Agilent Technologies Switch Agilent E5250A User Manual

Agilent E5250A  
Low Leakage Switch  
Mainframe  
User’s Guide  
Agilent Technologies  
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DECLARATION OF CONFORMITY  
According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014  
Manufacturer’s Name:  
Manufacturer’s Address:  
Supplier’s Address:  
Agilent Technologies International sarl  
Rue de la Gare 29  
CH - 1110 Morges  
Switzerland  
Declares under sole responsibility that the product as originally delivered  
Product Name:  
Model Number:  
Product Options:  
Low Leakage Switch Mainframe 10x12 Matrix  
Switch24(8x3)CH Multiplexer  
24(8x3)CH Multiplexer  
Agilent E5250A  
Agilent E5252A  
Agilent E5255A  
This declaration covers all options of the above product(s)  
complies with the essential requirements of the following applicable European Directives, and carries  
the CE marking accordingly:  
Low Voltage Directive (73/23/EEC, amended by 93/68/EEC)  
EMC Directive (89/336/EEC, amended by 93/68/EEC)  
and conforms with the following product standards  
EMC  
Standard  
Limit  
IEC 61326:2002 / EN 61326:1997 +A1:1998 +A2:2001 +A3:2003  
CISPR 11:1997 / EN 55011:1998  
Group 1 Class A  
IEC61000-4-2:1995 / EN61000-4-2:1995  
IEC 61000-4-3:1995 / EN61000-4-3:1995  
IEC 61000-4-4:1995 / EN61000-4-4:1995  
IEC 61000-4-5:1995 / EN61000-4-5:1995  
IEC 61000-4-6:1996 / EN61000-4-6:1996  
IEC 61000-4-11:1994 / EN61000-4-11:1994  
4 kV CD, 8 kV AD  
3 V/m, 80-1000 MHz  
0.5 kV signal lines, 1 kV power lines  
0.5 kV line-line, 1 kV line-ground  
3 V, 0.15-80 MHz  
1 cycle, 100%  
Canada: ICES-001:1998  
Australia/New Zealand: AS/NZS 2064.1  
The product was tested in a typical configuration with Agilent Technologies test systems.  
IEC 61010-1:2001 / EN 61010-1:2001  
Safety  
Canada: CSA C22.2 No. 1010.1:1992, NRTL/C  
Supplementary Information:  
This DoC applies to above-listed products placed on the EU market after:  
September 26, 2006  
Date  
Toshiyuki Kawaji  
QA Manager  
Agilent Technologies  
For further information, please contact your local Agilent Technologies sales office, agent or distributor,  
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Herstellerbescheinigung  
GEÄUSCHEMISSION  
Lpa < 70 dB  
am Arbeitsplatz  
normaler Betrieb  
nach DIN 45635 T. 19  
Manufacturer’s Declaration  
ACOUSTIC NOISE EMISSION  
Lpa < 70 dB  
operator position  
normal operation  
per ISO 7779  
NOTE  
This ISM device complies with Canadian ICES-001.  
Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.  
This product complies with the WEEE Directive (2002/96/EC) marking  
requirements. The affixed label indicates that you must not discard this electrical/  
electronic product in domestic household waste.  
Product Category: With reference to the equipment types in the WEEE Directive  
Annex I, this product is classed as a “Monitoring and Control instrumentation”  
product.  
Do not dispose in domestic household waste.  
To return unwanted products, contact your local Agilent office, or see  
www.agilent.com/environment/product/ for more information.  
Microsoft, Windows, Windows NT, Visual C++, and Visual Basic are registered trademarks of Microsoft  
Corporation. Borland C++ Builder is registered trademark of International, Inc. LabWindows and  
LabVIEW are registered trademarks of National Instruments Corporation.  
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Safety Summary  
The following general safety precautions must be observed during all phases of  
operation, service, and repair of this instrument. Failure to comply with these  
precautions or with specific warnings elsewhere in this manual may impair the  
protections provided by the equipment. In addition, it violates safety standards of  
design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.  
assumes no liability for customer’s failure to comply with these requirements.  
NOTE  
Agilent E5250A complies with INSTALLATION CATEGORY II for mains input  
and INSTALLATION CATEGORY I for measurement input terminals, and  
POLLUTION DEGREE 2 defined in IEC 1010-1.  
Agilent E5250A is INDOOR USE products.  
GROUND THE INSTRUMENT  
This is Safety Class I instrument. To minimize shock hazard, the instrument  
chassis and cabinet must be connected to an electrical ground. The power  
terminal and the power cable must meet International Electrotechnical  
Commission (IEC) safety standards.  
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE  
Do not operate the instrument in the presence of flammable gases or fumes.  
Operation of any electrical instrument in such an environment constitutes a  
definite safety hazard.  
KEEP AWAY FROM LIVE CIRCUITS  
Operation personnel must not remove instrument covers. Component  
replacement and internal adjustments must be made by qualified maintenance  
personnel. Do not replace components with power cable connected. Under  
certain conditions, dangerous voltages may exist even with the power cable  
removed. To avoid injuries, always disconnect power and discharge circuits  
before touching them.  
DO NOT SERVICE OR ADJUST ALONE  
Do not attempt internal service or adjustment unless another person, capable of  
rendering first aid and resuscitation, is present.  
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DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT  
Because of the danger of introducing additional hazards, do not install substitute  
parts or perform any unauthorized modification to the instrument. Return the  
instrument to a Agilent Technologies Sales and Service Office for services and  
repair to ensure that safety features are maintained.  
DANGEROUS PROCEDURE WARNINGS  
Warnings, such as example below, precede potentially dangerous procedures  
throughout this manual. Instructions contained in the warnings must be  
followed.  
WARNING  
Dangerous Voltage, capable of causing death, are present in this instrument.  
Use extreme caution when handling, testing, and adjusting.  
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Safety Symbols  
The general definitions of safety symbols used on equipment or in manuals are  
listed below.  
Instruction manual symbol: the product will be marked with this symbol when it is  
necessary for the user to refer to the instruction manual in order to protect against  
damage to the instrument.  
Indicates dangerous voltage and potential for electrical shock. Do not touch  
terminals that have this symbol when insrument is on.  
Affixed to product containing static sensitive devices--use anti-static handling  
procedures to prevent electrostatic discharge damage to component.  
Protective conductor terminal. For protection against electrical shock in case of a  
fault. Used with field wiring terminals to indicate the terminal which must be  
connected to ground before operating equipment.  
Frame or chassis terminal. A connection to the frame (chassis) of the equipment  
which normally includes all exposed metal structures.  
Indicates earth (ground) terminal.  
Alternating current.  
Direct current.  
ON (Supply).  
OFF (Supply).  
STANDBY (Supply).  
Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel  
comply with INSTALLATION CATEGORY I.  
CAT 1  
WARNING  
CAUTION  
The warning sign denotes a hazard. It calls attention to a procedure, practice,  
condition or the like, which, if not correctly performed or adhered to, could result in  
injury or death to personal.  
The caution sign denotes a hazard. It calls attention to an operating procedure,  
practice, condition or the like, which, if not correctly performed or adhered to, could  
result in damage to or destruction of part or all of the product.  
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In This Manual  
This manual is a user’s guide for Agilent E5250A, and consists of the following  
chapters:  
Introduction  
Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A  
10×12 Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.  
Installation  
Describes requirements to install the E5250A and tasks for installation.  
Executing Self-Test and Leak Test  
Describes how to execute the three Self-Test items (Controller Test, Front Panel  
Interface Test, and Relay Test) and the Leak Test.  
Setting up Measurement Environment  
Explains how to connect your instruments to the E5250A input, and how to  
connect the E5250A output to your wafer prober or test fixture.  
Controlling the E5250A  
Introduces several methods for controlling the E5250A, gives basic information  
for controlling the relay switches on the plug-in cards, and describes how to use  
Virtual Front Panel (VFP) utility furnished with the E5250A.  
Programming the E5250A  
Describes how to create programs that contain SCPI commands to control the  
E5250A.  
Command Reference  
Describes the SCPI commands available to operate the E5250A via GPIB  
interface and the status reporting structure.  
VXIplug&play Driver  
Introduces the VXIplug&play driver available for the E5250A.  
Executing Sample Programs  
Explains how to execute and modify the sample programs stored in the program  
disk that is furnished with the E5250A.  
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Specifications  
Lists specifications, typical data, supplemental data, and reference data for the  
E5250A, E5252A, and E5255A.  
Error Messages  
Lists and describes the error messages for the E5250A.  
SCPI Command Summary  
This is a quick reference for the SCPI subsystem commands available for the  
E5250A.  
Text Conventions  
The following text conventions are used in this manual:  
Screen Text  
Represents text that appears on screen of the controller.  
Refers to a related document, or is used for emphasis.  
Italic  
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Contents  
Agilent E5252A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6  
2. Installation  
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11  
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12  
E5255A Configuration Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13  
To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17  
To Connect GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17  
Agilent E5250A User’s Guide, Edition 9  
Contents - 1  
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Contents  
3. Executing Self-Test and Leak Test  
Using the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10  
4. Setting up Measurement Environment  
Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3  
Connector Plates for the E5252A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3  
Connecting 8-Channel Shielded Coaxial Cable . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5  
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5  
To Connect Connectors to DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13  
Connecting the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15  
To Connect Instruments to Input Connectors . . . . . . . . . . . . . . . . . . . . . . . . . 4-15  
To Connect Bias Source to the E5255A Bias Input . . . . . . . . . . . . . . . . . . . . 4-18  
To Connect GNDU to the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18  
Connecting the E5250A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20  
Contents - 2  
Agilent E5250A User’s Guide, Edition 9  
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Contents  
To Connect the E5252A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20  
To Connect the E5255A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22  
5. Controlling the E5250A  
Confirming the E5250A Card Configurations . . . . . . . . . . . . . . . . . . . . . . . . 5-28  
Saving/Loading the Setup Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-42  
6. Programming the E5250A  
SCPI Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3  
SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4  
Agilent E5250A User’s Guide, Edition 9  
Contents - 3  
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Contents  
Controlling Relay Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12  
Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29  
Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32  
Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32  
Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4  
:DIAGnostic Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15  
:ROUTe Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-20  
:SYSTem Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42  
Contents - 4  
Agilent E5250A User’s Guide, Edition 9  
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Contents  
Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50  
Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54  
Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55  
8. VXIplug&play Driver  
System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3  
Installing VXIplug&play Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4  
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17  
Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24  
Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35  
10. Specifications  
11. Error Messages  
Agilent E5250A User’s Guide, Edition 9  
Contents - 5  
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Contents  
12. SCPI Command Summary  
Contents - 6  
Agilent E5250A User’s Guide, Edition 9  
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1
Introduction  
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Introduction  
This chapter gives an overview of Agilent E5250A, E5252A, and E5255A.  
“Agilent E5250A Product Description”  
“Agilent E5252A Product Description”  
“Agilent E5255A Product Description”  
“Options and Accessories”  
1-2  
Agilent E5250A User’s Guide, Edition 9  
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Introduction  
Agilent E5250A Product Description  
Agilent E5250A Product Description  
Agilent E5250A Low Leakage Switch Mainframe is a computer-controlled  
switching matrix mainframe designed for semiconductor dc characteristics  
measurement applications. The E5250A has four slots for installing the modules  
(plug-in cards) listed in Table 1-1.  
These cards can be used in various switching matrix configurations in the E5250A.  
For example, using four E5252As, you can configure a maximum 10-input  
48-output switching matrix, or using four E5255As, you can configure a maximum  
2-input × 96-output multiplexer.  
Table 1-1  
Available Plug-in Cards for E5250A  
Model No.  
Description  
E5252A  
E5255A  
10×12 Matrix Switch  
24 (8×3) Channel Multiplexer  
Figure 1-1  
E5250A Front Panel  
Agilent E5250A User’s Guide, Edition 9  
1-3  
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Introduction  
Agilent E5250A Product Description  
Front Panel Tour  
The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in  
Figure 1-1.  
LINE key  
Line LED  
Used to turn the E5250A on or off.  
Turns on when the E5250A is turned on.  
Local/Self Test key If "Remote" LED is on, pressing this key releases the  
E5250A from remote GPIB control by an external controller.  
If "Remote" LED is off, pressing this key executes the Relay  
Test. Before pressing this key, make sure the Relay Test  
Adapter is connected. For details of Relay Test, refer to  
Chapter 3. During Relay Test execution, the LED in this key  
is ON.  
Remote LED  
Turns on when the E5250A is in the GPIB remote status.  
System Fail LED  
Turns on if system error occurs in the E5250A. Contact your  
nearest Agilent Technologies Service Center.  
Fail LED  
Turns on if the E5250A fails Self-test (including Relay Test).  
If this LED turns on after executing Relay Test, a plug-in  
card may be defective. And if this LED turns on after turning  
the E5250A on again, the E5250A is defective. If so, contact  
your nearest Agilent Technologies Service Center.  
Rear Panel Tour  
Rear panel of the E5250A is shown in Figure 1-2. The E5250A has 4 slots for  
installing plug-in cards, and 10 input connectors for connecting measurement cables  
from instruments.  
SMU INPUT  
SMU INPUT connectors are for semiconductor dc  
characteristics measurements.  
The E5250A has six SMU INPUT ports, which are triaxial type  
connectors. The connectors can also be used for a maximum  
three Kelvin connection inputs by coupling two ports as  
follows:  
SMU INPUT 1 and 2  
SMU INPUT 3 and 4  
SMU INPUT 5 and 6  
1-4  
Agilent E5250A User’s Guide, Edition 9  
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Introduction  
Agilent E5250A Product Description  
AUX INPUT  
AUX INPUT connectors are for C-V measurements, pulse  
input, and so on.  
The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2.  
These are BNC type connectors.  
The AUX INPUT connectors are used only with the E5252A  
and are not used with the E5255A.  
CAUTION  
The maximum measurement voltage that can be applied to any input terminal is  
±200 Vdc. The maximum measurement current is 1 Adc at ±200 Vdc. The  
maximum voltage that can be applied between input terminals is 300 Vdc. Do not  
apply an input signal over these limits to the E5250A inputs. If you do, the E5250A  
will be damaged.  
If you use a bias source that has current limit capability, set the bias source current  
limit to less than 1 Adc.  
Figure 1-2  
E5250A Rear Panel  
Agilent E5250A User’s Guide, Edition 9  
1-5  
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Introduction  
Agilent E5252A Product Description  
Agilent E5252A Product Description  
The E5252A 10×12 Matrix Switch is a 10-input to 12-output switching matrix card  
for the E5250A. The E5252A is designed for semiconductor dc parametric  
measurement applications that need to switch some instruments connected to  
Device Under Test (DUT), or need to scan instrument input/output for many DUTs,  
automatically.  
The E5250A can be installed with maximum four E5252As. And the input terminals  
of the E5252As are connected together inside the E5250A. So, the E5250A can  
configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and  
10×48 matrix (four E5252As). The E5252A block diagram and output connectors  
are shown in Figure 1-3 and Figure 1-4.  
Figure 1-3  
E5252A Block Diagram  
1-6  
Agilent E5250A User’s Guide, Edition 9  
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Introduction  
Agilent E5252A Product Description  
Input Ports  
The E5252A has 10 input ports via the E5250A.  
Input paths for SMU1 and SMU2 are designed for low current  
measurement.  
There are actually only six input paths, so two of the input paths  
are shared by three ports each as follows:  
SMU5, HF1, and CV1 ports share same input path  
SMU6, HF2, and CV2 ports share same input path  
So, for these two input paths, you can only use one input port at  
a time. For example, you cannot use HF1 and CV1 input ports  
at the same time.  
Output Ports  
The E5252A has 12 output ports. Two ports can be coupled for  
Kelvin connection output for a maximum of six Kelvin outputs:  
OUTPUT1 and OUTPUT2  
OUTPUT3 and OUTPUT4  
OUTPUT5 and OUTPUT6  
OUTPUT7 and OUTPUT8  
OUTPUT9 and OUTPUT10  
OUTPUT11 and OUTPUT12  
The output ports are triaxial connectors.  
Figure 1-4  
E5252A Output Ports  
WARNING  
Do not touch the force and guard terminals of the output connectors while the  
E5250A is turned on. Dangerous voltages up to the maximum input voltage  
may be present at the output connectors.  
Agilent E5250A User’s Guide, Edition 9  
1-7  
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Introduction  
Agilent E5255A Product Description  
Agilent E5255A Product Description  
The E5255A 24 (8×3) Channel Multiplexer is a 2-input to 24-output multiplexer  
card for the E5250A. The E5255A consists of 3 blocks (three 2×8 multiplexers). So,  
one E5255A can be configured as a 2×8 multiplexer, 2×16 multiplexer, or 2×24  
multiplexer. "2-input" means one BIAS input and one IV input.  
The E5255A is designed for semiconductor device reliability testing which needs to  
automatically scan instrument input/output for many DUTs.  
A maximum of four E5255As can be installed in the E5250A, which can use the  
multiplexers in several configurations. For example, the E5250A can configure  
twelve 8-output multiplexers, six 16-output multiplexers, four 24-output  
multiplexers, three 32-output multiplexers, two 48-output multiplexers, or one  
The E5255A block diagram is shown in Figure 1-5.  
BIAS Input  
The BIAS INPUT ports are used to apply ac or dc bias to DUT.  
BIAS INPUT ports are BNC connectors. Each BIAS INPUT  
port is assigned to a 2×8 multiplexer block as shown in Table  
1-2. And you can make internal connections to connect a BIAS  
INPUT port to multiple blocks. Refer to Chapter 2.  
IV Input  
IV input is used for measuring/forcing dc current/voltage. You  
can connect the IV input to desired SMU INPUT connector  
(SMU1 to SMU6) of the E5250A by making an internal  
connection. Refer to Chapter 2. The E5250A AUX INPUT  
connectors are not used with the E5255A.  
OUTPUT  
Connectors  
The E5255A has three 8-channel coaxial output connectors as  
shown in Figure 1-6. Each output connector is assigned to a 2×8  
multiplexer as shown in Table 1-2.  
1-8  
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Introduction  
Agilent E5255A Product Description  
Resistors  
Resistors connected between BIAS path and IV path are for  
protecting DUT from electrical damage. When shipped from  
factory, 0 Ω resistance is used in the E5255A. You can easily  
replace with desired resistors. Refer to Chapter 2. The  
following resistors are furnished with the E5255A:  
0 Ω resistors (3 sets with 10 resistors in each set)  
1.2 kΩ resistors (3 sets with 10 resistors in each set)  
22 kΩ resistors (3 sets with 10 resistors in each set)  
If you replace initial 0 Ω resistors with other resistors, you must  
cut the initial resistors. Then, if you need 0 Ω resistors again,  
use the ones listed above.  
WARNING  
Be careful about the following when selecting protective resistors:  
If only one E5255A is installed in the mainframe, total power consumption  
by resistors must be less than 16W.  
If multiple E5255As are installed in the mainframe, total power  
consumption by resistors must be less than 32W.  
Consider the current flows to resistor when DUT shorts, and make sure the  
power consumption by resistor will be within specification of resistor.  
Do not use resistors that have specifications inadequate for your  
applications, which will result in resistors heating up, burning, or smoking.  
Be careful about the heating of the rear panel of mainframe or plug-in card,  
which may be heated by resistors, even if you follow this warning.  
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Introduction  
Agilent E5255A Product Description  
Figure 1-5  
E5255A Block Diagram  
BLOCK 1  
BIAS Input 1  
Resistor  
IV Input 1  
Output  
1
2
3
4
5
6
7
8
BLOCK 2  
BIAS Input 2  
Resistor  
IV Input 2  
Output  
9
10  
11 12  
13  
14  
15  
16  
BLOCK 3  
BIAS Input 3  
Resistor  
IV Input 3  
Output  
17 18  
19  
20  
21 22  
23  
24  
1-10  
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Introduction  
Agilent E5255A Product Description  
Table 1-2  
E5255A Input/Output Connectors  
OUTPUT  
Connector  
(Location)  
2×8 multiplexer  
BIAS INPUT  
(Port No.)  
Output Port No.  
Block No.  
Block1  
Block2  
Block3  
BIAS1 (51)  
BIAS2 (52)  
BIAS3 (53)  
Output 1 to 8  
Output 9 to 16  
Output 17 to 24  
Left  
Center  
Right  
Figure 1-6  
E5255A BIAS INPUT Connectors and OUTPUT Connectors  
WARNING  
CAUTION  
Do not touch the force and guard terminals of the OUTPUT connectors while  
the E5250A is turned on. Dangerous voltages up to the maximum input voltage  
may be present at the OUTPUT connectors.  
The maximum voltage that can be applied to any input terminal is ±200 Vdc. The  
maximum current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied  
between input terminals is 300 Vdc. Do not apply an input signal over these limits to  
the E5255A inputs. If you do, the E5255A will be damaged.  
If you use a bias source that has current limit capability, set the bias source current  
limit to less than 1 Adc.  
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Introduction  
Options and Accessories  
Options and Accessories  
This section lists the options and accessories available for the E5250A.  
Table 1-3 lists the options available for the E5250A.  
Options  
Table 1-3  
Model  
Number  
Option Item  
Description  
E5250A  
Low Leakage Switch Mainframe  
Relay Test Adapter  
E5250A-301  
E5250A-A6J  
E5250A-UK6  
ANSI Z540 compliant calibration  
Commercial cal. certificate w/ test data  
1-12  
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Introduction  
Options and Accessories  
Table 1-4 lists accessories furnished with the E5250A, E5252A, and E5255A.  
Table 1-4  
Furnished Accessories  
Model  
Number  
Part Number  
Description  
Qty.  
E5250A  
E5250-90000 Agilent E5250A User's Guide  
1
1
E5250A VXI Plug&Play Driver Disk a  
E5250-17001  
E5250-17003 Agilent E5250A Program Disk. See next  
page. (LIF formatted, 3.5in diskette)  
1
04155-60007 Module Extractor  
1
1
1
1
1
1
3
1
8710-2151  
Wrench (for removing plug-in card)  
Power Cable  
E5252A  
E5255A  
E5252-90000 Agilent E5252A Installation Guide  
8710-2151 Wrench (for removing plug-in card)  
E5255-90000 Agilent E5255A Installation Guide  
1250-0929 BNC Short Cap  
E5255-65000 BIAS Input Modification Kit  
(BNC Open Cap × 2, wire × 2)  
E5255-65001 0 Ω Resistor Set (10 resistors)  
E5255-65002 1.2 kΩ Resistor Set (10 resistors)  
E5255-65003 22 kΩ Resistor Set (10 resistors)  
3
3
3
1
8710-2151  
Wrench (for removing plug-in card)  
a. The Agilent E5250A VXIplug&play driver supports Windows XP Pro-  
fessional, Windows 2000, Windows NT 4.0, Windows 98, and Windows  
95.  
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Introduction  
Options and Accessories  
Contents of the E5250A Program Disk:  
Virtual Front  
Panel Utility  
Interactive control program for the E5250A. Runs on Agilent  
4155/4156's built-in IBASIC controller. Refer to Chapter 5.  
VFP Data Upload  
Library  
Subprogram library used for uploading the E5250A control data  
(made by Virtual Front Panel Utility) to your program. Runs on  
HP BASIC. Refer to Chapter 6.  
Capacitance  
Compensation  
Routine  
Subprogram to compensate for capacitance error caused by the  
E5250A and E5252A. Runs on HP BASIC. This subprogram is  
used to compensate the capacitance data measured by Agilent  
4284A Precision LCR Meter. Refer to Chapter 6.  
Sample Programs Three sample programs: one for Vth and C measurement using  
the E5252A, and two for HCI test and analysis using the  
E5255A. Runs on HP BASIC. Refer to Chapter 9.  
Self-test Utility  
Self-test and relay test program for the E5250A. Runs on the  
4155/4156's built-in IBASIC controller. Refer to Chapter 3.  
1-14  
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Introduction  
Options and Accessories  
Table 1-5 lists accessories available for the E5250A.  
Table 1-5  
Available Accessories  
Model  
Number  
Option  
Item  
Description  
10×12 Matrix Switch  
E5252A  
E5255A  
16494A  
24 (8×3) Channel Multiplexer  
Triaxial Cable  
16494A-001 1.5 m length  
16494A-002 3 m length  
16494A-003 80 cm length  
16494B  
Kelvin Triaxial Cable (4156 kelvin to E5250 kelvin)  
16494B-001 1.5 m length  
16494B-002 3 m length  
16494B-003 80 cm length  
16494C  
16494D  
16494E  
Kelvin Triaxial Cable (4142 kelvin to E5250 kelvin)  
16494C-001 1.5 m length  
16494C-002 3 m length  
8 Channel Shielded Coaxial Cable  
16494D-001 1.5 m length  
16494D-002 3 m length  
Wide Temperature 8 Channel Shielded Coaxial Cable  
16494E-001 3m length  
Connector plate with 6 connectors for 16494D  
16495C  
16495D  
16495E  
16495F  
Connector plate with 12 connectors for 16494D  
Blank plate  
Connector plate with 12×triaxial, intlk, GNDU  
16495F-001 Bulkhead feedthrough connectors (female to female)  
16495F-002 Connectors to contacts for soldering  
Connector plate with 24×triaxial, intlk, GNDU  
16495G-001 Bulkhead feedthrough connectors (female to female)  
16495G-002 Connectors to contacts for soldering  
16495G  
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Introduction  
Options and Accessories  
1-16  
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2
Installation  
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Installation  
This chapter describes requirements to install Agilent E5250A and the tasks for  
installation, and is organized into the following three sections:  
“To Inspect the E5250A and Accessories” describes how to inspect the E5250A  
when you receive it.  
“Requirements” explains the information required for operating, storing, and  
shipping the E5250A.  
“Installing the E5250A” describes how to install the E5250A.  
“Maintenance” describes about performance verification and cleaning.  
WARNING  
The maximum input voltage of the E5250A is ±200 V. And dangerous voltages  
may be present at the E5250A output terminals. To prevent electric shock, you  
must observe the following safety precautions when using the E5250A.  
• Use a three-conductor ac power cable to connect cabinet (if used) and the  
E5250A to an electric ground (safety ground).  
• If you need to touch the force and guard terminals of the output connector,  
turn off the E5250A and discharge any capacitors whenever possible.  
• Warn workers around the E5250A about dangerous conditions.  
2-2  
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Installation  
To Inspect the E5250A and Accessories  
To Inspect the E5250A and Accessories  
When you receive and open the box that contains the E5250A, check the following:  
Before unpacking any components, inspect all boxes for any signs of damage  
that might have occurred during shipment such as:  
Dents  
Scratches  
Cuts  
Water marks  
When you open the boxes that contain the E5250A, check the components  
against the contents lists that are attached to the boxes.  
After installing the E5250A, check the E5250A operation by executing self-test  
shown in Chapter 3.  
If anything is wrong, notify your local Agilent Technologies sales office.  
When shipping the E5250A  
When you unpack the E5250A, retain all packing materials for future use. If it  
becomes necessary to reship the E5250A, repack it in the original packing materials  
and shipping carton.  
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Installation  
Requirements  
Requirements  
This section describes the following requirements for the E5250A.  
“Power Requirements”  
“Power Cable”  
“Operating Environment”  
“Storage and Shipping Environment”  
Power Requirements  
CAUTION  
Before applying ac line power to the E5250A, ensure that the correct power cable is  
used.  
The E5250A can operate from any single-phase ac power source supplying 100 to  
240 V ±10 % in the frequency range from 47 to 63 Hz. The maximum power  
consumption is 100 VA. For details, refer to Chapter 10, “Specifications.”  
Power Cable  
In accordance with international safety standards, this instrument is equipped with a  
three-wire power cable. When connected to an appropriate ac power outlet, this  
cable grounds the instrument frame. The type of power cable shipped with each  
instrument depends on the country of destination. Refer to the following table for  
the part numbers of the power cables available.  
If the plug on the cable does not fit the power outlet, or the cable is to be attached to  
a terminal block, cut the cable at the plug end and re-wire it. This work should be  
performed by a qualified electrician all local electrical codes being strictly observed.  
The color coding used in the cable will depend on the cable supplied. If a new plug  
is to be connected, it must meet local safety requirements and include the following  
features:  
Adequate load-carrying capacity. (refer to Chapter 10, “Specifications.”)  
Ground connection.  
Cable clamp.  
2-4  
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Installation  
Requirements  
Plug: NEMA 5-15P,  
125 V, 10 A  
Cable: 8120-6825,  
8120-1378,  
Plug: CEE 7 sheet  
VII, 250 V, 10 A  
Cable: 8120-4519,  
8120-1689  
Plug: AS 3112, 250 V,  
10 A  
Cable: 8120-4419,  
8120-1369  
Plug: BS 1363/A,  
250 V, 10 A  
Cable: 8120-4420,  
8120-1351  
8120-1395  
Plug: NEMA 6-15P,  
250 V, 10 A  
Cable: 8120-3996,  
8120-0698  
Plug: IS 1293 and IS  
6538, 250 V, 10 A  
Cable: 8121-1582,  
8120-4211  
Plug: SEV 1011, 250  
V, 10 A  
Cable: 8120-2104  
Plug: SR 107-2-D1,  
250 V, 10 A  
Cable: 8120-2956  
Plug: JIS C 8303,  
125 V, 12 A  
Cable: 8121-0743,  
8120-4753  
Plug: CEI 23-16, 250  
V, 10 A  
Cable: 8120-6978  
Plug: IRAM 2073-  
10A, 250 V, 10 A  
Cable: 8120-6870  
Plug: Israel SI 32, 250  
V, 10 A  
Cable: 8120-5182  
Plug: CS 0017:2003,  
250 V, 10 A  
Cable: 8120-8871,  
8120-0674,  
Plug: CNS 10917-2,  
125 V, 10 A  
Cable: 8121-1635,  
8120-6825  
Plug: GB 1002 figure  
3 , 250 V, 10 A  
Cable: 8120-8376  
Plug: SANS 164-1,  
250 V, 10 A  
Cable: 8121-0564,  
8120-4211  
8121-1638  
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Installation  
Requirements  
WARNING  
For protection from electrical shock, the power cable ground must not be  
defeated.  
Operating Environment  
The E5250A must be operated within the following environmental conditions:  
Temperature: 5 °C to 40 °C (41 °F to 104 °F)  
Humidity: 5 % to 80 % RH at 40 °C (104 °F), non-condensing  
Altitude: 0 m to 2000 m  
Storage and Shipping Environment  
The E5250A should be stored or shipped in environments within the following  
limits:  
Temperature: 40 °C to 70 °C (40 °F to 158 °F).  
Humidity: 5 % to 90 % RH at 65 °C (149 °F).  
Altitude: 0 m to 15,240 m  
Protect the E5250A from temperature extremes to prevent condensation from  
forming inside the E5250A.  
2-6  
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Installation  
Installing the E5250A  
“To Configure E5255A”  
“E5255A Configuration Examples”  
“To Set GPIB Address”  
“To Connect GPIB Cable”  
WARNING  
CAUTION  
To prevent electrical shock, turn off the mainframe and remove the power  
cable before starting the instruction.  
Be careful about the module pins used for internal connection to the mainframe. The  
pins can be damaged easily.  
Use clean handling and anti-static procedures when removing, configuring, and  
installing the modules. The modules contain components that can be damaged by  
static electricity.  
NOTE  
Plug-in module is shipped from the factory after the specifications are confirmed.  
Agilent can guarantee that the modules will function and that the module  
performance is designed to meet its specifications. However, if you have any  
trouble, contact your nearest Agilent Technologies service center.  
If you require that the modules be guaranteed to their specifications (for ISO  
compliance, etc.), then you must perform a calibration on the instrument (modules  
and mainframe together). For calibration, contact your nearest Agilent Technologies  
service center.  
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Installation  
Installing the E5250A  
To Install Plug-in Card  
The E5252As and E5255As are plug-in cards (modules). You install these cards in  
card slots 1 to 4 of the E5250A. The following procedure explains the card  
installation and removal:  
1. Turn off the E5250A, then wait at least 10 seconds before you remove or install  
a card.  
2. Remove a blank panel or a card attached to the slot you want to install a new  
card, as follows.  
To remove blank panel, do as follows:  
a. Loosen the screws on both the left and right edges of the blank panel by  
using the wrench furnished with the E5250A.  
b. Remove the blank panel.  
To remove a card, do as follows:  
a. Screw the Module Extractor into the screw hole for the extractor. See Figure  
2-1. Module Extractor is furnished with the E5250A.  
b. Loosen the screws on left and right edges of the card by using the wrench  
furnished with the E5250A.  
c. Gently pull the Module Extractor to extract the card from the card slot.  
3. Install the card as follows:  
a. Align the card with the left and right slot guide rails. The component side  
should be facing up.  
b. Push the card into the slot until you feel it seat firmly into the connector at  
the back of the card slot.  
c. Screw in the screws on the left and right edges of the card by using the  
wrench furnished with the E5250A.  
4. Execute the Relay Test and Leak Test:  
After installing the cards, perform the Relay Test and Leak Test described in  
Chapter 3 to check the operation and leak current of the E5250A with installed  
cards.  
CAUTION  
If you want to confirm that the E5250A with installed cards meets its specifications,  
return the E5250A with installed cards to your nearest Agilent Technologies Service  
Center to do the Performance Verification.  
2-8  
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Installation  
Installing the E5250A  
Figure 2-1  
Module Extractor and Location of the Screw Hole  
Agilent E5252A  
Screw Hole  
for Module Extractor  
Module Extractor  
Agilent E5255A  
To Install Blank Panel  
CAUTION  
To prevent thermal damage to the E5250A cards, be sure that blank panels (Agilent  
part number E5250-60003) are installed in all unused slots.  
If the blank panel is not installed to cover an unused slot, install the blank panel as  
follows:  
1. Align the blank panel over the unused slot.  
2. Screw in the screws on the left and right edges of the blank panel by using the  
wrench furnished with the E5250A.  
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Installation  
Installing the E5250A  
To Configure E5255A  
The Agilent E5255A has three 2-input 8-output multiplexers. You can configure  
several multiplexers by modifying some internal connections. Component locations  
on the E5255A are shown in Figure 2-2, and the relationship of the multiplexer  
blocks and the components is shown in Table 2-1. Table 2-2 shows the initial setting  
of the E5255A internal connections. The setting does not depend on the slot in  
which the module is installed.  
Table 2-1  
Multiplexer  
Multiplexer Blocks and Components  
Resistor  
holder  
IVin  
cable  
IVout  
connector  
BIASin  
BIASout  
DIP SW  
block  
Block 1  
Block 2  
Block 3  
holder 1  
holder 2  
holder 3  
-
BIASout1  
BIASout2  
-
IVin1  
IVin2  
IVin3  
IVout1  
IVout2  
IVout3  
DIP SW1  
DIP SW2  
DIP SW3  
BIASin2  
BIASin3  
Table 2-2  
Agilent E5255A Initial Setup  
Block number  
IVin cable connection  
BIASin/BIASout  
Protective resistor  
1
2
3
SMU1  
SMU2  
SMU3  
BIAS INPUT 51  
BIAS INPUT 52  
BIAS INPUT 53  
0 Ω  
0 Ω  
0 Ω  
To Modify IV Input  
IV input connection is defined by the connection of IVin cable and the setting of  
DIP switch shown in Figure 2-2. For actual examples of modifications, see  
“E5255A Configuration Examples”.  
Each DIP switch has four bit switches. Bits 1 to 3 are used to specify which SMU  
input connector is connected to the IV input. Bit 4 of DIP switch is used to specify  
whether the protective resistors are 0 Ω or not. The DIP switches must be set  
properly after you complete the internal connection. Make sure you set the DIP  
switches correctly. If not, dangerous voltages may be applied to unexpected output  
connectors.  
2-10  
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Installation  
Installing the E5250A  
Figure 2-2  
Agilent E5255A Component Locations  
Module pins  
SMU input connectors  
DIP SW3  
DIP SW2  
0: OFF  
1: ON  
DIP SW1  
IVin cable  
DIP SW setting  
connection BIT1 BIT2 BIT3  
IVout1  
IVout2  
connector  
IVout3  
connector  
SMU1  
SMU2  
SMU3  
SMU4  
SMU5  
SMU6  
1
0
1
0
1
0
0
1
1
0
0
1
0
0
0
1
1
1
connector  
IVin1  
cable  
IVin2  
cable  
IVin3  
cable  
Block 1  
Block 2  
Block 3  
Resistors  
BIT4  
Resistor holder 3  
Resistor holder 1  
Resistor holder 2  
0 ohm  
other  
0
1
Screws  
(Total 48)  
BIASin2  
terminal  
BIASin3  
terminal  
Resistors  
(Total 24)  
BIASout2  
terminal  
BIASout1  
terminal  
To B IAS INPUT 53  
To BIAS INPUT 51  
To BIAS INPUT 52  
To Modify BIAS Input  
Each multiplexer block has an independent BIAS input. You can change the BIAS  
input internally using the BIASin/BIASout terminals shown in Figure 2-2, or  
externally using the BIAS INPUT connectors. For actual examples of modifications,  
see “E5255A Configuration Examples”.  
To Use Multiplexer Blocks on another E5255A  
When a module is installed in a mainframe slot, six module pins are connected to  
the mainframe internal bus. So, if multiplexers on different E5255As use the same  
module pin, the IV inputs are connected together via the internal bus.  
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Installation  
Installing the E5250A  
For example, if a mainframe installs four E5255As which the IVin1 cable is  
connected to the SMU1 input connector and the IVin2 and IVin3 cables are not  
connected, the E5250A configures a 32-output multiplexer that uses the SMU  
INPUT 1 connector as the IV input.  
To Mount Protective Resistors  
To protect the device (DUT) from electrical damage, you can mount resistors  
between the IV input and BIAS input of multiplexer. The following procedure  
shows how to mount the resistors. See Figure 2-2 for the component locations.  
When shipped from the factory, 0 Ω resistors are mounted, and bit 4 of all DIP  
switches is set to OFF (0).  
1. Cut the original resistors (0 Ω) off.  
2. Loosen the screws from both sides of the resistor holder.  
3. Put resistors in holder, and tighten screws. And confirm that the resistors are  
held properly. Resistors should be mounted on each multiplexer block that you  
will use (8 resistors/block).  
4. Set bit 4 to ON (1) for the DIP switch of the related block. For example, if you  
mount resistors for Block 1 and 2 multiplexers, set bit 4 to ON for DIP SW1 and  
SW2.  
To Select Protective Resistors  
Be careful about the following when selecting protective resistors. Also, be careful  
about the heating of the rear panel of mainframe or plug-in module, which may be  
heated by resistors, even if you follow this warning.  
If only one E5255A is installed in the mainframe:  
Total power consumption by resistors must be less than 16W.  
If multiple E5255As are installed in the mainframe:  
Total power consumption by resistors must be less than 32W.  
Consider the current flows to resistor when DUT shorts, and make sure the  
power consumption by resistor will be within specification of resistor. Do not  
use resistors that have specifications inadequate for your applications, which  
will result in resistors heating up, burning, or smoking.  
2-12  
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Installation  
The following example configurations are described:  
“24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)”  
“24-output multiplexer (1-BIAS input, 1-IV input, 1 module)”  
“96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)”  
24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)  
To make this multiplexer, you need a E5255A. See Figure 2-3 for example setup.  
The example uses the SMU INPUT 1 connector as the IV input, and uses 0 Ω  
resistors.  
Figure 2-3  
24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)  
1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.  
2. Connect the IVin2 cable to the IVout1 connector.  
3. Connect the IVin3 cable to the IVout2 connector.  
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Installation  
Installing the E5250A  
4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.  
5. Install the module into the slot 1 of the mainframe. For installing module, see  
“To Install Plug-in Card” on page 2-8.  
24-output multiplexer (1-BIAS input, 1-IV input, 1 module)  
To make this multiplexer, you need a E5255A, two wires (furnished), and two BNC  
open caps (furnished). See Figure 2-4 for example setup. The example uses the  
SMU INPUT 1 connector as the IV input, and uses 0 Ω resistors.  
Figure 2-4  
24-output multiplexer (1-BIAS input, 1-IV input, 1 module)  
1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.  
2. Connect the IVin2 cable to the IVout1 connector.  
3. Connect the IVin3 cable to the IVout2 connector.  
4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.  
2-14  
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Installation  
Installing the E5250A  
5. Connect wires between BIASout1 and BIASin2, also between BIASout2 and  
BIASin3.  
6. Install the module into the slot 1 of the mainframe. For installing module, see  
“To Install Plug-in Card” on page 2-8.  
7. Connect BNC open caps to BIAS INPUT 52 and 53 connectors. So, the BIAS  
INPUT 51 connector will be the BIAS input.  
This example internally connects all BIAS INPUT connectors together. So, when  
bias is applied to a BIAS INPUT connector, the bias will also be applied to all the  
other BIAS INPUT connectors.  
Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors.  
Otherwise, you will be shocked if you touch the connectors while bias is applied.  
DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and  
the Bias Source will be destroyed when the bias is applied.  
To connect BIAS inputs externally.  
You can use the BIAS INPUT connectors instead of the BIASin/out internal  
connections shown above. See Figure 2-5. This example uses three BNC cables and  
two BNC-T type (f-m-f) adapters. Recommended parts for the BNC-T type adapters  
are listed below.  
Agilent part number 1250-0781: female(side)-male(center)-female(side)  
Agilent part number 1250-2405: male(side)-female(center)-female(side)  
Figure 2-5  
Interconnection of BIAS INPUT Connectors  
Agilent E5255A  
BNC T-adapter  
To Bias Source  
BNC cable  
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Installation  
Installing the E5250A  
96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)  
To make this multiplexer, you need four E5255As, eight wires (furnished), five  
BNC open caps (furnished), and three BNC cables. The example uses the SMU  
INPUT 1 connector as the IV input, and uses 0 Ω resistors.  
1. See “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)” and make  
four 24-output multiplexers. Then the IVin1 cable on all modules must be  
connected to the SMU1 input connector.  
2. Install the modules into the mainframe. For installing module, see “To Install  
Plug-in Card” on page 2-8.  
3. Connect BNC open caps to the BIAS INPUT 51 connector of the module in the  
slot 1 and all BIAS INPUT 52 connectors.  
