaker

"OFF").

2) Unscrew the 4 screws attached to front panel (1) and bring the front panel

down towards you.

3) Disconnect internal battery connector (2) (CON12).

4) Unscrew battery case screws (3) and pull out battery case (4) from the STP

control unit.

5) Replace battery case (4) containing a new battery.

6) Tighten battery case screw (3) and secure the battery case (4).

7) Connect internal battery connector (2) (CON12).

8) Turn ON the primary power (switch the breaker "ON") as well as the POWER

switch. Then, check whether or not "BATTERY NG" lamp (7) on the rear side

of the front panel lights.

9) If "BATTERY NG" lamp (7) located on the rear of the front panel lights, press

RESET switch (8) on the side of "BATTERY NG" lamp (7) to reset it (although

an impact noise may generate momentarily during reset, it is not indicative of a

problem).

10) Turn OFF the POWER switch and the primary power (Switch the breaker

"OFF").

11) Close front panel (1) and tighten the 4 screws that secure the front panel.

12) Record the next replacement date (after one year) of the battery on "Battery

Instruction Label" (9) attached to the front panel (See Figure 9.3).

9-4

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STP-H600/H1000 Series Instruction Manual

9.5.2 How to Replace the Battery in the Battery Case

1) Remove front plate (5) from battery case (4) by unscrewing 4 M2 screws.

2) Disconnect battery internal connector (6).

3) Remove inside plate(10) from battery case by unscrewing 4 M2 screws and

pull out the battery from the case (it can be pulled out toward you).

4) Replace the four worn-out batteries with new ones, the side, from which the

cord projects, up.

5) Attach inside plate(10).

6) Connect battery internal connector (6) and attach front plate (5) to the battery

case (Be careful not to catch the cable).

WARNING

◇ When covering the battery case, be sure not to catch the battery cable in the

battery case. Failure to do so may shortcircuit the battery and result in a

leakage, production of fire or explosion.

NOTICE

◇ New batteries and battery cases are supplied by Seiko Seiki.

9-5

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STP-H600/H1000 Series Instruction Manual

(1) STP Control Unit Front Panel

(2) Internal Battery Connector

(3) Battery Case Screw

(4) Battery Case

(5) Battery Case Front Plate

(6) Battery Internal Connector

(7) BATTERY NG Lamp

(8) RESET Switch

(9) Battery Instruction Label

(10) Battery Case Inside Plate

(11) Flat Head Screw (M2)

(2)

(8)

(7)

(1)

(4)

(10)

(3)

(5)

(11)

(9)

CAUTION

・

Change batteries every year

・注意

◇バッテリーは１年毎に交換してく

ださい。

◇

Do not use external batteries

in combination with internal

◇内部バッテリーと外部バッテリー

を同時に使用しないでください。

batteries

Next exchange date

次回交換日／

(6)

Affix this label to the front panel.

(5)

Figure 9.1 How to Replace the Internal Battery

9-6

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9.6 How to Dispose of the Internal Battery

Dispose of or collect worn-out batteries in accordance with the guidelines given by each

national and/or local government. If you procure batteries, dispose of them in accordance

with the guidelines given by the battery manufacturer.

CAUTION

◇ Pay attention to short-circuiting or leakage of the batteries when disposing of

them.

◇ To prevent the batteries from short-circuiting, remove the lead wires and

connectors from the batteries.

Cut the lead wires one by one so as not to cause a short-circuiting.

◇ Coat the conductive part of the batteries with tape.

NOTICE

◇ It is recommended to dispose of worn-out batteries after discharging them

thoroughly.

◇ Batteries manufactured by Japan Storage Battery Co., Ltd. will be collected by

Japan Storage Battery Co., Ltd. For detailed information, contact Japan

Storage Battery Co., Ltd. or Seiko Seiki.

9-7

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10 External Battery

CAUTION

◇ DO NOT use (an) external batteries when internal batteries are inserted.

Failure to do so may result in product damage or a problem.

It could cause a problem, such as product damage.

◇ DO NOT connect batteries in parallel.

◇ Replace batteries with new ones before the end of their life.

◇ When the STP pump is left unused over the specified period, charge battery for

90 minutes, or replace it with a new one before starting the STP pump.

NOTICE

◇ The life, allowable shelf life, and operation frequency of the battery differ

depending upon the type of the battery and ambient temperatures. See

technical data and information prepared by the battery manufacturer.

10.1 Specifications for the External Battery

When you use external batteries, select one in accordance with the specifications given in

Table 10.1.

CAUTION

◇ If you use external batteries which do not conform to the specifications, battery

backup will not function during a power failure which could result in damage to

the STP pump.

Table 10.1 Specifications for the External Battery

Item

Capacity

Specifications

1.8 Ah or more

48 V

Voltage

Current

2.3 A

Operation time

Operation frequency

Charging voltage

Approx. 6 minutes

Continues 2 times or more

55 V

It is recommended to use PORTALAC Series Small-Size Sealed Lead-Acid Battery

manufactured by J apan Storage Battery Co., Ltd. as an external battery.

10-1

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10.2 Installation of the External Battery

CAUTION

◇ Turn OFF the primary power (Switch the breaker "OFF"), before connecting the

battery.

Failure to do so may result in product damage or a problem due to electric

shock or short-circuiting of the internal circuit.

◇ After disconnecting the internal battery connector (CON12), connect the external

battery connector (CON9).

Having both connected simultaneously may result in damage to the STP control

unit.

◇ DO NOT use new batteries and worn-out batteries simultaneously.

◇ DO NOT use different types of batteries simultaneously.

◇ If the battery is not securely connected, backup during a power failure does not

function.

Install the external battery in accordance with the following steps:

1) Stop the STP pump, and turn OFF the primary power (Switch the breaker "OFF").

2) Unscrew the 4 screws attached to the front panel and bring it down towards you.

3) Pull out the battery according to the method described in Section 9.5.1, "How to Replace

the Battery Case," Steps 3) and 4).

Secure the internal battery connector (CON12) so as not to interfere with other

parts inside the STP control unit.

4) Close the front panel of the STP control unit and tighten the 4 screws that secure the

front panel.

5) Connect the external battery to the attached external battery plug, paying attention so

that "+" and "－" are positioned correctly. "+" and "－" of the external battery plug are

represented by (1) and (2), respectively.