4. Connect BNC cables between the following connectors:  
BIAS INPUT 51 (slot 4) and BIAS INPUT 53 (slot 3)  
BIAS INPUT 51 (slot 3) and BIAS INPUT 53 (slot 2)  
BIAS INPUT 51 (slot 2) and BIAS INPUT 53 (slot 1)  
So, the BIAS INPUT 53 connector of the module in the slot 4 will be the BIAS  
input.  
Figure 2-6  
96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)  
Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors.  
Otherwise, you will be shocked if you touch the connectors while bias is applied.  
DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and  
the Bias Source will be destroyed when the bias is applied.  
2-16  
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Installation  
Installing the E5250A  
To Set GPIB Address  
Every device on the GPIB bus must have a unique address.  
If you need to change the GPIB address of the E5250A, make sure the E5250A is  
turned off. With a small flatblade screwdriver, set the GPIB ADDRESS switch on  
the rear panel to the new address (0 to 30).  
The new GPIB address is recognized only at power on. The E5250A leaves the  
factory with the GPIB address set to 22.  
To Connect GPIB Cable  
To connect the E5250A with a computer or peripheral device via GPIB (IEEE Std.  
488), connect an GPIB cable between the GPIB connector on the E5250A rear panel  
and the GPIB connector on the peripheral device.  
Including the controller, a total of 15 GPIB interfaces can be connected on the same  
GPIB bus. The following are rules for connecting GPIB interfaces:  
If total number of interfaces 10:  
Max. total cable length = number of interfaces × 2 m.  
If total number of interfaces > 10:  
Max. total cable length = 20 m.  
Maximum cable length between interfaces is 4 m.  
Star connection and cascade connection are allowed. Loop connection is not  
allowed.  
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Installation  
Maintenance  
Maintenance  
Maintenance should be performed periodically to keep the E5250A in good  
condition.  
Performance Verification  
Performance verification must be performed periodically so that the instruments  
satisfy the specifications, and keep a good condition. It is recommended to perform  
the performance verification once a year at least. For the performance verification,  
contact your nearest Agilent Technologies Service Center. Trained service personnel  
will perform the performance verification.  
Cleaning  
Before performing cleaning, turn off the instrument, and disconnect power cable  
from the rear panel. Use a dry cloth to clean the external case parts.  
To prevent electrical shock, do not perform cleaning when the instrument is turned  
on, and do not use a wet cloth.  
2-18  
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3
Executing Self-Test and Leak Test  
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Executing Self-Test and Leak Test  
This chapter describes how to execute the Self-Test and the Leak Test.  
The Self-Test consists of three tests that check the operation of Agilent E5250A  
firmware, LEDs, and key that are on the E5250A front panel, and the relays on the  
cards installed in the E5250A.  
Self-Test should be executed every day as an operation check before using the  
E5250A.  
The Leak Test checks leakage current of cards installed in the E5250A.  
Leak Test can be executed by using Agilent 4155/4156 Semiconductor Parameter  
Analyzer with the Self-Test Utility program that is on the E5250A Program Disk  
furnished with the E5250A.  
NOTE  
Performance Verification  
The Self-Test and the Leak Test cannot be used to verify the specifications of the  
E5250A, E5252A, and E5255A.  
To verify the specifications, return the E5250A with the cards installed to your  
nearest Agilent Technologies Service Center. The performance verification should  
be done by service personnel who are trained to service the E5250A, and should be  
performed once a year.  
“Executing Self-Test” introduces the test items of the Self-Test and describes  
how to execute the Self-Test.  
“Using the Self-Test Utility” describes how to execute the Self-Test and the  
Leak Test interactively from Agilent 4155/4156 semiconductor parameter  
analyzer.  
3-2  
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Executing Self-Test and Leak Test  
Executing Self-Test  
Executing Self-Test  
The Self-Test of the E5250A consists of the following three tests:  
Table 3-1  
E5250A Self-Test Items  
Test Item  
Description  
Executed by  
Refer to  
Controller Checks the operation of Turning on the E5250A.  
page 3-4  
Test  
the E5250A firmware.  
Entering SCPI Command. page 3-6  
Using Self-Test Utility.  
page 3-10  
page 3-6  
page 3-10  
Front  
Checks the operation of Entering SCPI Command  
the LEDs and key that  
Panel  
Interface  
Test  
Using Self-Test Utility.  
are on the E5250A front  
panel.  
Relay Test Checks the operation of Pressing the Local/  
page 3-4  
the relays on the cards  
installed in the E5250A.  
Self Test key.  
Entering SCPI Command. page 3-6  
Using Self-Test Utility. page 3-10  
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Executing Self-Test and Leak Test  
Executing Self-Test  
To Execute Self-Test (Standalone)  
Controller Test is executed automatically when you turn on the E5250A. You  
execute the Relay Test by pressing the Local/Self Test key on the E5250A front  
panel.  
Executing the Controller Test  
1. Turn on the E5250A.  
2. Wait until the LED in the Local/Self Test key turns off.  
If System Fail LED or Fail LED stays on after executing the Controller Test, contact  
your nearest Agilent Technologies Service Center.  
Executing the Relay Test  
Requirements:  
Relay Test Adapter (E5250A-301)  
BNC Short Caps (3 caps are furnished with each E5255A)  
Procedure:  
1. Disconnect all cables from the E5250A input connectors.  
2. Open all outputs of the plug-in cards as follows: If cable is connected to output  
connector of plug-in card, open output at DUT end of cable. If end of cable is  
Kelvin connection, disconnect the cable or make non-Kelvin connection at end  
of cable.  
3. Attach the Relay Test Adapter to the E5250A input connectors as shown in  
Figure 3-1.  
4. Set switch on the Relay Test Adapter to Relay Testposition.  
5. For each E5255A card installed in the E5250A:  
a. Disconnect any cables from the BIAS INPUT connectors of the E5255A.  
b. Connect a BNC Short Cap to each E5255A BIAS INPUT connector.  
6. (If Remote LED is on, press the Local/Self Test key to return to Local control.  
The Remote LED should turn off.)  
7. Press the Local/Self Test key. The Relay Test executes.  
8. Wait until the LED in Local/Self Test key turns off.  
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Executing Self-Test and Leak Test  
Executing Self-Test  
NOTE  
If Fail LED is ON after Relay Test  
After executing the relay test, if the Fail LED turns on, the cause is one of the  
following:  
• The Relay Test Adapter is not connected or a cable is still connected to input  
connector.  
• Output is not open. See step 2 of previous procedure.  
You did not properly install the E5255A. See “To Configure E5255A” on page  
2-10.  
• A plug-in card may be defective. Contact your nearest Agilent Technologies  
Service Center.  
Figure 3-1  
Relay Test Adapter Connection  
Relay Test Adapter  
NOTE  
Settings after Relay Test  
After Relay Test, the E5250A settings are changed to same as after :SYST:CPON  
command execution.  
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Executing Self-Test and Leak Test  
Executing Self-Test  
To Execute Self-Test using External Controller  
You can execute Self-Test from an external controller by using SCPI commands in a  
program.  
This section describes the requirements, SCPI commands, and a sample program for  
Self-Test execution from an external controller. For details about the SCPI  
commands, refer to Chapter 7.  
Requirements  
Controller  
GPIB Cable  
Relay Test Adapter  
BNC Short Caps (3 caps are furnished with each E5255A)  
SCPI Commands for Self-Test  
Table 3-2 shows the SCPI commands used to execute Self-Test. Keyword of the  
SCPI command first level is :DIAG.  
The :DIAG commands ignore the E5250A channel configuration mode (NORMAL  
or AUTO).  
For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL.  
If the Fail LED turns on after executing the Self-Test, the E5250A or modules may  
be defective. Contact your nearest Agilent Technologies Service Center.  
NOTE  
Before executing Relay Test, be careful about following:  
• Attach the Relay Test Adapter to the E5250A input connectors. Refer to Figure  
3-1. Then set the switch on the adapter to the Relay Testposition.  
• Open all outputs of the plug-in cards as follows: If cable is connected to output  
connector of plug-in card, open output at DUT end of cable. If end of cable is  
Kelvin connection, disconnect the cable or make non-Kelvin connection at end  
of cable.  
• For each E5255A installed in the E5250A, connect a BNC short cap to each  
E5255A BIAS INPUT connector.  
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Executing Self-Test and Leak Test  
Executing Self-Test  
Table 3-2  
SCPI Commands for Self-Test  
Test Item  
Description  
SCPI Command  
Controller  
Test  
Executes Controller Test, :DIAG:TEST:FRAM:EXEC? CONT  
then returns test result.  
Returns test result.  
Clears test result.  
:DIAG:TEST:FRAM:STAT? CONT  
:DIAG:TEST:FRAM:CLE CONT  
:DIAG:TEST:FRAM:EXEC? FPAN  
FrontPanel Executes I/F Test, then  
Interface  
(I/F) Test  
returns test result.  
Returns test result.  
Clears test result.  
:DIAG:TEST:FRAM:STAT? FPAN  
:DIAG:TEST:FRAM:CLE FPAN  
Relay Test  
Executes Relay Test, then :DIAG:TEST:CARD:EXEC? ALL  
returns test result.  
or Card No. (1, 2, 3, or 4)  
Returns test result.  
:DIAG:TEST:CARD:STAT? ALL  
or Card No. (1, 2, 3, or 4)  
Clears test result.  
:DIAG:TEST:CARD:CLE ALLor  
Card No. (1, 2, 3, or 4)  
NOTE  
Front Panel Interface Test  
After the :DIAG:TEST:FRAM:EXEC? FPAN command is executed, the Remote,  
System Fail, Fail, and Local/Self Test LEDs on the E5250A front panel blink for  
about 10 seconds. If an LED does not blink, the LED is defective.  
Confirm that the four LEDs are blinking, then press the Local/Self Test key on the  
E5250A front panel within 10 seconds. The LEDs should stop blinking.  
If you do not press the Local/Self Test key within 10 seconds, the E5250A returns a  
fail result for the Front Panel Interface Test, which turns on the Fail LED.  
If you pressed Local/Self Test key within 10 seconds, and the Fail LED still turns on,  
it means the Local/Self Test key is defective.  
If you find any problem, contact your nearest Agilent Technologies Service Center.  
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Executing Self-Test and Leak Test  
Executing Self-Test  
Self-Test Programming Example  
This sample program is effective for an E5250A that has four cards installed. If your  
E5250A does not have four cards installed, delete the Relay Test program lines for  
the empty card slots. The program runs on HP BASIC.  
10 ! Self-Test by External Controller  
20 !  
30  
40  
50  
60  
70  
80  
90  
REAL A  
ASSIGN @Hp5250 TO 722  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE CONT"  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE FPAN"  
OUTPUT @Hp5250;":DIAG:TEST:CARD:CLE ALL"  
DISP "Press Continue to go to Controller Test."  
PAUSE  
100 ! Controller Test  
110  
120  
130  
140  
150  
160  
170  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? CONT"  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 160  
DISP "Failed. Press Continue to go to I/F Test."  
GOTO 170  
DISP "Passed. Press Continue to go to I/F Test."  
PAUSE  
180 ! Front Panel I/F Test  
190  
200  
210  
220  
230  
240  
250  
260  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? FPAN"  
DISP "Press Local/Self Test Key within 10 sec."  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 250  
DISP "Failed. Press Continue to go to Relay Test."  
GOTO 260  
DISP "Passed. Press Continue to go to Relay Test."  
PAUSE  
270 ! Relay Test  
280  
290  
300  
310  
320  
330  
340  
350  
360  
370  
380  
390  
400  
410  
420  
OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 1"  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 330  
DISP "Card 1 failed. Press Continue to test Card 2"  
GOTO 340  
DISP "Card 1 passed. Press Continue to test Card 2"  
PAUSE  
OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 2"  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 400  
DISP "Card 2 failed. Press Continue to test Card 3"  
GOTO 410  
DISP "Card 2 passed. Press Continue to test Card 3"  
PAUSE  
OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 3"  
3-8  
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Executing Self-Test and Leak Test  
Executing Self-Test  
430  
440  
450  
460  
470  
480  
490  
500  
510  
520  
530  
540  
550  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 470  
DISP "Card 3 failed. Press Continue to test Card 4"  
GOTO 480  
DISP "Card 3 passed. Press Continue to test Card 4"  
PAUSE  
OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 4"  
ENTER @Hp5250;A  
IF A=0 THEN GOTO 540  
DISP "Card 4 failed."  
GOTO 550  
DISP "Card 4 passed."  
END  
Line Number  
30 to 90  
Description  
Clears all previous test results.  
100 to 170  
180 to 260  
Executes the Controller Test, then returns test result.  
Executes the Front Panel Interface Test, then returns the test  
result.  
270 to 340  
350 to 410  
420 to 480  
490 to 550  
Executes the Relay Test for the card installed in slot 1 of the  
E5250A, then returns test result.  
Executes the Relay Test for the card installed in slot 2 of the  
E5250A, then returns test result.  
Executes the Relay Test for the card installed in slot 3 of the  
E5250A, then returns test result.  
Executes the Relay Test for the card installed in slot 4 of the  
E5250A, then returns test result.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
Using the Self-Test Utility  
The Self-Test Utility is a Self-Test program for the E5250A, and runs on the Agilent  
4155/4156's built-in IBASIC controller.  
Self-Test Utility can execute all Self-Test items listed in Table 3-1 and can also  
execute the Leak Test, which checks leakage current of the E5250A with installed  
cards. You execute the Self-Test items and Leak Test interactively (using softkeys)  
from the 4155/4156.  
This section explains the operation of the Self-Test Utility.  
“Requirements”  
“To Start the Self-Test Utility”  
“To Execute Self-Test”  
“To Execute Leak Test”  
Requirements  
The following equipment is required to execute the Self-Test Utility:  
Table 3-3  
Required Equipment  
Agilent  
Model/PartNo.  
Description  
Qty.  
Usage  
4155 or 4156  
Semiconductor  
Parameter Analyzer  
1
Executing  
Self-Test  
Utility  
10833A/B/C  
E5250-17003  
GPIB Cable  
1
1
E5250A Program  
Disk (furnished)  
E5250A-301  
Relay Test Adapter  
1
Relay Test  
(E5250-60002)  
1250-0929  
BNC Short Cap  
3 for each E5255A  
(furnished with the  
E5255A)  
3-10  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
To Start the Self-Test Utility  
1. Before turning on the 4155/4156 and E5250A, connect the GPIB cable between  
the E5250A and the 4155/4156.  
2. Turn on the 4155/4156 and E5250A.  
3. Set the 4155/4156 to "SYSTEM CONTROLLER" mode on SYSTEM:  
MISCELLANEOUS page.  
4. Insert the E5250A Program Disk into the 4155/4156 disk drive.  
5. Press the Display key twice to display the "All IBASIC" screen. This key is  
located in the IBASIC area on the 4155/4156 front panel.  
6. Select GET softkey on the 4155/4156 screen. The following is displayed:  
GET "_"  
7. Type SELFTEST between the double quotations of GET statement. Then press  
Enter key. Wait until the 4155/4156 finishes getting the file.  
8. Press Run key, which is in the IBASIC area on the 4155/4156 front panel. The  
following message is displayed:  
Input Agilent E5250A GPIB Address (default 722):?  
9. To use default GPIB address 722, just press the Enter key. If not, type the GPIB  
address of your E5250A, then press Enter key. MAIN MENU of the E5250A  
Self-Test Utility and following softkeys are displayed on the 4155/4156:  
Softkey  
Description  
SELF TEST  
LEAK TEST  
QUIT  
Displays the SELF TEST MENU.  
Displays the LEAK TEST MENU.  
Quits the Self-Test Utility.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
To Execute Self-Test  
On the MAIN MENU of the E5250A Self-Test Utility, select the SELF TEST  
softkey to display the E5250A SELF TEST MENU and following softkeys:  
Softkey  
Description  
CARD1 RELAY  
CARD2 RELAY  
CARD3 RELAY  
CARD4 RELAY  
CONTROLLER  
FRONT PANEL  
MAIN MENU  
For executing Relay Test for Card1.  
For executing Relay Test for Card2.  
For executing Relay Test for Card3.  
For executing Relay Test for Card4.  
Executes Controller Test immediately.  
Executes Front Panel I/F Test immediately.  
Returns to MAIN MENU of Self-Test Utility  
immediately.  
Also, the most recent Self-Test result (P/F/N) is displayed on the 4155/4156 screen.  
Figure 3-2  
Example of SELF TEST MENU  
Agilent E5250A Test Utility  
** SELF TEST MENU **  
CARD1 RELAY ... Start Slot1 E5255A Relay Test  
CARD2 RELAY ... Start Slot2 E5255A Relay Test  
CARD3 RELAY ... Start Slot3 E5255A Relay Test  
CARD4 RELAY ... Start Slot4 E5255A Relay Test  
CONTROLLER ... Start E5250A Controller Test  
[N]  
[N]  
[N]  
[N]  
[P]  
FRONT PANEL ... Start E5250A Front Panel UIF Test [N]  
MAIN MENU ... Return to MAIN MENU  
[P] indicates test was passed.  
[F] indicates test was failed.  
[N] indicates test was not executed.  
Prepare the relay test adapters  
before you select "CARDn RELAY" key.  
Select desired softkey.  
_
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
Executing the Controller Test  
To execute the controller test, press the CONTROLLER softkey.  
If [F]result is displayed after the test, the E5250A is defective. Contact your  
nearest Agilent Technologies Service Center.  
Executing the Front Panel Interface Test  
To execute the front panel interface test, do the following:  
1. Press the FRONT PANEL softkey.  
2. Confirm that the following four LEDs on the E5250A front panel are blinking.  
And press the Local/Self Test key on the E5250A front panel within 10 seconds.  
Remote LED  
System Fail LED  
Fail LED  
Local/Self Test LED  
NOTE  
Fail Condition for Front Panel Interface Test  
If an LED does not blink after selecting the FRONT PANEL softkey, the LED is  
defective.  
If you do not press the Local/Self Test key within 10 seconds, the Fail LED turns on.  
If you pressed Local/Self Test key within 10 seconds, and the Fail LED still turns on,  
it means the Local/Self Test key is defective.  
Contact your nearest Agilent Technologies Service Center.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
Executing the Relay Test  
To execute the Relay Test, do the following:  
1. Press the CARDn RELAY softkey (n=1 to 4). The following message is  
displayed on the 4155/4156 screen depending on card:  
Message for the E5252A:  
Attach the relay test adapter on input terminal and  
open all output of slot n.  
Message for the E5255A:  
Attach the relay test adapter and the BNC short cap to  
E5250A/E5255A input. And open all output of slot n.  
Where, n=1 to 4.  
And the following softkeys are displayed.  
Softkey  
Description  
CONTINUE  
CANCEL  
Executes the Relay Test for the card immediately.  
Cancels the Relay Test execution.  
2. Disconnect all cables from the E5250A input terminals. And attach the Relay  
Test Adapter to the E5250A input terminals. For each E5255A card, connect a  
BNC short cap to each E5255A BIAS INPUT port.  
3. Open all outputs of the plug-in cards as follows:  
If cable is connected to output connector of plug-in card, open output at DUT  
end of cable. If end of cable is Kelvin connection, disconnect the cable or make  
non-Kelvin connection at end of cable.  
4. Press the CONTINUE softkey to execute the Relay Test.  
Or press the CANCEL softkey to cancel test execution.  
5. Repeat steps 1 to 4 for the each card you want to test.  
If [F]result is displayed after executing the Relay Test, the card is defective.  
Contact your nearest Agilent Technologies Service Center.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
To Execute Leak Test  
NOTE  
Leak Test is for checking leakage current of the E5250A with plug-in cards  
installed. If leak test result is too large for your application, contact nearest Agilent  
Technologies Service Center. Leak test does not verify specifications of the E5250A  
and installed cards.  
The Leak Test applies 10 Vdc to the specified input port of the E5250A, and  
measures the leakage current. The test limits are shown in Table 3-4.  
You specify an input port of the E5250A, and specify the 4155/4156 SMU to use.  
The Leak Test automatically connects the specified input port to each output port  
consecutively, and uses the 4155/4156 SMU to measure the leakage current for each  
channel.  
You need to execute this test for each input port.  
Table 3-4  
Test Limits of Leak Test  
Card  
Instrument  
Connection  
Input Port  
IV1, IV2  
Test Limit  
E5252A  
4155  
non-Kelvin  
±4.12 pA  
IV3, IV4, IV5, IV6 ±1.01 nA  
IV1, IV2 ±1.14 pA  
IV3, IV4, IV5, IV6 ±1.01 nA  
IV1, IV2 ±2.24 pA  
IV3, IV4, IV5, IV6 ±2.02 nA  
4156  
non-Kelvin  
Kelvin  
E5255A  
4155  
4156  
non-Kelvin  
non-Kelvin  
IV1 to IV6  
IV1 to IV6  
±4.12 pA  
±1.14 pA  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
To execute the Leak Test, do the following:  
1. On MAIN MENU of the E5250A Self-Test Utility, select LEAK TEST softkey.  
The following message is displayed:  
Input Agilent 4155/4156 GPIB address (default 817):?  
2. To use default GPIB address 817 for the 4155/4156, just press Enter key.  
If not, type GPIB address of the 4155/4156, then press Enter key.  
The LEAK TEST MENU with the following softkeys are displayed:  
Softkey  
Description  
START TEST  
For defining the Leak Test connection. Need to define the  
E5250A input port and 4155/4156 SMU port.  
MAIN MENU Returns to MAIN MENU of the Self-Test Utility.  
3. Select START TEST softkey. Following message/softkeys are displayed:  
Select IV Port of Leak Test by softkey.  
Softkey  
Description  
IVn (n=1 to 6) For specifying the E5250A SMU INPUTn port for which  
you want to perform the leak measurement. If only the  
E5255As are installed, only IVn softkeys displayed are for  
SMU INPUTn internally connected to the E5255A IV input.  
CANCEL  
Cancels the Leak Test execution.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
4. Select desired IVn softkey (n=1 to 6) for input port you want to test.  
If the E5252A is installed in your E5250A, and the 4156 is used for the Relay  
Test, then when you press IV1, IV3, or IV5 softkey, the following message and  
softkeys are displayed:  
Is IVn Port a Kelvin connection?  
Where n=1, 3, or 5.  
Softkey  
YES  
Description  
Declares that the port specified by the IVn softkey is used  
for the Kelvin connection.  
NO  
Declares that the port specified by the IVn softkey is used  
for the non-Kelvin connection.  
CANCEL  
Cancels the Leak Test execution.  
Select the YES or NO softkey.  
The following message and the softkeys are displayed:  
Select SMU channel for IVn leak measurement by softkey.  
Where n=1 to 6.  
Softkey  
SMUm  
Description  
Declares that you will connect the 4155/4156 SMUm to the  
E5250A port specified by the IVn softkey. SMU5 and  
SMU6 are displayed only if 5th and 6th SMU are installed  
in the 41501 expander of the 4155/4156.  
(m= 1 to 6)  
CANCEL  
Cancels the Leak Test execution.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
5. Select the desired SMUm softkey (m=1 to 6). Following message is displayed  
depending on the connection type:  
Message for Kelvin connection:  
Disconnect Kelvin cable from IVn terminal.  
And disconnect all cables from output terminals.  
Message for non-Kelvin connection:  
Disconnect cable from IVn terminal.  
And disconnect all cables from output terminals.  
Where n=1 to 6. And the following softkeys are displayed.  
Softkey  
Description  
CONTINUE  
CANCEL  
To continue setting up the Leak Test.  
Cancels the Leak Test execution.  
6. Disconnect all cables from the E5250A input/output terminals. Then connect  
triaxial cable or Kelvin triaxial cable to the 4155/4156 SMU terminal you  
specified in step 5 because the next step executes the zero offset cancel.  
7. Select the CONTINUE softkey. The following message is displayed depending  
on the connection type:  
Message for Kelvin connection:  
Connect SMUm to IVn by Kelvin cable.  
Message for non-Kelvin connection:  
Connect SMUm to IVn by cable.  
Where m=1 to 6 (specified by SMUm softkey) and n=1 to 6 (specified by IVn  
softkey).  
And the following softkeys are displayed.  
Softkey  
Description  
CONTINUE  
Executes the Leak Test. Consecutively connects input port  
specified by IVn softkey to each output port and makes  
leak measurement.  
CANCEL  
Cancels the Leak Test execution.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
8. Connect the cable from the 4155/4156 SMU port specified by the SMUm  
softkey (m=1 to 6) in step 5 to the E5250A input port specified by the IVn  
softkey (n=1 to 6) in step 4.  
Use Kelvin triaxial cable for Kelvin connection  
Use triaxial cable for non-Kelvin connection  
9. Press the CONTINUE softkey to execute the Leak Test.  
After the Leak Test is completed for the input port specified by the IVn softkey,  
the test result (PASS or FAIL) is displayed on the 4155/4156 screen. And the  
following softkeys are displayed:  
Softkey  
Description  
REPORT CRT Displays the Leak Test results on the 4155/4156 screen.  
LEAK TEST Returns to the LEAK TEST MENU.  
To display the leak current measurement data on the 4155/4156 screen, press the  
REPORT CRT softkey.  
10. To return to the LEAK TEST MENU, select the LEAK TEST softkey. And to  
perform the Leak Test for another input port, repeat steps 3 to 9.  
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Executing Self-Test and Leak Test  
Using the Self-Test Utility  
3-20  
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4
Setting up Measurement Environment  
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Setting up Measurement Environment  
This chapter explains how to connect your instruments to Agilent E5250A input,  
and how to connect the E5250A output to your wafer prober or test fixture.  
You can connect the E5250A output (E5252A or E5255A) to your prober or fixture  
in the following three ways:  
Via the available connector plates.  
(For E5255A only) Directly using Agilent 16494E coaxial cable.  
Via connectors that you mount directly on your own connector plate or test  
fixture.  
This chapter explains how to do this in the following sections:  
“Connector Plates” introduces connector plates available for the plug-in card.  
For installing the connector plates on your shielding box for prober or fixture,  
refer to Agilent 16495 Installation Guide.  
“Connecting 8-Channel Shielded Coaxial Cable” explains how to use the  
16494E coaxial cable, which is used to directly connect the E5255A output to  
the DUT, DUT socket, or any fixture you want without using a connector plate.  
“Mounting Connectors Directly” describes connector hole dimensions for  
mounting connectors directly on your own connector plate or test fixture, and  
describes the information to connecting the connectors to prober, socket or DUT.  
“Connecting the E5250A Input” explains how to connect instruments to the  
E5250A input.  
“Connecting the E5250A Output” describes the information to connect the  
plug-in card output to a connector plate, connectors on your own shielding box  
and so on.  
“Measurement Cable Length” is a reference for deciding total cable length at  
your site by calculating the total guard capacitance according to the cable length  
from instrument to Device Under Test (DUT).  
4-2  
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Setting up Measurement Environment  
Connector Plates  
Connector Plates  
A connector plate is the interface to connect the E5250A to your prober or test  
fixture. The following connector plates are available for the E5250A. To install the  
connector plate, refer to Agilent 16495 Installation Guide.  
Connector Plates for the E5252A  
16495F  
Half size connector plate for E5252A  
16495F-001 has 12 triaxial through connectors (female to  
female), an Intlk connector, and a GNDU connector (triaxial  
through, female to female). The back of the Intlk connector is  
designed for soldering.  
16495F-002 has 12 triaxial connectors, an Intlk connector, and  
a GNDU connector. The back of each connector is designed for  
soldering.  
16495G  
Full size connector plate for E5252A  
16495G-001 has 24 triaxial through connectors (female to  
female), an Intlk connector, and a GNDU connector (triaxial  
through, female to female). The back of the Intlk connector is  
designed for soldering.  
16495G-002 has 24 triaxial connectors, an Intlk connector, and  
a GNDU connector. The back of each connector is designed for  
soldering.  
Connector Plates for E5255A  
16495C  
Half size connector plate for E5255A  
The 16495C has six 8-channel shielded coaxial connectors, an  
Intlk connector, and a GNDU connector. The back of each  
connector is designed for soldering.  
16495D  
Full size connector plate for E5255A  
The 16495D has twelve 8-channel shielded coaxial connectors,  
an Intlk connector, and a GNDU connector. The back of each  
connector is designed for soldering.  
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Setting up Measurement Environment  
Connector Plates  
Blank Plate  
16495E  
Half size blank plate.  
This plate is used to cover openings when you made too big  
openings for mounting the connector plate. You will use this  
plate to cover openings if you mount the half size connector  
plate in openings made for the full size connector plate.  
4-4  
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Setting up Measurement Environment  
Connecting 8-Channel Shielded Coaxial Cable  
Connecting 8-Channel Shielded Coaxial Cable  
This section introduces Agilent 16494E wide temperature 8-channel shielded  
coaxial cable, and explains how to connect the 16494E to the Device Under Test  
(DUT).  
WARNING  
Do not connect the 16494E cable to the E5255A or any instrument until  
connecting to the DUT as described below. If you ignore this warning, you  
maybe exposed to dangerous voltage.  
The 16494E coaxial cable is used to connect the E5255A output directly to the DUT,  
DUT socket, or any fixture you want without using the connector plate. One 16494E  
is used for one 8-channel output connector of the E5255A. To use 24 output  
channels (three 8-channel output connectors), you need three 16494Es.  
Instrument Side  
DUT Side  
The instrument side of the 16494E cable can be connected directly to the E5255A  
output.  
Solder the open side of the 16494E directly to DUT, DUT socket, or your test fixture  
as shown in Figure 4-1.  
Figure 4-1  
Example of DUT Connection  
Shielding (Ground)  
A
Input  
SMU  
BIAS  
B
Force  
Guard  
Bias line  
Bias line  
B
A
DUT  
Ground  
Total 8 ea.  
NOTE  
For highly accurate current forcing and measurements with minimized leakage,  
extend the guard to surround the signal lines as close as possible to the DUT.  
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Setting up Measurement Environment  
Mounting Connectors Directly  
Mounting Connectors Directly  
Previous sections described the information to use the available accessories, also the  
16495 Installation Guide provides the information how to install connector plates  
on the shielding box. However, you may need to directly mount connectors on your  
own connector plate or test fixture.  
In this case, you need to make connector holes and directly mount the connectors  
yourself. This section has dimension information about the holes you need to make.  
Do the following:  
1. Select the appropriate parts for your situation. Refer to Table 4-1.  
2. Make holes and mount the connectors. Refer to Table 4-2.  
For kelvin connection, use the 16494B Kelvin cable. Kelvin cable requires the  
kelvin triaxial connector which has two connector holes and three screw holes.  
3. Make interlock circuit as shown in “To Make Interlock Circuit” on page 4-8.  
4. Make cable connection between connector and DUT (device under test). Refer  
to “To Connect Connectors to DUT” on page 4-13.  
Table 4-1 lists the parts required to mount connectors on your shielding box. From  
this table, select the parts that you need to mount. Quantity of parts depends on your  
site.  
4-6  
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Setting up Measurement Environment  
Mounting Connectors Directly  
Table 4-1  
Recommended Parts  
Agilent Part  
No.  
Usage  
Description  
Making interlock  
circuit  
1252-1419C  
Interlock Connector (6 pin, female)  
3101-0302 or  
3101-3241  
Switch  
1450-0641  
LED (VF 2.1 V @ IF = 10 mA)  
8150-5680  
1250-2457  
8121-1191  
1251-2367  
1251-0179  
0380-3070  
2260-0002  
2190-0913  
8121-1191  
Wire  
Connecting  
E5252A output  
Triaxial Connector (female)  
Low Noise Coaxial Cable  
Connecting  
E5255A output  
Connector Frame (female)  
Coaxial Connector (female) (8ea. required for one frame.)  
Screw (2ea. required for one frame.)  
Nut (2ea. required for one frame.)  
Washer (2ea. required for one frame.)  
Low Noise Coaxial Cable  
Table 4-2  
Dimensions of Connector Holes  
Kelvin Triaxial Connector (in mm)  
Triaxial Connector (in mm)  
11.3  
14  
11  
11  
14  
2.8  
10.3  
2 − ∅11.3  
3.2  
2 M3 x 0.5  
8 Channel Shielded Coaxial Connector (in mm) Interlock Connector (in mm)  
63.5  
1.8  
59  
8.2  
6
12  
− ∅  
2
3
o
4
R1.5  
10  
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Setting up Measurement Environment  
Mounting Connectors Directly  
To Make Interlock Circuit  
The interlock circuit is to prevent electric shock when touching measurement  
terminals.  
You must install an interlock circuit on shielding box to prevent dangerous voltages  
when door of the shielding box is open.  
Figure 4-2 shows the pin assignments of the interlock connector mounted on your  
own connector plate or test fixture.  
Figure 4-2  
Interlock Connector Pin Assignments  
WARNING  
Dangerous voltages of up to the maximum voltage of SMUs may be present at  
force, guard, and sense terminals when the interlock terminals are shorted.  
To Install Interlock Circuit  
Install the interlock circuit as follows.  
1. Mount two mechanical switches on your shielding box, so that the switches  
close when the door of the shielding box is closed, and open when the door is  
opened. For the dimensions of the switch, refer to Figure 4-3 and Figure 4-4.  
2. Use wire to connect the two switches in series between pin number 1 and 2 (or  
3) of the interlock connector. See Figure 4-2.  
For example, Agilent 4155/4156 is connected to the interlock circuit, it cannot force  
more than ±40 V when the door is open. When door is closed, it can force more than  
±40 V.  
4-8  
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Setting up Measurement Environment  
Mounting Connectors Directly  
Figure 4-3  
Dimensions of Interlock Switch (Agilent part number 3101-0302)  
Figure 4-4  
Dimensions of Interlock Switch (Agilent part number 3101-3241)  
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Setting up Measurement Environment  
Mounting Connectors Directly  
To Install LED Circuit  
The 4155/4156 semiconductor parameter analyzer's Intlk connector provides the  
interlock signal and a LED drive signal.  
If a LED is connected between pin 4 and pin 5 (or 6) of the interlock connector, the  
LED lights to indicate high voltage output when more than ±40 V is forced from an  
SMU in the 4155/4156.  
To install LED circuit on your shielding box, do following:  
1. Mount LED on your shielding box. For the dimensions of the LED, refer to  
Figure 4-5.  
2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock  
connector. Refer to Figure 4-2.  
Figure 4-5  
Dimensions of LED (Agilent part number 1450-0641)  
4-10  
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Setting up Measurement Environment  
Mounting Connectors Directly  
To Connect Interlock Circuit to Instrument  
Before beginning the measurement, connect the interlock circuit to the interlock  
connector of the instrument as follows.  
For Agilent 4155/4156 semiconductor parameter analyzer:  
Connect Intlk connector of the 4155/4156 to the interlock connector by using  
Agilent 16493J Interlock cable that is furnished with the 4155/4156. You can  
connect it directly without using any adapter.  
For the instruments which has a BNC-Type interlock connector:  
If you use an instrument that has a BNC-type interlock connector (such as  
Agilent 4142B), connect interlock connectors of instrument and the interlock  
circuit as follows:  
Required Parts:  
Agilent  
Model No.  
Quantity  
Description  
16435A  
16493J  
1
1
Interlock Cable Adapter  
Interlock Cable  
Procedure:  
1. Connect interlock connector of instrument to the BNC connector of the  
16435A (interlock cable adapter) by using the BNC cable that is furnished  
with the adapter.  
2. Connect the 16435A adapter to the interlock connector by using the 16493J  
Interlock cable.  
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Setting up Measurement Environment  
Mounting Connectors Directly  
NOTE  
To Check Interlock Circuit  
If you use the 4155/4156, you can easily check the interlock circuit as follows:  
1. Connect the Intlk connector of the 4155/4156 to your interlock circuit.  
2. Press System front-panel key, then select CALIB/DIAG primary softkey to  
display the SYSTEM: SELF-CALIBRATION/DIAGNOSTICS page.  
3. In the CALIB/DIAG field, select DIAG secondary softkey.  
4. In the CATEGORY field, select I/O PERIPH secondary softkey.  
5. Move pointer to the 403 (INT.) Interlock LEDfield.  
6. Select EXECUTE secondary softkey.  
7. Confirm the following:  
LED turns on within 1 sec from when interlock circuit is shorted.  
LED turns off within 1 sec from when interlock circuit is open.  
To stop the interlock test, select STOP secondary softkey.  
4-12  
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Setting up Measurement Environment  
Mounting Connectors Directly  
To Connect Connectors to DUT  
Following figure shows a connection example from the connector to DUT. Use  
low-noise coaxial cable (Agilent part number: 8121-1191).  
Kelvin connections  
This connection is available only for the  
non-Kelvin connections  
Following connection is for the Kelvin  
Kelvin connectors. This connection can cancel connectors. For the triaxial connectors or the  
effects of cable resistance by connect sense 8 ch shielded connectors, ignore SENSE  
line and force line as close as possible to DUT terminal, and make connection only for  
terminal.  
FORCE terminal. Measurement results  
include residual resistance from the  
connection cable.  
Common  
Common  
Guard  
Guard  
Force  
Force  
to  
DUT  
to  
DUT  
Triaxial  
connector  
Triaxial  
connector  
Coaxial cable  
Coaxial cable  
Common  
Guard  
Common  
Guard  
Sense  
Sense  
Wire  
Insulator  
Plate  
Insulator  
Plate  
CAUTION  
Never connect the guard terminal to any output, including circuit common, chassis  
ground, or the guard terminal of any other unit. Doing so may result in an  
emergency condition.  
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Setting up Measurement Environment  
Mounting Connectors Directly  
For highly accurate current forcing and measurements while minimizing leakage,  
surround all force and sense lines from SMU by a guard as far as possible, and make  
cables stable by taping.  
For reducing capacitance measurement error, tape the cables to any grounded  
materials such as shielding box. If you use probe card, grounding the probe card also  
reduces capacitance measurement error.  
NOTE  
Low-Noise Coaxial Cable  
When you make a SMU output connection by using low-noise coaxial cable  
(Agilent part number: 8121-1191), shave the Conductive layer and the Insulator  
(clear) by knife so that the Center Conductor is insulated from the Conductive layer.  
Refer to following figure.  
Cover here using sleeve  
Insulator (black)  
min 2 mm  
Center conductor  
(for Force/Sense signal)  
approx. 10 to 15 mm  
Insulator (clear)  
Conductive layer (black)  
Outer conductor  
(for Guard signal)  
4-14  
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Setting up Measurement Environment  
Connecting the E5250A Input  
This section explains how to connect instruments to the E5250A.  
“To Connect Instruments to Input Connectors”  
“To Connect Bias Source to the E5255A Bias Input”  
“To Connect GNDU to the E5250A Input”  
WARNING  
Turn off all instruments that will be connected to the E5250A. And do not turn  
them on until the connection described in this section is completed. If you  
ignore this warning, you may be exposed to dangerous voltage.  
To Connect Instruments to Input Connectors  
The E5250A input connector has six SMU input connectors and four AUX input  
connectors.  
Table 4-3 shows cables required to connect the instrument for typical applications  
using the E5250A.  
You can make Kelvin connections when using the 4156 HRSMU, 41501 HPSMU,  
4142B SMU, E5270 SMU. Use cables as follows:  
4156/41501: Agilent 16494B-003 Kelvin triaxial cable  
4142B: Agilent 16494C-001 Kelvin triaxial cable  
E5270: Agilent 16494B-001 Kelvin triaxial cable  
To connect Kelvin triaxial cable to the E5250A input, use pairs (couple ports) of  
SMU INPUT connectors (1&2, 3&4, or 5&6) of the E5250A.  
The input signal for each Kelvin input is as follows:  
Odd input port number: FORCE  
Even input port number: SENSE  
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Setting up Measurement Environment  
Connecting the E5250A Input  
Table 4-3  
E5250A Input Connections  
Instrument  
E5250A  
Application  
Input  
Connector  
Cable Required  
Agilent  
Model No. Connector  
Output  
DC  
Measurement  
4155  
MPSMU  
VSU  
SMU1 to 6 16494A-003 Triaxial cable  
AUX1 to 4 BNC cable  
VMU  
Intlk  
AUX1 to 4 BNC cable  
16493J Interlock cable  
(for direct connection to Connector Plate)  
4156  
HRSMU  
SMU1 to 6 16494B-003 Kelvin Triaxial cable or  
16494A-003 Triaxial cable  
VSU  
VMU  
Intlk  
AUX1 to 4 BNC cable  
AUX1 to 4 BNC cable  
16493J Interlock cable  
(for direct connection to Connector Plate)  
41501  
HPSMU  
SMU1 to 6 16494B-003 Kelvin Triaxial cable or  
16494A-003 Triaxial cable  
MPSMU  
PGU  
SMU1 to 6 16494A-003 Triaxial cable  
HF1 or 2  
BNC cable  
GNDU  
SMU1 to 6 16493H GNDU cable  
and E5250-60004 Adapter  
16493H GNDU cable  
(for direct connection to Connector Plate)  
4142B  
SMU  
SMU1 to 6 16494C-001 Kelvin Triaxial cable or  
16494A-001 Triaxial cable  
VSU  
VMU  
GNDU  
AUX1 to 4 BNC cable  
AUX1 to 4 BNC cable  
SMU1 to 6 16493H GNDU cable  
and E5250-60044 Adapter  
16493H GNDU cable  
(for direct connection to Connector Plate)  
Intlk  
16435A Interlock cable adapter  
and 16493J Interlock cable  
(for direct connection to Connector Plate)  
4-16  
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Setting up Measurement Environment  
Connecting the E5250A Input  
Instrument  
Agilent Output  
E5250A  
Input  
Connector  
Application  
Cable Required  
Model No. Connector  
C
C Meter  
High, Low CV1 and 2 BNC cable  
Measurement  
Pulse Input  
Pulse  
Generator  
OUTPUT  
OUTPUT  
HF1 or 2  
BNC cable  
Bias Input  
Power  
AUX1 to 4 BNC cable  
Supply  
In the table above,  
AUX means CV1, CV2, HF1, or HF2 connector.  
The E5250A does not have input connectors for the interlock. Connect directly  
from instrument to the connector plate which has an interlock connector.  
Can't use Agilent 41422A/41423A (HCU/HVU) of the 4142B with the E5250A.  
To connect instrument output that uses banana plug to AUX connector, use Dual  
Banana plug to BNC Adapter (Agilent part number 1251-2277).  
Figure 4-6 shows an example of connecting the E5250A to the 4156.  
Figure 4-6  
Connection Example with Agilent 4156  
Agilent E5250A  
Kelvin Triaxial Cable  
Triaxial Cable  
BNC Cable  
Agilent 4156  
SMU  
AUX  
GNDU  
INTLK  
INTLK Cable  
Connector Plate  
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4-17  
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Setting up Measurement Environment  
Connecting the E5250A Input  
To Connect Bias Source to the E5255A Bias Input  
The E5255A BIAS INPUT connector is a BNC-type connector.  
Use BNC cable to connect the bias source to the BIAS INPUT of the E5255A.  
If output terminal of the bias source is a banana plug, use a Dual Banana Plug to  
BNC Adapter (Agilent part number 1251-2277).  
To Connect GNDU to the E5250A Input  
Ground Unit (GNDU) of Agilent 4142B Modular DC Source/Monitor or Agilent  
41501 Expander (for Agilent 4155/4156) is usually connected to GNDU connector  
on the connector plate by using Agilent 16493H GNDU cable. This connection  
allows current over 1A.  
If you want to connect the GNDU through the E5250A to connector plate, test  
fixture or DUT, connect the GNDU to the E5250A input as shown below.  
CAUTION  
Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A.  
The maximum input current of the E5250A is 1A.  
Required Parts:  
Agilent  
Model/Part No.  
Quantity  
Description  
16493H  
1
1
GNDU Cable  
Triaxial to Dual Triaxial Adapter  
E5250-60044  
Procedure:  
1. Connect the adapter to the E5250A SMU INPUT connector (1&2, 3&4 or 5&6)  
as shown in Figure 4-7.  
2. Connect the GNDU cable between the instrument GNDU connector and the  
triaxial connector on the adapter.  
4-18  
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Setting up Measurement Environment  
Connecting the E5250A Input  
Figure 4-7  
Connection of Triax-Dual Triax Adapter  
Agilent E5250A  
To  
GNDU  
To  
SMU INPUT  
SMU INPUT  
AUX  
TRIAX-DUAL TRIAX  
Adapter  
1
3
4
5
6
2
To  
SMU  
From  
GND  
Agilent 16493H Cable  
By this connection, input signal for SMU INPUT connectors is as follows:  
SMU INPUT Port Number  
Input Signal  
1, 3, or 5  
2, 4, or 6  
Force  
Sense  
If you make non-Kelvin connection for the E5250A outputs, use the odd input port  
only. Because non-Kelvin connection uses only Force signal for measurement.  
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Setting up Measurement Environment  
Connecting the E5250A Output  
This section describes how to connect the E5252A and E5255A output to connector  
plate, your test fixture, and so on.  
“To Connect the E5252A Output”  
“To Connect the E5255A Output”  
WARNING  
Turn off the E5250A and all instruments connected to the E5250A. And do not  
turn them on until the connection described in this section is completed. If you  
ignore this warning, you may be exposed to dangerous voltage.  
To Connect the E5252A Output  
The E5252A output connector is shown in Figure 4-8. The E5250A input signal  
(SMU input or AUX input) appears at the E5252A output connector as shown in  
Figure 4-8 when input-output switching path is made.  
Figure 4-8  
E5252A Output Connector and Output Signal  
A
A
Input  
SMU Force or Sense Guard  
AUX Signal line Ground  
B
B
Ground  
You can easily connect the E5252A output connector to the connector plate or your  
test fixture by using cables shown in Table 4-4.  
Table 4-4  
E5252A Output Cable  
Agilent Model No.  
Description  
16494A-001  
16494A-002  
16494B-001  
16494B-002  
Triaxial cable, 1.5m (for non-Kelvin connection)  
Triaxial cable, 3m (for non-Kelvin connection)  
Kelvin Triaxial cable, 1.5m (for Kelvin connection)  
Kelvin Triaxial cable, 3m (for Kelvin connection)  
4-20  
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Setting up Measurement Environment  
Connecting the E5250A Output  
For Kelvin connection, use Kelvin triaxial cable listed in Table 4-4. To make a  
Kelvin output port (1, 3, 5, 7, 9 and 11), couple two E5252A output ports as follows:  
Kelvin Output Port  
Output Port Number  
1
3
1 (Force) and 2 (Sense)  
3 (Force) and 4 (Sense)  
5 (Force) and 6 (Sense)  
7 (Force) and 8 (Sense)  
9 (Force) and 10 (Sense)  
11 (Force) and 12 (Sense)  
5
7
9
11  
Figure 4-9 shows the 16494B Kelvin triaxial cable for the E5252A.  
Figure 4-9  
16494B Kelvin Triaxial Cable for E5252A  
E5252A Side  
Connector Plate Side  
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Setting up Measurement Environment  
Connecting the E5250A Output  
To Connect the E5255A Output  
The E5255A output connector is shown in Figure 4-10. The E5250A SMU INPUT  
signal or the E5255A BIAS INPUT signal appears at the E5255A output connector  
as shown in Figure 4-10 when input-output switching path is made.  
Figure 4-10  
E5255A Output Connector and Output Signal  
A
A
Input  
SMU  
B
Force  
Guard  
Bias line  
BIAS Bias line  
B
Ground  
You can easily connect the E5255A output to the connector plate or your test fixture  
by using the cable shown in Table 4-5 and Figure 4-11. The cable can be connected  
to the E5255A output ports labeled as 18, 18 (916), or 18 (1724).  
Table 4-5  
E5255A Output Cable  
Agilent Model No.  
Description  
16494D-001  
16494D-002  
8-Ch Shielded Coaxial cable, 1.5m  
8-Ch Shielded Coaxial cable, 3m  
Figure 4-11  
16494D 8-Channel Shielded Coaxial Cable for E5255A  
MALE  
FEMALE  
To  
E5255A  
To  
Connector Plate  
4-22  
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Setting up Measurement Environment  
Measurement Cable Length  
Measurement Cable Length  
This section describes how to calculate the total guard capacitance when using a  
Source Monitor Unit (SMU), such as in Agilent 4155/4156 Semiconductor  
Parameter Analyzer, Agilent 4142B Modular DC Source/Monitor, Agilent E5270  
Series of Parametric Measurement Solution, and so on.  
When using an SMU, the length of measurement cables is limited by the guard  
capacitance of the cables. Guard capacitance means the capacitance between the  
signal line (FORCE or SENSE) and the GUARD line.  
Table 4-6 lists the guard capacitance for each element of the E5250A measurement  
environment.  
When using the 4155/4156/4142B/E5270, the maximum limit of the guard  
capacitance is approximately 900 pF. So, you add the following and total must be  
less than 900 pF:  
Guard capacitance of cable from SMU to E5250A SMU INPUT.  
Guard capacitance of E5250A and installed plug-in cards.  
Guard capacitance of cable from plug-in card output to connector plate.  
Guard capacitance of cable from connector plate to DUT.  
Other capacitances, such as for probe card.  
The following is an example to calculate the guard capacitance of a measurement  
environment:  
Installed Plug-in cards: Four E5252A cards (145 pF + 8 pF × 3)  
Input Cable:  
16494A-003 (75 pF)  
16494A-001 (125 pF)  
Output Cable:  
Cable from Connector  
Plate to DUT:  
8121-1191, 2 m (130 pF × 2)  
Probe Card:  
Guard Capacitance approximately 10 pF (example)  
In this environment, the total guard capacitance (Cg-total) is as follows.  
Cg-total = 145+(8×3)+75+125+(130×2)+10 pF = 639 pF < 900 pF  
Even if you use other instruments, you can use the table for reference about the  
measurement cable length and capacitance.  
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Setting up Measurement Environment  
Measurement Cable Length  
Table 4-6  
Guard Capacitances of E5250A Measurement Environment (Typical)  
Cable  
Length  
Guard  
Capacitance  
Connection  
Agilent Model/Part No.  
from SMU to 16494A-003 (for non-Kelvin)  
80 cm  
80 cm  
1.5 m  
75 pF  
90 pF  
E5250A  
16494B-003 (for Kelvin)  
16494C-001 (for 4142B)  
140 pF  
E5250A and  
Plug-in Card  
E5252A (only 1 card is installed)  
E5252A (more 1 card)  
E5255A (only 1 card is installed)  
E5255A(more 1 card)  
16494A-001 (for non-Kelvin)  
16494A-002 (for non-Kelvin)  
16494B-001 (for Kelvin)  
16494B-002 (for Kelvin)  
16494C-001 (for 4142B)  
16494C-002 (for 4142B)  
16494D-001  
145 pF  
8 pF/extra card  
180 pF  
60 pF/extra card  
125 pF  
from Card  
Output to  
Connector  
Plate  
1.5 m  
3 m  
1.5 m  
3 m  
1.5 m  
3 m  
1.5 m  
3 m  
3 m  
X m  
240 pF  
140 pF  
260 pF  
140 pF  
260 pF  
125 pF  
16494D-002  
240 pF  
16494E-003  
240 pF  
from  
Agilent Part No. 8121-1191  
130 pF per m  
Connector  
Plate to DUT  
4-24  
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5
Controlling the E5250A  
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Controlling the E5250A  
This chapter explains how to control Agilent E5250A.  
“Methods for Controlling the E5250A” introduces several methods for  
controlling the E5250A.  
“Switch Control Basics” introduces basic information for controlling the relay  
switches on the E5252A and E5255A plug-in cards.  
“Using Virtual Front Panel Utility” describes how to use Virtual Front Panel  
(VFP) utility furnished with the E5250A. The VFP is for Agilent 4155/4156  
users.  
5-2  
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Controlling the E5250A  
Methods for Controlling the E5250A  
Methods for Controlling the E5250A  
This section introduces several methods for controlling the E5250A. Table 5-1 lists  
the E5250A control methods, and the operating systems on which each control  
method can be used.  
Table 5-1  
Summary of Control Methods  
Operating System (Controller)  
Control  
Method  
BASIC for  
Windows  
(PC)  
Refer to  
HP BASIC  
(workstation)  
RMB/UX  
(workstation)  
IBASIC  
(4155/4156)  
Creating Your  
Program  
Yes  
Yes  
Yes  
No  
Yes  
No  
Yes  
No  
Chapter 6  
and 7  
Modifying  
Sample  
Chapter 6,  
7, and 8  
Program  
Using VFP  
No  
No  
No  
Yes  
page 5-25  
Creating Your Own Program  
You can create a control program using the SCPI Commands described in Chapter 7  
on all the operating systems listed in Table 5-1. Refer to Chapter 6 for how to create  
the program.  
In an control program (which runs on HP BASIC operating system), you can use the  
Capacitance Compensation Routine and the VFP Data Upload Library furnished  
with the E5250A.  
Capacitance Compensation Routine  
This routine is an subprogram runs on HP BASIC, and is used to compensate for the  
capacitance measurement error caused by the E5250A when the E5252A is  
installed. This subprogram is used with Agilent 4284A Precision LCR Meter. You  
enter the capacitance data measured by the 4284A, and this subprogram returns the  
compensated value.  
To use this subprogram, link it to your program. For details, refer to Chapter 6.  
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Controlling the E5250A  
Methods for Controlling the E5250A  
VFP Data Upload Library  
This subprogram library is used to convert the control data created by the Virtual  
Front Panel (VFP) Utility to data that can be used with your program runs on HP  
BASIC. To use this library, link it to your program. For details, refer to Chapter 6.  
CAUTION  
Open or close the relay without allowing the output voltage to affect the relay by  
using the following procedure.  
1. Disable the output voltage of bias source  
2. Connect the relay  
3. Enable the output voltage of bias source  
4. Make measurements  
5. Disable the output voltage of bias source  
6. Disconnect the relay  
If the relay is opened and output voltage reaches the relay, the relay may be  
damaged or its service life reduced.  
Modifying a Sample Program  
The sample programs furnished with the E5250A are useful for creating your  
program on HP BASIC. You can create your desired program easily by modifying a  
sample program. To understand the sample programs and how to modify, refer to  
Chapter 9.  
Also, you can use the Capacitance Compensation Routine and the VFP Data Upload  
Library introduced in “Creating Your Own Program” on page 5-3.  
The Virtual Front Panel (VFP) Utility is used to control the E5250A by using  
Agilent 4155/4156 Semiconductor Parameter Analyzer's built-in Instrument BASIC  
(IBASIC) controller. You can control the E5250A interactively without the control  
program.  
Refer to “Using Virtual Front Panel Utility” on page 5-25.  
5-4  
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Controlling the E5250A  
Switch Control Basics  
This section introduces basic information for controlling the relay switches on the  
“Channel List and Channel Configuration”  
“Bias Mode”  
“Couple Port”  
“E5252A Channel List”  
“E5255A Channel List”  
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Controlling the E5250A  
Switch Control Basics  
Channel List and Channel Configuration  
Some SCPI commands require the channel_list parameter, which determines the  
relays to close/open in the E5252A or the E5255A to connect/disconnect the desired  
channels. The following figure shows the basic syntax of the channel_list parameter.  
Figure 5-1  
Syntax of channel_list Parameter  
,
Card No.  
(1digit)  
Channel No.  
(4 digits)  
Card No.  
(1digit)  
Channel No.  
(4 digits)  
(
@
)
:
The channel_list depends on Channel Configuration mode as described later. In the  
channel_list, you can specify one or more channels.  
Each specified channel consists of five digits as follows:  
Card Number:  
One digit decimal number: 0 to 4.  
Specifies the slot number of the card that you want to control.  
Depends on Channel Configuration mode. Refer to Table 5-2.  
Channel Number: Four digit decimal number:  
First two digits: specifies input port.  
Last two digits: specifies output port.  
Depends on type of card and Channel Configuration mode.  
Refer to “E5252A Channel List” on page 5-15 and “E5255A  
Channel List” on page 5-19.  
5-6  
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Controlling the E5250A  
Switch Control Basics  
Table 5-2  
Card Number  
Channel Configuration  
Slot No. Card is Installed  
Card No.  
you specified  
Normal Configuration  
1
1
2
3
4
0
2
3
4
Auto Configuration  
1 to 4  
In the channel_list, you can specify multiple channels by using comma (,) or colon  
(:) as follows:  
Comma: use between each specified channel as in following examples:  
(@10101,10102,10103)means 10101, 10102 and 10103.  
(@10112,10202)means 10112 and 10202.  
(@11010,20102)means 11010 and 20102.  
Colon: use to specify a range of channels as in following examples:  
(@10101:10103)means 10101, 10102, and 10103.  
(@10112:10202)means 10112, 10201, and 10202.  
(@11012:20102)means 11012, 20101, and 20102.  
As shown in last two examples, you can specify a range across input ports and card  
slots.  
NOTE  
In the Auto Configuration mode, you can omit any zeros at beginning of channel.  
For example, channel 00101 can be expressed by 101.  
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Controlling the E5250A  
Switch Control Basics  
Channel Configuration  
The E5250A allows the following two channel configuration modes. The way to  
specify the channel_list depends on the channel configuration mode. You can set the  
channel configuration by using the [:ROUT]:FUNC command described in Chapter  
7.  
Normal  
Configuration  
Default mode at Power On or *RST command.  
Each card is considered independently. For each channel in  
channel_list, you specify actual card number and channel  
number (input port number and output port number).  
Auto  
Configuration  
To use this mode, the same type of card must be installed in the  
E5250A slots from slot number 1 continuously (slots 1,2; or  
slots 1,2,3; or slots 1,2,3,4).  
The installed cards are treated as one card for the output ports.  
specify output ports 1 to 36.  
For each channel in channel_list, card number is always 0. For  
channel number, you specify the input port number and output  
port number depending on the type of card.  
For more information, refer to “E5252A Channel List” on page 5-15 and “E5255A  
Channel List” on page 5-19.  
5-8  
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Controlling the E5250A  
Switch Control Basics  
Connection Rule  
Connection rule is used to specify if an input or output port can have multiple  
connections, and it is specified by the [:ROUTe]:CONNection:RULE command  
described in Chapter 7. For each card installed in the E5250A (for auto  
configuration mode, installed cards are treated as one card), you can specify one of  
the following connection rules:  
Single Route:  
Each input port can be connected to only one output port, and  
each output port can be connected to only one input port. So,  
existing connection to a port must be disconnected when a new  
connection is made.  
If normal configuration mode is set to the E5250A with  
multiple cards, an input/output path is effective for each card.  
For example, if normal configuration mode is set to the E5250A  
with two E5252As, and single route is set to both cards, the  
following connection is possible.  
1
2
3
E5250A  
INPUT  
10  
Close  
2
3
2
3
1
1
12  
12  
Open  
E5252A Card 1 Output  
E5252A Card 2 Output  
Free:  
Each input port can be connected to multiple output ports, and  
each output port can be connected to multiple input ports.  
CAUTION  
If the Free connection rule has been specified, ensure multiple input ports are not  
connected to the same output port. Such configurations can cause damage.  
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Controlling the E5250A  
Connection Sequence  
NOTE  
This is only for cards that are set to the Single Route connection rule. Refer to  
“Connection Rule” on page 5-9.  
Connection sequence specifies the open/close sequence of the relays when changing  
from an existing connection to a new connection. You can specify the connection  
sequence by using the [:ROUTe]:CONNection:SEQuence command described in  
Chapter 7.  
You can select one of the three connection sequences shown in Table 5-3 for each  
card installed in the E5250A.  
When an existing connection is changed to a new connection, the relays are  
opened/closed as follows:  
Table 5-3  
Connection Sequence  
Connection  
Relay Operation  
Sequence  
Break Before Make 1. Disconnect previous route.  
2. Wait for relays to open.  
3. Connect new route.  
Make Before Break 1. Connect new route.  
2. Wait for relays to close.  
3. Disconnect previous route.  
No Sequence  
1. Disconnect previous route.  
2. Connect new route.  
5-10  
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Controlling the E5250A  
Switch Control Basics  
Bias Mode  
NOTE  
Connection rule cannot be specified for the input Bias Port, which can always be  
connected to multiple output ports.  
Connection sequence (to connect input Bias Port to output ports) is always  
Break-Before-Make.  
Bias Port and Couple Port cannot be set to the same port number.  
Bias Mode is effective for the input Bias Port:  
For the E5255A, input Bias Port is the dedicated BIAS port on the E5255A  
For the E5252A, input Bias Port is the input port (1 to 10) that you select.  
When Bias Mode is ON, the input Bias Port is connected to all bias enabled output  
ports that are not connected to any other input ports. You cannot directly control  
which output ports are connected to the input Bias Port:  
If another input port is disconnected (:ROUT:OPENcommand) from a bias  
enabled output port, the output port is automatically connected to the input Bias  
Port.  
If another input port is connected (:ROUT:CLOScommand) to a bias enabled  
output port, the output port is automatically disconnected from the input Bias  
Port.  
Bias disabled output ports are never connected to the input Bias Port when Bias  
Mode is ON.  
When Bias Mode is OFF, the input Bias Port is the same as the other input ports, so  
relays can be controlled directly to connect to output ports.  
You can independently control the Bias Mode for each card installed in the E5250A.  
Refer to [:ROUTe]:BIAS[:STATe] in Chapter 7.  
For a programming example, refer to Chapter 6.  
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Controlling the E5250A  
Switch Control Basics  
Figure 5-2  
Example of Bias Mode  
Input 01  
Bias Port  
Input 02  
Input 03  
Input 10  
Output Port  
Open  
Close  
Connect to Bias port  
Connect to Input 3  
Connect to Input 1  
Figure 5-2 shows an example. Input port 2 is the input Bias Port. When the Bias  
Mode is turned ON, all bias enabled output ports (that are not connected to other  
input ports) are connected to the input Bias Port. So, the output ports that are  
connected to input port 1 and 3 are not connected to the input Bias Port.  
5-12  
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Controlling the E5250A  
Switch Control Basics  
Couple Port  
NOTE  
This function is available only for the E5252A.  
Bias Port and Couple Port cannot be set to the same port number.  
This function is used for making Kelvin connections. Couple port allows  
synchronized connection of two adjacent input ports to two adjacent output ports.  
You set up the Couple Port by using the [:ROUTe]:COUPle:PORT command  
described in Chapter 7.  
To turn Couple Port mode ON/OFF, refer to [:ROUTe]:COUPle[:STATe] command  
in Chapter 7.  
For a programming example, refer to Chapter 6.  
The input ports 1 and 2, 3 and 4, 5 and 6, 7 and 8, or 9 and 10 can be coupled  
together. See Table 5-4. For example, if you specify input port number 1 in the  
[:ROUTe]:COUPle:PORT command, input ports 1 and 2 are coupled together.  
Table 5-4  
Couple Port Number and Output Port Number  
Couple  
Port No.  
Input Ports  
Available Output Port No.  
01  
SMU1, SMU2  
01 to 12 (for Normal Config.)  
01 to 48 (for Auto Config.)  
03  
05  
07  
09  
SMU3, SMU4  
SMU5, SMU6  
HF1, HF2  
01 to 12 (for Normal Config.)  
01 to 48 (for Auto Config.)  
01 to 12 (for Normal Config.)  
01 to 48 (for Auto Config.)  
01 to 12 (for Normal Config.)  
01 to 48 (for Auto Config.)  
CV1, CV2  
01 to 12 (for Normal Config.)  
01 to 48 (for Auto Config.)  
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Controlling the E5250A  
Switch Control Basics  
The two output ports are determined by the channel_list parameter of the  
:ROUT:CLOScommand, and the lower output port number is always odd.  
So, when you execute :ROUT:CLOSor :ROUT:OPENcommand for the couple  
port, four relays operate synchronously as shown in Figure 5-3.  
For example, assume that input ports 1 and 2 are coupled, and that the Couple Port  
mode is ON:  
1. If :ROUT:CLOScommand specifies to connect channel 0105, relays are closed  
to realize two channels (0105 and 0206).  
2. If :ROUT:OPENcommand specifies to disconnect channel 0105, all four relays  
between the two input ports and two output ports are opened.  
Figure 5-3  
Couple Port Relay Connections  
2XN-1  
2XN  
2XN-1  
2XN  
INPUT  
INPUT  
2XM  
2XM-1  
2XM-1  
2XM  
OUTPUT  
2. Disconnect condition  
OUTPUT  
1. Connect condition  
N=1 to 5  
M=1 to 6 for Normal Config.  
M=1 to 24 (max) for Auto Config.  
Close  
Open  
NOTE  
For each E5252A installed in the E5250A, you can independently specify the same  
or different couple ports.  
5-14  
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Controlling the E5250A  
E5252A Channel List  
This section describes how to define the channel_list specifically for the E5252A.  
For the basic syntax of the channel_list, see “Channel List and Channel  
Configuration” on page 5-6.  
Normal Configuration Mode  
To specify a channel, you use five digits as shown in Table 5-5.  
Specifying E5252A Channels in Normal Config. Mode  
Table 5-5  
One Channel: 5 digits  
Slot No.  
Channel Number: 4 digits  
(E5252A is  
Card Number  
installed)  
(first 1 digit)  
Input Port No.  
(next 2 digits)  
Output Port No.  
(last 2 digits)  
1
2
3
4
1
2
3
4
01 to 10  
01 to 10  
01 to 10  
01 to 10  
01 to 12  
01 to 12  
01 to 12  
01 to 12  
Card Number:  
One digit: 1 to 4. E5250A slot number in which card is  
installed.  
Channel Number: Four digits: XXYY.  
XX: input port number (01 to 10).  
YY: output port number (01 to 12).  
Channel Number assignment is shown in Figure 5-4.  
NOTE  
For the following two cases, three ports share one input path. Do not specify two of  
the input ports at same time.  
SMU5, HF1, and CV1 (Input Port No. 05, 07, and 09)  
SMU6, HF2, and CV2 (Input Port No. 06, 08, and 10)  
For example, if you specify input port 05, then you cannot specify input ports 07 and  
09. You can specify 05 and 06 at the same time.  
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Controlling the E5250A  
Switch Control Basics  
Figure 5-4  
E5252A Channel Number in Normal Config. Mode  
SMU1 01  
0101 0102 0103 0104 0105 0106 0107 0108 0109 0110 0111 0112  
0201 0202 0203 0204 0205 0206 0207 0208 0209 0210 0211 0212  
0301 0302 0303 0304 0305 0306 0307 0308 0309 0310 0311 0312  
0401 0402 0403 0404 0405 0406 0407 0408 0409 0410 0411 0412  
SMU2  
SMU3  
SMU4  
02  
03  
04  
05  
06  
07  
08  
09  
SMU5  
SMU6  
HF1  
0501 0502 0503 0504 0505 0506 0507 0508 0509 0510 0511 0512  
0601 0602 0603 0604 0605 0606 0607 0608 0609 0610 0611 0612  
0701 0702 0703 0704 0705 0706 0707 0708 0709 0710 0711 0712  
0801 0802 0803 0804 0805 0806 0807 0808 0809 0810 0811 0812  
HF2  
CV1  
CV2  
0901 0902 0903 0904 0905 0906 0907 0908 0909 0910 0911 0912  
1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012  
10  
01  
03  
12  
: Channel No.  
04  
05  
06  
10  
02  
11  
07  
08  
09  
Input Port  
XXXX  
Input Port No.  
Output Port (Output Port No.)  
5-16  
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Controlling the E5250A  
Switch Control Basics  
Auto Configuration Mode  
To use this mode, the E5252A must be installed in the E5250A slots continuously  
from slot1 (slots 1,2; or slots 1,2,3; or slots 1,2,3,4).  
To specify a channel, you use five digits as shown in Table 5-6.  
Table 5-6  
Specifying E5252A Channels in Auto Config. Mode  
One Channel: 5 digits  
Slot No.  
(E5252A  
is  
installed)  
Channel Number: 4 digits  
Configuration  
CardNumber  
(first 1 digit)  
Input Port No.  
Output Port No.  
(last 2 digits)  
(next 2 digits)  
1
10×12 Matrix  
10×24 Matrix  
10×36 Matrix  
10×48 Matrix  
0
0
0
0
01 to 10  
01 to 10  
01 to 10  
01 to 10  
01 to 12  
01 to 24  
01 to 36  
01 to 48  
1 and 2  
1 to 3  
1 to 4  
Card Number:  
One digit: always 0.  
Channel Number: Four digits: XXYY.  
XX: input port number (01 to 10).  
YY: output port number (01 to 48).  
Channel Number assignment is shown in Figure 5-5.  
In the Auto Configuration mode, you can omit any zeros at beginning of channel.  
For example, channel 00101 can be expressed by 101.  
NOTE  
For the following two cases, three ports share one input path. Do not specify two of  
the input ports at same time.  
SMU5, HF1, and CV1 (Input Port No. 05, 07, and 09)  
SMU6, HF2, and CV2 (Input Port No. 06, 08, and 10)  
For example, if you specify input port 05, then you cannot specify input ports 07 and  
09. You can specify 05 and 06 at the same time:  
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Controlling the E5250A  
Switch Control Basics  
Figure 5-5  
E5252A Channel Number in Auto Config. Mode (example for 10×48 matrix)  
0145  
0146 0147 0148  
SMU1 01  
0101 0102 0103 0104 0105 0106  
0201 0202 0203 0204 0205 0206  
0301 0302 0303 0304 0305 0306  
0401 0402 0403 0404 0405 0406  
SMU2  
SMU3  
SMU4  
0245 0246 0247 0248  
0345 0346 0347 0348  
0445 0446 0447 0448  
02  
03  
04  
05  
06  
07  
08  
09  
SMU5  
SMU6  
HF1  
0501 0502 0503 0504 0505 0506  
0601 0602 0603 0604 0605 0606  
0701 0702 0703 0704 0705 0706  
0545 0546 0547 0548  
0645 0646 0647 0648  
0745 0746 0747 0748  
0801 0802 0803 0804 0805 0806  
0845 0846 0847 0848  
HF2  
CV1  
CV2  
0901 0902 0903 0904 0905 0906  
1001 1002 1003 1004 1005 1006  
0945 0946 0947 0948  
1045 1046 1047 1048  
10  
01  
03  
48  
: Channel No.  
04  
05  
06  
46  
02  
47  
45  
Input Port  
XXXX  
Input Port No.  
Output Port (Output Port No.)  
5-18  
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Controlling the E5250A  
E5255A Channel List  
This section describes how to define the channel_list specifically for the E5255A.  
For the basic syntax of channel_list parameter, see “Channel List and Channel  
Configuration” on page 5-6.  
Normal Configuration Mode  
To specify a channel, you use five digits as shown in Table 5-7.  
Specifying E5255A Channels in Normal Config. Mode  
Table 5-7  
One Channel: 5 digits  
Slot No.  
(E5255A  
is  
installed)  
Block No.  
ofE5255A  
Channel Number: 4 digits  
CardNumber  
(first 1 digit)  
Input Port No.  
Output Port No.  
(last 2 digits)  
(next 2 digits)  
1
2
3
4
1
2
3
1
2
3
1
2
3
1
2
3
1
2
3
4
IV Input: 01  
BIAS Input: 51  
01 to 08  
01 to 08  
01 to 08  
01 to 08  
IV Input: 02  
BIAS Input: 52  
IV Input: 03  
BIAS Input: 53  
IV Input: 01  
BIAS Input: 51  
IV Input: 02  
BIAS Input: 52  
IV Input: 03  
BIAS Input: 53  
IV Input: 01  
BIAS Input: 51  
IV Input: 02  
BIAS Input: 52  
IV Input: 03  
BIAS Input: 53  
IV Input: 01  
BIAS Input: 51  
IV Input: 02  
BIAS Input: 52  
IV Input: 03  
BIAS Input: 53  
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Controlling the E5250A  
Switch Control Basics  
Card Number:  
One digit: 1 to 4. E5250A slot number in which card is  
installed.  
Channel Number: Four digits: XXYY.  
XX: input port number (depends on the block number).  
01, 02, or 03 for IV Input Port Number.  
51, 52, or 53 for BIAS Input Port Number.  
The input port number depends only on the block number,  
and does not depend on which the E5250A SMU Input is  
connected to the IV Input.  
YY: output port number (01 to 08).  
Channel Number assignment is shown in Figure 5-6.  
E5255A Channel Number in Normal Config. Mode  
Figure 5-6  
Block 1  
BIAS Input  
(51)  
5102  
0102  
5101  
0101  
5103 5104 5105 5106 5107 5108  
0103 0104 0105 0106 0107 0108  
IV Input  
Output  
1
2
4
5
8
3
6
7
Block 2  
BIAS Input  
(52)  
5202  
0202  
5201  
0201  
5203 5204 5205 5206 5207 5208  
0203 0204 0205 0206 0207 0208  
IV Input  
Output  
1
2
4
5
8
3
6
7
Block 3  
BIAS Input  
(53)  
5302  
0302  
5301  
0301  
5303 5304 5305 5306 5307 5308  
0303 0304 0305 0306 0307 0308  
IV Input  
Output  
XXXX  
: Channel No.  
1
2
4
5
8
3
6
7
5-20  
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Controlling the E5250A  
Switch Control Basics  
Auto Configuration Mode  
To use this mode, the E5255A must be installed in the E5250A slots continuously  
from slot1 (slots 1,2; or slots 1,2,3; or slots 1,2,3,4). To specify a channel, use five  
digits as shown in Table 5-8,  
Table 5-8  
Specifying E5255A Channels in Auto Config. Mode  
One Channel: 5 digits  
IV Port Input  
Connection  
(SMU Input  
Port No.)  
Channel Number: 4 digits  
Card Number  
(first 1 digit)  
Input Port No.  
Output Port No.  
(last 2 digits)  
(next 2 digits)  
to SMU1 (1)  
to SMU2 (2)  
to SMU3 (3)  
to SMU4 (4)  
to SMU5 (5)  
to SMU6 (6)  
0
0
0
0
0
0
IV Input: 01  
BIAS Input: 11  
01 to 96  
01 to 96  
01 to 96  
01 to 96  
01 to 96  
01 to 96  
IV Input: 02  
BIAS Input: 12  
IV Input: 03  
BIAS Input: 13  
IV Input: 04  
BIAS Input: 14  
IV Input: 05  
BIAS Input: 15  
IV Input: 06  
BIAS Input: 16  
Card Number:  
One digit: always 0.  
Channel Number: Four digits: XXYY.  
XX: input port number.  
01, 02, 03, 04, 05, or 06 for IV Input Port.  
11, 12, 13, 14, 15, or 16 for BIAS Input Port.  
YY: output port number.  
Minimum output port number is 01.Maximum output port  
number is the total number of output ports for the E5255A  
blocks connected to the same input port.  
For each configured multiplexer, output port number 01 is  
assigned to first output port of smallest block number on  
card in the lowest slot number.  
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Switch Control Basics  
In the Auto Configuration mode, you can omit any zeros at beginning of channel.  
For example, channel 00101 can be expressed by 101.  
Figure 5-7, Table 5-9 and Figure 5-8 show examples of the Channel Number. In this  
example, four E5255As are installed in the E5250A. And the E5255As are  
configured to make the following multiplexers:  
Slot1 and Slot2:  
all six blocks are used together to make a 2×48 multiplexer.  
IV input port is internally connected to SMU1 input port.  
Slot3 and Slot4:  
Both Block1 used together to make 2×16 multiplexer-1.  
IV input port is internally connected to SMU2 input port.  
Both Block2 used together to make 2×16 multiplexer-2.  
IV input port is internally connected to SMU3 input port.  
Block3 of Slot3 makes 2×8 multiplexer-1.  
IV input port is internally connected to SMU4 input port.  
Block3 of Slot4 makes 2×8 multiplexer-2.  
IV input port is internally connected to SMU5 input port.  
For the internal connections of the E5255A, see Chapter 2.  
Figure 5-7  
Example Setup of E5255A  
2x48 Multiplexer  
2x8 Multiplexer-1  
slot 1  
slot 2  
slot 3  
slot 4  
2x8 Multiplexer-2  
2x16 Multiplexer-2  
2x16 Multiplexer-1  
5-22  
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Controlling the E5250A  
Switch Control Basics  
Table 5-9  
Example IV Input Connection and Channel Number  
One Channel: 5 digits  
IV  
Input  
to  
Slot  
No.  
Block  
No.  
Channel Number: 4 digits  
Configuration  
CardNumber  
(first 1 digit)  
Input Port No. Output Port No.  
(next 2 digits)  
(last 2 digits)  
1
2
3
1 to 3  
1 to 3  
1
SMU1  
SMU1  
SMU2  
0
0
0
IV Input: 01  
BIAS Input: 11  
01 to 24  
2×48MUX  
with slot 2 card  
IV Input: 01  
BIAS Input: 11  
25 to 48  
01 to 08  
2×48MUX  
with slot 1 card  
IV Input: 02  
BIAS Input: 12  
2×16MUX-1  
with block1 in  
slot 4 card  
2
SMU3  
0
IV Input: 03  
BIAS Input: 13  
01 to 08  
2×16MUX-2  
with block2 in  
slot 4 card  
3
1
SMU4  
SMU2  
0
0
IV Input: 04  
BIAS Input: 14  
01 to 08  
09 to 16  
2×8MUX-1  
4
IV Input: 02  
BIAS Input: 12  
2×16MUX-1  
with block1 in  
slot 3 card  
2
3
SMU3  
SMU5  
0
0
IV Input: 03  
BIAS Input: 13  
09 to 16  
01 to 08  
2×16MUX-2  
with block2 in  
slot 3 card  
IV Input: 05  
2×8MUX-2  
BIAS Input: 15  
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Controlling the E5250A  
Switch Control Basics  
Figure 5-8  
Example for E5255A Channel Number in Auto Config. Mode  
BIAS Input  
(11)  
BIAS Input  
(14)  
1103  
0103  
1102  
0102  
1148  
1101  
0101  
1147  
1403  
0403  
1402  
0402  
1408  
1401  
0401  
1407  
IV Input  
SMU1 (01)  
IV Input  
SMU4 (04)  
0147 0148  
0407 0408  
Output  
1
2
3
48  
47  
7
8
Output  
1
2
3
Made from Cards in Slot #1 and #2.  
Made from Block #3 of Card in Slot #3.  
Block #1 to 3 of each card should be connected in series.  
BIAS Input  
(12)  
BIAS Input  
(15)  
1203  
0203  
1215  
1202  
0202  
1216  
1201  
0201  
1503  
0503  
1502  
0502  
1508  
1501  
0501  
1507  
IV Input  
SMU2 (02)  
IV Input  
SMU5 (05)  
0215 0216  
0507 0508  
15  
16  
Output  
1
2
3
7
8
Output  
1
2
3
Made from Block #1 of Cards in Slot #3 and #4.  
Made from Block #3 of Card in Slot #4.  
Block #1 of each card should be connected in series.  
BIAS Input  
(13)  
1303  
0303  
1302  
0302  
1315 1316  
0315 0316  
1301  
0301  
IV Input  
SMU3 (03)  
SMU6 is not used.  
15  
16  
XXXX  
Output  
1
: Channel Number  
2
3
Made from Block #2 of Cards in Slot #3 and #4.  
Block #2 of each card should be connected in series.  
5-24  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Using Virtual Front Panel Utility  
The Virtual Front Panel (VFP) Utility is a control program for the E5250A. The  
VFP utility runs on Agilent 4155/4156 Semiconductor Parameter Analyzer's built-in  
IBASIC controller. You can control the E5250A interactively from the 4155/4156  
“Requirements”  
“Changing the VFP Setup Mode”  
“Defining Labels for the E5250A Input Ports”  
“Making Connections and Changing the Setup Data”  
“Saving/Loading the Setup Data”  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Functions of Virtual Front Panel Utility  
The Virtual Front Panel (VFP) utility is used to create the E5250A setup data and  
interactively (from the 4155/4156) make channel connections on the E5250A  
plug-in cards. The VFP utility can perform the following:  
Display the E5250A card configurations.  
Change the channel configuration mode, bias port, and bias mode.  
Define labels for the E5250A input terminals.  
Create setup data (connection data).  
Create channels on cards according to the connection data.  
Use 24 different setup memories for one setup data.  
Save/load the setup data to/from a file.  
The setup data has 24 setup memories. One setup memory is used for one  
measurement setup, and is the minimum unit of the E5250A setup data. For  
example, one setup memory is used for MOSFET Vth measurement, another setup  
memory is used for Capacitance measurement, and so on. One setup memory is used  
for the connection data of all installed cards.  
The data created by the VFP can be saved to diskette by using the built-in flexible  
disk drive of the 4155/4156. And VFP data on diskette can be loaded into VFP.  
Also, the VFP data on diskette can be loaded into your program by using the VFP  
Data Upload Library. Refer to Chapter 6.  
In the VFP, the following are always used and cannot be changed:  
Connection Rule: FREE  
Connection Sequence: Break Before Make  
Couple Port function is not available in the VFP.  
5-26  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Requirements  
The following are required to execute the Virtual Front Panel (VFP) Utility.  
Model/Part No.  
Description  
Qty.  
4155 or 4156  
10833A/B/C  
E5250-17003  
Semiconductor Parameter Analyzer  
GPIB Cable  
1
1
1
E5250A Program Disk (furnished)  
Starting the Virtual Front Panel Utility  
1. Before turning on the E5250A and the 4155/4156 Semiconductor Parameter  
Analyzer, connect the GPIB cable between the instruments, and make a  
measurement connection. See Chapter 4.  
2. Turn on the 4155/4156 and the E5250A.  
3. Set the 4155/4156 to "SYSTEM CONTROLLER" mode on SYSTEM:  
MISCELLANEOUS page.  
4. Insert the E5250A Program Disk into the 4155/4156 disk drive.  
5. Press the Display key twice to change to "All IBASIC" screen. This key is  
located in the IBASIC area on the 4155/4156 front panel.  
6. Select the GET softkey. This softkey is displayed on right side of the 4155/4156  
screen. The following statement is displayed on the 4155/4156.  
GET "_"  
7. Type VFP between the double quotations of the GET statement. Then press  
Enter key. Wait until the 4155/4156 finishes getting the file.  
8. Press the Run key, which in the IBASIC area on the 4155/4156 front panel. The  
following message is displayed:  
Input Agilent E5250A GPIB Address (default 722) : ?  
9. To use default GPIB address 722, just press the Enter key.  
If not, type the GPIB address of your E5250A, then press Enter key.  
The main menu of VFP is displayed on the 4155/4156 screen. And the E5250A  
is initially set to settings of setup memory 1.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
The following softkeys are displayed on right side of the 4155/4156 screen.  
Softkey  
Description  
SHOW  
For confirming which cards are installed in each E5250A slot.  
CONFIG  
SETUP  
MODE  
For changing the VFP setup mode (Channel Configuration mode,  
Bias Port, and Bias Mode state). When the setup mode is changed,  
all setup data is cleared (that is, connection data is set so that all  
relays are open).  
DEFINE  
LABEL  
For defining labels for the E5250A input ports to be used in  
MEMORY SETUP PANEL.  
SETUP  
For creating connection channels in the E5250A cards. When you  
MEMORY modify any setting of the setup memory, the E5250A connection  
channels are changed in real time.  
SAVE/  
LOAD  
For saving/loading the setup data to/from diskette.  
QUIT  
Quits the VFP utility.  
Confirming the E5250A Card Configurations  
Select SHOW CONFIG softkey. SHOW CONFIGURATION MENU is displayed  
on the 4155/4156 to show which card is installed in each E5250A slot.  
If card is the E5252A, the following comment is displayed:  
E5252A 10x12 Matrix Switch  
If card is the E5255A, a comment similar to following example is displayed:  
E5255A 24 (8x3) Channel Multiplexer  
Block 1 : Input 1, No Resistance  
Block 2 : Input 2, No Resistance  
Block 3 : Input 3, No Resistance  
For InputN, the N can be 1 to 6, and indicates which E5250A SMU input port is  
connected to the IV input of each multiplexer block. The next parameter indicates if  
resistor is used between input Bias Port and IV Input ports as follows:  
No Resistance: no resistor used.  