CON 9 PIN No. Polarity of Battery

6) Connect the external battery plug to the external battery connector (EXT. BATTERY

CON9) on the rear panel.

7) Record the next replacement date of the battery in the "Battery Instruction Label" (See

Figure 9.3) on the front panel for the Next Replacement Date of Battery (See the

technical data prepared by the battery manufacturer).

10-2

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10.3 How to Charge the External Battery

NOTICE

◇ The battery is charged while the power is "ON," regardless of the operation state

of the STP pump.

The STP control unit is equipped with a constant voltage (55 V) circuit and a constant

current (0.3 A) circuit for charging the battery.

After a power failure, charge the battery for approx. 12 times the BATTERY BACKUP time.

For example, if the BATTERY BACKUP time is 6 minutes, it takes approx. 75 minutes to

charge the battery.

If a power failure occurs 2 times within 90 minutes, charge the battery for more than 90

minutes before starting the STP pump.

10.4 How to Dispose of the External Battery

Dispose of or collect worn-out batteries in accordance with the guidelines given by each

national and/or local government. If you procure the batteries, dispose of them according to

the guidelines given by the battery manufacturer.

CAUTION

◇ Pay attention to short-circuiting or leakage of the batteries when disposing of

them.

◇ To prevent the batteries from short-circuiting, remove the lead wires and

connectors from the batteries.

Cut the lead wires one by one so as not to cause a short-circuiting.

◇ Coat the conductive part of the batteries with tape.

NOTICE

◇ It is recommended to dispose of worn-out batteries after discharging them

thoroughly.

◇ Batteries manufactured by Japan Storage Battery Co., Ltd. will be collected by

Japan Storage Battery Co., Ltd. For detailed information, contact Japan

Storage Battery Co., Ltd. or Seiko Seiki.

10-3

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STP-H600/H1000 Series Instruction Manual

11 Operation Principle of the STP Pump

The STP-H600/H1000 is a series of magnetically-levitated turbomolecular pumps, featuring

the following:

ꢀꢁ Oil free

ꢀꢁ Low vibration

ꢀꢁ High reliability

The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned

alternately in the axial direction. Gas molecules are pumped from the inlet port to the

outlet port by the high speed rotation of the rotor.

By uniting the rotor blades and the sleeve lower, the STP pump has a large capacity

allowing it to be used in a wide variety of applications. Rotor blade (1) is supported by the

magnetic bearing without mechanical contact. Therefore, the STP pump requires no

lubrication oil unlike conventional turbomolecular pumps using ball bearings.

The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is

supported in the radial direction by 4 pairs of radial direction active magnetic bearings that

consist of radial sensor (3) and radial electromagnet (4). A pair of axial direction active

magnetic bearings consists of axial sensor (5) and axial electromagnet (6) to support the

rotor in the axial direction. Because the rotor is supported without mechanical contact, it

can rotate at low vibration.

There is less heat generated from magnetic bearings because there is no friction. Therefore

the STP pump requires no cooling. However, the STP pump requires water cooling during

baking and gas suction. Taking into consideration a breakage of magnetic bearings, touch

down bearings (7) and (8) coated with solid lubrication have been installed. They do not

contact with the rotor during the rated operation.

A radial direction sensor, a rotation sensor and a temperature sensor always monitor the

magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.

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( ) Rotor blade

( ) Stator blade

( ) Touch down bearing

( ) Radial electromagnet

( ) Radial sensor

( ) Touch down bearing

( ) Radial sensor

( ) Radial electromagnet

( ) Axial electromagnet

( ) Axial sensor

Figure 11.1 Cross Sectional View of the STP Pump

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12 Maintenance and Inspection

CAUTION

◇ Stop the STP pump, turn OFF the primary power (switch the breaker "OFF")

and disconnect the internal battery connector before performing maintenance of

the STP control unit (battery replacement/fuse replacement).

Failure to do so may result in an accident such as electric shock.

◇ Stop the STP pump, and turn OFF the primary power (Switch the breaker

"OFF") before performing inspections of the STP pump (for deposit).

Failure to do so may result in the inadvertent rotation of the STP pump, which

may result in an accident.

◇ To inspect the air cooling fan and reset the "BATTERY NG" lamp, always be

sure to stop the STP pump, turn OFF the primary power (Switch the breaker

"OFF"), open the front panel, then turn ON the primary power. Failure to do so

may result in electric shock or product damage due to short-circuiting of the

internal circuit.

◇ Before performing maintenance or inspections, power OFF the baking heater

and the air cooling unit.

◇ DO NOT touch any of the blocks, parts, or connectors inside the STP control

unit (excluding the battery connector). These parts are excluded from

maintenance or inspection.

12.1 Replacing the Internal Battery

The STP pump is equipped with rechargeable batteries for backup during a power failure

inside the STP control unit. In order to ensure that the battery functions normally during a

power failure, replace the batteries before the end of their life (approx. one year).

See Section 9.5, "How to Replace the Internal Battery."

The "Battery Instruction Label" is affixed to the front panel. After replacing the battery,

always record the next replacement date.

12.2 Inspecting the Air Cooling Fan

First stop the STP pump. Next turn OFF the primary power (switch the breaker "OFF"),

open the front panel, and turn ON the primary power (Switch the breaker "ON"). Confirm

that the air cooling fan (See Figure 4.3) inside the STP control unit is operating. Then, turn

OFF the primary power (Switch the breaker "OFF") and close the front panel.

If the air cooling fan is not operating, contact Seiko Instruments to replace it.

NOTICE

◇ It is recommended to inspect the air cooling fan when replacing the battery.

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12.3 Replacing the Fuses

CAUTION

◇ Remove the probable causes of the blown fuse (Ex. a problem with the remote

input signal, etc.) before replacing the fuse.

◇ Always use specified and rated fuses.

NOTICE

◇ If fuses are blown frequently even after they are replaced, contact Seiko

Instruments.

The following are protective fuses used in the STP control unit (See Section 4.1.3, "Inside of

the Control Unit").

F3, F4: 250 V, 5 A

For control power protection.

F5, F6, F7: 250 V, 10 A (arc-extinguishing fuses)

For I/O TB2 remote input/output terminal protection.

For power input (19) and (20) and power output (1) to (6) protection.

F8: 250 V, 10 A (arc-extinguishing fuse)

For external battery protection.

F9: 250 V, 10 A (arc-extinguishing fuse)

For internal battery protection.

F11, F12: 250 V, 0.1 A

For START/STOP TB6 remote input signal protection.

NOTICE

◇ Two of each three different kinds of fuses are attached for replacement (See

Table 16.3).

12-2

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12.4 Inspecting for Deposit

◇ When inspecting for deposit, exhaust gases inside the STP pump thoroughly.

Residual gases may cause an accident when removing the STP pump.

Confirm the characteristics of gas to be used, referring to the Material Safety

Data Sheet (MSDS) you obtain from the gas supplier.

Wear personal protective equipment if necessary.

Leaving the STP pump without removing the deposit may cause the STP

pump to be corroded beyond repair.

Deposit may have accumulated inside the STP pump depending upon the type of the vacuum

equipment installed in the STP pump. An increase in the amount of deposit may lead to a

malfunction of the STP pump.

Therefore, perform regular maintenance (once every 3 to 6 months as a target).

Inspect the inside of the outlet port flange for adhesion of deposit while watching the outlet

port flange. If deposit has accumulated to some extent, an overhaul (cleaning) is required.

Contact Seiko Instruments.

Note that the costs of troubleshooting problems resulting from deposit will be at your own

charge even during the warranty period.

If a problem resulting from deposit occurs inside the STP pump, hermetically seal inlet port,

outlet port, purge port, and leak port flanges, and immediately return them to Seiko

Instruments.

For the transport method, see Section 12.6, "Transport for Repair or Overhaul."

◇ Contact with atmospheric air may cause a reaction of the deposit. DO NOT

open the STP pump to atmospheric air as much as possible.

◇ Seiko Instruments supplies you the Temperature Management System (TMS)

unit to keep the temperature high inside the STP pump and prevent the

accumulation of deposit.

For details, contact Seiko Instruments.

12-3

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12.5 Overhaul

The recommended maintenance intervals for different process applications are tabulated

below:

Process

Metal Etch

Period

1 year

Remarks

Ensure that TMS (Temperature Management

System) is fitted and operational to prevent

accumulation of by-product deposition in the

pump.

Other Etch

Processes

2 years

It is recommended to change the pump rotor after 5 years due to accumulated wear of

the protective plating material

Other semiconductor

process

2 years

Processes resulting in accumulation of deposits

in the pump will require more frequent service.

Clean applications

(Only vacuum pumping)

Other use

5 years

(2 years)

Dependent on application, contact Seiko

Instruments or our local Service Center.

◇ The touch down bearing inside the STP pump will be worn out after a number of

full speed touch downs.

The costs of replacing parts that need to be replaced because of deterioration or abrasion will

be at your own charge.

When overhaul of the STP pump or the STP control unit is needed, contact Seiko

Instruments or our local Service Center.

“Etching” includes semiconductor etching and LCD etching.

12-4

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12.6 Transporting for Repair or Overhaul

◇ When removing the STP pump from the vacuum equipment, exhaust gases

inside the STP pump thoroughly.

Residual gases may result in an accident when removing the STP pump.

Confirm the characteristics of gas to be used, referring to the Material Safety

Data Sheet (MSDS) you obtain from the gas supplier.

◇ When returning the STP pump which has used corrosive, reactive or

inflammable gases to Seiko Instruments, specify the type of gas and handling

precautions on the surface of the package.

Confirm the characteristics of gas to be used, referring to the Material Safety

Data Sheet (MSDS) you obtain from the gas supplier.

◇ When returning the STP pump to Seiko Instruments, be sure to pack it well to

prevent external damage.

◇ If any of the specifications has not been satisfied, Seiko Instruments will not be

responsible for any damage during transport.

i) Always contact Seiko Instruments before returning the STP pump for repairs, overhaul,

etc. To avoid any accident by gases or corrosion inside the STP pump, particularly when

corrosive, reactive or flammable gases have been used, ii) vacuum and hermetically seal the

STP pump before transport. iii) Specify the type of gases used and handling precautions on

the package and return the STP pump to Seiko Instruments.

When returning the STP pump to Seiko Instruments, be sure to pack it well to prevent

external damage. Use similar or superior packaging material as originally supplied by

Seiko Instruments.

◇ The costs of cleaning and overhaul of the STP pump will be at your own charge.

◇ When returning the STP pump to Seiko Instruments, fill in the necessary items

in the "STP PUMP PROBLEM CHECK SHEET" and fax it to Seiko Instruments.

12-5

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STP-H600/H1000 Series Instruction Manual

13 Storage

13.1 The STP Pump

When the STP pump is left unused over the specified period (more than a few months),

follow the precautions below:

1) Close the inlet port of the STP pump and vacuum it using an auxiliary pump.

2) Purge dry N₂gas or dry air from the purge port.

3) Close the outlet port and purge port.

4) If the STP pump is water cooled, introduce compressed air from one side of the cooling

water port so that no water remains in the STP pump.

5) Store the STP pump in a vertical position.

6) DO NOT store the STP pump in the following places:

Sꢀ Place of high humidity.

Sꢀ (If it must be stored in a place of high humidity, insulate it from the outside

and use a dehumidifying agent.)

Sꢀ Place of high temperatures (more than + 55 LC) and low temperatures (less

than - 25 LC).

Sꢀ Place where there are corrosive gases.

Sꢀ Place subjected to dripping water.

Sꢀ Place with a lot of dust.

Sꢀ Place with insufficient ventilation.

Sꢀ Place subjected to strong magnetic or electric fields.

Sꢀ Place subjected to radiation.

13-1

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13.2 The STP Control Unit

If the STP control unit (including cables) is not used for a long period (more than a few

months), follow the precautions below:

1) Remove the internal battery from the STP control unit (see Section 9, "Internal

Battery").

NOTICE

◇ Always remove the battery when the STP control unit is not used for a long

period.

2) Store the STP control unit in a horizontal position.

3) DO NOT store the STP control unit in the following places:

Sꢀ Place of high humidity.

(If it must be stored in a place of high humidity, insulate it from the outside

and use a dehumidifying agent.)