With Resistance: resistor is used.  
5-28  
Agilent E5250A User’s Guide, Edition 9  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Changing the VFP Setup Mode  
Select the SETUP MODE softkey. The display shows the present setup conditions:  
Channel Configuration mode:  
Model Number of each card:  
Bias Mode state of each card:  
NORMAL or AUTO  
E5252A or E5255A  
ON or OFF  
Bias Port number of each card: E5252A: 1 to 10 E5255A: not applicable  
The card numbers are 1 to 4 in NORMAL configuration mode, and 0 (zero) in  
AUTO configuration mode.  
The following softkeys are available.  
Softkey  
Description  
CHANGE For changing the channel configuration mode. See next page.  
CONFIG  
CARDn  
For selecting which card to change the Bias Port and Bias Mode  
(n=1 to 4) state. CARDn softkeys are displayed only in NORMAL  
configuration mode. Displays the BIAS STATE, BIAS PORT and  
RETURN softkeys.  
Select RETURN softkey to display CARDn softkey again, so you  
can select another card to change the Bias Port and Bias Mode state.  
BIAS  
STATE  
For toggling the Bias Mode ON/OFF. This softkey is displayed in  
AUTO configuration mode, or by selecting the CARDn softkey in  
NORMAL configuration mode. See next page.  
BIAS  
PORT  
Only for the E5252A card. For selecting the Bias Port. This softkey  
is displayed in AUTO configuration mode, or by selecting the  
CARDn softkey in NORMAL configuration mode. See next page.  
MAIN  
For returning to VFP main menu. See next page.  
MENU  
CAUTION  
If you change the VFP Setup Mode, all data is cleared from the setup memories  
when you return to the VFP main menu.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Figure 5-9  
Example of SETUP MODE MENU  
Agilent E5250A Virtual Front Panel Utility  
** SETUP MODE MENU **  
CONFIG MODE : NORMAL  
BIAS STATE  
OFF  
BIAS PORT  
CARD1 [E5252]  
CARD2 [E5252]  
CARD3 [E5255]  
CARD4 [E5255]  
10  
10  
--  
--  
OFF  
OFF  
OFF  
!! CAUTION !!  
If any setting parameter of this menu is changed,  
all setup memory will be cleared.  
Select desired softkey.  
To change the channel configuration mode  
Select the CHANGE CONFIG softkey. This softkey toggles the configuration mode  
between AUTO and NORMAL.  
To change the Bias Port (for the E5252A only)  
Select the BIAS PORT softkey. The following message is displayed:  
Input Bias Port Number.  
Type input port number (1 to 10 is available) to use as bias port, then press Enter  
key. To cancel operation, press Enter key without typing a number.  
To change the Bias Mode state  
Select BIAS STATE softkey. This softkey toggles the state OFF/ON.  
To enter/cancel the changes and return to the VFP main menu  
Select MAIN MENU softkey. If you did not make changes, Main Menu is  
displayed. If you made changes, following message/softkeys are displayed:  
Changing mode will clear all setup memory. OK?  
Softkey  
Description  
CHANGE  
MODE  
Enters the changes you made, and returns to the VFP main menu.  
All the previous setup memory data is cleared.  
CANCEL  
Cancels the changes you made, and returns to the VFP main  
menu. Setup memory data is not cleared.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Defining Labels for the E5250A Input Ports  
You can define labels to use for the input ports of each row in the MEMORY  
SETUP PANEL.  
Select the DEFINE LABEL softkey. The DEFINE LABEL MENU and following  
softkeys are displayed:  
Softkey  
Description  
E5250A  
INPUT  
For displaying softkeys to select the desired input ports. See below.  
CARDn  
INPUT  
For selecting the E5255A. You can define a label for the input Bias  
Port of selected E5255A. This softkey is displayed only for card  
(n=1 to 4) slots that have the E5255A installed. See next page.  
MAIN  
For returning to VFP main menu.  
MENU  
To define labels for the E5250A input ports  
Select the E5250A INPUT softkey. The following softkeys are displayed.  
Softkey  
Description  
INPUTn  
LABEL  
For selecting the E5250A input port. You can define a label for the  
selected input port. See below.  
(n=1 to 10)  
MORE  
For displaying more softkeys to select the input port. This softkey  
toggles between the INPUTn LABEL softkeys n=1 to 5 and n=6 to  
10.  
RETURN  
For returning to the DEFINE LABEL MENU.  
Select the INPUTn LABEL softkey (n=1 to 10). The following message is  
displayed:  
Input Label Name. (Max 5 char string)  
Type desired label (maximum 5 characters), then press the Enter key.  
If you press the Enter key without typing any characters, the label is cleared.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
To define labels for the E5255A bias input ports  
Select the CARDn INPUT softkey (n=1 to 4). The following softkeys are displayed:  
Softkey  
Description  
BIASn  
LABEL  
(n=1 to 3)  
For selecting input Bias Port on the E5255A that was selected by  
the CARDn INPUT softkey. See below.  
RETURN For returning to the DEFINE LABEL MENU.  
Select the BIASn LABEL softkey (n=1 to 3). The following message is displayed:  
Input Label Name. (Max 5 char string)  
Type desired label (maximum 5 characters), then press the Enter key.  
If you press the Enter key without typing any characters, the label is cleared.  
Figure 5-10  
Example of DEFINE LABEL MENU  
Agilent E5250A Virtual Front Panel Utility  
** DEFINE LABEL MENU **  
E5250A INPUT1 : " IV1 "  
INPUT2 : " IV2 "  
INPUT3 : " IV3 "  
INPUT4 : " IV4 "  
INPUT5 : " IV5 "  
INPUT6 : " IV6 "  
INPUT7 : " HF1 "  
INPUT8 : " HF2 "  
INPUT9 : " CV1 "  
INPUT10 : " CV2 "  
CARD1 E5252A  
CARD2 E5252A  
No Bias Input Port  
No Bias Input Port  
CARD3 E5255A BIAS1:"C3B1 " BIAS2:"C3B2 " BIAS3:"C3B3"  
CARD4 E5255A BIAS1:"C4B1 " BIAS2:"C4B2 " BIAS3:"C4B3"  
Select desired softkey.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Making Connections and Changing the Setup Data  
Select SETUP MEMORY softkey. The E5250A is initially set to connections of  
setup memory 1, then SETUP MEMORY MENU and following softkeys are  
displayed. Current Setup Memory indicates setup memory that currently sets  
E5250A.  
Softkey  
Description  
NEXT SETUP  
Changes Current Setup Memory to next setup memory  
number. Increases number of Current Setup Memory by 1.  
And changes the E5250A to new settings.  
PREV SETUP  
GOTO SETUP  
Changes Current Setup Memory to previous setup memory  
number. Decreases number of Current Setup Memory by 1.  
And changes the E5250A to new settings.  
Changes the E5250A to settings of specified setup memory.  
See later. Changes Current Setup Memory to specified  
setup memory number.  
MODIFY SETUP For modifying settings in Current Setup Memory. See later.  
MORE  
Displays more softkeys. See below table.  
Returns to the VFP main menu.  
MAIN MENU  
Softkey  
Description  
CLEAR SETUP  
For clearing settings of specified setup memory. See later.  
The setup memory is changed to "Open All" (no  
connection) setup.  
COPY SETUP  
For copying a setup memory to another setup memory. See  
later.  
DELETE SETUP  
For deleting the specified setup memory. The higher setup  
memories are shifted down, and setup memory 24 is set to  
"Open All" (no connection). See later.  
INSERT SETUP  
CLEAR ALL  
For inserting setup memory ("Open All"no connection) at  
specified setup memory number. Specified setup and higher  
memories are shifted up, and setup memory 24 is deleted.  
See later.  
For clearing all setup memories. All setup memories are  
changed to "Open All" (no connection) setup. See later.  
MORE  
Displays more softkeys. See above table.  
Returns to the VFP main menu.  
MAIN MENU  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Figure 5-11  
Example of SETUP MEMORY MENU  
Agilent E5250A Virtual Front Panel Utility  
** SETUP MEMORY MENU **  
Current Setup Memory : 1  
Setup: Comment  
1 : Open All  
2 : MOSFET 1  
3 : MOSFET 2  
4 : MOSFET 3  
5 : MOS CAP 1  
6 : MOS CAP 2  
7 : MOS CAP 3  
8 : Open All  
9 : Open All  
10 : Open All  
11 : Open All  
12 : Open All  
Setup: Comment  
13 : Open All  
14 : Open All  
15 : Open All  
16 : Open All  
17 : Open All  
18 : Open All  
19 : Open All  
20 : Open All  
21 : Open All  
22 : Open All  
23 : Open All  
24 : Open All  
Select desired softkey.  
To change the E5250A setup to specified setup memory  
Select the GOTO SETUP softkey. The following message is displayed:  
Input setup memory number to be connected?  
Type the desired setup memory number, then press the Enter key. Current Setup  
Memory changes to the specified setup memory, and the E5250A changes to the new  
settings.  
If you press Enter key without typing a number, the operation is canceled.  
To copy a setup memory  
Select the COPY SETUP softkey. The following message is displayed:  
Input copy src & dest setup memory number: src,dest  
Type the desired setup memory number, then press the Enter key. This operation  
overwrites the setup memory data. For example, to copy setup memory No.1 to  
No.5, type as follows:  
1,5  
If you press Enter key without typing numbers, operation is canceled.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
To delete a setup memory  
Select the DELETE SETUP softkey. The following message is displayed.  
Input setup memory number to be deleted? ENTER to cancel.  
Type the setup memory number to delete, then press the Enter key.  
For example, if you type 12, setup memory 12 is deleted, setup memories 13 to 24  
are shifted down by one, and setup memory 24 is set to "Open All".  
If you press Enter key without typing a number, operation is canceled.  
To insert a setup memory  
Select the INSERT SETUP softkey. The following message is displayed.  
Input setup memory number to be inserted? ENTER to cancel.  
Type the setup memory number where you want to insert a new setup memory, then  
press the Enter key.  
For example, if you specify 12, setup memory 24 is deleted, setup memories 12 to  
23 are shifted up by one, and new setup memory 12 is set to "Open All".  
If you press Enter key without typing a number, operation is canceled.  
To clear setup memory  
To clear a setup memory, select the CLEAR SETUP softkey. The following message  
is displayed:  
Input setup memory number to be cleared? ENTER to cancel.  
Type the setup memory number to clear, then press the Enter key. The setup memory  
is set to "Open All".  
To clear all setup memories, select the CLEAR ALL softkey. The following  
message and softkeys are displayed:  
Clear all setup memory. OK?  
Softkey  
Description  
CLEAR ALL  
CANCEL  
Clears all setup memories.  
Cancels the clear operation.  
Select the CLEAR ALL softkey to clear all setup memories.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
To modify the settings in Current Setup Memory  
Select MODIFY SETUP softkey. MEMORY SETUP PANEL appears as shown in  
examples in Figure 5-12 to Figure 5-14, and softkeys shown after Figure 5-14  
appear.  
One setup memory is used for connection data of all installed cards. For Auto  
Config mode, settings for all cards are on one MEMORY SETUP PANEL. For  
Normal Config mode, each card uses a different MEMORY SETUP PANEL.  
Figure 5-12  
Memory Setup Panel for the E5252A in Auto Config.  
Agilent E5250A Virtual Front Panel Utility  
** MEMORY SETUP PANEL **  
Current Setup Memory : 1  
Comment  
Card Number  
: MOSFET Vth  
: 0  
111111111122222222223333333333444444444  
Input  
IV1  
IV2  
IV3  
IV4  
IV5  
IV6  
HF1  
HF2  
CV1  
CV2  
123456789012345678901234567890123456789012345678  
@...............................................  
.@..............................................  
..@.............................................  
...@............................................  
................................................  
................................................  
................................................  
................................................  
................................................  
................................................  
Use softkeys to move cursor and to change status.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Figure 5-13  
Memory Setup Panel for the E5255A in Normal Config. (2 X 24 multiplexer)  
Agilent E5250A Virtual Front Panel Utility  
** MEMORY SETUP PANEL **  
Current Setup Memory : 1  
Comment  
Card Number  
: MOS CAP  
: 1  
Input  
IV1  
12345678  
@.......  
BS1 * .@@@@@@@  
IV1 ........  
BS1 * @@@@@@@@  
IV1 ........  
BS1 * --------  
Use softkeys to move cursor and to change status.  
Figure 5-14  
Memory Setup Panel for the E5255A in Auto Config. (2 X 24 multiplexer)  
Agilent E5250A Virtual Front Panel Utility  
** MEMORY SETUP PANEL **  
Current Setup Memory : 1  
Comment  
Card Number  
: MOS CAP  
: 0  
111111111122222  
Input  
IV1  
123456789012345678901234  
@.......................  
BS1 * .@@@@@@@@@@@@@@@--------  
Use softkeys to move cursor and to change status.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
You can define labels to use for the input ports of each row in the MEMORY  
SETUP PANEL. Refer to “Defining Labels for the E5250A Input Ports” on page  
5-31.  
The following softkeys are displayed for MEMORY SETUP PANEL:  
Softkey  
Description  
CHANGE  
CHAN  
For changing the settings in the Current Setup Memory. See  
later. Displays cursor for input-output crosspoints and some  
softkeys.  
COMMENT For entering a comment for the setup memory. See next page.  
NEXT  
CARD  
(Displayed only for NORMAL Config mode, not AUTO Config  
mode.) Displays MEMORY SETUP PANEL of next card for  
changing settings.  
SWITCH  
PAGE  
(Displayed only for AUTO Config mode, not NORMAL Config  
mode.) Displays other page of MEMORY SETUP PANEL if  
more than 48 output ports. This softkey is displayed if the  
E5250A is configured for multiplexer that has more than 48  
outputs (example, 2×96 multiplexer). This softkey toggles  
between the MEMORY SETUP PANEL for outputs 1 to 48, and  
for 49 to 96.  
NEXT  
SETUP  
Changes the Current Setup Memory to next setup memory  
number. Increases the Current Setup Memory number by 1. And  
changes the E5250A to the new settings.  
PREV  
SETUP  
Changes the Current Setup Memory to previous setup memory  
number. Decreases the Current Setup Memory number by 1. And  
changes the E5250A to the new settings.  
GOTO  
SETUP  
For changing the E5250A to settings of specified setup memory.  
See later. Changes Current Setup Memory to specified setup  
memory number.  
SETUP  
Returns to the SETUP MEMORY MENU.  
MEMORY  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
To enter a comment for the setup memory  
Select the COMMENT softkey. The following message is displayed:  
Input comment for this setup memory. (Max 20 char)  
Type desired comment (maximum 20 characters), then press the Enter key. If you  
press Enter key without typing a comment, comment line is cleared.  
To change the E5250A setup to specified setup memory  
Select the GOTO SETUP softkey. The following message is displayed:  
Input setup memory number to be connected?  
Type the desired setup memory number, then press the Enter key. Current Setup  
Memory changes to the specified setup memory, and the E5250A changes to the new  
settings.  
To cancel this operation, press the Enter key without typing a number.  
To change the settings in a setup memory  
Select the CHANGE CHAN softkey. A cursor for selecting input-output crosspoints  
is displayed. And the following softkeys are displayed for changing the settings of  
the setup memory.  
Change the setting of the setup memory by using these softkeys.  
NOTE  
Invalid Input Port  
The following E5250A input port combinations cannot be used for making a setup  
memory.  
IV5 (INPUT 5) and HF1 (INPUT 7) and CV1 (INPUT 9)  
IV6 (INPUT 6) and HF2 (INPUT 8) and CV2 (INPUT 10)  
For example, when IV5 is used, HF1 and CV1 cannot be used.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Softkey Menu 1:  
Softkey  
Description  
OPEN/  
CLOSE  
Changes the relay state (open or close) of crosspoint selected by the  
cursor. The softkey toggles the state between open and close. The  
E5250A settings are changed in real time.  
If bias mode is ON and cursor is in the row of input bias port, this  
softkey changes the relay state; open, close, and bias disabled.  
. means open.  
@ means close.  
means bias disabled.  
When bias mode is ON, if you disconnect a bias enabled output port  
from a non-bias input port, the output port is automatically  
connected to the input bias port.  
UP  
Moves the cursor upward.  
Moves the cursor to the left.  
Moves the cursor to the right.  
Moves the cursor downward.  
LEFT  
RIGHT  
DOWN  
MORE  
Displays more softkeys. The displayed softkeys depend on whether  
cursor selects input Bias Port and Bias Mode is ON. See Softkey  
Menu 2 and Menu 3 on next pages.  
RETURN Displays the previous level of the softkey menu, shown previously  
in "To Modify the Settings in Current Setup Memory".  
NOTE  
Moving the Cursor  
Move the cursor by using the UP, DOWN, RIGHT, LEFT softkeys. Do not use  
arrow keys on the 4155/4156 front panel.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Softkey Menu 2:  
For the following conditions, the following softkeys are displayed by selecting the  
MORE softkey on Softkey Menu 1.  
Cursor points to row of normal input port or to row of input Bias Port with Bias  
Mode OFF.  
Softkey  
Description  
OPEN  
ALL  
Opens all relays. If Bias Mode is ON, then closes relays to connect  
bias enabled output ports to the input Bias Port.  
OPEN  
ROW  
Opens all relays of row at cursor. If Bias Mode is ON, then closes  
relays to connect bias enabled output ports (that are not connected  
to other input ports) to the input Bias Port.  
CLOSE  
ROW  
Closes all relays of row at cursor. And all output ports are  
disconnected from the input Bias Port.  
MORE  
Displays softkey menu 1.  
RETURN Displays the previous level of softkey menu.  
Softkey Menu 3:  
For the following conditions, the following softkeys are displayed by selecting the  
MORE softkey on Softkey Menu 1:  
Cursor points to row of input Bias Port and Bias Mode is ON.  
Softkey  
Description  
OPEN  
ALL  
Opens all relays, then connects all bias enabled output ports to the  
input Bias Port.  
DISABLE Bias disables all output ports. So relays open to disconnect all  
ROW  
output ports from the input Bias Port.  
ENABLE  
ROW  
Bias enables all output ports, then connects all output ports (that  
are not connected to another input port) to the input Bias Port.  
MORE  
Displays softkey menu 1.  
RETURN  
Displays the previous level of softkey menu.  
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Controlling the E5250A  
Using Virtual Front Panel Utility  
Saving/Loading the Setup Data  
Select the SAVE/LOAD softkey. The following softkeys are displayed:  
Softkey  
Description  
CATALOG  
Lists the files of diskette that is in the 4155/4156 internal disk  
drive.  
SAVE FILE  
LOAD FILE  
RETURN  
For saving setup data to the diskette that is in the 4155/4156  
internal disk drive. See below.  
For loading setup data from the diskette that is in the  
4155/4156 internal disk drive. See below.  
Returns to the VFP main menu.  
To save setup data to diskette  
Select the SAVE FILE softkey. The following message is displayed:  
Input Save file name  
Type the name (maximum 8 characters) of file to which you want to save the setup  
data, then press the Enter key.  
To cancel this operation, press the Enter key without typing the file name.  
To load setup data from diskette  
Select the LOAD FILE softkey. The following message is displayed:  
Input Load file name  
Type the file name of setup data you want to load, then press the Enter key. The VFP  
setup data is loaded into the VFP.  
To cancel this operation, press the Enter key without typing the file name.  
After loading the file, the E5250A changes to the setting of setup memory 1.  
5-42  
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6
Programming the E5250A  
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Programming the E5250A  
Standard Commands for Programmable Instruments (SCPI) is a universal  
programming language for electronic test and measurement instruments, and based  
on IEEE 488.1 and IEEE488.2.  
This chapter describes how to create programs that contain SCPI commands to  
control the E5250A. These programs can be run from an external controller.  
This chapter explains the following programming tasks along with programming  
examples:  
“SCPI Programming Basics” explains the basics of using an program that  
contains SCPI commands to control the E5250A and runs on HP BASIC.  
“Creating a Control Program” shows typical programming flow for controlling  
the E5250A.  
“Programming Examples” provides some examples of the E5250A  
programming.  
“Using the VFP Data Upload Library” explains how to use the VFP Data  
Upload Library furnished with the E5250A.  
“Using the Capacitance Compensation Routine” explains how to use the  
Capacitance Compensation Routine furnished with the E5250A.  
For the details about SCPI commands, refer to Chapter 7.  
In addition to this chapter, refer to Chapter 9, which describes how to use and  
modify the sample programs furnished with the E5250A, and helps to increase your  
understanding about programming.  
CAUTION  
The VFP Data Upload Library and the Capacitance Compensation Routine can be  
used only in an program runs on HP BASIC.  
6-2  
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Programming the E5250A  
SCPI Programming Basics  
This section describes the structure of SCPI commands, and the basics of using an  
program that contains SCPI commands to control the E5250A and runs on HP  
BASIC:  
“SCPI Command Hierarchy”  
“Controlling E5250A by Using HP BASIC”  
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Programming the E5250A  
SCPI Programming Basics  
SCPI Command Hierarchy  
The SCPI commands use a hierarchical structure for subsystem commands similar  
to a file system. For example, in :ROUT:CONN:RULEcommand, the hierarchy is  
as follows:  
ROUT  
CONN  
RULE  
root  
sub-level 1  
sub-level 2  
The colon at the beginning of the command means root.  
The colons between two command keywords means moving down to a lower level.  
NOTE  
Using a Semicolon to Reduce Typing  
A semicolon enables two commands to be sent on the same line.  
For example, :ROUT:CONN:RULE ALL,FREE;SEQ ALL,BBMis the same as  
the following two commands:  
:ROUT:CONN:RULE ALL,FREE  
:ROUT:CONN:SEQ ALL,BBM  
So, using a semicolon reduces typing and simplifies the program.  
A command terminator (such as carriage return) resets the path to root.  
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Programming the E5250A  
SCPI Programming Basics  
Controlling E5250A by Using HP BASIC  
1. Assign I/O path for controlling the E5250A by using the ASSIGN command.  
In the following example, the select code of the external computer is 7 and GPIB  
address of the E5250A is 22.  
10 ASSIGN @Hp5250 TO 722  
2. Use OUTPUT command to send SCPI commands to control the E5250A.  
3. Use ENTER command to get query response from the E5250A.  
Example:  
10 REAL Complete  
20 !  
30 ASSIGN @Hp5250 TO 722  
40 !  
50 OUTPUT @Hp5250;"*RST"  
60 !  
70 OUTPUT @Hp5250;":ROUT:FUNC NCON"  
80 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,FREE"  
90 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM"  
100 OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
110 !  
120 OUTPUT @Hp5250;"*OPC?"  
130 ENTER @Hp5250;Complete  
140 !  
150 END  
Line Number  
Description  
10  
Declares "Complete" as a real number.  
Assigns I/O path to control the E5250A.  
Resets the E5250A.  
30  
50  
70  
Sets the E5250A to Normal channel configuration mode.  
Sets all cards to free connection rule.  
Sets all cards to break-before-make connection sequence.  
Creates channels 10101 and 10202.  
80  
90  
100  
120 and 130  
Waits until all operations are complete.  
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Programming the E5250A  
Creating a Control Program  
This section explains how to create a control program for the E5250A.  
The control program basically consists of the following six parts:  
“Defining Connection Sequence”  
“Using Bias Mode”  
“Using Couple Port (for E5252A only)”  
“Controlling Relay Switching”  
Table 6-1 summarizes the commands for each part of the control program for the  
E5250A. In the table, default setting means the instrument state by the *RST  
command or power on.  
CAUTION  
The SCPI commands introduced in this section are ROUTe subsystem commands  
for controlling the E5250A.  
There are also other SCPI subsystem commands for the E5250A: DIAGnostic and  
SYSTem subsystem commands. For details about all SCPI commands, refer to  
Chapter 7.  
6-6  
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Programming the E5250A  
Creating a Control Program  
Table 6-1  
Programming Summary  
Description  
Command  
Default Setting  
1
2
3
4
Defines Channel Configuration Mode  
Defines Connection Rule  
:ROUT:FUNC channel_config  
NCON  
:ROUT:CONN:RULE card_no, rule  
ALL,FREE  
Defines Connection Sequence  
Using Bias Mode  
:ROUT:CONN:SEQ card_no,sequence  
ALL,BBM  
Selects input Bias Port (for E5252A)  
Bias enables all output ports  
Bias enables specified output ports  
Bias disables all output ports  
Bias disables specified output ports  
Sets Bias Mode ON/OFF  
:ROUT:BIAS:PORT card_no, input_port_no  
:ROUT:BIAS:CHAN:ENAB:CARD card_no  
:ROUT:BIAS:CHAN:ENAB:LIST channel_list  
:ROUT:BIAS:CHAN:DISA:CARD card_no  
:ROUT:BIAS:CHAN:DISA:LIST channel_list  
:ROUT:BIAS:STAT card_no, state  
ALL,10  
ALL  
All enabled  
All enabled  
All enabled  
ALL,OFF  
5
6
Using Couple Port (for E5252A)  
Sets up Couple Port  
:ROUT:COUP:PORT card_no, 'input_port_no'  
:ROUT:COUP:STAT card_no, state  
:ROUT:CLOS channel_list  
No couple ports  
ALL,OFF  
Sets Couple Port Mode ON/OFF  
Controls Relays on Cards  
All relays open  
All relays open  
ALL  
:ROUT:OPEN channel_list  
:ROUT:OPEN:CARD card_no  
Parameter  
Description  
channel_config  
rule  
NCON or ACON.  
FREE or SROU.  
sequence  
state  
NSEQ, BBM or MBBR.  
ON (1) or OFF (0).  
channel_list  
card_no  
5 digit decimal number. See Chapter 5.  
ALL or 0 or 1 to 4 are available.  
input_port_no  
1 to 10 are available for :ROUT:BIAS:PORT.  
1, 3, 5, 7 or 9 are available for :ROUT:COUP:PORT.  
For details about these parameters, refer to Chapter 5 and Chapter 7.  
Bias Port and Couple Port cannot be set for the same input port number.  
CAUTION  
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Programming the E5250A  
Creating a Control Program  
Defining Channel Configuration Mode  
Following commands are used to set the Channel Configuration mode. For details,  
refer to “Channel List and Channel Configuration” on page 5-6.  
Command  
Description  
:ROUT:FUNC NCON  
:ROUT:FUNC ACON  
Sets Normal Channel Configuration mode.  
Sets Auto Channel Configuration mode.  
Example:  
100 OUTPUT @Hp5250;":ROUT:FUNC NCON"  
110 ! Sets E5250A to Normal channel configuration mode.  
Defining Connection Rule  
Following commands are used to set the Connection Rule. For details, refer to  
“Connection Rule” on page 5-9.  
Command  
Description  
:ROUT:CONN:RULE card_no,FREE  
Sets Free Connection rule.  
:ROUT:CONN:RULE card_no,SROU Sets Single Connection rule.  
Example:  
100 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,FREE"  
110 ! Sets all cards to Free Connection rule.  
6-8  
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Programming the E5250A  
Creating a Control Program  
Defining Connection Sequence  
Following commands are used to specify the Connection Sequence. For details,  
refer to “Connection Sequence” on page 5-10.  
Command  
Description  
:ROUT:CONN:SEQ card_no,NSEQ  
:ROUT:CONN:SEQ card_no,BBM  
Connection sequence not specified.  
Specifies Break-before-Make  
connection sequence.  
:ROUT:CONN:SEQ card_no,MBBR Specifies Make-before-Break  
connection sequence.  
Example:  
100 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM"  
110 ! Sets all cards to Break-before-Make connection  
sequence.  
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Programming the E5250A  
Using Bias Mode  
If you use the Bias Mode, following commands are available. For details, refer to  
“Bias Mode” on page 5-11.  
Selects input port to be input Bias Port on specified card (for E5252A only).  
Command  
Description  
:ROUT:BIAS:PORT card_no,input_port_no  
input_port_no specifies which input port  
(on specified card) to be the input Bias  
Port.  
Bias enables the output ports.  
Command  
Description  
:ROUT:BIAS:CHAN:ENAB:CARD card_no  
Bias enables all output ports on  
specified card.  
:ROUT:BIAS:CHAN:ENAB:LIST channel_list  
Bias enables the specified output  
ports.  
Bias disables the output ports.  
Command  
Description  
:ROUT:BIAS:CHAN:DISA:CARD card_no  
Bias disables all output ports on  
specified card.  
:ROUT:BIAS:CHAN:DISA:LIST channel_list  
Bias disables the specified output ports.  
Turns the Bias Mode ON/OFF  
Command  
Description  
:ROUT:BIAS:STAT card_no,ON  
:ROUT:BIAS:STAT card_no,OFF  
Turns on Bias Mode for card specified by card_no.  
Turns off Bias Mode for card specified by  
card_no.  
Example:  
100 OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,1"  
110 ! Selects SMU1 input port to be input Bias Port for all  
cards.  
120 OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL"  
130 ! Bias enables all output ports on all cards.  
140 OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON"  
150 ! Turns on the Bias Mode for all cards.  
6-10  
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Programming the E5250A  
Creating a Control Program  
Using Couple Port (for E5252A only)  
If you use Couple Port, the following commands are available. For details, refer to  
“Couple Port” on page 5-13.  
Sets up the couple ports for specified card. You can specify multiple  
input_port_no to set up multiple couple ports.  
Command  
Description  
:ROUT:COUP:PORT card_no,`input_port_no' Sets up couples ports  
determined by input_port_no  
on card specified by card_no.  
Turns the Couple Port Mode ON or OFF  
Command  
Description  
:ROUT:COUP:STAT card_no,ON  
Turns on the couple port mode for card  
specified by card_no.  
:ROUT:COUP:STAT card_no,OFF Turns off the couple port mode for card  
specified by card_no.  
Example:  
100 OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1,3'"  
110 ! Sets up two couple ports (1&2 and 3&4) on all cards.  
120 OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON"  
130 ! Turns on the couple port mode for all cards.  
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Programming the E5250A  
Creating a Control Program  
Controlling Relay Switching  
Following commands are used to control relay switching. For details of  
channel_list, see “Channel List and Channel Configuration” on page 5-6.  
Command  
Description  
:ROUT:CLOS channel_list  
:ROUT:OPEN channel_list  
Close the relays specified by channel_list.  
Open the relays specified by channel_list.  
:ROUT:OPEN:CARD card_no Open all relays on card specified by card_no.  
Example:  
100 OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
110 ! Closes relays to create channels 10101 and 10202.  
6-12  
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Programming the E5250A  
Programming Examples  
Programming Examples  
This section provides examples of control programs for the E5250A.  
The programs are written in the HP BASIC language, and can be executed without  
any modifications. But the program examples do not include instrument control  
routines, so to make a measurement, you need to add the desired routines.  
This section explains the following three examples:  
“Channel Creation Example”  
“Bias Mode Example”  
“Couple Port Example”  
For each example, the required conditions, program list, and program description  
are given.  
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Programming the E5250A  
Programming Examples  
Channel Creation Example  
The following example is a typical control program for the E5250A with the  
E5252A, which connects instrument output to DUT as shown in Figure 6-1. Bias  
Mode and Couple Port are not used in this example.  
Figure 6-1  
MOSFET Connection Example  
Required  
This program assumes the following conditions.  
Conditions:  
E5250A Installed Cards:  
Slot 1: E5252A  
Slot 2 to 4: not used.  
E5250A Input Ports:  
SMU INPUT 1 to 4: should be connected to instrument.  
SMU INPUT 5 to 6: not used.  
AUX INPUTs: not used.  
E5252A Output Ports:  
Output 1 to 4 are used in the program, and should be connected as follows.  
Output 1: Gate  
Output 2: Drain  
Output 3: Substrate  
Output 4: Source  
6-14  
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Programming the E5250A  
Programming Examples  
Program List:  
10 ! Example: Creating Connection Channels  
20 !  
30 INTEGER Complete  
40 DIM Channel$[100]  
50 ! (Gate, Drain, Substrate, Source)  
60 Channel$="(@10101,10202,10303,10404)"  
70 !  
! Channels to Create  
80 ! Put Instrument Initialization Routine here  
90 !  
100 ASSIGN @Hp5250 TO 722 ! Assigns E5250A GPIB address to 722  
110 OUTPUT @Hp5250;"*RST"  
120 OUTPUT @Hp5250;":ROUT:FUNC NCON" ! Sets Normal Config mode  
130 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"! Sets Single rule  
140 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM" ! Sets BBM sequence  
150 !  
160 OUTPUT @Hp5250;":ROUT:CLOS "&Channel$  
170 OUTPUT @Hp5250;"*OPC?"  
180 ENTER @Hp5250;Complete  
190 !  
! Creates channels  
200 ! Put Measurement Routine here  
210 !  
220 OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
230 OUTPUT @Hp5250;"*OPC?"  
240 ENTER @Hp5250;Complete  
250 !  
! Opens all relays  
260 OUTPUT @Hp5250;"*RST"  
270 !  
280 END  
Line  
Description  
Number  
40  
Declares data size of Channel$, which is used as channel_list  
parameter.  
60  
80  
Defines the desired channel_list.  
Here, insert the initialization routine for your measurement  
instrument.  
110  
120  
130  
140  
160  
Resets the E5250A.  
Sets the E5250A to Normal channel configuration mode.  
Sets the connection rule to Single.  
Sets the connection sequence to Break-Before-Make.  
Closes relays to create the channels specified by Channel$.  
170 to 180 Waits until the relay closing operation is completed.  
200  
Here, insert measurement routine for your measurement  
instrument.  
220 to 240 Opens all relays, and waits until open operation is completed.  
260 Resets the E5250A.  
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Programming the E5250A  
Programming Examples  
Bias Mode Example  
The following example shows how to use Bias Mode for the E5255A.  
Figure 6-2  
Example of Bias Mode  
Required  
This program assumes the following conditions.  
Conditions:  
E5250A Installed Cards:  
Slot 1: E5255A  
Slot 2 to 4: not used.  
E5250A Input Ports:  
SMU INPUT 1: should be connected to instrument.  
SMU INPUT 2 to 6: not used.  
AUX INPUTs: not used.  
E5255A Connection:  
IV Input Connection: IVin1 should be connected to the E5250A SMU INPUT 1.  
Bias Input Connection: BIAS INPUT 51 should be connected to bias source.  
E5255A Output Ports:  
Block 1: outputs 1 to 8 are used in the program.  
Block 2 and 3: not used.  
6-16  
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Programming the E5250A  
Programming Examples  
Program List:  
10 ! Example: Using Bias Mode  
20 !  
30 INTEGER Complete  
40 DIM Channel$[100]  
50 Channel$="(@10101:10108)"  
60 !  
70 ! Put Instrument Initialization Routine here.  
80 !  
90 ASSIGN @Hp5250 TO 722  
100 OUTPUT @Hp5250;"*RST"  
110 OUTPUT @Hp5250;":ROUT:FUNC NCON"  
120 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,FREE"  
130 !OUTPUT @Hp5250;":ROUT:BIAS:PORT 1,7"  
140 OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD 1"  
150 OUTPUT @Hp5250;":ROUT:BIAS:STAT 1,ON"  
Line  
Description  
Number  
40  
Declares data size of Channel$, which is used as channel_list  
parameter.  
50  
70  
Defines the desired channel_list.  
Here, insert the initialization routine for your measurement  
instrument.  
100  
110  
120  
130  
Resets the E5250A.  
Sets the E5250A to Normal channel configuration mode.  
Sets the connection rule to FREE.  
This line is not used (commented) for the E5255A. If you use the  
E5252A instead of the E5255A, use this line, which defines AUX  
INPUT HF1 to be the input Bias Port.  
140  
150  
Bias enables all output ports of card 1 for the Bias Mode.  
Turns on the Bias Mode. All output ports of card 1 are connected to  
the input Bias Port.  
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Programming the E5250A  
Programming Examples  
160 !  
170 ! Put Bias Source Control Routine here.  
180 !  
190 OUTPUT @Hp5250;":ROUT:CLOS "&Channel$  
200 OUTPUT @Hp5250;"*OPC?"  
210 ENTER @Hp5250;Complete  
220 !  
230 ! Put Measurement Routine here  
240 !  
250 OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,OFF"  
260 OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
270 OUTPUT @Hp5250;"*OPC?"  
280 ENTER @Hp5250;Complete  
290 !  
300 OUTPUT @Hp5250;"*RST"  
310 !  
320 END  
Line  
Description  
Number  
170  
190  
Here, insert your bias source control routine.  
Disconnects all output ports of block 1 from the input Bias Port,  
then connects the output ports to the IV input port.  
200 to 210 Waits until the channel connections are completed.  
230  
Here, insert measurement routine for your measurement  
instrument.  
250  
Turns off the Bias Mode.  
260 to 280 Opens all relays, then connects all output ports of block 1 to the  
input Bias Port again, and waits until the connections are  
completed.  
300  
Resets the E5250A.  
6-18  
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Programming the E5250A  
Programming Examples  
Couple Port Example  
The following example shows how to use the Couple Port.  
This function is available only for the E5252A.  
Figure 6-3  
Example of Couple Port  
Required  
This program assumes the following conditions.  
Conditions:  
E5250A Installed Cards:  
Slot 1: E5252A must be installed.  
Slot 2 to 4: not used.  
E5250A Input Ports:  
SMU INPUT 1 and 2: should be connected to instrument.  
SMU INPUT 3 &4 and 5&6: should be connected to instrument. Couple port.  
AUX INPUTs: not used.  
The program couples SMU INPUT 3&4 and couples SMU INPUT 5&6. For each  
Couple Port, use Kelvin triaxial cable for instrument connection.  
E5252A Output Ports:  
Output 1, 2, 3, 4, 5, 6 should be connected to :  
Substrate, Gate, Drain, Drain, Source, Source, respectively.  
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Programming the E5250A  
Programming Examples  
Program List:  
10 ! Example: Using Couple Port  
20 !  
30 INTEGER Complete  
40 DIM Channel$[100]  
50 ! (Substrate,Gate,Drain,Source)  
60 Channel$="(@101,202,303,505)"  
70 !  
80 ! Put Instrument Initialize Routine here  
90 !  
100 ASSIGN @Hp5250 TO 722  
110 OUTPUT @Hp5250;"*RST"  
120 OUTPUT @Hp5250;":ROUT:FUNC ACON"  
130 OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"  
140 OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM"  
Line  
Description  
Number  
40  
Declares data size of Channel$, which is used as channel_list  
parameter.  
60  
80  
Defines the desired channel_list.  
Here, insert the initialization routine for your measurement  
instrument.  
110  
120  
130  
140  
Resets the E5250A.  
Sets the E5250A to Auto channel configuration mode.  
Sets the connection rule to Single.  
Sets the connection sequence to Break-Before-Make.  
6-20  
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Programming the E5250A  
Programming Examples  
150 OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'3,5'"  
160 OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON"  
170 !  
180 OUTPUT @Hp5250;":ROUT:CLOS "&Channel$  
190 OUTPUT @Hp5250;"*OPC?"  
200 ENTER @Hp5250;Complete  
210 !  
220 ! Put Measurement Routine here  
230 !  
240 OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
250 OUTPUT @Hp5250;"*OPC?"  
260 ENTER @Hp5250;Complete  
270 !  
280 OUTPUT @Hp5250;"*RST"  
290 !  
300 END  
Line  
Description  
Number  
150  
160  
180  
Sets up SMU3&4 and SMU5&6 input ports as Couple Ports.  
Turns on the Couple Port mode.  
Closes relays to create channels specified by Channel$.  
190 to 200 Waits until the relay close operation is completed.  
220  
Here, insert measurement routine for your measurement  
instrument.  
240 to 260 Opens all relays, and waits until open operation is completed.  
280 Resets the E5250A.  
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Programming the E5250A  
Using the VFP Data Upload Library  
This section introduces and explains how to use the VFP Data Upload Library:  
“VFP Data Upload Library”  
“Programming Example”  
“Before Executing Your Program”  
“Error Messages”  
For information about using the VFP, refer to “Using Virtual Front Panel Utility” on  
page 5-25.  
CAUTION  
The VFP Data Upload Library can be used only in an program runs on HP BASIC.  
6-22  
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Programming the E5250A  
Using the VFP Data Upload Library  
VFP Data Upload Library  
VFP Data Upload Library is an subprogram library used for loading data (that was  
made and saved by the Virtual Front Panel utility) to your program. The library  
contains the following four subprograms. The library runs on HP BASIC.  
Load_vfp_data subprogram  
Loads data file (that was created and saved by Virtual Front Panel utility) to your  
program. The file contains all data from the 24 Setup Memories, and setup mode  
data for initializing the E5250A.  
Syntax:  
Load_vfp_data(Address_5250,"LOAD_FILE",Setup_data$)  
Parameters:  
Address_5250:  
LOAD_FILE:  
Setup_data$:  
GPIB address of the E5250A.  
File name of data you want to load.  
Data string for internal use in the library. Must declare 14000  
byte data size.  
Example:  
CALL Load_vfp_data(722,"MAT48_1",Mat48_data$)  
Init_vfp_setup subprogram  
Initializes the E5250A based on the setup mode data loaded by the Load_vfp_data  
subprogram. This subprogram sets the following parameters:  
Configuration Mode: Auto or Normal  
Connection Rule: Free  
Connection Sequence: Break Before Make  
Bias State: Bias Mode (ON/OFF) for each card.  
Input Bias Port for each card.  
This subprogram must be entered before the Connect_vfp subprogram.  
Syntax:  
Init_vfp_setup(Setup_data$)  
Parameter:  
Setup_data$:  
Data string for internal use in the library. Must declare 14000  
byte data size.  
Example:  
CALL Init_vfp_setup(Mat48_data$)  
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Programming the E5250A  
Using the VFP Data Upload Library  
Connect_vfp subprogram  
Makes relay connections based on data from the specified Setup Memory. Data from  
all 24 Setup Memories was loaded by the Load_vfp_data subprogram.  
Syntax:  
Connect_vfp(Setup_data$,Setup_num)  
Parameters:  
Setup_data$:  
Setup_num:  
Data string for internal use in the library. Must declare 14000  
byte data size.  
Setup Memory number: 1 to 24.  
Example:  
CALL Connect_vfp(Mat48_data$,1)  
FNGet_vfp_comment$ subprogram  
Returns comment from the specified Setup Memory. Comments for all 24 Setup  
Memories were loaded by the Load_vfp_data subprogram.  
Syntax:  
FNGet_vfp_comment$(Setup_data$,Setup_num)  
Parameters:  
Setup_data$:  
Setup_num:  
Data string for internal use in the library. Must declare 14000  
byte data size.  
Setup Memory number from which to get comment: 1 to 24.  
Example:  
Comment$=FNGet_vfp_comment$(Mat48_data$,1)  
DISP "Comment=";Comment$  
6-24  
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Programming the E5250A  
Using the VFP Data Upload Library  
Programming Example  
The following program is an example for using the VFP Data Upload Library.  
10 ! Example for using VFP Data Upload Library  
20 !  
30 COM /Vfp_com_data/ Mat48_data$[14000]  
40 DIM Comment$[20]  
50 Address_5250=722 ! E5250A GPIB Address: 722  
60 Setup_num=1  
70 !  
! VFP Setup Memory Number: 1  
80 OUTPUT Address_5250;"*RST"  
90 !  
100 CALL Load_vfp_data(Address_5250,"MAT48",Mat48_data$)  
110 CALL Init_vfp_setup(Mat48_data$)  
120 !  
130 DISP "SETUP IN PROGRESS. SETUP NO.=";Setup_num  
140 CALL Connect_vfp(Mat48_data$,Setup_num)  
150 !  
160 Comment$=FNGet_vfp_comment$(Mat48_data$,Setup_num)  
170 !  
180 DISP "SETUP WAS COMPLETED. SETUP COMMENT:",Comment$  
190 !  
200 END  
Line  
Description  
Number  
30  
40  
Declares data size of Mat48_data$, which is for internal use by the  
library. Size must be 14000.  
Declares data size of Comment$, which is for storing comment  
from Setup Memory.  
100  
110  
140  
Loads the data file MAT48, which was made by VFP utility.  
Initializes the E5250A based on the loaded data.  
Connects relays based on data from specified Setup Memory.  
160 to 180 Gets the comment from specified Setup Memory, and displays the  
comment.  
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Programming the E5250A  
Using the VFP Data Upload Library  
Before Executing Your Program  
Before executing a program that uses subprograms from the VFP Data Upload  
Library, do the following:  
1. Link the library to your program:  
Link the library as shown in the following example. The VFP Data Upload  
Library is an ASCII file on the E5250A Program Disk.  
a. GET the file UPLOAD from the E5250A Program Disk.  
GET "UPLOAD"  
b. RE-STORE the file.  
RE-STORE "U_LIB"  
c. LOAD your program.  
d. Link the library to your program by using the LOADSUB statement:  
LOADSUB ALL FROM "U_LIB"  
2. Change the mass storage device  
Before executing your program, you must set the mass storage device to the  
device that has the file that will be loaded by Load_vfp_data subprogram.  
For example, if the file is on the device ":CS80,701,1", you should change the  
mass storage device by using the MSI statement:  
MSI ":CS80,701,1"  
Or you can specify the mass storage device as follows:  
Load_vfp_data(Address_5250,"LOAD_FILE:CS80,701,1",Setup_data$)  
6-26  
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Programming the E5250A  
Using the VFP Data Upload Library  
Error Messages  
If any error related to the VFP Data Upload Library occurs in your program, one of  
following error messages is displayed, and the program is paused.  
Cannot configure for AUTO. Normal mode used.  
Cannot use the data for Auto Config mode.  
Normal Configuration mode is used.  
File name is wrong.  
File name is not correct.  
Enter the correct file name.  
Instrument at address XXX is not E5250A!  
Instrument specified by GPIB address XXX is not E5250A.  
Confirm GPIB address for the E5250A, and enter the correct value.  
Note: XXX is the number you specified for the parameter Address_5250 in the  
Load_vfp_data subprogram.  
File data is not VFP format, or is broken.  
Cannot load the data because the data format is not for VFP or the data is  
broken. Enter the correct file name.  
GPIB address, connection or firmware is bad.  
Timeout occurred for connecting the E5250A.  
Confirm the GPIB address of the E5250A, and the connection of the GPIB  
cable. Or the E5250A firmware may be defective.  
Must execute Init_vfp_setup before Connect_vfp.  
Init_vfp_setup must be called before calling Connect_vfp.  
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Programming the E5250A  
Using the Capacitance Compensation Routine  
Using the Capacitance Compensation Routine  
This section introduces and explains how to use the Capacitance Compensation  
Routine.  
“Capacitance Compensation Routine”  
“Required Conditions”  
“Programming Example”  
“Before Executing Your Program”  
“Error Messages”  
NOTE  
Restrictions for Using the Routine  
Capacitance Compensation Routine can be used only in an program runs on HP  
BASIC. Corrected data by the routine is not guaranteed. But typical data  
(supplemental data) is as follows:  
Capacitance measurement accuracy: ±1 % ±0.5 pF  
This typical data is for the following measurement conditions:  
Frequency:  
1 kHz to 1 MHz  
Measurement Range:  
Maximum 1000 pF  
Measurement Terminal: At the end of the Agilent 16494A-001 (1.5 m triaxial  
cable) connected to the E5252A output terminal.  
The typical data does not apply to cable or anything extended from the 16494A  
triaxial cable. Also the conditions specified in “Required Conditions” on page 6-30  
must be satisfied.  
6-28  
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Programming the E5250A  
Using the Capacitance Compensation Routine  
Capacitance Compensation Routine  
This routine is an subprogram used to compensate for capacitance measurement  
error caused by the E5250A with the E5252A matrix card installed. The subprogram  
is used with Agilent 4284A Precision LCR Meter. You enter capacitance and  
conductance data measured by the 4284A as a parameter, and this subprogram  
returns the compensated value. This routine runs on HP BASIC.  
Syntax:  
Ccompen_5250(Freq,L1,L2_h,L2_l,L3_h,L3_l,C_m,G_m,C_c,G_c)  
Parameter:  
Freq  
L1  
Measurement Frequency (Hz): 1000 Hz to 1000000 Hz (1 kHz to  
1 MHz).  
Length (in meters) of 16494A triaxial cable connected from E5252A  
output to connector plate.  
L2_h  
Length (in meters) of triaxial cable connected from connector plate to  
DUT (Highterminal of capacitor).  
If you do not use triaxial cable, enter 0for this parameter.  
L2_l  
L3_h  
L3_l  
Length (in meters) of triaxial cable connected from connector plate to  
DUT (Lowterminal of capacitor).  
If you do not use triaxial cable, enter 0for this parameter.  
Length (in meters) of coaxial cable connected from connector plate to  
DUT (Highterminal of capacitor).  
If you do not use coaxial cable, enter 0for this parameter.  
Length (in meters) of coaxial cable connected from connector plate to  
DUT (Lowterminal of capacitor).  
If you do not use coaxial cable, enter 0for this parameter.  
C_m  
G_m  
C_c  
Capacitance data (in F) measured by 4284A.  
Conductance data (in S) measured by 4284A.  
Compensated capacitance value (in F) returned by Capacitance  
Compensation Routine.  
G_c  
Compensated conductance value (in S) returned by Capacitance  
Compensation Routine.  
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Programming the E5250A  
Using the Capacitance Compensation Routine  
Required Conditions  
This subprogram requires the following conditions:  
Setting of the 4284A:  
Option Required:  
Frequency:  
4284A-006  
1 kHz to 1 MHz.  
Cp-G.  
Measurement Function:  
Connection to E5250A:  
Use Agilent 16048D/E Test Cable and BNC  
T-type Adapter (Agilent part number:  
1250-2405).  
Calibration:  
Must be done at the end of the 16048D/E.  
E5250A Input port:  
CV1 and CV2.  
Connection of E5252A output:  
To Connector Plate:  
Use Agilent 16494A Triaxial Cable.  
From Connector Plate to  
DUT:  
Use low noise coaxial cable (Agilent part  
number: 8121-1191) for minimizing the  
compensation error.  
You can also use another type of coaxial cable,  
triaxial cable, or combination of these. See  
“Using Other than Recommended Cable”.  
Using Other than Recommended Cable  
If you do not use the low noise coaxial cable (Agilent part number: 8121-1191) for  
the connection from Connector Plate to DUT, the Capacitance Compensation  
Routine cannot return accurate results. To get more accurate compensation results,  
do following:  
6-30  
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Programming the E5250A  
Using the Capacitance Compensation Routine  
1. Measure R, L, C of your cable using the 4284A. Measurement setup is as  
follows:  
GUARD (C)  
GROUND (E)  
GROUND (F)  
GUARD (D)  
Insulator  
Triaxial Cable  
FORCE or SENSE (A)  
FORCE or SENSE (B)  
Measurement  
Terminals a  
A and B  
see note c  
A and C  
Measurement  
Parameter  
Measurement  
Frequency  
Measurement  
Function  
1 kHz to 1 MHz b  
R
L
SERIES  
C
PARALLEL  
a. See figure above.  
b. Select 1 point in the frequency range.  
c. For triaxial cable, connect B to F directly, and measure L  
between A and E.  
For coaxial cable, connect B to D directly, and measure L  
between A and C. Ignore E and F.  
2. Overwrite the R, L, C data in the program lines listed below. The data must be in  
per meter values.  
Program Line No.  
Defines R, L, C value of  
1420  
1430  
1440  
1450  
Triaxial cable for C meter High terminal  
Triaxial cable for C meter Low terminal  
Coaxial cable for C meter High terminal  
Coaxial cable for C meter Low terminal  
Original program defines initial data by DATA statement in the "Rlc_data" block  
as shown below:  
1350 Rlc_data: !  
1360  
:
!
R [ohm]  
:
L [H]  
:
C [F]  
:
1420  
1430  
1440  
1450  
:
DATA 100.70E-3, 400.00E-9, 80.00E-12 !User Triax Cbl H  
DATA 100.70E-3, 400.00E-9, 80.00E-12 !User Triax Cbl L  
DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl H  
DATA 114.00E-3, 544.00E-9, 130.00E-12 !User Coax Cbl L  
:
:
:
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Programming the E5250A  
Using the Capacitance Compensation Routine  
Programming Example  
The following program is an example for using the capacitance compensation  
subprogram:  
100 ! Example of Capacitance Compensation  
110 !  
120 Freq=1.E+6 ! MEASUREMENT FREQUENCY: 1MHz  
130 L1=1.5 ! E5252A OUTPUT CABLE: 1.5m  
140 L2_h=0 ! TRIAX CABLE High SIDE: none (0m)  
150 L2_l=0 ! TRIAX CABLE Low SIDE: none (0m)  
160 L3_h=2 ! COAX CABLE High SIDE: 2m  
170 L3_l=2 ! COAX CABLE Low SIDE: 2m  
180 !  
190 OUTPUT @Hp4284;"FUNC:IMP CPG"  
! SET Cp-G FUNCTION  
200 OUTPUT @Hp4284;"FREQ "&VAL$(Freq) ! SET MEAS FREQ  
210 OUTPUT @Hp4284;"CORR:LENG 2M"  
220 OUTPUT @Hp4284;"*TRG"  
230 ENTER @Hp4284;C_m,G_m,Stat  
240 !  
! SET 16048D LENGTH  
250 Ccompen_5250(Freq,L1,L2_h,L2_l,L3_h,L3_l,C_m,G_m,C_c,G_c)  
260 DISP "CORRECTED C DATA=";C_c  
270 DISP "CORRECTED G DATA=";G_c  
280 !  
290 END  
Before Executing Your Program  
Before executing a program that uses the capacitance compensation subprogram,  
you must link the subprogram to your program as follows. The subprogram is in an  
ASCII file on the E5250A Program Disk.  
1. GET the file C_COMPEN from the E5250A Program Disk.  
GET "C_COMPEN"  
2. RE-STORE the file.  
RE-STORE "C_COM"  
3. Load your program.  
4. Link the subprogram to your program by using the LOADSUB statement.  
LOADSUB ALL FROM "C_COM"  
Error Messages  
If error occurs, following error message is displayed, and program is paused:  
Parameter Out of Range Improper parameter value. Confirm and enter the  
available value.  
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7
Command Reference  
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Command Reference  
This chapter describes the following for Agilent E5250A:  
SCPI commands available to control the E5250A via GPIB interface.  
SCPI is a universal programming language for electronic test and measurement  
instruments, and is based on IEEE 488.1 and IEEE 488.2.  
SCPI commands are divided into two types: common commands and subsystem  
commands.  
Common commands are generally not measurement related, but are used to  
manage status registers, data storage, and so on. Common commands are  
defined by IEEE 488.2. All common commands begin with an asterisk, such as  
*RST.  
Subsystem commands are mostly measurement related and some are general  
purpose. Subsystem commands have a hierarchical structure that uses a colon  
between mnemonics (keywords), such as :DIAG:TEST:CARD:RES.  
Commands for the following subsystems are available for the E5250A:  
DIAGnostic  
ROUTe  
commands for performing self-test.  
commands for signal routing.  
SYSTem  
commands for controlling other functions that are not related  
to instrument performance.  
Commands are listed in alphabetical order in this chapter.  
Status reporting structure  
These are IEEE 488.2 status structures (registers), which can be set or read by  
the common commands.  
For SCPI programming to control the E5250A, refer to Chapter 6, “Programming  
the E5250A.”  
For a quick reference list of all SCPI subsystem commands described in this chapter,  
refer to Chapter 12, “SCPI Command Summary.”  
For error messages related to the SCPI commands, refer to Chapter 11, “Error  
Messages.”.  
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Command Reference  
Textual Notation for Subsystem Commands  
CAPITAL  
LETTERS  
Capital letters are the minimally required letters of the  
command header. Lowercase letters are the long form  
(complete spelling), which you can omit if desired.  
For example, for :SYSTem:CCONfig?, you only need to  
specify :SYST:CCON?.  
[ ]  
Square brackets are used to enclose optional information not  
required for execution of the command sequence.  
For example, for the [:ROUTe]:BIAS:PORT command, you can  
execute :ROUT:BIAS:PORT or :BIAS:PORT, which are  
exactly the same.  
italic font  
Text you supply. For example, for card_number, you enter an  
allowed card number. Also, used to represent response data.  
|
Vertical bar can be read as "or" and is used to separate  
alternative parameter options.  
{ }  
< >  
Braces (curly brackets) are used to enclose one or more  
parameters that may be included zero or more times.  
Angular brackets indicate that the word or words enclosed  
represent something other than themselves. For example,  
<newline>.  
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Command Reference  
Common Commands for E5250A  
Common Commands  
This section describes common commands and queries, which are commands  
defined by IEEE 488.2.  
The following table shows some common commands that are supported for the  
E5250A.  
Common Commands for E5250A  
Mnemonic  
*CLS  
Name  
Clear Status  
*ESE(?)  
*ESR?  
*IDN?  
*OPC(?)  
*RST  
Standard Event Status Enable Command (Query)  
Standard Event Status Register Query  
Identification Query  
Operation Complete Command (Query)  
Reset Command  
*SRE(?)  
*STB?  
*TST?  
*WAI  
Service Request Enable Command (Query)  
Read Status Byte Query  
Self-Test Query  
Wait-to-Continue Command  
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Command Reference  
*CLS  
*CLS  
This command clears the Status Byte Register, the Standard Event Status Register,  
and the Error Queue. This command does not clear the enable registers. Refer to  
“Status Reporting Structure” on page 7-48.  
Also, this command stops the monitoring of pending operations by the *OPC  
command.  
This command does not have query form.  
*CLS  
Syntax  
Example  
OUTPUT @Hp5250;"*CLS"  
*ESE  
This command sets the bits of the Standard Event Status "Enable" Register.  
1enables, 0masks.  
Syntax  
*ESE enable_number  
Parameter  
Explanation  
enable_number  
decimal integer (that is the sum of the binary-weighted values  
for the desired bits), hexadecimal, octal, or binary value  
Query response  
Semantics  
enable_number <newline><^END>  
enable_number is decimal integer value that is the sum of the binary-weighted  
values of the “Enable” register bits.  
The Standard Event Status "Enable" Register determines which bits of the Standard  
Event Status Register are enabled. Enabled bits are ORed together, and the result is  
reported to bit5 of the Status Byte Register.  
The Standard Event Status "Enable" Register consists of 16 bits, but only the lower  
8 bits are used, which correspond to the bits of the Standard Event Status Register.  
For details, refer to “Standard Event Status Enable Register” on page 7-54  
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Command Reference  
*ESE  
The following table shows the bits of the Standard Event Status Register and  
binary-weighted decimal value of each bit.  
binary-  
weight  
bit  
description  
0
1
OPC (Operation Complete)  
not used  
1
2
3
4
5
6
7
2
4
8
QYE (Query ERROR)  
DDE (Device-Dependent ERROR)  
16 EXE (Execution ERROR)  
32 CME (Command ERROR)  
64 not used  
128 PON (Power on)  
Example  
The following four lines enable the same bit (CME bit):  
OUTPUT @Hp5250;"*ESE 32"  
using decimal numeric  
OUTPUT @Hp5250;"*ESE #B100000" using binary numeric  
OUTPUT @Hp5250;"*ESE #Q40"  
OUTPUT @Hp5250;"*ESE #H20"  
using octal numeric  
using hexadecimal numeric  
The following is example for query:  
OUTPUT @Hp5250;"*ESE?"  
ENTER @Hp5250;A  
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Command Reference  
*ESR?  
*ESR?  
This query command returns the present contents of the Standard Event Status  
Register.  
Syntax  
*ESR?  
Query response  
register <newline><^END>  
Parameter  
Explanation  
register  
decimal integer value that is the sum of the binary-weighted values  
for the set bits  
Semantics  
The following table shows the bits of the Standard Event Status Register, and the  
binary-weighted decimal value of each bit.  
binary-  
weight  
bit  
description  
OPC (Operation Complete)  
0
1
1
2
3
4
5
6
7
2
4
8
not used. always 0.  
QYE (Query ERROR)  
DDE (Device-Dependent ERROR)  
16 EXE (Execution ERROR)  
32 CME (Command ERROR)  
64 not used. always 0.  
128 PON (Power on)  
Example  
OUTPUT @Hp5250;"*ESR?"  
ENTER @Hp5250;A  
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Command Reference  
*IDN?  
*IDN?  
This query command returns the ID of your E5250A.  
Syntax  
*IDN?  
Query response  
HEWLETT-PACKARD,model,0,revision <newline><^END>  
Response  
Type  
Explanation  
model  
character model number. E5250A  
character revision number. A.01.00or later  
revision  
Example  
DIM A$[50]  
OUTPUT @Hp5250;"*IDN?"  
ENTER @Hp5250;A$  
PRINT A$  
An example result of above program is:  
HEWLETT-PACKARD,E5250A,0,A.01.00  
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Command Reference  
*OPC  
*OPC  
This command starts to monitor pending operations, and sets/clears the Operation  
Complete (OPC) bit in the Standard Event Status Register as follows:  
If there is no pending operation, sets the OPC bit to 1.  
If there are any pending operations, sets the OPC bit to 0. The bit will be set to 1  
again when all pending operations are completed.  
So, *OPC command is required to enable the OPC bit. To stop monitoring pending  
operations (disable OPC bit), execute the *CLS command.  
For details about the Standard Event Status Register, refer to “Standard Event Status  
Register” on page 7-53. Also, see *WAI command.  
Syntax  
*OPC  
Query response  
1 <newline><^END>  
*OPC?places ASCII character 1into the Output Queue when all pending  
operations are completed. For details, refer to “Output Queue” on page 7-55.  
Example  
OUTPUT @Hp5250;"*OPC"  
The following example is for query:  
OUTPUT @Hp5250;"*OPC?"  
ENTER @Hp5250;A  
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Command Reference  
*RST  
*RST  
This command performs an instrument reset. Status after *RST is shown below:  
Channel Configuration: Normal Config Mode  
Connection Rule:  
Connection Sequence:  
Bias Mode:  
Free  
Break Before Make  
Off  
Bias Port:  
E5252A: 10  
E5255A: None  
Bias Enabled Channels: All channels (output ports) are bias enabled  
Couple Port Mode:  
Couple Port:  
Off  
No Couple Port  
All relays open  
No Change  
Card Channel Status:  
Self-Test Result:  
Syntax  
*RST  
Example  
OUTPUT @Hp5250;"*RST"  
NOTE  
This command does not change the self-test result.  
For the power-on settings, see :SYSTEM:CPON.  
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Command Reference  
*SRE  
*SRE  
This command sets the Service Request "Enable" Register bits.  
1enables, 0masks.  
Syntax  
*SREenable_number  
Parameter  
Explanation  
enable_number decimal integer (that is the sum of the binary-weighted values  
for the desired bits), hexadecimal, octal, or binary value  
Query response  
Semantics  
enable_number <newline><^END>  
The Service Request "Enable" Register consists of 8 bits: Bit0 to Bit7. Bit6 is not  
defined, and is always 0. The Service Request "Enable" Register determines which  
bits of the Status Byte Register are enabled.  
The status of the enabled bits are ORed together, and the result of OR is output to  
bit6 (Master Summary Status bit) of Status Byte Register. For details, refer to  
“Status Reporting Structure” on page 7-48.  
The following table shows the bits of the Status Byte Register, and the  
binary-weighted decimal value of each bit.  
binary-  
weight  
bit  
description  
0
1
not used  
not used  
not used  
not used  
1
2
3
4
5
6
7
2
4
8
16 MAV (Message Available summary-message)  
32 ESB (Event Status Bit)  
64 MSS (Master Summary Status)  
128 not used  
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Command Reference  
*SRE  
Example  
The following four lines enable the same bits (bit 4 and 5):  
OUTPUT @Hp5250;"*SRE 48"  
using decimal numeric  
OUTPUT @Hp5250;"*SRE #B110000" using binary numeric  
OUTPUT @Hp5250;"*SRE #Q60"  
OUTPUT @Hp5250;"*SRE #H30"  
using octal numeric  
using hexadecimal numeric  
The following is example for query:  
OUTPUT @Hp5250;"*SRE?"  
ENTER @Hp5250;A  
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Command Reference  
*STB?  
*STB?  
This query command reads the Status Byte Register (reads Master Summary Status  
bit, not Request for Service Message).  
For bit6, this command reads MSS, not Request for Service (RQS). Refer to “Status  
Reporting Structure” on page 7-48.  
Syntax  
*STB?  
Query response  
register <newline><^END>  
Parameter  
Explanation  
register  
decimal integer value that is the sum of the binary-weighted values  
for the set bits  
Semantics  
The following table shows the bits of the Status Byte Register, and the  
binary-weighted decimal value of each bit.  
binary-  
weight  
bit  
description  
0
1
not used. always 0.  
not used. always 0.  
not used. always 0.  
not used. always 0.  
1
2
3
4
5
6
7
2
4
8
16 MAV (Message Available summary-message)  
32 ESB (Event Status Bit)  
64 MSS (Master Summary Status)  
128 not used. always 0.  
Example  
OUTPUT @Hp5250;"*STB?"  
ENTER @Hp5250;A  
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Command Reference  
*TST?  
*TST?  
This query command executes an internal self-test, then returns the result. After this  
command execution, the E5250A becomes same status as after *RST command  
execution.  
Syntax  
*TST?  
Query response  
test_result <newline><^END>  
test_result  
Explanation  
0
1
pass  
fail  
Example  
OUTPUT @Hp5250;"*TST?"  
ENTER @Hp5250;A  
*WAI  
This command stops execution of any commands until the Operation Complete  
(OPC) bit is set to 1, which means there is no pending operation. Refer to *OPC  
command.  
Syntax  
*WAI  
Example  
OUTPUT @Hp5250;"*WAI"  
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Command Reference  
:DIAGnostic Command Tree  
:DIAGnostic Subsystem  
The :DIAGnostic subsystem has commands for executing the self-test function. For  
more info, see Chapter 3.  
NOTE  
The :DIAGnostic subsystem commands ignore the E5250A channel configuration  
mode. For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or  
ALL.  
:DIAGnostic Command Tree  
Command  
Parameter  
:DIAGnostic  
:TEST  
:CARD  
:CLEar  
card_number | ALL  
[:EXECute]?  
:STATe?  
card_number | ALL  
card_number  
:FRAMe  
:CLEar  
CONTroller| FPANel  
CONTroller| FPANel  
CONTroller| FPANel  
[:EXECute]?  
:STATe?  
Parameter values:  
card_number:  
1| 2| 3| 4  
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Command Reference  
:DIAGnostic:TEST:CARD:CLEar  
:DIAGnostic:TEST:CARD:CLEar  
This command clears the relay test result (pass/fail result) of the specified card.  
Syntax  
:DIAGnostic:TEST:CARD:CLEar card_number  
Parameter  
card_number  
Explanation  
card number: 1, 2, 3, 4, or ALL  
Example  
OUTPUT @Hp5250;":DIAG:TEST:CARD:CLE 1"  
:DIAGnostic:TEST:CARD[:EXECute]?  
This command executes the relay test for specified card, then returns the pass/fail  
result. For more info, see Chapter 3.  
NOTE  
You must attach the relay test adapter before executing this command.  
This command changes all settings of card to same state as after executing  
:SYST:CPON command.  
Syntax  
:DIAGnostic:TEST:CARD[:EXECute]? card_number  
Parameter  
card_number  
Explanation  
card number: 1, 2, 3, 4, or ALL  
Query response  
Example  
test_result <newline><^END>  
1: Fail card exists  
0: Pass  
OUTPUT @Hp5250;":DIAG:TEST:CARD? ALL"  
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Command Reference  
:DIAGnostic:TEST:CARD:STATe?  
:DIAGnostic:TEST:CARD:STATe?  
This command returns the most recent relay test result for the specified card.  
Syntax  
:DIAGnostic:TEST:CARD:STATe? card_number  
Parameter  
card_number  
Explanation  
card number: 1, 2, 3, 4  
Query response  
Example  
test_result <newline><^END>  
1: Fail  
0: Pass  
-1: Not Tested  
OUTPUT @Hp5250;":DIAG:TEST:CARD:STAT? 1"  
ENTER @Hp5250;A  
:DIAGnostic:TEST:FRAMe:CLEar  
This command clears test result of the specified E5250A test.  
Syntax  
:DIAGnostic:TEST:FRAMe:CLEar CONTroller | FPANel  
Parameter  
Explanation  
CONTroller  
FPANel  
Controller test  
Front panel interface test  
Example  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE CONT"  
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Command Reference  
:DIAGnostic:TEST:FRAMe[:EXECute]?  
:DIAGnostic:TEST:FRAMe[:EXECute]?  
This command executes the specified E5250A test, then returns the test result. For  
more info, see Chapter 3.  
After :DIAG:TEST:FRAM:EXEC CONTexecution, the E5250A status becomes  
same as after *RST command execution.  
After :DIAG:TEST:FRAM:EXEC FPANexecution, the E5250A status is not  
changed.  
NOTE  
The :DIAG:TEST:FRAM:EXEC FPANcommand requires key input from the  
front panel. If key is not pressed within 10 seconds, this test result will be fail.  
Syntax  
:DIAGnostic:TEST:FRAMe[:EXECute]? CONTroller | FPANel  
Parameter  
Explanation  
CONTroller  
FPANel  
Controller test  
Front panel interface test  
Query response  
Example  
test_result <newline><^END>  
1: Fail  
0: Pass  
OUTPUT @Hp5250;":DIAG:TEST:FRAM? CONT"  
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Command Reference  
:DIAGnostic:TEST:FRAMe:STATe?  
:DIAGnostic:TEST:FRAMe:STATe?  
This command returns the most recent test result (pass/fail) of the specified E5250A  
test.  
Syntax  
:DIAGnostic:TEST:FRAMe:STATe? CONTroller | FPANel  
Parameter  
Explanation  
CONTroller  
FPANel  
Controller test  
Front panel interface test  
Query response  
Example  
test_result <newline><^END>  
1: Fail  
0: Pass  
-1: Not Tested  
OUTPUT @Hp5250;":DIAG:TEST:FRAM:STAT? CONT"  
ENTER @Hp5250;A  
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Command Reference  
:ROUTe Command Tree  
:ROUTe Subsystem  
The :ROUTe subsystem has commands for controlling the signal routing.  
"Open a channel": opens relays to disconnect the channel (that is, disconnects input  
port from output port).  
"Close a channel": closes relays to connect the channel (that is, connects input port  
to output port).  
:ROUTe Command Tree  
Command  
Parameter  
[:ROUTe]  
:BIAS  
:CHANnel  
:DISAble  
:CARD  
card_number | ALL  
[:LIST]  
(@channel_list)  
(@channel_list)  
[:LIST]?  
:ENABle  
:CARD  
card_number | ALL  
(@channel_list)  
[:LIST]  
[:LIST]?  
(@channel_list)  
:PORT  
card_number | ALL,bias_port  
card_number  
:PORT?  
[:STATe]  
[:STATe]?  
card_number | ALL,state  
card_number  
:CLOSe  
:CARD?  
card_number  
[:LIST]  
[:LIST]?  
(@channel_list)  
(@channel_list)  
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Command Reference  
:ROUTe Command Tree  
Command  
Parameter  
[:ROUTe]  
:CONNection  
:RULE  
card_number | ALL,rule  
:RULE?  
card_number  
:SEQuence  
:SEQuence?  
card_number | ALL,sequence  
card_number  
:COUPle  
:PORT  
card_number | ALL,'couple_port'  
card_number  
:PORT?  
[:STATe]  
[:STATe]?  
card_number | ALL,state  
card_number  
:FUNCtion  
:FUNCtion?  
:OPEN  
channel_config  
:CARD  
card_number | ALL  
(@channel_list)  
(@channel_list)  
[:LIST]  
[:LIST]?  
Parameter values:  
card_number:  
Auto Config Mode: 0  
Normal Config Mode: 1| 2| 3| 4  
Refer to Chapter 5.  
ON| OFF| 0| 1  
channel_list:  
state:  
rule:  
FREE| SROU  
channel_config: ACON| NCON  
sequence:  
NSEQ| BBM| MBBR  
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Command Reference  
[:ROUTe]:BIAS:CHANnel:DISable:CARD  
[:ROUTe]:BIAS:CHANnel:DISable:CARD  
This command bias disables all output ports of the specified card.  
When Bias Mode is ON, this command opens relays to disconnect the input Bias  
Port from all output ports. Refer to "ROUTe:BIAS:STATe".  
At *RST, all output ports are bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:DISable:CARD card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS:CARD ALL"  
[:ROUTe]:BIAS:CHANnel:DISable[:LIST]  
This command bias disables the output ports specified by the channel_list.  
When Bias Mode is ON, this command opens relays to disconnect the input Bias  
Port from the output ports specified by channel_list. Refer to  
"ROUTe:BIAS:STATe".  
At *RST, all output ports are bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:DISable[:LIST] (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to bias disable.  
For details about channel_list, refer to Chapter 5.  
The input ports specified by the channel_list are ignored. The input port is always  
the input Bias Port. So, in the channel_list, only the card numbers and output ports  
have meaning. But you cannot omit the input port in the channel_list.  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS (@10301,10402)"  
In above example, the input Bias Port on card 1 is disabled for output ports 1 and 2.  
Specified input ports 3 and 4 are ignored because the input port is always the input  
Bias Port.  
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Command Reference  
[:ROUTe]:BIAS:CHANnel:DISable[:LIST]?  
[:ROUTe]:BIAS:CHANnel:DISable[:LIST]?  
This query command returns 0or 1for each channel specified by channel_list, in  
same order as specified by channel_list.  
1: channel is bias disabled, 0: channel is bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:DISable[:LIST]? (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to check.  
For details about channel_list, refer to Chapter 5.  
The input ports specified by the channel_list are ignored. The input port is always  
the input Bias Port. So, in the channel_list, only the card numbers and output ports  
have meaning. But you cannot omit the input port in the channel_list.  
Query response  
Example  
disable_status{,disable_status} <newline><^END>  
1 : disabled  
0 : enabled  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL"  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS (@10101)"  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS? (@10101,10102,10201)"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
1,0,1  
10101and 10201have the same meaning because the specified input port is  
ignored.  
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Command Reference  
[:ROUTe]:BIAS:CHANnel:ENABle:CARD  
[:ROUTe]:BIAS:CHANnel:ENABle:CARD  
This command bias enables all output ports of the specified card.  
When Bias Mode is ON, this command closes relays to connect the input Bias Port  
to all output ports that are not already connected (by :ROUT:CLOS command) to  
other input ports.  
Refer to "ROUTe:BIAS:STATe".  
At *RST, all output ports are bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:ENABle:CARD card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB:CARD ALL"  
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Command Reference  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]  
This command bias enables the output ports specified by channel_list.  
When Bias Mode is ON, this command closes relays to connect the input Bias Port  
to the output ports specified by channel_list.  
Refer to "ROUTe:BIAS:STATe". Output ports that are already connected to another  
input port cannot be connected to the input Bias Port.  
At *RST, all output ports are bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST] (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to bias enable.  
For details about channel_list, refer to Chapter 5.  
The input ports specified by the channel_list are ignored. The input port is always  
the input Bias Port. So, in the channel_list, only the card numbers and output ports  
have meaning. But you cannot omit the input port in the channel_list.  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB (@10401,10502)"  
In above example, the input Bias Port on card 1 is enabled for output ports 1 and 2.  
Specified input ports 4 and 5 are ignored because input port is always the input Bias  
Port.  
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Command Reference  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]?  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]?  
This query command returns 0or 1for each channel specified by channel_list, in  
same order as specified by channel_list.  
0: channel is bias disabled, 1: channel is bias enabled.  
Syntax  
[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]? (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to check.  
For details about channel_list, refer to Chapter 5.  
The input ports specified by the channel_list are ignored. The input port is always  
the input Bias Port. So, in the channel_list, only the card numbers and output ports  
have meaning. But you cannot omit the input port in the channel_list.  
Query response  
Example  
enable_status{,enable_status} <newline><^END>  
1: enabled  
0: disabled  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:DIS:CARD ALL"  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB (@10101)"  
OUTPUT @Hp5250;":ROUT:BIAS:CHAN:ENAB? (@10101,10102,10201)"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
1,0,1  
10101and 10201have the same meaning because the specified input port is  
ignored.  
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Command Reference  
[:ROUTe]:BIAS:PORT  
[:ROUTe]:BIAS:PORT  
NOTE  
This command applies only to the E5252A card.  
For the E5255A card, the input Bias Port cannot be selected, and is always the  
built-in Bias Port.  
The Bias Port and Couple Port cannot be set to same port number.  
This command selects which input port is the Bias Port on the specified card. For  
each card, you can specify the same or different Bias Port. For details, refer to "Bias  
Mode" in Chapter 5.  
At *RST, Bias Port is set to 10 for the E5252A.  
Syntax  
[:ROUTe]:BIAS:PORT card_number,bias_port  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
bias_port  
Input port number: 1to 10.  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,6"  
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Command Reference  
[:ROUTe]:BIAS:PORT?  
[:ROUTe]:BIAS:PORT?  
NOTE  
This command applies only to the E5252A card.  
For the E5255A card, the input Bias Port cannot be selected, and is always the  
built-in Bias Port.  
This query command returns the input Bias Port number for the specified card.  
Syntax  
[:ROUTe]:BIAS:PORT? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
port_number <newline><^END>  
port_number = 1 to 10  
OUTPUT @Hp5250;":ROUT:BIAS:PORT ALL,4"  
OUTPUT @Hp5250;":ROUT:BIAS:PORT? 1"  
ENTER @Hp5250;A  
For above example, Awill be as follows:  
4
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Command Reference  
[:ROUTe]:BIAS[:STATe]  
[:ROUTe]:BIAS[:STATe]  
This command controls the Bias Mode for the specified card. For details, refer to  
"Bias Mode" in Chapter 5.  
When Bias Mode is ON, the input Bias Port is connected to all bias enabled output  
ports that are not connected to any other input ports. To bias enable the desired  
output ports, refer to :ROUT:BIAS:CHAN:ENAB:CARDor  
:ROUT:BIAS:CHAN:ENAB:LIST.  
To select the input Bias Port, refer to :ROUT:BIAS:PORT.  
When Bias Mode is ON, you cannot directly specify Bias Port connections by  
:ROUT:OPENor :ROUT:CLOSE. Refer to those commands for details.  
Bias disabled output ports are never connected to the input Bias Port when Bias  
Mode is ON.  
When Bias Mode is OFF, the input Bias Port is the same as the other input ports, so  
relays can be controlled directly to connect to output ports.  
At *RST, the value of this parameter is OFF.  
Syntax  
[:ROUTe]:BIAS[:STATe] card_number,state  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
state  
ONor 1: turn ON the Bias Mode  
OFFor 0: turn OFF the Bias Mode  
Example  
OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON"  
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Command Reference  
[:ROUTe]:BIAS[:STATe]?  
[:ROUTe]:BIAS[:STATe]?  
This query command returns the Bias Mode of the specified card.  
Syntax  
[:ROUTe]:BIAS[:STATe]? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
0 or 1 <newline><^END>  
0: Bias Mode is OFF  
1: Bias Mode is ON  
OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,ON"  
OUTPUT @Hp5250;":ROUT:BIAS:STAT? 4"  
ENTER @Hp5250;A  
In above example, Awill be 1.  
[:ROUTe]:CLOSe:CARD?  
This query command returns channel_list of all closed (connected) channels for the  
specified card.  
Syntax  
[:ROUTe]:CLOSe:CARD? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
channel_list <newline><^END>  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
OUTPUT @Hp5250;":ROUT:CLOS:CARD? 1"  
ENTER @Hp5250;A$  
A$will be @10101,10202. For the meaning of channel_list, refer to Chapter 5.  
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Command Reference  
[:ROUTe]:CLOSe[:LIST]  
[:ROUTe]:CLOSe[:LIST]  
This command connects the input ports to the output ports as specified in  
channel_list.  
For some modes (such as Single Route Mode, Couple Port Mode, and Bias Mode),  
more complex connections may occur. For details, refer to Chapter 5.  
For example, if Bias Mode is ON, you cannot directly specify the input Bias port.  
But if channel_list specifies an output port that is connected to the input Bias Port,  
the output port is automatically disconnected from the Bias Port and connected to  
specified input port. Refer to ":ROUTe:BIAS:STATe".  
Syntax  
[:ROUTe]:CLOSe[:LIST] (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to close.  
For details about channel_list, refer to Chapter 5.  
Example  
OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
[:ROUTe]:CLOSe[:LIST]?  
This query command returns 0or 1for each channel specified by channel_list, in  
same order as specified by channel_list.  
0: channel is opened (not connected), 1: channel is closed (connected).  
[:ROUTe]:CLOSe[:LIST]? (@channel_list)  
Syntax  
Parameter  
channel_list  
Explanation  
Channels to check.  
For details about channel_list, refer to Chapter 5.  
Query response  
Example  
close_status{,close_status} <newline><^END>  
1: closed, or 0: opened  
OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
OUTPUT @Hp5250;":ROUT:CLOS? (@10101,10102,10201,10202)"  
ENTER @Hp5250;A$  
In above example, A$will be 1,0,0,1.  
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Command Reference  
[:ROUTe]:CONNection:RULE  
[:ROUTe]:CONNection:RULE  
This command sets the connection rule (Free or Single Route) for the specified card.  
For details, refer to "Connection Rule" in Chapter 5.  
At *RST, all cards are set to FREE.  
Syntax  
[:ROUTe]:CONNection:RULE card_number,rule  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
rule  
FREE: free route  
SROUte: single route  
Example  
Syntax  
OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"  
[:ROUTe]:CONNection:RULE?  
This query command returns the connection rule of the specified card. For details,  
refer to "Connection Rule" in Chapter 5.  
[:ROUTe]:CONNection:RULE? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
FREE or SROU <newline><^END>  
OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"  
OUTPUT @Hp5250;":ROUT:CONN:RULE? 1"  
ENTER @Hp5250;A$  
In above example, A$will be SROU.  
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Command Reference  
[:ROUTe]:CONNection:SEQuence  
[:ROUTe]:CONNection:SEQuence  
This command specifies the connection sequence mode, which is the open/close  
sequence of the relays when connection route is changed from an existing  
connection to a new connection. For details, refer to "Connection Sequence" in  
Chapter 5.  
The connection sequence is used only for cards that have been set to SROUte  
connection rule. Refer to "ROUTe:CONNection:RULE".  
At *RST, BBMake is selected.  
Syntax  
[:ROUTe]:CONNection:SEQuence card_number,sequence  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
sequence  
NSEQ: No-Sequence mode  
BBM: Break-Before-Make mode  
MBBR: Make-Before-Break mode  
Example  
OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR"  
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Command Reference  
[:ROUTe]:CONNection:SEQuence?  
[:ROUTe]:CONNection:SEQuence?  
This query command returns the connection sequence mode of the specified card.  
For details, refer to "Connection Sequence" in Chapter 5.  
Syntax  
[:ROUTe]:CONNection:SEQuence? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
NSEQ or BBM or MBBR <newline><^END>  
OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,MBBR"  
OUTPUT @Hp5250;":ROUT:CONN:SEQ? 0"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
MBBR  
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Command Reference  
[:ROUTe]:COUPle:PORT  
[:ROUTe]:COUPle:PORT  
NOTE  
This command applies only to the E5252A card.  
The Couple Port function is not available for the E5255A card.  
The Bias Port and Couple Port cannot be set to same port number.  
This command is used to set up couple ports, which are used for making Kelvin  
connections. For details, refer to "Couple Ports" in Chapter 5.  
Each specified input port number will be coupled with the next input port and two  
output ports. The two output ports are determined by the :ROUT:CLOScommand,  
and the lower output port number is always odd. See example below.  
To turn Couple Port Mode ON/OFF, refer to :ROUT:COUP:STAT.  
For each card, you can set up the same or different couple ports.  
This command overwrites the previous couple port setting for the card.  
At *RST, no input ports are coupled.  
Syntax  
[:ROUTe]:COUPle:PORT card_number,'couple_port'  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
couple_port  
One or more input port numbers: 1, 3, 5, 7, or 9.  