Sꢀ Place of high temperature (more than + 55 LC) and low temperature (less than -

25 LC) (excluding the battery)

NOTICE

◇ Storage temperatures of the battery range from - 20 to + 40 LC.

4) Place subjected to direct sunlight.

5) Place where there are corrosive gases.

6) Place subjected to dripping water.

7) Place with a lot of dust.

8) Place of insufficient ventilation.

9) Place subjected to strong magnetic or electric field.

10) Place subjected to radiation.

11) Place subjected to mist.

12) Place with electric noise.

13) Place with vibration.

13.3 Restarting Precautions

1) Stored for more than four months:

Charge internal batteries for 90 minutes or more under the "POWER ON" state before

starting to operate the STP pump.

2) Stored for more than one year or when the date of replacement has passed:

Replace with new batteries.

13-2

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STP-H600/H1000 Series Instruction Manual

14 Disposal

14.1 The STP Pump

Dispose of the STP pump as industrial waste according to the guidelines given by each

national and/or local government.

WARNING

◇ When disposing of the STP pump, exhaust gases inside the STP pump

thoroughly.

Residual gases may result in an accident when disposing of the STP pump.

If the STP pump has been used with reactive or corrosive gasses, always clean

thoroughly before disposing of it to avoid any injury.

Confirm the characteristics of gas to be used, referring to the Material Safety

Data Sheet (MSDS) you obtain from the gas supplier.

CAUTION

◇ Seiko Seiki is not responsible for problems during or after disposal.

14.2 The STP Control Unit

Dispose of the STP control unit as industrial waste according to the guidelines given by each

national and/or local government.

WARNING

◇ Remove the battery from the STP control unit.

Failure to do so may result in an accident or fire.

Always remove the battery from the STP control unit and strictly follow the

guidelines for battery disposal in accordance with Section 14.3, "How to Dispose

of The Battery."

CAUTION

◇ Seiko Seiki is not responsible for problems during or after disposal.

14-1

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14.3 The Battery

Dispose of or collect worn-out batteries in accordance with the guidelines given by each

national and/or local government. If you procure batteries, dispose of them in accordance

with the guidelines given by the battery manufacturer.

CAUTION

◇ Pay attention to short-circuiting or leakage of the battery at their disposal.

◇ To prevent the battery from short-circuiting, remove lead wires and connectors

from the battery.

Cut lead wires one by one so as not to cause short-circuiting.

◇ Coat the conductive part of the battery with tape or a similar material.

NOTICE

◇ It is recommended to dispose of batteries after discharging them thoroughly.

◇ Batteries manufactured by Japan Storage Battery Co., Ltd. will be collected by

Japan Storage Battery Co., Ltd. For detailed information, contact Japan

Battery Co., Ltd. or Seiko Seiki.

14-2

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STP-H600/H1000 Series Instruction Manual

15 Troubleshooting

If an abnormality/error is found when using the STP pump, check it and take measures in

accordance with the following procedures.

If you cannot trace it or if the STP pump does not function normally after troubleshooting,

fill in the necessary information in the "STP PUMP PROBLEM CHECK SHEET" and fax

it to Seiko Seiki.

CAUTION

◇ After making sure that the STP pump stops thoroughly, and always turn OFF

the primary power (Switch the breaker "OFF"), check probable causes and

remove them.

15.1 Troubleshooting Immediately After An Abnormality/Error Occurs

1) In case the “FAILURE” lamp lights due to an overload of the inverter (the STP

pump continues rotating by inertia: FREE RUN state):

i. Press the “MOTOR STOP” switch. The "FAILURE" lamp goes out and the FREE

RUN state is reset.

ii. Press the “MOTOR START” switch and press the "MOTOR STOP" switch again.

The brake functions and the STP pump decelerates.

iii. After the STP pump stops thoroughly (the "BRAKE" lamp goes out: the needle of the

tachometer is in the red), turn OFF the "POWER ON/OFF" switch, switch the

breaker "OFF," and remove probable causes of the abnormality/error.

iv. Restart the STP pump and check if it operates correctly.

< REMOTE OPERATION>

i. Slide the "MANUAL/REMOTE" changeover switch on the rear panel to "MANUAL."

ii. Press the "MOTOR STOP" switch. The "FAILURE" lamp goes out and the FREE

RUN state is reset.

iii. Press the "MOTOR START" switch and press the "MOTOR STOP" switch again.

The brake functions and the STP pump decelerates.

iv. After the STP pump stops thoroughly (the "BRAKE" lamp goes out: the needle of the

tachometer is in the red), switch the breaker "OFF," and remove probable causes of

the abnormality/error.

v. Restart the STP pump and check if it operates correctly.

15-1

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STP-H600/H1000 Series Instruction Manual

2) In case the FREE RUN state is not reset after troubleshooting:

i. Check the tachometer on the front panel.

ii. If the needle is in the red, it means the STP pump has stopped.

Power OFF and switch the breaker "OFF."

iii. If the needle is in the black, the STP pump is rotating.

Wait for it to enter the red. Then, power OFF and switch the breaker "OFF. "

iv. Restart the STP pump and check if operates correctly.

CAUTION

◇ DO NOT power OFF and switch the breaker OFF until the needle is in the red.

NOTICE

◇ If the FREE RUN state cannot be reset, it takes approx. 8 to 10 hours to stop

the STP pump (the needle is in the red) because it rotates by inertia.

To stop the STP pump quickly, close the vacuum valve at the outlet port

flange and introduce gas from the purge port into the STP pump.

3) Other Cases:

After the STP pump stops thoroughly, power OFF, switch the breaker "OFF" and remove

probable causes of the abnormality/error. Then, restart the STP pump and check if it

operates correctly.

15.2 Abnormalities When Powering ON

(When any "Abnormality/Error Warning" lamp lights, see Section 15.5 "When Any

Abnormality/Error Warning Lamp Lights.")

Table 15.1 Troubleshooting After Powering ON

No.

１

Symptom

Probable Cause

Countermeasures

Connect the power

Referred Section

4.4.2

The "POWER ON/OFF" (1) Incorrect

switch built-in lamp

(green LED) does not

light, when powering

ON.

connection of cable correctly.

the power

cable.

(2) Blown fuses Replace blown fuses 4.1.3

F3, F4.

(250 V, 5 A).