Enclose by single quotation marks. Separate multiple  
input port numbers by comma. For example: '1,5'  
Example  
OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1'"  
OUTPUT @Hp5250;":ROUT:CLOS (@10103)"  
This example connects input port 1 to output port 3, and connects input port 2 to  
output port 4.  
The lower output port of the couple port is always the odd number port, even if you  
specify an even output port in the :ROUT:CLOS command. For example, if you  
used :ROUT:CLOS (@10104), the connections would be the same as above.  
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Command Reference  
[:ROUTe]:COUPle:PORT?  
[:ROUTe]:COUPle:PORT?  
NOTE  
This command applies only to the E5252A card.  
This query command returns the lower input port number of each coupled pair. For  
details, refer to "Couple Ports" in Chapter 5.  
Syntax  
[:ROUTe]:COUPle:PORT? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
port_number{,port_number} <newline><^END>  
port_number = 1or 3or 5or 7or 9  
OUTPUT @Hp5250;":ROUT:COUP:PORT ALL,'1,3'"  
OUTPUT @Hp5250;":ROUT:COUP:PORT? 1"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
1,3  
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Command Reference  
[:ROUTe]:COUPle[:STATe]  
[:ROUTe]:COUPle[:STATe]  
NOTE  
This command applies only to the E5252A card.  
The Couple Port function is not available for the E5255A card.  
This command controls the Couple Port Mode for the specified card. For details,  
refer to "Couple Ports" in Chapter 5.  
To set up the couple ports, refer to :ROUT:COUP:PORT.  
At *RST, the value of this parameter is OFF.  
Syntax  
[:ROUTe]:COUPle[:STATe] card_number,state  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
state  
ONor 1: turn ON the Couple Port Mode  
OFFor 0: turn OFF the Couple Port Mode  
Example  
OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON"  
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Command Reference  
[:ROUTe]:COUPle[:STATe]?  
[:ROUTe]:COUPle[:STATe]?  
NOTE  
This command applies only to the E5252A card.  
The Couple Port function is not available for the E5255A card.  
This query command returns the Couple Port Mode of the specified card. For  
details, refer to "Couple Ports" in Chapter 5.  
Syntax  
[:ROUTe]:COUPle[:STATe]? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
Example  
0 or 1 <newline><^END>  
0 : Couple Port Mode is OFF  
1 : Couple Port Mode is ON.  
OUTPUT @Hp5250;":ROUT:COUP:STAT ALL,ON"  
OUTPUT @Hp5250;":ROUT:COUP:STAT? 2"  
ENTER @Hp5250;A  
For above example, Awill be as follows:  
1
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Command Reference  
[:ROUTe]:FUNCtion  
[:ROUTe]:FUNCtion  
This command sets the channel configuration, which determines how you specify  
the channel_list or card_number in other commands. For details, refer to "Channel  
List and Channel Configuration" in Chapter 5.  
When configuration is changed by :ROUT:FUNC, all channels are opened  
(disconnected) and become same status as after SYSTem:CPON ALL command  
execution.  
At *RST, this parameter is set to NCONfig.  
[:ROUTe]:FUNCtion channel_config  
Syntax  
Parameter  
Explanation  
channel_config  
ACONfig: Auto Config Mode  
NCONfig: Normal Config Mode  
Example  
OUTPUT @Hp5250;":ROUT:FUNC ACON"  
[:ROUTe]:FUNCtion?  
This query command returns the present channel configuration.  
For details, refer to "Channel List and Channel Configuration" in Chapter 5.  
Syntax  
[:ROUTe]:FUNCtion?  
Query response  
Example  
ACON or NCON <newline><^END>  
OUTPUT @Hp5250;":ROUT:FUNC ACON"  
OUTPUT @Hp5250;":ROUT:FUNC?"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
ACON  
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Command Reference  
[:ROUTe]:OPEN:CARD  
[:ROUTe]:OPEN:CARD  
This command disconnects all input ports from all output ports for the specified  
card. Then, if Bias Mode is ON, connects the input Bias Port to all bias enabled  
output ports.  
For details about the Bias Mode, refer to ":ROUTe:BIAS:STATe" in this chapter and  
refer to Chapter 5.  
Syntax  
[:ROUTe]:OPEN:CARD card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Example  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
[:ROUTe]:OPEN[:LIST]  
This command disconnects the input ports from output ports as specified in  
channel_list.  
For some modes (such as Single Route Mode, Couple Port Mode, and Bias Mode),  
more complex disconnections may occur. For details, refer to Chapter 5.  
For example, if Bias Mode is ON, you cannot directly specify the input Bias port.  
But if you use :ROUT:OPENto disconnect a bias enabled output port from another  
input port, the output port is automatically connected to the input Bias Port.  
Syntax  
[:ROUTe]:OPEN[:LIST] (@channel_list)  
Parameter  
channel_list  
Explanation  
Channels to open (disconnect).  
For details about channel_list, refer to Chapter 5.  
Example  
OUTPUT @Hp5250;":ROUT:OPEN (@10101,10202)"  
7-40  
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Command Reference  
[:ROUTe]:OPEN[:LIST]?  
[:ROUTe]:OPEN[:LIST]?  
This query command returns 0or 1for each channel specified by channel_list, in  
same order as specified by channel_list.  
0: channel is closed (connected), 1: channel is opened (not connected).  
[:ROUTe]:OPEN[:LIST]? (@channel_list)  
Syntax  
Parameter  
channel_list  
Explanation  
Channels to check. For details about channel_list,  
refer to Chapter 5.  
Query response  
Example  
open_status{,open_status} <newline><^END>  
1: opened  
0: closed  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
OUTPUT @Hp5250;":ROUT:CLOS (@10101,10202)"  
OUTPUT @Hp5250;":ROUT:OPEN? (@10101,10102,10201,10202)"  
ENTER @Hp5250;A$  
In above example, A$will be as follows:  
0,1,1,0  
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Command Reference  
:SYSTem Command Tree  
:SYSTem Subsystem  
The :SYSTem subsystem is a collection of functions that are not related to  
instrument performance.  
:SYSTem Command Tree  
Command  
Parameter  
:SYSTem  
:CCONfig?  
:CDEScription?  
:CPON  
card_number  
card_number  
card_number | ALL  
card_number  
:CTYPe?  
:ERRor?  
:VERSion?  
Parameter values:  
card_number:  
Auto Config Mode: 0  
Normal Config Mode: 1| 2| 3| 4  
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Command Reference  
:SYSTem:CCONfig?  
:SYSTem:CCONfig?  
This query command returns the card configuration information. This command has  
query form only.  
Syntax  
:SYSTem:CCONfig? card_number  
Parameter  
card_number  
card_configuration <newline><^END>  
Explanation  
card number: 1, 2, 3, or 4  
Query response  
For the E5252A: no response. Always returns #10.  
For the E5255A: definite length block response data, #16ABCDEF, where each  
letter is 8-bit binary data as follows:  
A: indicates input port (1to 6) that is connected to block 1.  
B: indicates if resistance is set for block 1 Bias Port: 1: resistance set, 0: not set  
C: indicates input port (1to 6) that is connected to block 2.  
D: indicates if resistance is set for block 2 Bias Port: 1: resistance set, 0: not set  
E: indicates input port (1to 6) that is connected to block 3.  
F: indicates if resistance is set for block 3 Bias Port: 1: resistance set, 0: not set  
Example  
OUTPUT @Hp5250;":SYST:CCON? 1"  
ENTER @Hp5250;A$  
ENTER A$ USING "3X,6A";B$  
FOR I=1 TO 6  
C=NUM(B$[I;1])  
PRINT "BYTE No. ";I;"= ";C  
NEXT I  
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Command Reference  
:SYSTem:CDEScription?  
:SYSTem:CDEScription?  
This query command returns a description of the specified card.  
This command has query form only.  
Syntax  
:SYSTem:CDEScription? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
NOTE  
"card_description" <newline><^END>  
If designated card is not installed or initialize failed, this command returns  
"No Card".  
For E5252A in Auto Config mode, "card_description"response is one of  
following:  
"E5252A 10x12 Matrix Switch"  
"E5252A 10x24 Matrix Switch"  
"E5252A 10x36 Matrix Switch"  
"E5252A 10x48 Matrix Switch"  
For E5252A in Normal Config mode:  
"E5252A 10x12 Matrix Switch"  
For E5255A in Auto Config mode:  
"E5255A I1,I2,I3,I4,I5,I6 Channel Multiplexer"  
Where In is the number (two characters) of output ports for each input port n.  
For example:  
"E5255A 24,24, 0,16,16,16 Channel Multiplexer"  
For E5255A in Normal Config mode:  
"E5255A 24 (8x3) Channel Multiplexer"  
Example  
OUTPUT @Hp5250;":SYST:CDES? 1"  
ENTER @Hp5250;A$  
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Command Reference  
:SYSTem:CPON  
:SYSTem:CPON  
This command resets the specified card to the power-on state. If the parameter is  
ALL, all addressable cards are reset to the power-on state. Status after this command  
is shown below:  
Channel Configuration: No Change  
Connection Rule:  
Connection Sequence:  
Bias Mode:  
Free  
Break Before Make  
Off  
Bias Port:  
E5252A : 10  
E5255A : None  
Bias Enabled Channels: All channels (output ports) are bias enabled  
Couple Port Mode:  
Couple Port:  
Off  
No Couple Ports  
Card Channel Status:  
Self-Test Result:  
All relays open in present channel configuration mode  
No Change  
For the device reset state, see *RST.  
:SYSTem:CPON card_number  
Parameter  
Syntax  
Explanation  
card_number  
card number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Example  
OUTPUT @Hp5250;":SYST:CPON ALL"  
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Command Reference  
:SYSTem:CTYPe?  
:SYSTem:CTYPe?  
This query command returns the ID of the specified card.  
This command has query form only.  
Syntax  
:SYSTem:CTYPe? card_number  
Parameter  
card_number  
Explanation  
card number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
Query response  
HEWLETT-PACKARD,model,0,revision <newline><^END>  
model = E5252Aor E5255A  
revision = A.01.00or later version  
NOTE  
If designated card is not installed or initialize failed, this command returns  
NONE,NONE,0,0  
Example  
OUTPUT @Hp5250;":SYST:CTYPE? 1"  
ENTER @Hp5250;A$  
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Command Reference  
:SYSTem:ERRor?  
:SYSTem:ERRor?  
This command reads the error from the head of the error queue and removes that  
error from the queue.  
This command has query form only.  
Syntax  
:SYSTem:ERRor?  
Query response  
err_no,"message" <newline><^END>  
err_no is numeric response data, and message is string response data.  
If there has been no error (error queue is empty), the response to this query is as  
follows:  
0,"No error"  
Example  
OUTPUT @Hp5250;":SYST:ERR?"  
ENTER @Hp5250;A,B$  
:SYSTem:VERSion?  
This command returns the SCPI version number for which the E5250A complies.  
This command has query form only.  
Syntax  
:SYSTem:VERSion?  
Query response  
YYYY.V <newline><^END>  
YYYY is the year (for example, 1995).  
V is the approved revision number for that year.  
Example  
OUTPUT @Hp5250;":SYST:VERS?"  
ENTER @Hp5250;A$  
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Command Reference  
Status Reporting Structure  
Status Reporting Structure  
This section describes the status reporting structure used in the E5250A. These are  
IEEE 488.2 status structures that can be set and read by the SCPI Common  
Commands as described in “Common Commands” on page 7-4.  
Status Reporting Structure  
The status reporting structure consists of the following:  
Status Byte Register  
Service Request "Enable" Register  
Standard Event Status Register  
Standard Event Status "Enable" Register  
Output Queue  
In general, the status reporting structure is used to request service via Service  
Request (SRQ) or to indicate a specific condition, such as operation complete.  
Refer to the following figures for a model of the E5250A status reporting structure.  
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Command Reference  
Status Reporting Structure  
Figure 7-1  
Status Reporting Structure of E5250A  
The above figure shows Service Request Generation. When a condition occurs that  
requires service, the instrument sets Request Service bit (RQS bit6) of Status  
Byte, and sends a Service Request (SRQ) via GPIB bus to the controller. So, the  
controller can execute an interrupt service routine (must be in the program) that uses  
a Serial Poll to read Status Byte of each instrument to determine which instrument  
requested service. See “Status Byte Register” on page 7-50.  
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Command Reference  
Status Byte Register  
The E5250A Status Byte Register contains bits (ESB and MAV) for status summary  
messages from other registers. The status of these bits depends on the condition of  
the Standard Event Status Register and the Output Queue. If service request occurs,  
Bit6 (RQS) of Status Byte Register is set.  
Refer to Figure 7-2 and Table 7-1 for the E5250A Status Byte Register.  
Figure 7-2  
Status Byte Register of E5250A  
The Status Byte Register can be read with either a serial poll or the *STB? common  
query command (refer to “Common Commands” on page 7-4).  
Serial poll is a low-level GPIB command that can be executed by SPOLLin HP  
BASIC, such as the following:  
Status=SPOLL(@Hp5250)  
Both serial poll and STB? read the Status Byte Register identically, but have  
following difference:  
SPOLLreturns RQS for bit6  
*STB? returns MSS for bit6  
RQS and MSS are always the same value, so returned Status Byte value is always  
the same for these two methods.  
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Command Reference  
Status Byte Register  
In general, use serial polling (not *STB?) inside interrupt service routines. Use  
*STB? in other cases (not in interrupt service routine) when you want to know the  
value of Status Byte.  
Table 7-1  
Status Byte Register of E5250A  
Bit  
Definition  
Not Used.  
Explanation  
0
Always zero.  
Always zero.  
Always zero.  
Always zero.  
1
2
3
4
Not Used.  
Not Used.  
Not Used.  
Message Available  
Indicates whether Output Queue is empty. If  
(MAV) Queue Summary unread message exists, this bit is set to 1.  
Message  
Otherwise, this bit is set to 0. Refer to  
“Output Queue” on page 7-55.  
5
6
Standard Event Status  
Bit (ESB) Summary  
Message  
Indicates whether one or more of the enabled  
Standard Events Status Register bits is set.  
Request Service (RQS)  
Message  
Indicates whether a SRQ (Service Request)  
has occurred. Read by Serial Poll.  
Master Summary Status  
(MSS) Summary  
Message  
Indicates that the instrument has at least one  
reason for requesting service. Read by  
*STB?.  
7
Not Used.  
Always zero.  
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Command Reference  
Service Request Enable Register  
Service Request Enable Register  
The Service Request Enable Register is an 8-bit register that can be used by the  
programmer to select which summary messages in the Status Byte Register may  
cause service requests. Refer to Figure 7-3.  
Figure 7-3  
Service Request Enable Register of E5250A  
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Command Reference  
Standard Event Status Register  
Standard Event Status Register  
The Standard Event Status Register has specific events assigned to specific bits.  
Refer to Figure 7-4 and Table 7-2.  
Figure 7-4  
Standard Event Status Register of E5250A  
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Command Reference  
Standard Event Status Enable Register  
Table 7-2  
Standard Event Status Register of E5250A  
Bit  
Definition  
Explanation  
0
Operation Complete  
(OPC)  
This event bit has meaning only if a request  
to monitor is set by the *OPC command.  
Refer to “*OPC” on page 7-9. This bit is set  
to 1if there are no pending operations.  
1
2
Not Used  
Always 0.  
Query Error (QYE)  
An attempt is being made to read data  
from the Output Queue when no data is  
present or pending.  
Data in the Output Queue has been lost.  
3
4
5
Device Dependent  
Error (DDE)  
This event bit indicates that an error has  
occurred which is not a Command Error, a  
Query Error, or an Execution Error.  
Execution Error (EXE) Syntax of command is correct, but cannot be  
executed due to some condition of the  
E5250A.  
Command Error  
(CME)  
A command syntax error has been detected.  
6
7
Not Used  
Always 0.  
Power On (PON)  
This event bit indicates that an off-to-on  
transition has occurred in instrument's  
power supply.  
8 to 15 Not used  
Always 0.  
Standard Event Status Enable Register  
The Standard Event Status "Enable" Register is an 8-bit register that can be used by  
the programmer to select which bits of Standard Event Status Register are enabled.  
The status of the enabled bits are ORed together, and result of OR will be reported to  
the ESB bit (Bit5) of the Status Byte Register.  
The 8 bits of this register correspond to the 8 bits of the Standard Event Status  
Register. Refer to Figure 7-4.  
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Command Reference  
Output Queue  
Output Queue  
The Output Queue stores response messages until they are read. If an unread  
message exists, Bit4 (Message Available MAV) of the Status Byte Register is set  
to 1. So, Bit4 is used to synchronize information exchange with the controller. Refer  
to Figure 7-5.  
Figure 7-5  
Output Queue of E5250A  
The Response Formatter places Data Byte Messages and END messages into the  
Output Queue in response to query commands. These messages are removed from  
the Output Queue as they are read by the controller. As long as the Output Queue  
contains an unread message, MAV is 1.  
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Command Reference  
Output Queue  
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8
VXIplug&play Driver  
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VXIplug&play Driver  
This chapter introduces the VXIplug&play driver available for Agilent E5250A, and  
consists of the following sections:  
“System Requirements”  
“Installing VXIplug&play Driver”  
“Driver Functions”  
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VXIplug&play Driver  
System Requirements  
System Requirements  
The following system environments are required.  
Operating System  
Microsoft Windows XP Professional, Windows 2000, Windows NT 4.0,  
Windows 98, or Windows 95. It must be supported by the application  
development environment and VISA I/O library.  
Application Development Environment (or programming environment)  
Microsoft Visual Basic, Microsoft Visual C++, Borland C++Builder, National  
Instruments LabWindows or LabVIEW, or Agilent VEE. It must be supported  
by the VISA I/O library.  
GPIB (IEEE 488) Interface and 32-bit VISA I/O Library  
Agilent GPIB interface with Agilent IO Libraries or equivalent.  
Computer and peripherals  
Required specifications depend on the application development environment.  
See manual of the application development environment. The flexible disk drive  
is required to install the VXIplug&play driver. The CD-ROM drive is required  
to install the software needed to use driver.  
Minimum disk space  
2 MB for 4155/4156 driver  
1 MB for E5250A driver  
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VXIplug&play Driver  
Installing VXIplug&play Driver  
Installing VXIplug&play Driver  
The installation flow is shown below. If you have already installed the GPIB  
interface card, VISA I/O library, and programming software on your PC, skip steps  
1 through 4.  
1. Install the GPIB interface card into your PC.  
See the interface card manual. Note the model number of the interface card, as  
you may need it to configure the interface (in step 3).  
2. Install VISA I/O library.  
Follow the instructions in the I/O library’s setup program.  
3. Configure and check the GPIB interface.  
See the I/O library manual.  
4. Install the programming software.  
Follow the setup program instructions.  
5. Install the VXIplug&play driver as shown below.  
a. Insert the E5250A Plug&Play Driver Disk into the flexible disk drive  
connected to your PC.  
b. Execute the SETUP.EXE program stored on the diskette. The program  
automatically installs the following files in \Vxipnp\Winnt\Hpe5250a or  
\Vxipnp\Win95\Hpe5250a depending on the OS.  
hpe5250a.bas  
hpe5250a.c  
hpe5250a.def  
hpe5250a.fp  
hpe5250a.GID  
hpe5250a.h  
hpe5250a.hlp  
readme.txt  
DelsL1.isu  
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VXIplug&play Driver  
Driver Functions  
Driver Functions  
Table 8-1 lists all the functions for the E5250A. You will see a brief description of  
the functions in the table.  
For the description, syntax and parameters of the function, refer to the reference  
section following this table. The driver functions in the reference section will appear  
in the alphabetical order.  
Table 8-1  
Category  
E5250A Driver Function Lists  
Function  
hpe5250a_init  
Description  
Initializes the E5250A.  
Miscellaneous  
hpe5250a_close  
Closes the connection with the E5250A.  
Executes the E5250A reset.  
hpe5250a_reset  
hpe5250a_self_test  
Executes the E5250A self-test.  
Queries for the E5250A error code/message.  
Queries for the driver error.  
hpe5250a_error_query  
hpe5250a_error_message  
hpe5250a_revision_query  
hpe5250a_timeOut  
Queries for the E5250A firmware/driver revisions.  
Sets the timeout.  
hpe5250a_timeOut_Q  
hpe5250a_errorQueryDetect  
Queries for the timeout setting.  
Sets the automatic error checking.  
hpe5250a_errorQueryDetect_Q Queries for the automatic error checking setting.  
hpe5250a_dcl  
Sends the Device Clear.  
hpe5250a_esr_Q  
Queries for the ESR status.  
hpe5250a_readStatusByte_Q  
hpe5250a_opc_Q  
Reads the E5250A status byte.  
Checks the E5250A operation completion status.  
Sets the configuration mode.  
Sets the connection rule/sequence.  
Selects the input bias port.  
Mode Control  
Bias Mode  
hpe5250a_func  
hpe5250a_connRuleSeq  
hpe5250a_biasPort  
hpe5250_biasChanCard  
hpe5250_biasChanList  
hpe5250a_biasState  
hpe5250a_biasChanList_Q  
hpe5250a_couplePort  
hpe5250a_coupleState  
Selects the card for bias mode.  
Selects the channel list for bias mode.  
Sets the bias port state.  
Queries for the bias channel list.  
Selects the couple port.  
Couple Port  
Sets the couple port state.  
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VXIplug&play Driver  
Driver Functions  
Category  
Function  
Description  
Closes the channel list.  
Route Control  
hpe5250a_closeList  
hpe5250a_openList  
Opens the channel list.  
hpe5250a_openCard  
Opens all output on the card.  
Queries for the channel list status.  
hpe5250a_closeList_Q  
hpe5250a_openList_Q  
hpe5250a_closeCard_Q  
hpe5250a_CompenC  
hpe5250a_selectCompenFile  
hpe5250a_testExec_Q  
hpe5250a_testClear  
Queries for the closed channel list on the card.  
Executes the C/G compensation.  
C/G  
Compensation  
Selects the compensation data file.  
Diagnostics  
Executes the relay/front-panel/controller test.  
Clears the test result.  
Passthrough  
Functions  
hpe5250a_cmd  
Sends a command.  
hpe5250a_cmdInt  
Sends a command with an integer parameter.  
Sends a command with a real parameter.  
Sends a command to read any data.  
hpe5250a_cmdReal  
hpe5250a_cmdData_Q  
hpe5250a_cmdString_Q  
hpe5250a_cmdInt16_Q  
hpe5250a_cmdInt16Arr_Q  
hpe5250a_cmdInt32_Q  
hpe5250a_cmdInt32Arr_Q  
hpe5250a_cmdReal64_Q  
hpe5250a_cmdReal64Arr_Q  
Sends a command to read string response.  
Sends a command to read 16 bit integer response.  
Sends a command to read 16 bit integer array response.  
Sends a command to read 32 bit integer response.  
Sends a command to read 32 bit integer array response.  
Sends a command to read 64 bit real response.  
Sends a command to read 64 bit real array response.  
8-6  
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Driver Functions  
hpe5250a_biasChanCard  
This function will enable or disable bias on all the output ports of the specified card.  
Syntax  
ViStatus _VI_FUNC hpe5250a_biasChanCard(ViSession vi,  
ViInt16 disable_enable, ViInt16 bias_cardno);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Bias status.  
disable_enable  
0 : sets bias enabled card.  
1 : sets bias disabled card.  
bias_cardno  
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
hpe5250a_biasChanList  
This function will enable or disable bias on all the output ports specified by the  
biaschan_list.  
The parameter ’biaschan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’biaschan_list’ should be "0" (numeric zero) to  
identify the end of the list. The maximum number of channels that can be specified  
by the list is 100.  
Syntax  
ViStatus _VI_FUNC hpe5250a_biasChanList(ViSession vi,  
ViInt16 biaschan_disen, ViInt32 _VI_FAR biaschan_list[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Bias status.  
biaschan_disen  
0 : sets bias enabled port.  
1 : sets bias disabled port.  
biaschan_list[ ]  
Channel numbers. 5 digits integer. ABCDE. where A: card  
number, BC: input port number, DE: output port number.  
Top zero(s) can be ignored. For example, if A=0, BC=01, and  
DE=01, channel number should be 101 instead of 00101.  
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Driver Functions  
hpe5250a_biasChanList_Q  
This function will query the instrument for the bias status for the channels given in  
the list.  
The parameter ’biaschan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’biaschan_list’ should be "0" (numeric zero) to  
identify the end of the list. The maximum number of channels that can be specified  
by the list is 100.  
The ’bias_status’ parameter is an array of integers containing the return values of  
the query. The ’bias_status’ array returned will correspond one to one with  
’biaschan_list’ parameter.  
Syntax  
ViStatus _VI_FUNC hpe5250a_biasChanList_Q(ViSession vi, ViInt16 bias_disen,  
ViInt32 _VI_FAR biaschan_list[ ], ViInt32 _VI_FAR bias_status[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Bias status for the query.  
bias_disen  
0 : confirms if the port is the bias enabled.  
1 : confirms if the port is the bias disabled.  
biaschan_list[ ]  
bias_status[ ]  
Channel numbers to know the bias status. 5 digits integer.  
ABCDE. where A: card number, BC: input port number, DE:  
output port number. Top zero(s) can be ignored. For example, if  
A=0, BC=01, and DE=01, channel number should be 101  
instead of 00101.  
Bias status of the channels given in the biaschan_list. Returned  
value depends on the setting of bias_disen as shown below:  
when bias_disen=0, 0 means bias disabled, 1 means enabled.  
when bias_disen=1, 0 means bias enabled, 1 means disabled.  
8-8  
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Driver Functions  
hpe5250a_biasPort  
This function will select which input port is the bias port on the specified card. For  
each card, you can specify the same or different Bias Port. This function applies  
only to the E5252A card.  
Syntax  
ViStatus _VI_FUNC hpe5250a_biasPort(ViSession vi, ViInt16 biasport_cardno,  
ViInt16 bias_port);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
biasport_cardno Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
bias_port  
Input port number to be set to the bias port. 1 to 10 (input port 1  
to input port 10).  
hpe5250a_biasState  
This function controls the bias mode for the specified card. When Bias Mode is ON,  
the input Bias Port is connected to all bias enabled output ports that are not  
connected to any other input ports. Bias disabled output ports are never connected to  
the input Bias Port when Bias Mode is ON.  
Syntax  
ViStatus _VI_FUNC hpe5250a_biasState(ViSession vi, ViInt16 biasstate_cardno,  
ViInt16 state);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
biasstate_cardno Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
state  
Bias mode. 0 (OFF) or 1 (ON).  
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Driver Functions  
hpe5250a_close  
This function terminates the software connection to the instrument and deallocates  
system resources. It is generally a good programming habit to close the instrument  
handle when the program is done using the instrument.  
Syntax  
ViStatus _VI_FUNC hpe5250a_close(ViSession vi);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
hpe5250a_closeCard_Q  
This function will query the card for the channels closed of the specified card.  
The parameter ’closechan_list’ contains the channel numbers returned by the  
instrument. This will be an array of integers terminated by ’zero’ to identify the end  
of the list. Array of enough length should be passed to the function.  
Syntax  
ViStatus _VI_FUNC hpe5250a_closeCard_Q(ViSession vi, ViInt16 close_card,  
ViInt32 _VI_FAR closechan_list[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
close_card  
Card number. 1 (card 1), 2 (card 2), 3 (card 3), or 4 (card 4) in  
the normal configuration mode, or 0 (all card in the automatic  
configuration mode). For the configuration mode, see  
hpe5250a_func.  
closechan_list[ ] Channels closed of the specified card.  
8-10  
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Driver Functions  
hpe5250a_closeList  
This function will connect the input ports to the output ports specified by the  
channel list.  
The parameter ’closechan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’closechan_list’ should be "0" (numeric zero)  
to identify the end of the list. The maximum number of channels that can be  
specified by the list is 100.  
Syntax  
ViStatus _VI_FUNC hpe5250a_closeList(ViSession vi,  
ViInt32_VI_FAR closechan_list[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
closechan_list[ ] Channel numbers to connect. 5 digits integer. ABCDE. where  
A: card number, BC: input port number, DE: output port  
number. Top zero(s) can be ignored. For example, if A=0,  
BC=01, and DE=01, channel number should be 101 instead of  
00101.  
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Driver Functions  
hpe5250a_closeList_Q  
This function will query the instrument for the channels closed given in the  
’closechan_list’.  
The parameter ’closechan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’closechan_list’ should be "0" (numeric zero)  
to identify the end of the list. The maximum number of channels that can be  
specified by the list is 100.  
The ’close_status’ parameter is an array of integers containing the return values of  
the query. The ’close_status’ array returned will correspond one to one with  
’closechan_list’ parameter.  
Syntax  
ViStatus _VI_FUNC hpe5250a_closeList_Q(ViSession vi,  
ViInt32_VI_FAR closechan_list[ ], ViInt32 _VI_FAR close_status[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
closechan_list[ ] Channel numbers to know the close status. 5 digits integer.  
ABCDE. where A: card number, BC: input port number, DE:  
output port number. Top zero(s) can be ignored. For example, if  
A=0, BC=01, and DE=01, channel number should be 101  
instead of 00101.  
close_status[ ]  
Status of the channels given in the closechan_list.  
0 (opened) or 1 (closed).  
hpe5250a_cmd  
This function passes the cmd_str string to the instrument. Must be a NULL  
terminated C string.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmd(ViSession vi, ViString cmd_str);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
cmd_str  
Instrument command (cannot exceed 256 bytes in length).  
8-12  
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Driver Functions  
hpe5250a_cmdData_Q  
This function passes the cmd_str string to the instrument. This entry point will wait  
for a response which may be any data. You specify the cmd_str and size parameters,  
and get result[ ].  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdData_Q(ViSession vi, ViString cmd_str,  
ViInt32 size, ViChar _VI_FAR result[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Length of result in bytes. 2 to 32767.  
cmd_str  
size  
result[ ]  
Response from instrument.  
hpe5250a_cmdInt  
This function passes the cmd_str string to the instrument. This entry point passes  
the string in cmd_str followed by a space and then the integer in value. Note that  
either an Int16 or 32 can be passed as the Int16 will be promoted.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdInt(ViSession vi, ViString cmd_str,  
ViInt32 value);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Parameter for command. -2147483647 to 2147483647.  
cmd_str  
value  
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Driver Functions  
hpe5250a_cmdInt16Arr_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that is a definite arbitrary block of 16 bit integers. You specify the cmd_str  
and size parameters, and get result[ ] and count.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdInt16Arr_Q(ViSession vi, ViString cmd_str,  
ViInt32 size, ViInt16 _VI_FAR result[ ], ViPInt32 count);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
cmd_str  
size  
Instrument command (cannot exceed 256 bytes in length).  
Size of result[ ] (number of items in the array).  
1 to 2147483647.  
result[ ]  
count  
Response from instrument.  
Count of valid items in result[ ].  
hpe5250a_cmdInt16_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that can be returned as a 16 bit integer.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdInt16_Q(ViSession vi, ViString cmd_str,  
ViPInt16 result);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Response from instrument.  
cmd_str  
result  
8-14  
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Driver Functions  
hpe5250a_cmdInt32Arr_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that is a definite arbitrary block of 32 bit integers. You specify the cmd_str  
and size parameters, and get result[ ] and count.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdInt32Arr_Q(ViSession vi, ViString cmd_str,  
ViInt32 size, ViInt32 _VI_FAR result[ ], ViPInt32 count);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
cmd_str  
size  
Instrument command (cannot exceed 256 bytes in length).  
Size of result[ ] (number of items in the array).  
1 to 2147483647.  
result[ ]  
count  
Response from instrument.  
Count of valid items in result[ ].  
hpe5250a_cmdInt32_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that can be returned as a 32 bit integer.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdInt32_Q(ViSession vi, ViString cmd_str,  
ViPInt32 result);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Response from instrument.  
cmd_str  
result  
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Driver Functions  
hpe5250a_cmdReal  
This function passes the cmd_str string to the instrument. This entry point passes  
the string in cmd_str followed by a space and then the real in value. Note that either  
an Real32 or 64 can be passed as the Real32 will be promoted.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdReal(ViSession vi, ViString cmd_str,  
ViReal64 value);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Parameter for command. -1E+300 to 1E+300.  
cmd_str  
value  
hpe5250a_cmdReal64Arr_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that is a definite arbitrary block of 64 bit reals. You specify the cmd_str  
and size parameters, and get result[ ] and count.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdReal64Arr_Q(ViSession vi, ViString cmd_str,  
ViInt32 size, ViReal64 _VI_FAR result[ ], ViPInt32 count);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
cmd_str  
size  
Instrument command (cannot exceed 256 bytes in length).  
Size of result[ ] (number of items in the array).  
1 to 2147483647.  
result[ ]  
count  
Response from instrument.  
Count of valid items in result[ ].  
8-16  
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Driver Functions  
hpe5250a_cmdReal64_Q  
This function passes the cmd_str string to the instrument. This command expects a  
response that can be returned as a 64 bit real.  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdReal64_Q(ViSession vi, ViString cmd_str,  
ViPReal64 result);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Response from instrument.  
cmd_str  
result  
hpe5250a_cmdString_Q  
This function passes the cmd_str string to the instrument. This entry point will wait  
for a response which must be a string (character data). You specify the cmd_str and  
size parameters, and get result[ ].  
Syntax  
ViStatus _VI_FUNC hpe5250a_cmdString_Q(ViSession vi, ViString cmd_str,  
ViInt32 size, ViChar _VI_FAR result[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument command (cannot exceed 256 bytes in length).  
Length of result in bytes. 2 to 32767.  
cmd_str  
size  
result[ ]  
Response from instrument.  
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Driver Functions  
hpe5250a_compenC  
This function compensates capacitance/conductance data measured by using Agi-  
lent 4284A C meter, and returns compensation results. If you change the compensa-  
tion data, create the compensation data file, and specify the data file using  
hpe5250a_selectCompenFile function before executing this function.  
Syntax  
ViStatus _VI_FUNC hpe5250a_compenC(ViSession vi,ViReal64 frequency,  
ViReal64 len_hptrx, ViReal64 len_usrtrx_h, ViReal64 len_usrtrx_l,  
ViReal64 len_usrcoax_h, ViReal64 len_usrcoax_l, ViReal64 raw_c,  
ViReal64 raw_g, ViPReal64 compen_c, ViPReal64 compen_g);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Measurement frequency. 1E+3 to 1E+6 Hz.  
Agilent 16494A triaxial cable. 1.5 or 3.0 m.  
frequency  
len_hptrx  
len_usrtrx_h  
Triaxial cable length (in m) between connector plate and DUT  
high terminal. If you do not use triaxial cable, enter 0 (zero).  
len_usrtrx_l  
Triaxial cable length (in m) between connector plate and DUT  
low terminal. If you do not use triaxial cable, enter 0 (zero).  
len_usrcoax_h  
len_usrcoax_l  
Coaxial cable length (in m) between connector plate and DUT  
high terminal. If you do not use coaxial cable, enter 0 (zero).  
Coaxial cable length (in m) between connector plate and DUT  
low terminal. If you do not use coaxial cable, enter 0 (zero).  
raw_c  
Capacitance value (in F) measured by the 4284A.  
Conductance value (in S) measured by the 4284A.  
Capacitance compensation result (in F).  
raw_g  
compen_c  
compen_g  
Conductance compensation result (in S).  
8-18  
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Driver Functions  
hpe5250a_connRuleSeq  
The function sets connection rule and connection sequence for the specified card.  
Syntax  
ViStatus _VI_FUNC hpe5250a_connRuleSeq(ViSession vi,  
ViInt16 cardno_ruleseq, ViInt16 rule, ViInt16 sequence);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
cardno_ruleseq  
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
rule  
Connection rule. 0 (free route) or 1 (single route).  
Connection sequence. 0, 1, or 2. See below.  
0 (no sequence)  
sequence  
1 (break before make)  
2 (make before break)  
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Driver Functions  
hpe5250a_couplePort  
This function sets the couple ports which are used for making kelvin connections on  
the specified card. The specified input port number will be coupled with the next  
input port and two output ports. For each card, you may setup the same or different  
couple ports. This command overwrites the previous couple port setting for the card.  
This command applies only to the E5252A card.  
The couple port mode is controlled by the hpe5250a_coupleState function.  
Syntax  
ViStatus _VI_FUNC hpe5250a_couplePort(ViSession vi,  
ViInt16 coupleport_cardno, ViInt16 port1, ViInt16 port3, ViInt16 port5,  
ViInt16 port7, ViInt16 port9);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
coupleport_cardn  
o
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
port1  
port3  
port5  
port7  
port9  
Couple port by the input ports 1 and 2.  
0 (disable) or 1 (enable).  
Couple port by the input ports 3 and 4.  
0 (disable) or 1 (enable).  
Couple port by the input ports 5 and 6.  
0 (disable) or 1 (enable).  
Couple port by the input ports 7 and 8.  
0 (disable) or 1 (enable).  
Couple port by the input ports 9 and 10.  
0 (disable) or 1 (enable).  
8-20  
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Driver Functions  
hpe5250a_coupleState  
This function controls the couple port mode for the specified card. This function  
applies only to the E5252A card.  
Syntax  
ViStatus _VI_FUNC hpe5250a_coupleState(ViSession vi,  
ViInt16 couplestate_cardno, ViInt16 couple_state);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
couplestate_cardn  
o
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
couple_state  
Couple port mode. 0 (OFF) or 1 (ON).  
hpe5250a_dcl  
This function sends a device clear (DCL) to the instrument.  
A device clear will abort the present operation and enable the instrument to accept a  
new command or query.  
This is particularly useful in situations where it is not possible to determine the  
instrument state. In this case, it is customary to send a device clear before issuing a  
new instrument driver function. The device clear ensures that the instrument will be  
able to begin processing the new commands.  
Syntax  
ViStatus _VI_FUNC hpe5250a_dcl(ViSession vi);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_error_message  
This function translates the error return value from an instrument driver function to  
a readable string.  
Syntax  
ViStatus _VI_FUNC hpe5250a_error_message(ViSession vi, ViStatus  
error_number, ViChar _VI_FAR message[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Error return value from the driver function.  
error_number  
message[ ]  
Error message string. This is limited to 256 characters.  
hpe5250a_error_query  
This function returns the error numbers and corresponding error messages in the  
error queue of a instrument. See Chapter 11 for a listing of the instrument error  
numbers and messages.  
Instrument errors may occur when you places the instrument in a bad state such as  
sending an invalid sequence of coupled commands. Instrument errors can be  
detected by polling. Automatic polling can be accomplished by using the  
hpe5250a_errorQueryDetect function.  
Syntax  
ViStatus _VI_FUNC hpe5250a_error_query(ViSession vi, ViPInt32 error_number,  
ViChar _VI_FAR error_message[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Instrument’s error code.  
error_number  
error_message[ ] Instrument’s error message. This is limited to 256 characters.  
8-22  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_errorQueryDetect  
This function enables or disables automatic instrument error checking.  
If automatic error checking is enabled then the driver will query the instrument for  
an error at the end of each function call.  
Syntax  
ViStatus _VI_FUNC hpe5250a_errorQueryDetect(ViSession vi,  
ViBoolean errorQueryDetect);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
errorQueryDetect Error checking enable (VI_TRUE) or disable (VI_FALSE).  
hpe5250a_errorQueryDetect_Q  
This function indicates if automatic instrument error detection is enabled or  
disabled.  
Syntax  
ViStatus _VI_FUNC hpe5250a_errorQueryDetect_Q(ViSession vi,  
ViPBoolean pErrDetect);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
pErrDetect  
Error checking enable (VI_TRUE) or disable (VI_FALSE).  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_esr_Q  
This function returns the contents of the ESR register. The driver returns the  
equivalent messages (see Parameters).  
Syntax  
ViStatus _VI_FUNC hpe5250a_esr_Q(ViSession vi, ViChar _VI_FAR errstr[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Response from instrument.  
errstr[ ]  
Bit Value  
Message  
1
“ESR_OPC”  
2
“ESR_RQL”  
4
“ESR_QYE_ERROR”  
“ESR_DEVICE_DEPENDENT_ERROR”  
“ESR_EXECUTION_ERROR”  
“ESR_COMMAND_ERROR”  
“ESR_URQ”  
8
16  
32  
64  
128  
OTHERS  
“ESR_PON”  
“ESR_MULTI_EVENT”  
hpe5250a_func  
This function is used to set the channel configuration to the auto configuration mode  
or the normal configuration mode.  
Syntax  
ViStatus _VI_FUNC hpe5250a_func(ViSession vi, ViInt16 channel_config);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Configuration mode. 0 (auto) or 1 (normal).  
channel_config  
8-24  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_init  
This function initializes the software connection to the instrument and optionally  
verifies that instrument is in the system. In addition, it may perform any necessary  
actions to place the instrument in its reset state.  
If the hpe5250a_init function encounters an error, then the value of the vi output  
parameter will be VI_NULL.  
Syntax  
ViStatus _VI_FUNC hpe5250a_init(ViRsrc InstrDesc, ViBoolean id_query,  
ViBoolean do_reset, ViPSession vi);  
Parameters  
InstrDesc  
id_query  
Instrument description. Examples; GPIB0::1::INSTR.  
VI_TRUE (to perform In-System Verification), or  
VI_FALSE (do not perform In-System Verification).  
do_reset  
vi  
VI_TRUE (to perform reset operation), or  
VI_FALSE (do not perform reset operation).  
Instrument handle. This is VI_NULL if an error occurred  
during the init.  
hpe5250a_opc_Q  
This function does the *OPC? common command.  
Syntax  
ViStatus _VI_FUNC hpe5250a_opc_Q(ViSession vi, ViPBoolean result);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
result  
VI_TRUE (Operation complete), or  
VI_FALSE (Operation is pending).  
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8-25  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_openCard  
This function will disconnect all input ports from all output ports for the specified  
card. Then if bias mode is ON, connects the input bias port to all bias enabled output  
ports.  