12.3

(3) Abnormal

Set the voltage to the 4.4.2

power voltage

(4) Power

failure.

16.2

6.1.1

rated voltage M10%.

Check whether or

not a power failure

has occurred.

15-2

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15.3 Abnormalities When Performing The STP Pump Start Operation

(When any "Abnormality/Error Warning" lamp lights, see Section 15.5 "When Any

Abnormality/Error Warning Lamp Lights.")

Table 15.2 Troubleshooting When Performing The STP Pump Start Operation

No.

１

Symptom

The "ACCELERATION" (1) TB3

lamp does not light.

Probable Cause

Countermeasures

When this function 8.2

INHIBIT (5) - is not used, short the

Referred Section

(7) for

circuit between

Rotation

INHIBIT

terminals (5) - (7).

If these terminals

Signal Input are opened, the STP

are opened. pump will not rotate

after performing

start operation.

(2) The

Slide the "MANUAL/ 4.1.2

"MANUAL/R REMOTE"

5.5

5.6

EMOTE"

changeover switch

on the rear panel of

changeover

switch is not the STP control unit

in the correct to the correct

position.

(3) Blown fuses Replace the blown

4.1.3

F11, 12 (only fuses (250 V, 0.1 A). 8.4

REMOTE

12.3

operation).

15.4 Abnormalities While the STP Pump is Rotating

(When any "Abnormality/Error Warning" lamp lights, see Section 15.5 "When Any

Abnormality/Error Warning Lamp Lights.")

Table 15.3 Troubleshooting While the STP Pump Is Rotating

Referred

Section

3.3.4

No.

Symptom

Probable Causes

Countermeasures

The "NORMAL

OPERATION

"lamp does not

light approx. 15

minutes after

performing start

operation.

(1) Insufficient pressure Use the maximum

at the inlet port.

working pressure or less. 16.1

(2) Insufficient pressure Use the allowable backing 3.3.4

at the outlet port.

(3) Leakage of the piping Check piping.

system.

(4) Failure in the

auxiliary pump.

pressure or less.

16.1

3.3.4

Check the auxiliary pump 3.3

for its capacity and

START state.

16.1

(use a pump with the

recommended capacity or

more).

(5) Incorrect connection of Connect the motor

the motor connection connection cable correctly.

4.4.2

cable.

If the cable connector is

not locked, lock it

securely.

15-3

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STP-H600/H1000 Series Instruction Manual

Referred

Section

7.3

No.

Symptom

Probable Causes

Countermeasures

The STP pump

stops.

(1) Baking temperature

overheat.

Set the temperature to

120 ℃ or lower.

(2) Insufficient cooling.

Always cool during baking 7.2

or gas suction.

(3) Power failure.

(4) Over vibration

(5) (vibration 100 m p-p

or more).

Check if power has failed. 6.1.1

After the STP pump stops 6.1.3

thoroughly, power OFF

and remove external

vibration so as not to

transmit it to the STP

pump.

(6) Overheating inside the Remove heat source or

STP control unit.

1) Ambient

shield for air route.

1) Keep ambient

temperature 40 LC or

lower.

4.2.1

temperature

2) Insufficient

4.2.2

12.2

2) Remove obstacles at

the ventilation port.

If the air cooling fan

is broken, contact

Seiko Seiki.

cooling of the STP

control unit.

(7) Improper pressure of Use the maximum

the inlet port.

(8) Improper pressure of Use the allowable backing 3.3.4

3.3.4

working pressure or less. 16.1

the outlet port.

pressure or less.

16.1

Rotor falls during (1) Failure of the STP

operation. connection cable.

Inspection is needed.

Contact Seiko Seiki.

4.4.2

(2) Failure of the battery. Inspection is needed.

Contact Seiko Seiki.

Ultimate pressure (1) Failure of the auxiliary Check the auxiliary pump 3.3

is insufficient.

pump.

for its capacity and

START state.

16.1

(use a pump with the

recommended capacity or

more).

(2) Leakage of the piping Check the piping system. 3.3.4

system.

(3) Residual molecule.

If the main composition is 7.3

H2 or H2O, perform

baking; if it is other than

H2 or H2O, clean the

inside of the vacuum

equipment

(If gases remain inside

the STP pump, contact

Seiko Seiki when it is

needed to be cleaned).

12.4

15-4

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15.5 When Any Abnormality/Error Warning Lamp Lights

When any Abnormality/Error Warning lamp lights, check which lamp is being lit and see

Table 15.5 for which procedure No. to follow.

Then, follow the steps of that procedure No. (shown in Tables 15.6 to 15.8) to remove the

problem (for the names and positions of the "Abnormality/Error Warning" lamps, see

Figures 4.1 and 4.3).

Table 15.4 Cross Reference of Items of Abnormality Warning Lamps

OVER

TEMPERATUR

BATTERY NG

(front panel

rear side)

—

BATTERY

OPERATION

EMERGENCY

OPERATION

PROCEDURE

No.

FAILURE

—

○

—

No. 1

No. 2

No. 3

No. 4

No. 5

No. 6

○

—

○

—

○

—

○

—

○

—

○

△

—

△

○

(When the

power is turned

on again, this

lamp goes out.)

○:

The lamp is being lit.

△: The lamp may light.

—:

The lamp is not being lit.

CAUTION

◇ When checking the " BATTERY NG" lamp, turn OFF the primary power

(Switch the breaker "OFF"), then open the front panel. After opening the

front panel, turn ON the primary power (Switch the breaker "ON").

Failure to do so may result in electric shock or product damage due to short-

circuiting of the internal circuit.

NOTICE

◇ The "BATTERY NG" lamp remains lit until it is reset even after the primary

power is turned OFF (the breaker is switched "OFF").

15-5

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Table 15.5 Troubleshooting When Any of Abnormality/Error Warning Lamp Lights

PROCEDU

RE No.

No.1

Referred

Section

4.4.2

Lamp Being Lit

Probable Causes

Countermeasures

“OVER

(1) Incorrect connection of

the STP connection

cable.

Connect cables correctly.

If the cable connector is not

locked, lock it securely.

TEMPERATURE”

“FAILURE”

“EMERGENCY

OPERATION”

“OVER

No.2

(1) Overheat inside the STP

pump:

TEMPERATURE”

“FAILURE”

1) Overheat during

baking.

1) Set the temperature of the

baking heater to 120 LC or

lower.

7.3

2) Insufficient cooling.

2) At the time of baking or gas 7.2

suction, always cool the STP

pump.

3) Leakage of the

vacuum piping

system.

3) Check the piping system for 3.3.4

leakage.

4) Repetitious start/stop 4) Repetitious start/stop

5.2

operations.

operations may cause the

STP pump to overheat.

Check a power failure.

“BATTERY

No.3

No.4

(1) Power failure.

6.1.1

OPERATION”

“EMERGENCY

OPERATION”

“FAILURE”

(1) Incorrect connection of

the emergency vent.

valve cable.

(2) When the rated operation

does not start approx. 15

minutes after start

operation is executed:

When the

Connect the cable correctly. If 4.4.2

the cable connector is not

locked, lock it securely.

6.1.4

ACCELERATION state

continues for approx. 15

minutes:

1) Insufficient pressure at 1) Use the maximum working 3.3.4

the inlet port.

pressure or less.

16.1

3.3.4

16.1

2) Insufficient pressure at 2) Use the allowable backing

the outlet port.

3) Leakage of the piping

system.

pressure or less.

3) Check the piping system for 3.3.4

leakage.

4) Failure of the auxiliary 4) Check the auxiliary pump

3.3

pump.

for its capacity and START 16.1

state.

(use a pump with the

recommended capacity or

more).

5) Incorrect connection of

the motor connection

cable.

5) Connect the cable correctly. 4.4.2

If the cable is not locked,

lock it securely.

15-6

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PROCEDU

RE No.

No.4

Referred

Section

Lamp Being Lit

Probable Causes

Countermeasures

“FAILURE”

(3) Overheating inside the

STP control unit:

1) Ambient temperature. 1) Set the ambient

temperature to 40 LC or

4.2.1

lower.

2) Insufficient cooling of 2) Remove obstacle from the

4.2.2

12.2

8.2

the STP control unit.

ventilation port.

If the air cooling fan is

broken, contact Seiko Seiki.

Remove abnormalities from

peripheral equipment.

(4) Peripheral equipment

abnormality (when

peripheral equipment is

connected between TB3

R.P. THER (1)–(3)).

(5) TB3 R. P. THER (1)–(3) Short the circuit between

8.2

are opened.

terminals (1)–(3).

(when peripheral

equipment is not

connected between TB3

R. P. THER (1)–(3).

(6) Insufficient charging or Check that the battery is fully

deterioration of the

battery.

charged. If the battery is not

charged, charge it. Check the

battery for deterioration and

the next replacement date.

If the battery deteriorates or

its replacement date has

passed, replace it.

(7) Incorrect connection of

the battery.

Check that external or internal 9

batteries are correctly

connected.

(8) Blown fuses F8, F9 (for

battery protection).

Replace the blown fuses

(250 V, 10 A).

12.3

“EMERGENCY

OPERATION”

No.5

(1) Different model name or Check that the model name,

Safety

No. on the name plate.

serial number and cable length Precautions

of the STP pump, the STP

control unit and the STP

connection cable are the same.

After the STP pump stops

thoroughly, power OFF and

remove external vibration so

as not to transmit it to the STP

pump.

4.4.2

(2) Excessive external

vibration (vibration of

100 m p-p or more).

6.1.3

15-7

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PROCEDU

RE No.

No.6

Referred

Section

Lamp Being Lit

Probable Causes

Countermeasures

“FAILURE”

(1) Insufficient charge or

deterioration of the

battery.

1) Check whether or not the

“BATTERY NG”

(inside the front

panel)

( “EMERGENCY

OPERATION”

lamp may light)

battery is fully charged. If 10

the battery is not

sufficiently charged, charge

it.

2) Check the deterioration and

the replacement date of the

battery. If the battery has

deteriorated or the

replacement date has

passed, replace the battery

with a new one.

3) After taking steps 1) and 2)

above, reset BATTERY NG.

CAUTION

◇ When checking the " BATTERY NG" lamp, turn OFF the primary power

(Switch the breaker "OFF"), then open the front panel. After opening the

front panel, turn ON the primary power (Switch the breaker "ON"). Failure to

do so may result in electric shock of product damage due to short-circuiting

of the internal circuit.

NOTICE

◇ The "BATTERY NG" lamp remains lit until it is reset even after the primary

power is turned OFF (the breaker is switched "OFF").

15-8

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STP-H600/H1000 Series Instruction Manual

16 Specifications and Accessories

16.1 Specifications for the STP Pump

Table 16.1 Specifications for the STP Pump

STP-H600

Item

STP-H1000

Inlet port flange

ICF203/VG150/ISO160 ICF253/VG200/ISO200

KF40

Flange size^*1

Outlet port flange

N₂

H_e

N₂

H_e

N₂

L/s

600

550

500

1000

900

800

Pumping speed

>10⁸

10⁴

Compression ratio

Ultimate pressure

10³

Pa (Torr)

10^-7(10^-9) order (after baking)

67 (0.5)

Maximum working When cooled water:

pressure

When cooled air:

When cooled natural

air:

When TMS unit is

used:

5.3 (0.04)

Pa (Torr)

0.9 (0.007)

13(0.1)

Allowable backing When cooled water:

pressure

When TMS unit is

Pa (Torr) used:

400 (3)

267 (2)

When cooled air:

When cooled natural

air:

Rated speed

rpm

min

μm O-P

35,000

Starting time

Stopping time

Vibration

＜0.01 (at 35,000 rpm)

Noise

＜50 (at 35,000 rpm)

Baking temperature

Lubricating oil

Installation position

Cooling method^*2

Recommended auxiliary pump L/min

Mass^*3

＜120

Not necessary

Free

Water cooled, Air cooled, Natural air cooled

240

Ambient temperature range

Storage temperature range

0 to 40

- 25 to + 55

Values shown in the above table are typical. They are not guaranteed.

*1 : ICF (JVIS) VG, KF (JIS)

^*2: Varies depending upon the operation pressure range.