Syntax  
ViStatus _VI_FUNC hpe5250a_openCard(ViSession vi, ViInt16 open_cardno);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
open_cardno  
Card number. 1 (card 1), 2 (card 2), 3 (card 3), 4 (card 4), or 5  
(all card) in the normal configuration mode, or 0 (all card in the  
automatic configuration mode). For the configuration mode, see  
hpe5250a_func.  
hpe5250a_openList  
This function will disconnect the input ports from the output ports specified by the  
channel list.  
The parameter ’openchan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’openchan_list’ should be "0" (numeric zero)  
to identify the end of the list. The maximum number of channels that can be  
specified by the list is 100.  
Syntax  
ViStatus _VI_FUNC hpe5250a_openList(ViSession vi,  
ViInt32_VI_FAR openchan_list[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
openchan_list[ ] Channel numbers to disconnect. 5 digits integer. ABCDE.  
where A: card number, BC: input port number, DE: output port  
number. Top zero(s) can be ignored. For example, if A=0,  
BC=01, and DE=01, channel number should be 101 instead of  
00101.  
8-26  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_openList_Q  
This function will query the instrument for the channels open given in the  
’openchan_list’.  
The parameter ’openchan_list’ is an array of integers with each integer representing  
one channel. The last number of the ’openchan_list’ should be "0" (numeric zero)  
to identify the end of the list. The maximum number of channels that can be  
specified by the list is 100.  
The ’open_status’ parameter is an array of integers containing the return values of  
the query. The ’open_status’ array returned will correspond one to one with  
’openchan_list’ parameter.  
Syntax  
ViStatus _VI_FUNC hpe5250a_openList_Q(ViSession vi,  
ViInt32_VI_FAR openchan_list[ ], ViInt32 _VI_FAR open_status[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
openchan_list[ ] Channel numbers to know the open status. 5 digits integer.  
ABCDE. where A: card number, BC: input port number, DE:  
output port number. Top zero(s) can be ignored. For example, if  
A=0, BC=01, and DE=01, channel number should be 101  
instead of 00101.  
open_status[ ]  
Status of the channels given in the openchan_list.  
1 (opened) or 0 (closed).  
hpe5250a_readStatusByte_Q  
This function returns the contents of the status byte register.  
Syntax  
ViStatus _VI_FUNC hpe5250a_readStatusByte_Q(ViSession vi,  
ViPInt16 statusByte);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
statusByte  
The contents of the status byte are returned in this parameter.  
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8-27  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_reset  
This function places the instrument in a default state. Before issuing this function, it  
may be necessary to send a device clear to ensure that the instrument can execute a  
reset. A device clear can be issued by invoking hpe5250a_dcl function.  
Syntax  
ViStatus _VI_FUNC hpe5250a_reset(ViSession vi);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
hpe5250a_revision_query  
This function returns the driver revision and the instrument firmware revision.  
Syntax  
ViStatus _VI_FUNC hpe5250a_revision_query(ViSession vi,  
ViChar_VI_FAR driver_rev[ ] , ViChar _VI_FAR instr_rev[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
driver_rev[ ]  
instr_rev[ ]  
Instrument driver revision. This is limited to 256 characters.  
Instrument firmware revision. This is limited to 256 characters.  
8-28  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_selectCompenFile  
This function specifies capacitance/conductance compensation data file used to  
compensate C/G by using hpe5250a_compenC.  
Syntax  
ViStatus _VI_FUNC hpe5250a_selectCompenFile(ViSession vi,  
ViString file_name);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
file_name  
Compensation data file name. Use absolute path. If the value is  
NULL string, the default data is used.  
Remarks  
If you change the compensation data, copy the default data shown below, and  
modify the data for your measurement cable. You will need to change the data for  
DATA05 and 06, and/or DATA07 and 08 corresponding to your cables. To measure  
and change the compensation data, refer to Chapter 6. To get the R, L, and C value,  
measure R, L, and C of the cable using the 4284A, and divide them by cable length  
(in m). Compensation data must be the value for 1 m length. Do not change the data  
format in the file.  
# E5250A C Compensation coefficient data table  
#
#
#
#
CAUTION : Do not add or delete "REVISION" line and "DATAxx" line.  
Change the value for R,L,C of DATA05,06,07 or 08.  
REVISION  
#
A.03.00  
R [ohm]  
L [H]  
C [F]  
DATA00  
DATA01  
DATA02  
DATA03  
DATA04  
DATA05  
DATA06  
DATA07  
DATA08  
DATA09  
# END of Data  
74.65E-3  
75.41E-3  
231.41E-3  
177.56E-3  
100.70E-3  
100.70E-3  
100.70E-3  
114.00E-3  
114.00E-3  
0.00E-3  
140.00E-9  
90.00E-9  
450.00E-9  
390.00E-9  
400.00E-9  
400.00E-9  
400.00E-9  
544.00E-9  
544.00E-9  
0.00E-9  
58.44E-12  
67.13E-12  
178.85E-12  
135.45E-12  
80.00E-12  
80.00E-12  
80.00E-12  
130.00E-12  
130.00E-12  
1.20E-12  
# Frame Path 1  
# Frame Path 2  
# Card Path High  
# Card Path Low  
# Triax Cable  
# User Triax Cbl H [/m]  
# User Triax Cbl L [/m]  
# User Coax Cbl H [/m]  
# User Coax Cbl L [/m]  
# Stray Capacitance  
[/m]  
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8-29  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_self_test  
This function causes the instrument to perform a self-test and returns the result of  
that self-test. This is used to verify that an instrument is operating properly. A failure  
may indicate a potential hardware problem.  
Syntax  
ViStatus _VI_FUNC hpe5250a_self_test(ViSession vi, ViPInt16 test_result,  
ViChar_VI_FAR test_message[ ] );  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
Numeric result from self-test operation. 0: No error.  
Self-test status message. This is limited to 256 characters.  
test_result  
test_message[ ]  
hpe5250a_testClear  
This function clears the test result for the specified relay card or the front panel or  
the controller.  
Syntax  
ViStatus _VI_FUNC hpe5250a_testClear(ViSession vi, ViInt16 framecard_clear);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
framecard_clear Test result to be cleared. 0, 1, 2, 3, 4, 5, 6, or 7. See below.  
0 (test result of all test)  
1 (card 1 relay test result)  
2 (card 2 relay test result)  
3 (card 3 relay test result)  
4 (card 4 relay test result)  
5 (relay test result of all card)  
6 (front panel test result)  
7 (controller test result)  
8-30  
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VXIplug&play Driver  
Driver Functions  
hpe5250a_testExec_Q  
This function executes the controller test, the front panel test, or the relay test for the  
specified card. You must attach the relay test adapter before executing the relay test.  
The Front Panel test requires the key to be pressed within 10 seconds else the test  
will fail.  
Syntax  
ViStatus _VI_FUNC hpe5250a_testExec_Q(ViSession vi, ViInt16 framecard_exec,  
ViPInt16 exec_result);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
framecard_exec Test to be executed. 1 (card 1 relay test) to 4 (card 4 relay test),  
5 (relay test for all card), 6 (front panel test), or 7 (controller  
test).  
exec_result  
Test result. 0: No error.  
hpe5250a_timeOut  
This function sets a minimum timeout value for driver I/O transactions in  
milliseconds. The default timeout period is 2 seconds.  
Syntax  
ViStatus_VI_FUNC hpe5250a_timeOut(ViSession vi, ViInt32 timeOut);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
timeOut  
I/O timeout value for all functions in the driver. in milliseconds.  
0 to 2147483647.  
hpe5250a_timeOut_Q  
This function returns the timeout value for driver I/O transactions in milliseconds.  
Syntax  
ViStatus_VI_FUNC hpe5250a_timeOut_Q(ViSession vi, ViPInt32 pTimeOut);  
Parameters  
vi  
Instrument handle returned from hpe5250a_init( ).  
pTimeOut  
Minimum timeout period that the driver can be set to, in  
milliseconds.  
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8-31  
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VXIplug&play Driver  
Driver Functions  
8-32  
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9
Executing Sample Programs  
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This chapter explains how to use the following sample programs:  
“Vth and Capacitance Measurement Program”  
“HCI Measurement Program”  
The sample programs are saved in the E5250A Program Disk (LIF formatted,  
3.5-inch diskette) that is furnished with Agilent E5250A. This disk includes the  
setup files for controlling Agilent 4155/4156 Semiconductor Parameter Analyzer  
used in the program with Agilent E5250A.  
NOTE  
The sample programs are HP BASIC language programs, so you need an HP BASIC  
workstation to execute the programs.  
The Vth and Capacitance Measurement Program uses the Agilent 4155/4156,  
Agilent 4284A Precision LCR Meter, and the E5250A with the E5252A card.  
The HCI Measurement Program uses the 4155/4156, Bias Sources, and the E5250A  
with the E5255A cards.  
CAUTION  
NOTE  
These are sample programs, so you may need to modify these programs and the  
4155/4156 setup files for your application before executing the programs.  
If the sample programs damage your device, Agilent Technologies is NOT LIABLE  
for the damage.  
To Keep Original Program Disk  
Copy the E5250A Program Disk, and keep the original disk for your backup. Also,  
for storing a program after you modify it, use a file name that is different from the  
original program name.  
9-2  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
This section introduces and explains how to use and modify the Vth and  
Capacitance measurement program. This section consists of the following sections:  
“Introduction”  
“Setting up the Measurement Environment”  
“Executing the Program”  
“Modifying the Program”  
Introduction  
This program measures the parameters of the devices shown in Table 9-1 by using  
the Agilent 4155/4156 Semiconductor Parameter Analyzer, the Agilent 4284A  
Precision LCR Meter, and the Agilent E5250A with the E5252A card.  
The program flow is shown in Table 9-2. In this program, the 4155/4156 is set up by  
loading the 4155/4156 setup file E5252.MES, which is saved on the E5250A  
Program Disk. So, the program disk must be in the 4155/4156's disk drive when you  
execute the program.  
Table 9-1  
Devices and Parameters Measured  
No. of  
Devices  
Measured  
Measurement  
Parameter  
Instrument  
Used  
Device  
N-channel MOSFET  
Capacitor  
1
1
Threshold Voltage (Vth)  
Capacitance  
4155/4156  
4284A  
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9-3  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Table 9-2  
Vth and Capacitance Measurement Flow  
Step  
Description  
1
Initializes the Instruments:  
1. Resets the 4155/4156.  
2. Resets the 4284A.  
3. Resets and initializes the E5250A.  
Configuration Mode: NORMAL  
Bias Mode: OFF  
Connection Rule: Single  
Connection Sequence: BBM  
2
Measures Vth of MOSFET:  
1. Loads the 4155/4156 setup file for Vth measurement. And sets up the  
4155/4156 measurement conditions.  
2. Creates connection channels in the E5250A for Vth measurement.  
3. Measures Vth of MOSFET.  
4. Disconnects the connection channels in the E5250A.  
5. Judges pass or fail.  
6. Displays result and measurement data on computer's screen.  
7. Resets instrument.  
3
Measures Capacitance:  
1. Sets up the 4284A measurement conditions.  
2. Creates connection channels in the E5250A for C measurement.  
3. Measures capacitance.  
4. Disconnects the connection channels in the E5250A.  
5. Compensates the measurement data.  
6. Judges pass or fail.  
7. Displays result and measurement data on computer's screen.  
8. Resets instrument.  
4
Resets all instruments.  
9-4  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Vth Measurement Setup  
Measurement setup of the E5250A and 4155/4156 for this program is as follows:  
E5250A/E5252A Setup:  
Slot No  
Channels  
1
2
3
4
10101, 10202, 10303, and 10404  
not used.  
not used.  
not used.  
4155/4156 Setup:  
Below is summary of measurement setup saved in E5252.MESfile. For details  
of the setup data, GET the E5252.MESfile using the 4155/4156 and refer to  
the setup displayed on the 4155/4156 screen.  
Channel/Source Setup:  
SMU  
SMU1  
SMU2  
SMU3  
SMU4  
VNAME  
Vd  
I NAME  
MODE  
FUNCTION  
CONST  
VAR1  
Source Setup  
5V  
Id  
Ig  
V
Vg  
V
COMMON  
V
0 to 5V, 50mV step  
Common  
Vs  
Is  
CONST  
CONST  
Vsb  
Isb  
0V  
User Function Setup:  
NAME  
UNIT  
DEFINITION  
SQRTId  
GRAD  
VTH  
SQRT(Id)  
DIFF(SQRTId,Vg)  
@L1X  
V
BETA  
@L1G^2  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Display Setup:  
Xaxis  
Y1axis  
Y2axis  
NAME  
SCALE  
MIN  
Vg  
LINEAR  
0 V  
SQRTId  
LINEAR  
0
GRAD  
LINEAR  
0
MAX  
5 V  
200 m  
80 m  
Also the DATA VARIAVLES fields set VTH and BETA.  
Auto Analysis Setup:  
*LINE1: [ TANGENT ] line on [ Y1 ] at a point where  
[ GRAD ] = [ MAX(GRAD)  
]
-----------------------------------------------------------  
*LINE2: [  
]
-----------------------------------------------------------  
*MARKER: At a point where  
[ GRAD ] = [ MAX(GRAD)  
]
[
]
---------------------  
*Interpolate: [OFF]  
Capacitance Measurement Setup  
Measurement setup of the E5250A and 4284A for this program is as follows:  
E5250A/E5252A Setup:  
Slot No  
Channels  
10905 and 11006  
1
2
3
4
not used.  
not used.  
not used.  
4284A Setup:  
Measurement Frequency  
Signal Level  
100 kHz  
0.03 V  
Cp-G  
Measurement Function  
9-6  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Setting up the Measurement Environment  
Before executing the program, you need to set up the measurement environment.  
Table 9-3 lists the required equipment.  
Connect the E5250A output to Device Under Test (DUT). For details, refer to  
“Setting up Measurement Environment” on page 4-1.  
And connect all equipment as shown in Figure 9-1 and Table 9-4. The E5252A must  
be installed in slot1 of the E5250A.  
Table 9-3  
Required Equipments  
Agilent Model/Part No.  
Description  
Qty.  
E5250A  
Low Leakage Switch Mainframe  
10×12 Matrix Switch  
Semiconductor Parameter Analyzer  
Triaxial Cable (80 cm)  
Triaxial Cable (1.5 m or 3 m)  
Connector Plate  
1
1
1
4
6
1
1
1
2
3
E5252A  
4155/4156  
16494A-003  
16494A-001 or -002  
16495F  
4284A with 4284A-006  
16048D/E  
Precision LCR Meter  
Test Lead  
1250-2405  
BNC T-type Adapter  
GPIB Cable  
10833A/B/C  
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9-7  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Figure 9-1  
Vth and C Measurement Setup and DUT Connection  
Table 9-4  
Instrument and DUT Connection  
Instrument  
E5250A  
Input Port  
DUT Terminal (via  
Connector Plate)  
Measurement  
ModelNo.  
Output Port  
Port  
4155/4156  
SMU 1  
SMU 2  
SMU 3  
SMU 4  
Hp, Hc  
Lp, Lc  
SMU INPUT 1  
SMU INPUT 2  
SMU INPUT 3  
SMU INPUT 4  
AUX INPUT CV1  
AUX INPUT CV2  
OUTPUT 1  
OUTPUT 2  
OUTPUT 3  
OUTPUT 4  
OUTPUT 5  
OUTPUT 6  
MOSFET Drain  
MOSFET Gate  
MOSFET Source  
MOSFET Substrate  
Capacitance (H)  
Capacitance (L)  
4284A  
9-8  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Executing the Program  
Before executing the program, do the following:  
1. Set the GPIB address for each instrument as follows:  
4155/4156: 717  
4284A: 724  
E5250A: 722  
2. Turn on all instruments and the computer.  
3. Boot up HP BASIC operating system.  
4. Set the 4155/4156 to "NOT SYSTEM CONTROLLER" on the SYSTEM:  
MISCELLANEOUS page.  
5. Insert the program disk into the disk drive that is connected to the computer.  
6. Specify the mass storage device where the program disk is inserted by using the  
MSI statement.  
For example, if the device is ":CS80,702,1", enter the following command:  
MSI ":CS80,702,1"  
7. GET the Vth and C measurement program (SP_MAT), and RE-STORE the  
program. In following example, the file is stored as program file P_MAT.  
GET "SP_MAT"  
RE-STORE "P_MAT"  
program. In following example, the file is stored as program file C_COM.  
GET "C_COMPEN"  
RE-STORE "C_COM"  
For details of Capacitance Compensation Routine, refer to “Using the  
Capacitance Compensation Routine” on page 6-28.  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
Execute the program as follows:  
1. LOAD the Vth and C measurement program as following example.  
LOAD "P_MAT"  
2. Link the Capacitance Compensation Routine by using the LOADSUB ALL  
statement as in following example.  
LOADSUB ALL FROM "C_COM"  
3. Eject the E5250A Program Disk from the disk drive connected to the computer.  
4. Insert the E5250A Program Disk into the 4155/4156's disk drive. Setup file  
E5252.MESis stored on the disk and is used to set up 4155/4156 for the Vth  
measurement.  
5. RUN the program.  
6. After the measurement, measurement results are displayed on the computer as  
shown in example in Figure 9-2.  
Figure 9-2  
Example of Vth and C Measurement Results  
Comment  
Test Time : 30 Sep 1995 10:29:27  
# P/F Min. Meas.  
: Vth & C Meas. Sample Program  
Max.  
Comment  
1 P 10.000E-002 18.255E-001 20.000E-001 MOSFET Vth Measurement  
2 F 8.000E-12  
2.164E-11  
2.000E-11  
Capacitance Measurement  
9-10  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
“To save the 4155/4156 measurement data”  
“To change the Vth measurement setup”  
“To change the capacitance measurement setup”  
“To use the VFP data upload library”  
To change the GPIB Address  
You can EDIT the program to change the following parameters in the  
Init_settingsubprogram.  
Parameter  
Description  
GPIB select code  
Default  
Hpib_sc  
Ad415x  
Ad4284  
Ad5250  
7
GPIB address for the 4155/4156  
GPIB address for the 4284A  
GPIB address for the E5250A  
17  
24  
22  
To change the header of the measurement result report  
You can EDIT to change the following parameters in the Init_setting  
subprogram. This is for header of report displayed on the computer. For the display  
example, refer to Figure 9-2.  
Parameter  
Description  
Default  
Usercomm$  
Test_num  
Header comment (title) of the report. "Vth C Meas. Sample Program"  
Initial number for numbering the test  
item. If value is 0, the first test item  
will be number 1.  
0
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
To output the measurement report to printer  
You can EDIT to change the following parameters in the Init_setting  
subprogram. Printer must be connected to computer by using GPIB cable. The  
report as shown in example in Figure 9-2 will be printed automatically.  
Parameter  
Description  
Default  
Ad_prn  
GPIB address for printer  
1
0
Prn_enab  
Enable/disables print out function.  
(1: Enable, 0: Disable)  
To execute the 4155/4156 calibration  
Remove the exclamation marks from program lines shown below, and enter the  
lines. These lines are in Init_instrumentsubprogram. The calibration will be  
done automatically before measurement.  
! CALL Cal415x  
! DISP "Agilent 4155/4156 Calibration Completed"  
To save the 4155/4156 measurement data  
To save the Vth measurement data to a diskette in the 4155/4156's disk drive,  
remove the exclamation marks from the program lines shown below, and enter the  
lines. These lines are in the "Save Measurement Data" block of the Meas_vth  
subprogram.  
! OUTPUT @Hp415x;":MMEM:STOR:TRAC DEF,'VTH.DAT','DISK'"  
! OUTPUT @Hp415x;"*OPC?"  
! ENTER @Hp415x;A  
The measurement data will be saved to the VTH.DATfile after the measurement. If  
desired, you can use another file name instead of VTH.DAT.  
9-12  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
To change the Vth measurement setup  
You can EDIT the program to change the following parameters in the "Constant  
Definition" block of the Meas_vthsubprogram.  
Parameter  
Description  
Default  
Test_comm$ Comment for the measurement. "MOSFET Vth Measurement"  
Param_file$  
Vth_max  
Vth_min  
4155/4156 setup file to use.  
The maximum Vth limit in V.  
The minimum Vth limit in V.  
E5250A channel_list to use.  
"E5252.MES"  
2.0  
0.1  
Channel$  
"(@10101,10202,10303,10404)"  
To change the E5250A input port/output port connections, change the Channel$  
parameter. And if you want to change the E5250A connection functions (Channel  
Configuration mode, etc.), modify the Set5250initsubprogram.  
To change the 4155/4156 measurement setup, change the Param_file$  
parameter to the name of your desired setup file.  
To change the name of parameter Vthentered from the 4155/4156, change VTHand  
Vthto the desired name on the 3 lines shown below. Where VTHis the parameter  
defined by the E5252.MES setup file.  
Meas_vthsubprogram, "Measurement" block:  
OUTPUT @Hp415x;":TRAC? 'VTH'"  
ENTER @Hp415x;Vth  
Meas_vthsubprogram, "Test measurement data" block:  
IF Vth<Vth_min OR Vth>Vth_max THEN  
Meas_vthsubprogram, "Reset Instrument" block:  
OUTPUT Out_str$ USING Img1;Test_num,Result$,Vth_min,V  
th,Vth_max,Test_comm$  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
To change the capacitance measurement setup  
You can EDIT the program to change the following parameters in the "Constant  
Definition" block of the Meas_csubprogram.  
Parameter  
Description  
Default  
Test_comm$  
Comment for the measurement.  
"Capacitance  
Measurement"  
Capa_max  
Capa_min  
Sig_volt  
The maximum capacitance limit in F.  
The minimum capacitance limit in F.  
Signal level for C measurement in V.  
Frequency for C measurement in Hz.  
Length (in meters) of 16048D/E cable.  
2.0E-11  
8.0E-12  
0.03  
Meas_freq  
Cable_len  
Clen_hptriax  
1.0E+5  
1
Length (in meters) of 16494A cable  
connected from E5252A output to  
connector plate.  
1.5  
Clen_usrtriax_h Length (in meters) of triaxial cable  
connected from connector plate to  
0
DUT (Highterminal of capacitor).  
Clen_usrtriax_l  
Length (in meters) of triaxial cable  
connected from connector plate to  
DUT (Lowterminal of capacitor).  
0
Clen_usrcoax_h Length (in meters) of coaxial cable  
connected from connector plate to  
1.0  
DUT (Highterminal of capacitor).  
Clen_usrcoax_l  
Channel$  
Length (in meters) of coaxial cable  
connected from connector plate to  
DUT (Lowterminal of capacitor).  
1.0  
E5250A channel_list to use.  
"(@10905,11006)"  
To change the E5250A input port/output port connections, change the Channel$  
parameter. And if you want to change the E5250A connection functions (Channel  
Configuration mode, etc.), modify the Set5250initsubprogram.  
9-14  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
If you want to use your VFP data in the program, change the program as follows.  
Before executing the program, you need to create the VFP data and save it to a file  
on diskette. And you must link the VFP Data Upload Library to the program. For  
details, refer to “Using the Virtual Front Panel (VFP) Utility” on page 5-4 and  
“Using the VFP Data Upload Library” on page 6-22.  
1. Insert an exclamation mark (!) at the beginning of each program line shown in  
the following table, and enter the lines.  
Subprogram  
Meas_vth  
Program Line  
Test_comm$="MOSFET Vth Measurement"  
Channel$="(@10101,10202,10303,10404)"  
"Constant Definition" block  
OUTPUT @Hp5250;":ROUT:CLOS "&Channel$  
OUTPUT @Hp5250;"*OPC?"  
ENTER @Hp5250;A  
Meas_vth  
"Connect to DUT" block  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
OUTPUT @Hp5250;"*OPC?"  
ENTER @Hp5250;A  
Meas_vth  
"Connection All Open" block  
Test_comm$="Capacitance Measurement"  
Channel$="(@10905,11006)"  
Meas_c  
"Constant Definition" block  
OUTPUT @Hp5250;":ROUT:CLOS "&Channel$  
OUTPUT @Hp5250;"*OPC?"  
ENTER @Hp5250;A  
Meas_c  
"Connect to DUT" block  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
OUTPUT @Hp5250;"*OPC?"  
ENTER @Hp5250;A  
Meas_c  
"Connection All Open" block  
OUTPUT @Hp5250;":ROUT:FUNC NCON"  
OUTPUT @Hp5250;":ROUT:BIAS:STAT ALL,OFF"  
OUTPUT @Hp5250;":ROUT:CONN:RULE ALL,SROU"  
OUTPUT @Hp5250;":ROUT:CONN:SEQ ALL,BBM"  
OUTPUT @Hp5250;":ROUT:OPEN:CARD ALL"  
OUTPUT @Hp5250;"*OPC?"  
Set5250init  
ENTER @Hp5250;A  
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Executing Sample Programs  
Vth and Capacitance Measurement Program  
2. Remove the exclamation marks from program lines shown in the following  
table, and enter the lines.  
Subprogram  
Meas_vth  
Meas_vth  
Program Line  
! COM /Vfp_com_data/ Setup_data$[14000]  
! Test_comm$=FNGet_vfp_comment$(Setup_data$,Setup_num)  
"Constant Definition"  
block  
a
See Note .  
! Connect_vfp(Setup_data$,Setup_num)  
Meas_vth  
"Connect to DUT" block  
a
See Note .  
! Connect_vfp(Setup_data$,Setup_num)  
Meas_vth  
"Connection All Open"  
block  
b
See Note .  
! COM /Vfp_com_data/ Setup_data$[14000]  
Meas_c  
! Test_comm$=FNGet_vfp_comment$(Setup_data$,Setup_num)  
Meas_c  
"Constant Definition"  
block  
c
See Note .  
! Connect_vfp(Setup_data$,Setup_num)  
Meas_c  
"Connect to DUT" block  
c
See Note .  
! Connect_vfp(Setup_data$,Setup_num)  
Meas_c  
"Connection All Open"  
block  
b
See Note .  
! COM /Vfp_com_data/ Setup_data$[14000]  
! Adrs=Adrs5250  
Set5250init  
! CALL Load_vfp_data(Adrs,"VFP_FILE",Setup_data$)  
! CALL Init_vfp_setup(Setup_data$)  
d
See Note .  
a. You must replace the Setup_num parameter with number of the VFP setup memory to use  
for Vth measurement.  
b. You must replace the Setup_num parameter with number of the VFP setup memory that sets  
"Open All" (no connection) condition.  
c. You must replace the Setup_num parameter with number of the VFP setup memory to use  
for C measurement.  
d. In Load_vfp_data subprogram, enter your VFP data file name instead of "VFP_FILE". Your  
VFP data file must contain data for at least 3 Setup Memories: for Vth measurement, C mea-  
surement, and "Open All" condition.  
9-16  
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Executing Sample Programs  
HCI Measurement Program  
This section explains how to use and modify the HCI measurement sample program.  
“Introduction”  
“Adding the Bias Source Control Routine”  
“Setting up the Measurement Environment”  
“Executing the Program”  
“Modifying the Program”  
Introduction  
The Hot-Carrier-Induced (HCI) degradation of MOSFET parameters is measured by  
using Agilent 4155/4156 Semiconductor Parameter Analyzer, bias sources, and the  
E5250A with the E5255A card.  
Two HP BASIC language programs are used to perform the HCI measurement:  
HCI Test Program (SP_MUX_M) performs HCI degradation test according to  
the JEDEC proceeding titled "A PROCEDURE FOR MEASURING HCI"  
(29-JULY-93).  
Analysis Program (SP_MUX_A) determines the lifetime of MOSFET from the  
data measured by HCI test program.  
The SP_MUX_Mprogram flow is shown in Table 9-5.  
Table 9-5 also lists the files that are used to set up the 4155/4156 for each part of the  
SP_MUX_Mprogram. These setup files are stored on the E5250A Program Disk. So,  
the program disk must be in the 4155/4156's disk drive when you execute the  
program.  
using the 4155/4156.  
NOTE  
To Add the Bias Source Control Routine  
The HCI measurement sample program (SP_MUX_M) requires bias sources. You  
must modify or add a control routine for your bias sources to the program. Refer to  
“Adding the Bias Source Control Routine” on page 9-23.  
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Executing Sample Programs  
HCI Measurement Program  
Table 9-5  
HCI Degradation Measurement Flow  
4155/4156  
setup file  
step  
Description  
Initializes the Instruments:  
1
1. Resets the 4155/4156.  
2. Resets and initializes the E5250A.  
Configuration Mode: AUTO  
Bias Mode: OFF  
Connection Rule: FREE  
Channel Status: All Relays Open  
2
3
Determines Stress Condition. See later.  
IBVG.MES  
Selects devices valid for the HCI test. See later.  
IGLEAK.MES  
IDLEAK.MES  
4
5
Characterizes the initial parameters. See later.  
PARAM.MES  
PARAM.MES  
Applies stress and characterizes the parameters.  
See later.  
Step 2. Determines Stress Condition  
This step determines the gate stress voltage (Vgstr) from the Ib-Vgs measurement  
test result. This Vgstrvalue will be used in step 5.  
NOTE  
Test Device for Defining Stress Conditions  
The test device used to determine the stress conditions (step 2) should not be used  
for Hot-Carrier stress testing (steps 3 to 5).  
9-18  
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Executing Sample Programs  
HCI Measurement Program  
Step 3. Selects devices valid for the HCI test  
This step judges whether each device is valid according to the current leak test  
result. The IGLEAK.MESand IDLEAK.MESfiles are used to set up the 4155/4156  
for this step.  
As shown below, 24 devices are connected to the E5250A, and measured  
individually by switching. For devices that fail this step, no further testing is  
performed, and "0.0" is recorded.  
Device  
Terminal  
Device 1  
Device2  
Device 3  
. . . .  
Device24  
Gate  
1
25  
2
26  
3
27  
. . . .  
. . . .  
24  
48  
Drain  
Sub  
49  
50  
51  
. . . .  
72  
Source  
GNDU  
GNDU  
GNDU  
GNDU  
GNDU  
Step 4. Characterizes the initial parameters  
This step initially (before stress) measures parameters for the devices that were  
determined to be valid by the previous step.  
The PARAM.MESfile sets up the 4155/4156.  
A summary of the measurement setup saved in PARAM.MESis shown below. For  
details of the setup data, GET the PARAM.MESfile using the 4155/4156, and refer  
to the setup displayed on the 4155/4156.  
Channel/Source Setup:  
SMU  
SMU1  
SMU3  
SMU4  
GNDU  
V NAME  
VG  
I NAME  
MODE  
FUNCTION  
VAR1  
Source Setup  
IG  
ID  
IB  
IS  
V
0 to 5V, 20mV step  
VD  
V
V
CONST  
CONST  
CONST  
0.1V  
VB  
0V  
VS  
COMMON  
Common  
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Executing Sample Programs  
HCI Measurement Program  
User Function Setup:  
NAME  
UNIT  
DEFINITION  
DIFF(ID,VG)  
Gm  
S
V
S
V
A
Vtext  
Gmmax  
Vtci  
@MX-(@MY1/@MY2)-AT(VD,1)/2  
MAX(Gm)  
@L2X  
Idlin  
@L1Y1  
Display Setup:  
Xaxis  
Y1axis  
Y2axis  
NAME  
SCALE  
MIN  
VG  
LINEAR  
0 V  
ID  
LINEAR  
0 A  
Gm  
LINEAR  
0 S  
MAX  
5 V  
2 mA  
1.5 mS  
Also the DATA VARIAVLES fields set Vtext and Idlin.  
Auto Analysis Function:  
*LINE1: [ GRAD  
] line on [ Y1 ] at a point where  
[ VG  
] = [ 5  
]
]
[
]
Gradient:  
[ 0  
-----------------------------------------------------------  
*LINE2: [ NORMAL  
] line on [ Y1 ] at a point where  
[ ID  
[
] = [ 10u  
]
]
]
and a point  
[WHERE]  
[ ID  
] = [ 10u  
-----------------------------------------------------------  
*MARKER: At a point where  
[ Gm  
[
] = [ MAX(Gm)  
]
]
---------------------  
*Interpolate: [ON ]  
PARAM.MES setup file extracts Idlin and Vtci by using the 4155/4156 User  
Function and Auto Analysis Function. These parameters are extracted with the  
following conditions:  
Idlin:  
Gate voltage VG=5 V  
Substrate voltage VB=0V  
Vtci:  
W/L Ratio (Gate width/Gate length ratio) =10 μm/1 μm  
For changing the conditions, refer to “Modifying the Program” on page 9-35.  
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Executing Sample Programs  
HCI Measurement Program  
Step 5. Applies stress and characterizes the parameters  
1. Applies the stress, Vdstrand Vgstr, to the valid devices.  
Before running the SP_MUX_Mprogram, you must determine the Vdstr(drain  
stress voltage) by Id-Vds measurement (using setup file IDVD.MES), then edit  
the SP_MUX_Mprogram to input value of Vdstr. Refer to “Executing the  
Program” on page 9-27.  
2. Performs the interim characterization. This sets up the 4155/4156 by using the  
PARAM.MESsetup file, then measures the parameters (Idlin, Gmmax, Vtext  
and Vtci) for each device.  
3. Judges whether to terminate the stress/interim characterization cycle. This cycle  
is terminated when total stress time reaches 100,000 sec or when there is no  
device satisfies all of the following conditions:  
Idlinvalue is within ±10 % of initial value.  
Gmmaxvalue is within ±10 % of initial value.  
Vtcivalue is within ±20 mV of initial value.  
If none of these termination conditions has occurred, stress time (duration) is  
increased, and these 3 steps are repeated. The default cumulative stress times are  
defined in the program as follows. To change these cumulative stress times, refer  
to “Modifying the Program” on page 9-35.  
Stress  
cycle  
Cumulative  
stress time  
Stress  
cycle  
Cumulative  
stress time  
Stress time  
Stress time  
1
10 sec  
10 sec  
30 sec  
50 sec  
100 sec  
300 sec  
500 sec  
10 sec  
8
1000 sec  
3000 sec  
5000 sec  
10000 sec  
30000 sec  
50000 sec  
2000 sec  
2
3
4
5
6
7
20 sec  
9
5000 sec  
50 sec  
10  
11  
12  
13  
10000 sec  
20000 sec  
50000 sec  
100000 sec  
100 sec  
200 sec  
500 sec  
1000 sec  
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Executing Sample Programs  
HCI Measurement Program  
The measurement data is saved to the diskette in disk drive connected to the  
computer with the following file names.  
IDXX: Percent change data for Idlin  
GMXX: Percent change data for Gmmax  
VTEXX: Relative shift data for Vtext  
VTIXX: Relative shift data for Vtci  
where XX means the test device number.  
Required Equipments  
Prepare the equipment shown in Table 9-6, which lists the required equipment to  
execute the program:  
Table 9-6  
Required Equipment  
Agilent Model/Part No.  
Description  
Qty.  
E5250A  
Low Leakage Switch Mainframe  
24 (8×3) Channel Multiplexer  
Semiconductor Parameter Analyzer  
SMU/PGU expander (for GNDU)  
Triaxial Cable (1.5 m or 3 m)  
Triaxial Cable (80 cm)  
1
3
1
1
1
3
9
1
5
1
3
3
1
E5255A  
4155/4156  
41501  
16494A-001 or -002  
16494A-003  
16494D-001 or -002  
16495D  
8 Channel Shielded Coaxial Cable (1.5 m or 3 m)  
Connector Plate  
10833A/B/C  
E5250-17002  
GPIB Cable  
E5250A Program Disk (furnished)  
Bias Source  
BNC - BNC cable (for Bias Source)  
3.5 inch diskette (for storing measurement data  
and modified program)  
9-22  
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Executing Sample Programs  
HCI Measurement Program  
Adding the Bias Source Control Routine  
This sample program requires bias sources to apply stress to DUT. So, you must  
modify the following bias source control subprograms to match your bias sources or  
create new subprograms. The following subprogram is for bias sources that support  
SCPI commands:  
1. Get the HCI test program (SP_MUX_M) from the E5250A Program Disk by  
using the computer:  
GET "SP_MUX_M"  
2. Delete the exclamation marks (!) from beginning of the following two program  
lines. You can easily find these lines by using FIND statement.  
! CALL Bias_source_on  
:
:
! CALL Bias_source_off  
3. Delete the exclamation mark (!) from the beginning of the following lines in the  
"Bias_source_on" and "Bias_source_off" subprograms.  
Then modify the "OUTPUT" statements to match your Bias Sources. The  
"SOUR XXX" SCPI command is used to control the output voltage of the Bias  
Sources.  
!Bias_source_on:SUB Bias_source_on  
! !===========================================================  
! ! Bias Source On  
! !-----------------------------------------------------------  
! COM /Meas_info5/ REAL Vdstr,Vgstr,Vdd,Vbb,Gate_length,Gate_w  
idth  
! !-----------------------------------------------------------  
! OUTPUT 701;"SOUR "&VAL$(Vgstr) ! Set Gate Stress Voltage  
! OUTPUT 702;"SOUR "&VAL$(Vdstr) ! Set Drain Stress Voltage  
! OUTPUT 703;"SOUR 0.0" ! Set Substrate Stress Voltage  
!SUBEND  
! !===========================================================  
!Bias_source_off:SUB Bias_source_off  
! !===========================================================  
! ! Bias Source Off  
! !-----------------------------------------------------------  
! COM /Meas_info5/ REAL Vdstr,Vgstr,Vdd,Vbb,Gate_length,Gate_w  
idth  
! !-----------------------------------------------------------  
! OUTPUT 701;"SOUR 0.0" ! Set Gate Voltage to 0.0V  
! OUTPUT 702;"SOUR 0.0" ! Set Drain Voltage to 0.0V  
! OUTPUT 703;"SOUR 0.0" ! Set Substrate Voltage to 0.0V  
!SUBEND  
4. Save modified file to an empty formatted diskette as in following example. This  
diskette is used for executing program. And the data measured and analyzed will  
be saved to this diskette automatically during program execution.  
RE-STORE "SP_MUX"  
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Executing Sample Programs  
HCI Measurement Program  
Setting up the Measurement Environment  
Before executing the program, you need to set up the measurement environment as  
follows:  
1. Prepare the equipment shown in Table 9-6, which lists the required equipment to  
execute the program.  
2. For each E5255A, make internal connections, and set the DIP switches. Refer to  
Figure 9-3.  
Three E5255As are used, which are installed in Slot1, Slot2, and Slot3 of the  
E5250A. The internal connections of the three E5255As are almost the same,  
except for the following:  
IVin1internal connection (1 in Figure 9-3) for each E5255A:  
for Slot1: IVin1to SMU1  
for Slot2: IVin1to SMU3  
for Slot3: IVin1to SMU4  
DIP SW settings in each slot are different as shown in Figure 9-3. But within  
each E5255A, SW1/SW2/SW3 settings are the same.  
3. Connect all equipment and devices as shown in Figure 9-4 and Table 9-7. Refer  
to Chapter 4 for the details of the connection from the E5250A output to Device  
Under Test (DUT).  
9-24  
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Executing Sample Programs  
HCI Measurement Program  
Figure 9-3  
Internal Connections and DIP SW Settings for E5255As  
2
3
IVin2 cable  
IVin3 cable  
SW3  
SW1  
SW2  
1
IVout1  
IVout2  
IVin1 cable  
For E5255A in Slot 1: Connect IVin1 to SMU1, and  
set SW1/SW2/SW3 to  
For E5255A in Slot 2: Connect IVin1 to SMU3, and  
set SW1/SW2/SW3 to  
For E5255A in Slot 3: Connect IVin1 to SMU4, and  
set SW1/SW2/SW3 to  
4
5
9 10 11 12 13 14 15 16  
17 18 19 20 21 22 23 24  
1 2 3 4 5 6 7 8  
Table 9-7  
E5250A Input/Output Connection  
4155/4156  
E5250A Input  
Measurement  
Port  
E5255A Output Port  
DUT  
Port  
SMU 1  
SMU 3  
SMU 4  
GNDU  
SMU INPUT 1  
SMU INPUT 3  
SMU INPUT 4  
Output 1 to 24 (SLOT 1)  
Output 25 to 48 (SLOT 2)  
Output 49 to 72 (SLOT 3)  
Gate  
Drain  
Sub  
(directly connected to Connector Plate)  
Source  
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Executing Sample Programs  
HCI Measurement Program  
Figure 9-4  
DC HCI Degradation Test Equipment Connections  
BNC Cable (3ea.)  
Shielding Box  
16494D-001 or 002 ( 9 ea.)  
SLOT1  
Output  
1--24  
Bias Input  
BIAS SOURCE 1  
BIAS SOURCE 2  
BIAS SOURCE 3  
1
24  
48  
to  
to  
SLOT2  
Bias Input  
25--48  
49--72  
25  
SLOT3  
Bias Input  
E5250A  
to  
49  
72  
SMU  
GPIB Cable  
GNDU  
16495D  
16494A-003 (3ea.)  
Drain  
4155/4156  
Sub  
Source  
Gate  
GNDU  
41501  
HP BASIC  
CONTROLLER  
16494A-001 or 002  
1
2
24  
48  
25  
49  
26  
GNDU  
50  
72  
Device1  
Device24  
Device2  
(Total 24ea.)  
NOTE  
Device used to Determine Stress Conditions  
HCI test program (SP_MUX_M) uses Device1 above to determine stress voltages  
(Vdstrand Vgstr). So, during the program, you are prompted to replace Device1  
after these voltages are determined.  
9-26  
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Executing Sample Programs  
HCI Measurement Program  
Executing the Program  
You should have already added the bias source control routine and set up the  
measurement environment as described previously.  
Before running the program, do following:  
1. Set the GPIB address of instruments as follows:  
4155/4156: 717  
E5250A: 722  
Bias Source: Set the GPIB addresses to match your control routine  
(Address 701 to 703 are defaults used in SP_MUX_Mprogram)  
2. Turn on all instruments and the computer.  
3. Boot up HP BASIC operating system.  
4. Insert a diskette into the computer's disk drive. The diskette must contain the  
HCI test program (SP_MUX in this example) you modified in “Adding the Bias  
Source Control Routine” on page 9-23.  
5. Specify the computer's mass storage device (disk drive) the diskette is inserted  
by using MSI statement. For example, if the device is ":CS80,702,1", enter the  
following command:  
MSI ":CS80,702,1"  
6. Load your HCI test program. The following example loads and displays  
SP_MUX program, in this example.  