^*3: Mass is a value of state that the only standard accessory was installed. (except the optional accessory)

16-1

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16.2 16.2 Specifications for the STP Control Unit

Table 16.2 Specifications for the STP Control Unit

Item

Specifications

200 to 240±10%

2.6

Input voltage

Input power

V AC

kVA

At start:

Under rated operation:

1.0 to 2.6

50/60±2

Input frequency

Input phase

Rated current of main breaker

Motor drive system

Single phase

3-phase transistor-inverter

Output voltage under rated

operation(3-phase)

Output frequency under rated

operation

V AC

584

Ambient temperature range

℃

0 to 40

Storage temperature range

- 25 to + 55 (excluding a battery)

Battery storage temperature range

- 20 to + 40

Mass

Battery used

12 V 2Ah x 4 (J apan Storage Battery Co.,

Ltd./Small-Sized Sealed Lead-Acid

Battery/PORTALAC series PE12V2WS)

[Front Panel]

Operation switches

Sꢀ POWER ON/OFF

(Illuminated alternate push button

switch, black/green)

Sꢀ MOTOR START

(Momentary push button switch, black)

Sꢀ MOTOR STOP

(Momentary push button switch, red)

Sꢀ HEATING ON/OFF

(Illuminated alternate push button

switch, black/green)

[Rear Panel]

Sꢀ MANUAL/REMOTE Changeover

(Toggle switch)

Panel indication lamps

Sꢀ ACCELERATION

Sꢀ NORMAL OPERATION (Green LED)

Sꢀ BRAKE (Yellow LED)

Sꢀ EMERGENCY OPERATION (Red LED)

(Green LED)

Sꢀ FAILURE

(Red LED)

Sꢀ OVER TEMPERATURE

Sꢀ BATTERY OPERATION

ꢀ

Sꢀ [Switch built-in Lamps]

Sꢀ POWER ON (POWER ON/OFF, green)

Sꢀ HEATING ON (HEATING ON/OFF,

green)

^*1: Mass is a value of state that the only standard accessory was installed. (except the optional accessory)

16-2

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STP-H600/H1000 Series Instruction Manual

Item

Input/output terminal

Specifications

Sꢀ AC POWER TB1 (3 pins)

Sꢀ P.CONNECTOR CON5A (45 pins)

Sꢀ INVERTER OUTPUT CON2A (5 pins)

Sꢀ LEAK VALVE CON8A (8 pins)

Sꢀ I/O TB2 (20 pins)

Sꢀ DC I/O TB3 (10 pins)

Sꢀ START STOP TB5 (3 pins)

Sꢀ START/STOP TB6 (2 pins)

Sꢀ EXT. BATTERY CON9 (2 pins)

Sꢀ Primary power cable

Input/output cables

Safety functions

Sꢀ STP connection cable

Sꢀ Motor connection cable

Sꢀ Emergency vent. valve cable

Sꢀ Ground cable

Sꢀ Magnetic bearing abnormality/error

detection

(Rotor vibration: 100μm p-p or more)

Sꢀ STP pump overheat detection

(Motor: 110 ℃ over)

Sꢀ Inverter overload detection

(Inverter current: 40 A over,

instantaneous, A over for 15 minutes)

Sꢀ Battery abnormality/error detection

(Battery terminal voltage: 42 V under)

Sꢀ Power failure detection

(Detects power failure of over about 2

seconds)

Sꢀ STP pump overspeed detection

(37500 rpm over)

Sꢀ STP control unit overheat detection

(90℃ over)

Sꢀ Brake failure detection

16-3

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STP-H600/H1000 Series Instruction Manual

16.3 Accessories

Table 16.3 Accessories

Item

Q'ty

Remarks

STP control unit

Primary power cable*¹

STP connection cable*¹

Motor connection cable*¹

Ground cable*¹

Inlet port cover

Outlet port cover

STP connector cover

Motor connector cover

Leg

4 legs are attached to the STP pump

Rubber foot for lug

Emergency vent. valve

Emergency vent. valve clamping ring

Emergency vent. valve O-ring washer

Blank flange for purge port

Purge port clamping ring

Purge port O-ring washer

T-piping

With a one-sided connector cable*¹

KF*²10

External battery connection plug

Spare fuses 250 V, 5 A

250 V, 10 A

F3, 4

F5, 6, 7 ,8 ,9

(arc-extinguishing fuses)

250 V, 0.1 A

Instruction Manual

F11, 12

16.4 Recommended Spare Parts

Table 16.4 Recommended Spare Parts

Item

Model and Manufacturer

Specifications

Fuses for F3, 4

MF60-NR5, 5 A, 250 V

(TOYO FUSE CO., LTD)

5 A, 250 V, Normal acting fuse

ꢀ6.35 × 30 mm

Fuses for F5 to 9

MF60-NR10-S, 10 A, 250 V

(TOYO FUSE CO., LTD)

10 A, 250 V, Normal acting fuse

(arc-extinguishing fuses)

ꢀ6.35 × 30 mm

Fuses for F11, 12 MF60-NR0.1, 0.1 A, 250 V

(TOYO FUSE CO., LTD)

0.1A, 250 V, Normal acting fuse

ꢀ6.35 × 30 mm

Internal batteries PE12V2WS

Nominal voltage: 12 V

(J apan Storage Batteries Co., Ltd.) Rated capacity (20-hour rate): 2Ah

CAUTION

◇ Do not use parts other than those recommended in the above table.

If you use these parts, contact Seiko Seiki before use.

*1 :The standard cable length is 5 m.

*2 :JIS

16-4

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STP-H600/H1000 Series Instruction Manual

5 .

1 4 7

6 0

5 .

1 4 1

3 0

ﾟ

ﾟ 5

ﾟ

5 0

3 5

1 3

3 9

2 6

Ｄ

Ｃ

8 0

Ａ

Figure 16.1 External Appearance of the STP Pump (Example: STP-H1000 Series)

16-5

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STP-H600/H1000 Series Instruction Manual

2 4

1 8 8 . 6

. 5 3 4

5 . 4

1 3 0

1 9 9

3 4 . 5

e ) a c p S e l b a ( C

5 0 ) ( 1

5 0 0

4 7 0

3 0

5 0

2 4 . 5

. 5 2 4

3 5 4

Figure 16.2 External Appearance of the STP Control Unit

16-6

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STP-H600/H1000 Series Instruction Manual

Figure 16.3 Label Affixing Positions for the STP Pump

16-7

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STP-H600/H1000 Series Instruction Manual

. l

p a t n e o r n f f o d i e s n i h t e o t l

a l b s e i h t x i f f A

y n o l l

o r n i e a d r t i k i e S o k i e S b y

d e m o f r p e b e l d u o h s n i u n T

o s n r n e e p e z d i h t o r a u

n . i o u t a c

h t i w e l d n H a

注意取扱

ｋｇ

・

N O I U T C A

ｋｇ

てください許。可を受け

のトレー精ニ機ン

整を行浮う上場調合

たはグま

イコはセ

物重量

意・注

d u o r c p y e a H v

・注意

・

C A U T

N O I

／

N e x

交換日次回

e t a d

n a g h e c e x t

s e i r e t b a t

い。

リー

ないでくださ同時をに使用し

と外部バッテ部バッ ◇ テ内リー

n a e r n i t h i t w n o i i n b a t m o c i n

◇

e i r s e t b a t n r a e l t e x e s u n o t D o

さいだ。

◇

C h a n g e

てく

年毎に交換しッテリ ◇ ーバは１

e y a

e v r e e i r s e t b a t

・

・注意

N O I U T C A

SAFETY INSTRUCTIONS

Read instruction manual

安全上の指示事項

使用前に取扱説明書を

お読みください。

before operation

CAUTION

・

Use pump control unit and

・注意

◇ポンプとコントロールユニッ

トおよび接続ケーブルは同一

№の組合せで使用してくださ

い。

◇必ず指定の型式のケーブルを

使用してください。

◇最初にアース線を接続してく

ださい。

◇

connection cable with same

CAUTION

Lock connector

・

◇

・注意

◇コネクタは確実に

ロックしてくださ

い。

◇ブレーカＯＮの時

はコネクタを外さ

ないでください。

Lock

serial number

securely

Use only designated type of

◇

Do not remove

◇

connector while

breaker is ON

cables

Connect ground cable first

◇

200 240V

～

Ａ

From viewing arrow A

TURBOMOLECULAR PUMP CONTROL UNIT

MODEL:

MANUFACTURING DATE:

POWER SUPPLY( Hz):

SERIAL NUMBER:

POWER CONSUMPTION:

VOLTS WEIGHT:

STP-

No.

50 60 1φ

MANUFACTURED BY: SEIKO SEIKI CO LTD YASHIKI NARASHINO CHIBA JAPAN

., . ,

LENGTH

SEIKO SEIKI

Figure 16.4 Label Affixing Positions for the STP Control Unit

16-8

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STP-H600/H1000 Series Instruction Manual

・警告

WARNING

・

Hot surface

Can burn hands

Do not touch

高温部

やけどします。

触らないでく

ださい。

Baking Heater

Air Cooling Unit

AIR COOLING UNIT

VOLTS AC

SEIKO SEIKI _{MADE IN JAPAN}

Figure 16.5 Label Affixing Positions for the Special Accessory

16-9

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STP PUMP PROBLEM CHECK SHEET

Contact your nearest Seiko Seiki’s office shown in the rear cover.

To : Company Name

Contact Name

TEL. Number

FAX. Number

Address

Date :

From: Customer Name

Person in charge

TEL. Number

Date :

FAX. Number

Address

Input Voltage:

Model Name :

STP-

Inlet Flange Type :

Length of Connection Cable:

M/C No. :

Manufacturing Date :

Other:

◇STATE OF PROBLEM

Check Items

Abnormality Warning

(Check lamps being lit)

State/Result

□ OVER TEMPERATURE

□ BATTERY OPERATION

□ FAILURE

(while the vacuum chamber is in operation, etc.)

◇OTHER INFORMATION

□ EMERGENCY

OPERATION

□ BATTERY NG (inside

panel)

□ Yes / □ No

Pump

Noise

□ Yes / □ No

Vibration

Heat

□ Yes / □ No

Choke Water

Deposition

□ Yes / □ No

Control Unit Next Battery

Replacement Date

Power Failure

Time

Min.

Blown Fuses

□ Yes / □ No

(Fuse No. F

)

□ Yes / □ No

Heat

Other

Used Gas

Pump Installation

Position

□ Vertically / □ Horizontal

□ Upside-down

□ Other

(

)

□ Yes / □ No

Leakage

TMS Unit

□ Yes / □ No

Seiko Seiki Comment :

Date

Name

Job No.

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UNIT CONVERSION TABLE

Length

inch

1.00x10

10.0

100

39.4

0.394

39.4x10

0.01

1x10

-3

0.10

2.54

-3

25.4x10

25.4

Mass

lb.

-3

-5

1.00x10

2.20x10

2.20

1x10

454

0.454

Pressure

kgf/cm

Torr

7.50x10

-3

-5

-3

1.02x10

1.36x10

133

9.81 x 10

736

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Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Sales Department

1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN

Telephone: <Vacuum Innovative Products Sales Department, Direct>

Domestic

043-211-1401

International

Domestic

+ 81-43-211-1401

043-211-8075

Facsimile:

International

+ 81-43-211-8075

Manufacturer, Sales Office (Japan)

Seiko Instruments Inc. Vacuum Innovative Products Division

4-3-1 Yashiki, Narashino-shi, Chiba 275-0004 JAPAN

Telephone: <Vacuum Innovative Products Service Section, Direct>

Domestic

047-475-3123

International

+81-47-475-3123

Domestic

047-475-3111

International

+81-47-475-3111

Facsimile:

Domestic

047-471-1544

International

+81-47-471-1544

Supplier:

Seiko Instruments Inc.

1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN

Telephone:

national 043-211-1401 (VI Sales Sec., Direct)

intern. + 81-43-211-1401

Facsimile:

national 043-211-8075

intern. + 81-43-211-8075

Supplier:

Seiko Instruments USA

1130 Ringwood Court

San Jose, CA 95131 U.S.A.

Telephone:

national 408-922-5932

intern. +1-408-922-5932

national 408-922-1959

intern. +1-408-922-1959

Facsimile:

Supplier:

Seiko Instruments Belgium S.A

Av. De Messidor 202 1180 Bruxelles, Belgium

Telephone:

national 02-346-6274

intern. + 32-2-346-6274

national 02-347-5268

intern. + 32-2-347-5268

Facsimile:

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