LOAD "SP_MUX"  
EDIT  
7. Insert the E5250A Program Disk into the 4155/4156's disk drive, then get the  
setup file IDVD.MESto set up the 4155/4156.  
8. Enter the following command from the command line of the computer:  
OUTPUT 722;":ROUT:CLOS (@10101,20101,30101)"  
9. Press Single key on the 4155/4156's front panel. The Id-Vds measurement is  
performed and the Id-Vds measurement result is displayed as shown in Figure  
9-5.  
10. Determine the drain stress voltage (Vdstr) from the above curve.  
Recommended maximum value is about 0.5 V below actual breakdown. Then,  
edit the HCI test program (SP_MUX in this example) , and define the Vdstr  
value. The value should be defined in the following program line.  
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9-27  
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Executing Sample Programs  
HCI Measurement Program  
!-- Drain stress voltage should be determined by Id-Vd charact  
eristics  
Vdstr=5  
! Drain stress voltage  
After defining the value, re-store the program.  
Figure 9-5  
Id-Vds Measurement Example  
9-28  
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Executing Sample Programs  
HCI Measurement Program  
To Execute HCI Test Program  
1. Load the HCI test program (SP_MUX in this example), and press RUN function  
key. Then the following message is displayed on the computer screen.  
Enter directory name for saving data. (default: test_data)  
2. Type the name of directory for saving HCI test data, and press ENTER key. After  
executing the program, test data is saved to the directory in the diskette. If you  
press ENTER key with no input, the test data will be saved in "test_data"  
directory.  
After this operation, the Ib-Vgs measurement is automatically executed, and the  
measurement results are displayed on the 4155/4156, as shown in Figure 9-6.  
Also the program automatically extracts the gate stress voltage (Vgstr), which  
will be used later for stress testing.  
3. Remove the device used to determine Vdstrand Vgstrafter the following  
message is displayed.  
"Connect HCI degradation test devices"  
This device must be Device1, which was connected to the E5255A output port  
numbers 1, 25, 49, and GNDU as shown in Figure 9-4.  
4. Connect a new device in place of device removed by previous step. Then press  
Continue function key to continue the program.  
The program executes the leakage current tests, which determine the valid  
devices to use for stress testing.  
If the measured leakage currents are within the limit, following message is  
displayed:  
"Device No. = XX can be used"  
If the measured leakage currents are not within the limit, following message is  
displayed:  
"Device No. = XX shall not be used"  
Then, the initial characterization (before stress) is performed for all valid  
devices.  
Then, stress/interim characterization cycle is executed until stress termination  
conditions are met as described previously. In each interim characterization,  
Idlin, Gmmax, Vtext, and Vtciare determined. An example measurement  
is shown in Figure 9-7.  
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Executing Sample Programs  
HCI Measurement Program  
After each interim characterization, the fractional change in a parameter versus  
the stress time is displayed on GRAPHICS page of the 4155/4156 as shown in  
Figure 9-8.  
After testing, the test result data is saved to the diskette in the computer's disk  
drive, and the following message is displayed.  
"HCI Degradation Test is Completed!!"  
Figure 9-6  
Example of Ib-Vgs Measurement Results  
9-30  
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Executing Sample Programs  
HCI Measurement Program  
Figure 9-7  
Initial/Interim Characterization Example  
Figure 9-8  
HCI Degradation Test Result Example  
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Executing Sample Programs  
HCI Measurement Program  
To Execute Analysis Program  
Before running the program, do the following:  
1. Insert the E5250A Program Disk into the computer's disk drive.  
2. Specify the mass storage device (disk drive) the program disk is inserted by  
using MSI statement. For example, if the device is ":CS80,702,1", enter the  
following command:  
MSI ":CS80,702,1"  
3. Get the SP_MUX_Aprogram from the program disk.  
GET "SP_MUX_A"  
4. Eject the program disk.  
5. Insert the diskette which saves test result data into the computer's disk drive.  
6. Specify the directory which stores the test result data files. For example, if the  
directory is /test_data, enter MSI "/test_data".  
Execute the SP_MUX_Aprogram as follows:  
1. Press the RUN function key on the computer. The following message is  
displayed.  
"Enter number of devices (default:24)"  
2. Enter the number of devices to be analyzed. Default number is 24.  
Then the following softkeys are displayed.  
Softkey  
Idlin  
description  
Extract Tdcfrom the Idlin data for all valid devices  
Extract Tdcfrom the Gmmax data for all valid devices  
Extract Tdcfrom the Vtext data for all valid devices  
Extract Tdcfrom the Vtci data for all valid devices  
Extract Tdcfor all these parameters for all valid devices  
Quit the program  
Gmmax  
Vtext  
Vtci  
All  
End  
Tdcis the "time to target". The SP_MUX_Aprogram extracts Tdcfrom the  
measurement data that was saved by SP_MUXprogram. Tdcis the time when  
the device parameter reached its termination condition.  
9-32  
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Executing Sample Programs  
HCI Measurement Program  
3. Select softkey for parameter for which you want to extract Tdc.  
Analysis result and Tdcwill be displayed on the 4155/4156 screen as shown in  
Figure 9-9. Then program pauses. During pause, you can save these results to a  
4155/4156’s DAT type file.  
4. Select Continue function key to continue the program after each graph is  
displayed.  
If you select the ALL softkey in step 3, the 4155/4156 screen displays the graph  
for the next parameter of the same device number. And then program pauses.  
If you select the softkey to specify parameter in step 3, the 4155/4156 screen  
displays the graph for the next device for the parameter. And program pauses.  
This step is repeated according to entered number of devices and selected  
softkey.  
Figure 9-9  
HCI Degradation Test Data Analysis Example  
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Executing Sample Programs  
HCI Measurement Program  
NOTE  
If you don't want program to pause, change the parameter in SP_MUX_Aprogram to  
Pause_to_save=0before you run the SP_MUX_Aprogram. The program  
automatically extracts Tdc, saves result data, and stops.  
5. All calculated data is saved to ANAHCIfile on computer's disk drive, which is  
an ASCII file. The data is also listed on the 4155/4156's screen. After analyzing,  
saving, and listing the data, the 4155/4156 is initialized.  
For example, in the case that you selected Idlin softkey in step 3, the following is  
saved to the file:  
Number of devices  
Vdstr, Vgstr, Gate length, Gate width  
Idlin  
Device ,Validity ,Tdc_idlin  
First device number, 0or 1, Extracted Tdc for the device  
:
:
:
Last device number, 0or 1, Extracted Tdc for the device  
Averaged Tdc_idlin  
Calculated average Tdc  
For the above, 0means valid and 1means invalid.  
Following is an actual example for this case:  
4
5, 1.95, 1.E-6, 1.E-5  
Idlin  
Device Validity Tdc_idlin  
1, 0, 835.5786  
2, 0, 3401.432  
3, 0, 6269.047  
4, 0, 24366.79  
Averaged Tdc_idlin  
8718.2119  
9-34  
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Executing Sample Programs  
HCI Measurement Program  
This section explains how to modify the SP_MUX_Msample program and  
“To change the stress times”  
“To change the test limits”  
“To specify the data displayed on the 4155/4156 screen”  
“To change the timing for saving the test data”  
To change the GPIB address  
To change the GPIB address of the instruments, change the following parameters in  
the "GPIB Setup" block.  
Parameter  
Description  
Default  
Hpib_sc  
4155/4156 GPIB select code  
4155/4156 GPIB address  
E5250A GPIB select code  
E5250A GPIB address  
7
17  
7
Hpib_addr  
Swm_sc  
Swm_addr  
22  
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Executing Sample Programs  
HCI Measurement Program  
To change the 4155/4156 setup file used  
To change the 4155/4156's setup file used for the HCI test program, modify the  
setting of the setup file and save it as a new setup file. Then change the following  
parameter in the "Definition of measurement and stress setup files" block of the  
program.  
Parameter  
Description  
Default  
Ibvg_file$  
Setup file for extracting Vgstr.  
"IBVG.MES"  
Igleak_file$ Setup file for Gate leakage current  
measurement.  
"IGLEAK.MES"  
Idleak_file$ Setup file for Drain leakage current  
measurement.  
"IDLEAK.MES"  
"PARAM.MES"  
Param_file$ Setup file for parameter measurement.  
To change Vtci extraction condition  
To change W/L ratio (Gate width/Gate length ratio) required for Vtci extraction, do  
follows.  
1. GET the PARAM.MES setup file by using the 4155/4156.  
2. Change the setting of "ID" parameter in "LINE2" on the ANALYSIS SETUP  
screen. The value of "ID" can be calculated by the following expression.  
ID=1 μA × W/L  
where, W means Gate width in m, and L means Gate length in m.  
3. Change the following parameters in the "Device geometries" block of program.  
Parameter  
Description  
Default  
Gate_length  
Gate_width  
Gate length in m.  
Gate width in m.  
1.E-6  
1.E-5  
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Executing Sample Programs  
HCI Measurement Program  
To change Idlin and Gmmax extraction condition  
To change Gate voltage and Substrate voltage required for Idlin and Gmmax  
extraction, do follows.  
1. GET the PARAM.MES setup file by using the 4155/4156.  
2. Change the value of Substrate voltage "VB" on the SOURCE SETUP screen.  
3. Change the setting of "VG" parameter in "LINE1" on the ANALYSIS SETUP  
screen.  
To change the number of devices  
Change the setting of the No_of_devicesvariable in the "Input Parameters" block.  
To test more than 25 devices, you must change the configuration of the E5250A. See  
chapter 2.  
To change the stress times  
Change the data at the DATA statement in the "Stress duration setup" block. Each  
data shows the cumulative stress data.  
Example:  
DATA  
DATA  
DATA  
DATA  
10,  
100,  
20,  
200,  
50  
500  
1000,  
2000,  
5000  
10000, 20000, 50000  
DATA 100000  
If you change the number of the data defined in DATA statements, change the value  
of the Meas_pointsvariable in the "Stress duration setup" block.  
The value of Meas_pointsmust be the same number as the number of data defined  
in the DATA statements.  
In the above example, the number of data in DATA statements is 13. So the variable  
for the above example must be set as follows.  
Meas_points=13  
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Executing Sample Programs  
HCI Measurement Program  
To change the test limits  
Each test device is judged to be valid or not by measuring the gate and drain leakage  
currents. Change the following parameters in "Limits for leakage tests" block.  
Parameter  
Description  
Default  
Igleak_max  
Idleak_max  
Maximum Gate leakage current in A.  
Maximum Drain leakage current in A.  
2.E-10  
1.E-8  
To specify the data displayed on the 4155/4156 screen  
Change the following parameters in the "Setup for drawing / saving data in main  
menu" block.  
Parameter  
Description  
Default  
Show_device  
To display the data for the specified device number.  
0: Displays the data for all devices.  
0
n (integer): Displays the data for device No. n.  
Show_param  
To display the data for the specified parameter.  
0: Displays the data for all parameters.  
1: Displays Idlin data.  
0
2: Displays Gmmax data.  
3: Displays Vtext data.  
4: Displays Vtci data.  
-1: No data is displayed.  
To change the timing for saving the test data  
Change the following parameter in the "Setup for drawing / saving data in main  
menu" block.  
Save_at_last=0: Saves the data after each parameter measurement.  
Save_at_last=1: Saves the data after HCI test is completely finished.  
For this parameter, the default is 1.  
9-38  
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10  
Specifications  
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Specifications  
This chapter lists specifications, typical data and supplemental data for the Agilent  
E5250A Low Leakage Switch Mainframe with the Agilent E5252A 10×12 Matrix  
Switch and the Agilent E5255A 24 (8×3) Channel Multiplexer. This chapter also  
provides the supplemental data when used with the Agilent 4155/4156.  
The specifications are the performance standards or limits against which these units  
have been tested. The typical data and supplemental data are not warranted, but  
provide useful information about functions and performance.  
If not noted otherwise, the conditions for specifications and other data are as  
follows:  
Temperature: 23 °C ± 5 °C  
Humidity: < 60 % RH  
10-2  
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Specifications  
General Specifications  
General Specifications  
Temperature  
Range:  
Operating: 5 °C to 40 °C  
Storage: 40 °C to 70 °C  
Humidity Range:  
Altitude:  
Operating: 5 % to 80 % RH (non-condensing)  
Storage: 5 % to 90 % RH at 65 °C  
Operating: 0 to 2,000 m (6,500 ft)  
Storage: 0 to 15,240 m (50,000 ft)  
Power  
Requirement:  
100 to 240V ± 10 %, 47 to 63 Hz  
Maximum VA:  
Number of Slots:  
Dimensions:  
100 VA  
4 slots for 30 mm height switch cards  
E5250A: 230 mm H × 430 mm W × 600 mm D  
E5252A: 30 mm H × 395 mm W × 424 mm D  
E5255A: 30 mm H × 395 mm W × 424 mm D  
Weight:  
E5250A: 11.2 kg  
E5252A: 2.0 kg  
E5255A: 2.1 kg  
E5252A Number of Low Leakage I-V Port: 2 ports  
Input Ports:  
General I-V Port: 4 ports  
C-V Port: 2 ports  
HF Port: 2 ports  
E5255A Number of Low Leakage I-V Port: 1 port/multiplexer block  
Input Ports:  
Bias Port: 1 port/multiplexer block  
Number of Output (depends on the number of cards)  
Ports:  
For each E5252A: 12  
For each E5255A: 24 (8 ports × 3 multiplexer blocks)  
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Specifications  
Agilent E5252A 10x12 Matrix Switch  
Agilent E5252A 10x12 Matrix Switch  
Switch Specifications  
These are specifications when the E5252A is installed in mainframe. In the table,  
the conditions are as follows:  
A: 23 °C ± 5 °C, 5 % to 60 % RH  
B: 5 °C to 18 °C and 28 °C to 40 °C, 5 % to 60 % RH  
C: 28 °C to 40 °C, 60 % to 80 % RH  
A
B
C
Max. Current Rating (A)  
Max. Voltage Rating (V)  
Channel to Guard  
1.0  
1.0  
1.0  
200  
300  
200  
300  
200  
300  
Channel to Channel  
Closed Channel Residual Resistance (Ω)  
Low Leakage I-V Port  
General I-V Port  
0.6  
1.0  
1.0  
0.6  
1.0  
1.0  
0.6  
1.0  
1.0  
C-V, HF Port  
Channel Isolation Resistance (Ω)  
Low Leakage I-V Port  
1013  
1012  
109  
5 × 1012  
5 × 1011  
5 × 108  
2 × 1012  
2 × 1011  
2 × 108  
General I-V Port  
C-V, HF Port  
10-4  
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Specifications  
Agilent E5252A 10x12 Matrix Switch  
Typical Data  
Offset Current  
< 0.1 pA *1 (Low Leakage I-V Port)  
< 1000 pA *1 (General I-V Port)  
Channel Crosstalk Capacitance < 0.3 pF per channel  
Offset Voltage (EMF) at 5 min*2 < 80 μV (Low Leakage I-V Port)  
< 110 μV (General I-V Port)  
< 110 μV (C-V, HF Port)  
Guard Capacitance  
< 145 pF *3 (Low Leakage I-V Port)  
< 123 pF *3 (General I-V Port)  
< ± 1 % ± 0.5 pF *4 (C-V Port)  
C Measurement Error  
*1  
*2  
The offset current when 0V is applied to all I/O channels.  
EMF means Electro Motive Force, and these are offset voltages after  
applying voltage and waiting 5 minutes.  
*3  
*4  
This is guard capacitance for an I/O channel for following conditions.  
Only one E5252A is installed in mainframe, and only one I/O channel  
is connected.  
When capacitance compensation routine is used for following  
measurement conditions:  
Frequency: 1 kHz to 1 MHz  
Measurement Range: Maximum 1000 pF  
Measurement Terminal: At the end of Agilent 16495A-001 (1.5 m  
triaxial cable) connected to the E5252A output terminal.  
See “Using the Capacitance Compensation Routine” on page 6-28.  
Supplemental Data  
Bandwidth (at -3dB)  
Relay Contact Life  
Settling Time  
< 10 MHz (C-V, HF Port)  
> 108 times (Dry Switching Mode)  
< 3.5 sec to settle to within 400 fA of final value  
when 10 V is applied (Low Leakage I-V Port)  
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Specifications  
Agilent E5255A 24 (8x3) Channel Multiplexer  
Agilent E5255A 24 (8x3) Channel Multiplexer  
Switch Specifications  
These are specifications when the E5255A is installed in mainframe. In the table,  
the conditions are as follows:  
A: 23 °C ± 5 °C, 5 % to 60 % RH  
B: 5 °C to 18 °C and 28 °C to 40 °C, 5 % to 60 % RH  
C: 28 °C to 40 °C, 60 % to 80 % RH  
A
B
C
Max. Current Rating (A)  
Max. Voltage Rating (V)  
Channel to Guard  
1.0  
1.0  
1.0  
200  
300  
200  
300  
200  
300  
Channel to Channel  
Closed Channel Residual Resistance (Ω)  
Low Leakage I-V Port  
0.6  
1.0  
0.6  
1.0  
0.6  
1.0  
BIAS Port a  
Channel Isolation Resistance (Ω)  
Low Leakage I-V Port  
1013  
109  
5 × 1012  
5 × 108  
2 × 1012  
2 × 108  
BIAS Port  
a. When 0 Ω resistors are mounted on the card as the protective resis-  
tor.  
Typical Data  
Offset Current:  
< 0.1 pA *1 (Low Leakage I-V Port)  
10-6  
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Specifications  
Agilent E5255A 24 (8x3) Channel Multiplexer  
Channel Crosstalk Capacitance: < 0.4 pF/channel (Low Leakage I-V Port)  
< 5 pF/channel (Bias Port)  
Offset Voltage (EMF) at 5min*2: < 80 μV (Low Leakage I-V Port)  
Guard Capacitance  
(Low Leakage I-V Port):  
< 180 pF *3  
< 60 pF (when the port is open.)  
*1  
The offset current when 0 V is applied to all I/O channels.  
*2  
EMF means Electro Motive Force, and these are offset voltages after  
applying voltage and waiting 5 minutes.  
*3  
This is guard capacitance for an I/O channel for following conditions.  
Only one E5255A is installed in mainframe, and only one I/O channel  
is connected.  
Supplemental Data  
Relay Contact Life:  
Settling Time:  
> 108 times (Dry Switching Mode)  
< 3.5 sec to settle to within 400 fA of final value  
when 10 V is applied (Low Leakage I-V Port)  
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Specifications  
Accessories  
Accessories  
The following specifications are applied for the accessories listed below.  
Temperature  
Range  
Operating:  
Storage:  
5 °C to 40 °C  
40 °C to 70 °C  
Humidity Range  
Operating:  
Storage:  
5 % to 80 % RH (non-condensing)  
5 % to 90 % RH at 65 °C  
Agilent 16494A Triaxial Cable  
Agilent 16494B Kelvin Triaxial Cable  
Agilent 16494C Kelvin Triaxial Cable for Agilent 4142B  
Agilent 16494D 8ch Shielded Coaxial Cable  
Agilent 16495C Connector Plate with 6 8ch Shield,Intlk/GNDU  
Agilent 16495D Connector Plate with 12 8ch Shield,Intlk/GNDU  
Agilent 16495E Half size Blank Plate  
Agilent 16495F Connector Plate with 12 Triax.,Intlk/GNDU  
Agilent 16495G Connector Plate with 24 Triax.,Intlk/GNDU  
The following specifications are applied for the Agilent 16494E Wide Temperature  
8ch Shielded Coaxial Cable.  
Temperature  
Range  
Operating:  
Storage:  
5 °C to 40 °C (for connector part)  
50 °C to 200 °C (for cable part)  
40 °C to 70 °C  
Humidity Range  
Operating:  
Storage:  
5 % to 80 % RH (non-condensing)  
5 % to 90 % RH at 65 °C  
10-8  
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Specifications  
Supplemental Data when used with Agilent 4155/4156  
Supplemental Data when used with Agilent  
4155/4156  
The below data shows degradation of Agilent 4155/4156 when used with Low  
Leakage I-V Port.  
Iout is output current in A, and Vout is output voltage in V.  
Supplemental Data when used with Agilent 4155  
Voltage Range Offset Accuracy (with MPSMU)  
Range  
2 V  
Setting  
Measurement  
960 μV + (0.5 × Iout) V  
780 μV + (0.5 × Iout) V  
Current Range Offset Accuracy (with MPSMU)  
Range  
1 nA  
Setting  
Measurement  
3 pA + (0.2 × Vout) pA  
7 pA + (0.2 × Vout) pA  
50 pA + (0.4 × Vout) pA  
3 pA + (0.2 × Vout) pA  
5 pA + (0.2 × Vout) pA  
30 pA + (0.4 × Vout) pA  
10 nA  
100 nA  
Supplemental Data when used with Agilent 4156 (non-Kelvin connection)  
Voltage Range Offset Accuracy (with HRSMU)  
Range  
2 V  
Setting  
Measurement  
500 μV + (0.5 × Iout) V  
280 μV + (0.5 × Iout) V  
Current Range Offset Accuracy (with HRSMU)  
Range  
10 pA  
Setting  
Measurement  
0.4 pA + (0.2 × Vout) pA  
0.4 pA + (0.2 × Vout) pA  
0.7 pA + (0.2 × Vout) pA  
4 pA + (0.2 × Vout) pA  
40 pA + (0.3 × Vout) pA  
0.1 pA + (0.2 × Vout) pA  
0.1 pA + (0.2 × Vout) pA  
0.5 pA + (0.2 × Vout) pA  
2 pA + (0.2 × Vout) pA  
20 pA + (0.3 × Vout) pA  
100 pA  
1 nA  
10 nA  
100 nA  
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Specifications  
Supplemental Data when used with Agilent 4155/4156  
10-10  
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11  
Error Messages  
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Error Messages  
This chapter lists and describes the error messages for Agilent E5250A. An error  
message consists of an error number and message.  
There are two types of error messages:  
Standard SCPI Error Messages  
Negative error numbers (Command Error, Execution Error, Device-Dependent  
Error, and Query Error) are standard SCPI errors.  
E5250A Specific Error Messages  
Positive error numbers are the E5250A specific errors.  
Error messages are classified by error number as listed in the following table:  
Error Range Error Category  
0
No error  
-100 to -199  
-200 to -299  
-300 to -399  
-400 to -499  
100 to 32767  
Command Error  
Execution Error  
Device-Dependent Error  
Query Error  
E5250A Specific Error  
When an error occurs, the corresponding bit is set in the Standard Event Status  
Register (see Chapter 7):  
Standard Event  
Error Category  
Status Register Bit  
Command Error  
bit5  
bit4  
bit3  
bit2  
bit3  
Execution Error  
Device-Dependent Error  
Query Error  
E5250A Specific Error  
Also, the error number and message are placed in the error queue, which can be read  
by the :SYSTem:ERRor?query command. The error queue is cleared by the  
common command *CLS, and when power is turned on. For these commands, see  
Chapter 7.  
11-2  
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Error Messages  
Standard SCPI Error Messages  
Standard SCPI Error Messages  
Standard SCPI error messages have negative error numbers. The following are the  
standard SCPI error messages for the E5250A:  
Command Error  
If syntax of SCPI command is not valid, a -1XX error occurs. The error number and  
message are placed in the error queue, and bit5 of the Standard Event Status  
Register is set.  
A SCPI command consists of a command header and zero or more parameters.  
The following are example SCPI commands:  
Subsystem command: :ROUT:OPEN:CARD 1  
:ROUT:OPEN:CARDis the command header, and 1is the parameter.  
A subsystem command header consists of mnemonics (keywords) separated by  
colons. Query commands have a question mark (?) at end of last mnemonic.  
Common command: *SRE 48  
*SREis the command header, and 48is the parameter.  
A common command header consists of an asterisk (*) followed by 3  
characters. Query commands have a question mark (?) at end of header.  
Error  
Error Message and Description  
Number  
-100  
-101  
Command error  
Generic syntax error that cannot be determined more specifically.  
Invalid character  
A syntax element contains a character that is invalid for that type of  
element; for example, a header containing an ampersand.  
-102  
Syntax error  
An unrecognized command or data type was received; for example, a  
string was received when the E5250A does not accept strings.  
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Error Messages  
Standard SCPI Error Messages  
Error  
Number  
Error Message and Description  
-103  
Invalid separator  
An illegal character was received when a separator was expected; for  
example, the semicolon was omitted between multiple commands in  
a program message.  
-104  
Data type error  
An improper data type was received; for example, numeric data was  
expected but string data was received.  
-105  
-108  
-109  
-110  
GET not allowed  
A group execute trigger was received within a program message.  
Parameter not allowed  
Too many parameters for the command were received.  
Missing parameter  
Fewer parameters were received than required for the command.  
Command header error  
An error was detected in the header. This error message is reported if  
the E5250A cannot determine the more specific header errors -111  
through -114.  
-111  
Header separator error  
An illegal character for a header separator was received; for  
example, no white space between the command header and  
parameter.  
-112  
-113  
Program mnemonic too long  
A keyword in the command header contains more than twelve  
characters.  
Undefined header  
An undefined command header was received; for example, *XYZor  
:ROUT:OPEN:COOD.  
11-4  
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Error Messages  
Standard SCPI Error Messages  
Error  
Number  
Error Message and Description  
Numeric data error  
-120  
An error was detected in a numeric parameter (including the  
non-decimal numeric types). This error message is reported when the  
E5250A cannot determine the more specific errors -121 through  
-128.  
-121  
Invalid character in number  
An invalid character for the parameter was received; for example, an  
alphacharacter was received when the parameter type was decimal  
numeric.  
-123  
-124  
Exponent too large  
The magnitude of the exponent for a numeric parameter was larger  
than 32000.  
Too many digits  
The mantissa of a decimal numeric parameter contained more than  
255 digits excluding leading zeros.  
-128  
-138  
Numeric data not allowed  
Numeric data is not allowed in this position for this command.  
Suffix not allowed  
A suffix was received after a numeric parameter. For the E5250A, no  
parameters have suffix.  
-140  
Character data error  
An error was detected in a character parameter. This error message is  
reported if the E5250A cannot determine the more specific errors  
-141 through -148.  
-141  
-144  
Invalid character data  
Either the character parameter contains an invalid character or the  
particular element received is not valid for the command.  
Character data too long  
The character parameter contains more than 12 characters.  
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Error Messages  
Standard SCPI Error Messages  
Error  
Number  
Error Message and Description  
-148  
Character data not allowed  
A character parameter is not allowed for this position.  
-150  
-151  
-158  
-160  
-161  
String data error  
An error was detected in a string parameter. This error is reported if  
the E5250A cannot determine a more specific error -151 and -158.  
Invalid string data  
An invalid string parameter data was received; for example, an END  
message was received before the terminal quote character.  
String data not allowed  
A string parameter data was received but was not allowed at this  
point.  
Block data error  
An error was detected in a block data. This error is reported if the  
E5250A cannot determine more specific errors -161 and -168.  
Invalid block data  
An invalid block data was received; for example, an END message  
was received before the length was satisfied.  
-168  
-170  
Block data not allowed  
A legal block data was received but was not allowed at this point.  
Expression error  
An error was detected in an expression. This error is reported if the  
E5250A cannot determine more specific errors -171 and -178.  
-171  
-178  
Invalid expression  
The expression was invalid; for example, unmatched parentheses or  
an illegal character.  
Expression data not allowed  
An expression was received but was not allowed at this point.  
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Error Messages  
Standard SCPI Error Messages  
Execution Error  
If syntax of a SCPI command header and parameter is valid, but the command  
cannot be executed due to some condition of the E5250A, a -2XX error occurs. The  
error number and message are placed in the error queue, and bit4 of the Standard  
Event Status Register is set.  
Error  
Error Message and Description  
Number  
-200  
Execution error  
Generic execution error that cannot be determined more  
specifically.  
-220  
Parameter error  
The parameter value is valid, but not executable due to some  
condition of the E5250A. This error occurs if more specific errors  
-221 through -224 cannot be determined.  
-222  
-223  
Data out of range  
A valid parameter setting could not be executed because interpreted  
value was out of range as defined by the E5250A.  
Too much data  
A valid parameter setting (block, expression, or string type) could  
not be executed because parameter contained more data than the  
E5250A could handle due to insufficient memory or other  
requirements.  
-224  
-260  
Illegal parameter value  
A valid parameter setting (where exact value from list of possibles  
was expected) could not be executed due to present E5250A state.  
Expression error  
An expression related error occurred.  
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Error Messages  
Standard SCPI Error Messages  
Device-Dependent Errors  
-3XX errors indicate that an E5250A operation did not properly complete, possibly  
due to an abnormal hardware or firmware condition. These negative codes are SCPI  
defined. For the device-dependent positive error codes, see “E5250A Specific Error  
Messages” on page 11-10. The positive codes are not SCPI defined.  
For these errors, an error number and message are placed in the error queue, and bit3  
of the Standard Event Status Register is set.  
Error  
Error Message and Description  
Number  
-300  
Device-specific error  
Generic device-dependent error for the E5250A that cannot be  
determined more specifically.  
-311  
-350  
Memory error  
An error was detected in the E5250A's memory.  
Queue overflow  
If error queue is full, this code is entered into the error queue instead  
of the code that caused the error. This code indicates that there was  
no room in the error queue, so an error occurred but was not  
recorded.  
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Error Messages  
Standard SCPI Error Messages  
Query Errors  
If the output queue control of the E5250A detects one of following problems, a  
-4XX error occurs:.  
An attempt was made to read data from the output queue when no output data is  
present or pending.  
Data in the output queue has been lost.  
If this type of error occurs, the error number and message are placed in the error  
queue, and bit2 of the Standard Event Status Register is set.  
Error  
Error Message and Description  
Number  
-400  
Query error  
Generic query error for the E5250A that cannot be determined more  
specifically.  
-410  
Query INTERRUPTED  
A condition causing an INTERRUPTED query error occurred; for  
example, a query followed by DAB or GET before a response was  
completely sent.  
-420  
-430  
-440  
Query UNTERMINATED  
A condition causing an UNTERMINATED query error occurred; for  
example, the E5250A was addressed to talk and an incomplete  
program message was received.  
Query DEADLOCKED  
A condition causing a DEADLOCKED query error occurred; for  
example, both input buffer and output buffer are full and the E5250A  
cannot continue.  
Query UNTERMINATED after indefinite response  
A query was received in the same program message after a query  
requesting an indefinite length response was executed.  
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Error Messages  
E5250A Specific Error Messages  
E5250A Specific Error Messages  
These are the E5250A-specific errors that are not defined by SCPI. These errors  
indicate that an E5250A operation did not properly complete due to card, channel,  
port, or mode errors.  
For the SCPI defined device-dependent codes, see “Device-Dependent Errors” on  
page 11-8.  
For these errors, an error number and message are placed in the error queue, and bit3  
of the Standard Event Status Register is set.  
The E5250A specific error messages have positive error numbers.  
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Error Messages  
E5250A Specific Error Messages  
E5250A Channel Related Errors  
Error  
Number  
Error Message and Description  
Invalid card number  
2000  
Wrong card number is specified in card number or channel list  
parameter. Make sure card is properly installed in the correct  
E5250A slot.  
2001  
Invalid channel number  
Wrong channel number is specified in the channel list. Confirm the  
channel number, the card configuration, and the configuration  
mode of the E5250A.  
2006  
2009  
Command not supported on this card  
Command was used that is not supported by the card.  
Too many channels in channel list  
Too many channels are specified in the channel list. Maximum  
number of channels:  
E5252A: number of cards × 120  
E5255A: number of cards × 48  
2011  
2012  
Empty channel list  
No channel list is specified.  
Invalid channel range  
Wrong channel list is defined. Confirm the syntax of the channel  
list, the card configuration, and the configuration mode of the  
E5250A.  
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Error Messages  
E5250A Specific Error Messages  
E5250A Card/Mode/Port Related Errors  
Error  
Error Message and Description  
Number  
3000  
Card0 initialization fail  
The E5250A may be defective. Contact your nearest Agilent  
Technologies service center.  
3001  
Card1 initialization fail  
The E5250A or card installed in slot 1 of the E5250A may be  
defective. Or if card is the E5255A, the internal cable connection or  
the DIP switch setting may be wrong.  
3002  
3003  
3004  
Card2 initialization fail  
The E5250A or card installed in slot 2 of the E5250A may be  
defective. Or if card is the E5255A, the internal cable connection or  
the DIP switch setting may be wrong.  
Card3 initialization fail  
The E5250A or card installed in slot 3 of the E5250A may be  
defective. Or if card is the E5255A, the internal cable connection or  
the DIP switch setting may be wrong.  
Card4 initialization fail  
The E5250A or card installed in slot 4 of the E5250A may be  
defective. Or if card is the E5255A, the internal cable connection or  
the DIP switch setting may be wrong.  
3011  
3012  
Bad couple port number  
For the Input Port No. for Couple Port, only 1, 3, 5, 7, or 9 are  
allowed.  
Bad bias port number  
For Input Port No. for Bias Port, only 1 to 10 are allowed.  
11-12  
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Error Messages  
E5250A Specific Error Messages  
Error  
Number  
Error Message and Description  
3013  
Cannot connect multiple channels in SROUTe mode  
Incorrect channel list for Single connection rule. For Single  
connection rule, an input port cannot be connected to multiple output  
ports, and an output port cannot be connected to multiple input ports.  
Change channel list or change connection rule to Free.  
3014  
3015  
Cannot directly specify Bias Port channel  
Incorrect channel number when Bias Mode ON is specified in the  
channel list. Cannot directly specify the channel number for the Bias  
Port.  
Bad channel number combination on E5252A card  
Wrong input port combination is specified in the channel list for the  
E5252A card. For input ports, can specify only one of input port  
numbers 5, 7, and 9, and only one of input port numbers 6, 8, and 10.  
For example, channel list cannot specify input ports 5 and 7.  
3016  
3017  
3018  
Config error. Re-install E5255A.  
May be problem with the E5255A installation. Re-install the  
E5255A.  
Too many relays closed. Max 200.  
Too many physical relays have been closed. To close new relays,  
must open some relays. Maximum 200 relays can be closed.  
Can't change to ACONfig mode. Check card config.  
The present card configuration of the E5250A does not allow the  
Auto Config mode. Change the E5250A card configuration to allow  
Auto configuration mode.  
3019  
Cannot use same port for Couple and Bias  
Same input port number is specified to be Couple Port and Bias Port.  
Couple Port and Bias Port cannot be the same port.  
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Error Messages  
E5250A Specific Error Messages  
11-14  
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12  
SCPI Command Summary  
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SCPI Command Summary  
This chapter is a quick reference for the SCPI subsystem commands available for  
Agilent E5250A. The commands are in alphabetical order.  
For details about these commands, see Chapter 7.  
For how to specify the channel_list parameter, see Chapter 5.  
Textual Notation for Subsystem Commands  
[ ]  
Square brackets are used to enclose optional information not  
required for execution of the command sequence. So, you can  
omit the characters in brackets, and the command will still  
execute correctly.  
For example, for the [:ROUTe]:BIAS:PORT command, you can  
execute :ROUT:BIAS:PORT or :BIAS:PORT, which are  
exactly the same.  
italic font  
Text you supply. For example, for card_number, you enter an  
allowed card number. Also, used to represent response data.  
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SCPI Command Summary  
Command  
Description  
:DIAG:TEST:CARD:CLE card_number  
Clears relay test result (pass/fail) of specified card.  
card_number: 1, 2, 3, 4, or ALL  
:DIAG:TEST:CARD[:EXEC]? card_number  
:DIAG:TEST:CARD:STAT? card_number  
:DIAG:TEST:FRAM:CLE unit  
Executes relay test, then returns result:  
1: fail card exists, 0: pass  
card_number: 1, 2, 3, 4, or ALL  
Returns most recent relay test result:  
1: fail, 0: pass, -1: not tested.  
card_number: 1, 2, 3, 4  
Clears specified test result.  
unit: CONT (controller test), or FPAN (front panel  
interface test)  
:DIAG:TEST:FRAM[:EXEC]? unit  
Executes specified test, then returns test result:  
1: fail, 0: pass.  
unit: CONT (controller test), or FPAN (front panel  
interface test)  
:DIAG:TEST:FRAM:STAT? unit  
Returns most recent test result of specified test:  
1: fail, 0: pass, -1: not tested.  
unit: CONT: Controller test FPAN: Front panel  
interface test  
[:ROUT]:BIAS:CHAN:DIS:CARD card_number  
[:ROUT]:BIAS:CHAN:DIS[:LIST] (@channel_list)  
Bias disables all channels of specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Bias disables the specified channels.  
channel_list: Channels to bias disable.  
[:ROUT]:BIAS:CHAN:DIS[:LIST]? (@channel_list) Returns whether specified channels are bias  
disabled. 1: disabled, 0: enabled.  
channel_list: Channels to check.  
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SCPI Command Summary  
Command  
Description  
[:ROUT]:BIAS:CHAN:ENAB:CARD card_number  
Bias enables all channels in the specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
[:ROUT]:BIAS:CHAN:ENAB[:LIST] (@channel_list)  
[:ROUT]:BIAS:CHAN:ENAB[:LIST]? (@channel_list)  
Bias enables the specified channels.  
channel_list: Channels to bias enable.  
Returns whether specified channels are bias  
enabled. 1: enabled, 0: disabled.  
channel_list: Channels to check.  
[:ROUT]:BIAS:PORT card_number,bias_port  
Selects which input port is the Bias port on  
specified card. Only for the E5252A card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
bias_port: 1to 10  
[:ROUT]:BIAS:PORT? card_number  
Returns the input Bias Port number for the  
specified card. Only for the E5252A card.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
[:ROUT]:BIAS[:STAT] card_number,state  
Turns Bias Mode ON or OFF for the specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
state:  
ONor 1: turn ON Bias Mode  
OFFor 0: turn OFF Bias Mode  
[:ROUT]:BIAS[:STAT]? card_number  
Returns the Bias Mode for the specified card.  
0: Bias Mode is OFF, 1: Bias Mode is ON.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
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SCPI Command Summary  
Command  
Description  
[:ROUT]:CLOS:CARD? card_number  
Returns channel_list of all closed channels for the  
specified card. "Closed channel" means an input  
port connected to an output port.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
[:ROUT]:CLOS[:LIST] (@channel_list)  
[:ROUT]:CLOS[:LIST]? (@channel_list)  
Connects input ports to output ports as specified in  
channel_list.  
channel_list: Channels to close.  
Returns whether specified channels are closed.  
0: channel is open (not connected)  
1: channel is closed (connected)  
channel_list: Channels to check.  
[:ROUT]:CONN:RULE card_number,rule  
Sets the connection rule for the specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
rule: FREE: free route, or SROUte: single route  
[:ROUT]:CONN:RULE? card_number  
Returns the connection rule of the specified card:  
FREE: free route, SROU: single route  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
[:ROUT]:CONN:SEQ card_number,sequence  
Specifies the connection sequence mode for the  
specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
sequence:  
NSEQ: No-Sequence mode  
BBM: Break-Before-Make mode  
MBBR: Make-Before-Break mode  
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SCPI Command Summary  
Command  
Description  
[:ROUT]:CONN:SEQ? card_number  
Returns the connections sequence mode of the  
specified card:  
NSEQ: No-Sequence mode  
BBM: Break-Before-Make mode  
MBBR: Make-Before-Break mode.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
[:ROUT]:COUP:PORT card_number,'couple_port'  
Sets up the couple ports for the specified card. Only  
for the E5252A card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
couple_port:  
One or more input port numbers: 1, 3, 5, 7, or 9.  
Enclose by single quotation marks. Separate  
multiple input port numbers by comma. For  
example: '1,5'  
[:ROUT]:COUP:PORT? card_number  
Returns the lower input port number of each couple  
pair on the specified card. Only for the E5252A  
card.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
[:ROUT]:COUP[:STAT] card_number,state  
Turns Couple Mode ON or OFF for the specified  
card. Only for the E5252A card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
state:  
ONor 1: turn ON Couple Mode  
OFFor 0: turn OFF Couple Mode  
12-6  
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SCPI Command Summary  
Command  
Description  
[:ROUT]:COUP[:STAT]? card_number  
Returns Couple Mode of specified card.  
0: Couple Mode is OFF  
1: Couple Mode is ON.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, 4  
[:ROUT]:FUNC channel_config  
Sets the channel configuration mode.  
channel_config:  
ACON: Auto Config Mode  
NCON: Normal Config Mode  
[:ROUT]:FUNC?  
Returns present channel configuration:  
ACON: Auto Config Mode  
NCON: Normal Config Mode  
[:ROUT]:OPEN:CARD card_number  
Disconnects all input ports from all output ports for  
specified card.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
[:ROUT]:OPEN[:LIST] (@channel_list)  
[:ROUT]:OPEN[:LIST]? (@channel_list)  
Disconnects the input ports from output ports as  
specified in channel_list.  
channel_list: Channels to open.  
Returns whether specified channels are opened.  
0: channel is closed (connected)  
1: channel is opened (disconnected)  
channel_list: Channels to check.  
:SYST:CCON? card_number  
Returns the card configuration information:  
E5252A: no info returned.  
E5255A: input port and resistance info for each  
block.  
card_number: 1, 2, 3, or 4  
Agilent E5250A User’s Guide, Edition 9  
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SCPI Command Summary  
Command  
Description  
:SYST:CDES? card_number  
Returns a description of the specified card:  
model number and input/output port info.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
:SYST:CPON card_number  
:SYST:CTYP? card_number  
Resets the specified card to the power-on state.  
card_number:  
For Auto Config mode: 0or ALL  
For Normal Config mode: 1, 2, 3, 4, or ALL  
Returns ID of specified card: model number and  
revision.  
card_number:  
For Auto Config mode: 0  
For Normal Config mode: 1, 2, 3, or 4  
:SYST:ERR?  
:SYST:VERS?  
Reads error from head of error queue, and removes  
that error from queue.  
Returns SCPI version number for which the  
E5250A complies.  
12-8  
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